JPH0423334Y2 - - Google Patents
Info
- Publication number
- JPH0423334Y2 JPH0423334Y2 JP1981068790U JP6879081U JPH0423334Y2 JP H0423334 Y2 JPH0423334 Y2 JP H0423334Y2 JP 1981068790 U JP1981068790 U JP 1981068790U JP 6879081 U JP6879081 U JP 6879081U JP H0423334 Y2 JPH0423334 Y2 JP H0423334Y2
- Authority
- JP
- Japan
- Prior art keywords
- region
- conductivity type
- impurity concentration
- semiconductor device
- radiation detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 33
- 230000005855 radiation Effects 0.000 claims description 23
- 239000012535 impurity Substances 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 230000006698 induction Effects 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 230000003068 static effect Effects 0.000 claims description 9
- 239000003990 capacitor Substances 0.000 claims description 5
- 230000004888 barrier function Effects 0.000 claims 1
- 230000004044 response Effects 0.000 description 12
- 239000000969 carrier Substances 0.000 description 8
- 230000003321 amplification Effects 0.000 description 6
- 238000003199 nucleic acid amplification method Methods 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981068790U JPH0423334Y2 (enrdf_load_stackoverflow) | 1981-05-13 | 1981-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981068790U JPH0423334Y2 (enrdf_load_stackoverflow) | 1981-05-13 | 1981-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57178462U JPS57178462U (enrdf_load_stackoverflow) | 1982-11-11 |
| JPH0423334Y2 true JPH0423334Y2 (enrdf_load_stackoverflow) | 1992-05-29 |
Family
ID=29864704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981068790U Expired JPH0423334Y2 (enrdf_load_stackoverflow) | 1981-05-13 | 1981-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423334Y2 (enrdf_load_stackoverflow) |
-
1981
- 1981-05-13 JP JP1981068790U patent/JPH0423334Y2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| IEEE TRANSACTIONS ON ELECTRON DEVICES=1973US * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57178462U (enrdf_load_stackoverflow) | 1982-11-11 |
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