JPH0422314Y2 - - Google Patents
Info
- Publication number
- JPH0422314Y2 JPH0422314Y2 JP1984093073U JP9307384U JPH0422314Y2 JP H0422314 Y2 JPH0422314 Y2 JP H0422314Y2 JP 1984093073 U JP1984093073 U JP 1984093073U JP 9307384 U JP9307384 U JP 9307384U JP H0422314 Y2 JPH0422314 Y2 JP H0422314Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- constant temperature
- thermostatic
- temperature chamber
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 26
- 238000005192 partition Methods 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Control Of Temperature (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9307384U JPS619853U (ja) | 1984-06-21 | 1984-06-21 | バ−ンイン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9307384U JPS619853U (ja) | 1984-06-21 | 1984-06-21 | バ−ンイン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS619853U JPS619853U (ja) | 1986-01-21 |
| JPH0422314Y2 true JPH0422314Y2 (fr) | 1992-05-21 |
Family
ID=30650423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9307384U Granted JPS619853U (ja) | 1984-06-21 | 1984-06-21 | バ−ンイン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS619853U (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2511205Y2 (ja) * | 1989-06-16 | 1996-09-25 | 株式会社藤田製作所 | バ―ンイン処理装置 |
| JP7341921B2 (ja) * | 2020-02-20 | 2023-09-11 | 株式会社東芝 | 空調装置及びエージング方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5611372A (en) * | 1979-07-05 | 1981-02-04 | Reliability Inc | Burn-in chamber |
| JPS58196025A (ja) * | 1982-05-12 | 1983-11-15 | Hitachi Ltd | 半導体等のエ−ジング装置 |
-
1984
- 1984-06-21 JP JP9307384U patent/JPS619853U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5611372A (en) * | 1979-07-05 | 1981-02-04 | Reliability Inc | Burn-in chamber |
| JPS58196025A (ja) * | 1982-05-12 | 1983-11-15 | Hitachi Ltd | 半導体等のエ−ジング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS619853U (ja) | 1986-01-21 |
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