JPH04211130A - 半導体装置作製方法 - Google Patents

半導体装置作製方法

Info

Publication number
JPH04211130A
JPH04211130A JP3033679A JP3367991A JPH04211130A JP H04211130 A JPH04211130 A JP H04211130A JP 3033679 A JP3033679 A JP 3033679A JP 3367991 A JP3367991 A JP 3367991A JP H04211130 A JPH04211130 A JP H04211130A
Authority
JP
Japan
Prior art keywords
semiconductor
annealing
hydrogen
laser
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3033679A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566012B2 (enExample
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP3033679A priority Critical patent/JPH04211130A/ja
Publication of JPH04211130A publication Critical patent/JPH04211130A/ja
Publication of JPH0566012B2 publication Critical patent/JPH0566012B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)
  • Recrystallisation Techniques (AREA)
JP3033679A 1991-02-01 1991-02-01 半導体装置作製方法 Granted JPH04211130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3033679A JPH04211130A (ja) 1991-02-01 1991-02-01 半導体装置作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3033679A JPH04211130A (ja) 1991-02-01 1991-02-01 半導体装置作製方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9974379A Division JPS5623784A (en) 1979-08-05 1979-08-05 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPH04211130A true JPH04211130A (ja) 1992-08-03
JPH0566012B2 JPH0566012B2 (enExample) 1993-09-20

Family

ID=12393128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3033679A Granted JPH04211130A (ja) 1991-02-01 1991-02-01 半導体装置作製方法

Country Status (1)

Country Link
JP (1) JPH04211130A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012134524A (ja) * 2003-06-25 2012-07-12 Trustees Of Princeton Univ 改良型太陽電池
JP2012525008A (ja) * 2009-04-22 2012-10-18 テトラサン インコーポレイテッド 太陽電池内の機能膜の局所的レーザ転化による局所的金属接触子

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
APPL.PHYS LETT=1979 *
APPLIED PHYSICS LETTERS=1979 *
CHARACTERIZATION TECHNIQUES FOR SEMICONDUCTOR MATERIALS AND DEVICES=1978 *
SEMICONDUCTOR CHARACTERIZATION TECHNIQUES=1978 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012134524A (ja) * 2003-06-25 2012-07-12 Trustees Of Princeton Univ 改良型太陽電池
JP2015179870A (ja) * 2003-06-25 2015-10-08 ザ、トラスティーズ オブ プリンストン ユニバーシティ 有機感光性オプトエレクトロニックデバイス
JP2012525008A (ja) * 2009-04-22 2012-10-18 テトラサン インコーポレイテッド 太陽電池内の機能膜の局所的レーザ転化による局所的金属接触子

Also Published As

Publication number Publication date
JPH0566012B2 (enExample) 1993-09-20

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