JPH0420848A - Apparatus for inspecting cut surface - Google Patents

Abstract

PURPOSE:To make it possible to inspect a cut surface highly accurately in a total automatic mode by providing a sample feeding device for feeding samples on a sample table, an X-ray optical system and a sample discharging device for selecting and discharging the samples. CONSTITUTION:A standard sample whose specified lattice plane is accurately inclined by a specified angle with respect to the outer shape surface is mounted on a sample stage 36. An X-ray optical system 30 is set. Then, samples which are inputted into sample aligning device 19 are dropped into a vibrating bowl 12 from an input dish 11. The samples undergo turning motion. Under this state, the samples are aligned along the outer surface of the bowl 12 and pushed out on an aligning stage 13. Then, the sample at the tip of the aligning stage 13 is sucked with a vacuum chuck 24 of a sample feeding robot 20 and mounted on the sample stage 36. When the deviation angle of the cut surface of the sample is measured with the X-ray optical system 30, the sample is sent into a sample selecting device 50 with a vacuum chuck of a sample discharging robot 40. The sample is classified in the specified block of a containing case 51. Thus, the cut surface can be inspected highly accurately in a total automatic mode.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cut surface inspection device for inspecting the deviation angle of a cut surface of a sample (for example, an AT cut plate of quartz) by X-ray diffraction measurement.

[Prior Art] A crystal AT-cut plate is defined to be inclined at a predetermined angle with respect to a predetermined lattice plane or external surface. It is desired that the angle of inclination be such that the error from the specified angle is within the range of, for example, a 15-second turn at bat, and the accuracy of the cutting angle of an AT-cut plate is usually only about one minute.

Therefore, in order to obtain an AT-cut plate whose deviation from the specified angle (hereinafter referred to as deviation angle) is within 15 seconds, it is necessary to inspect the cut AT-cut plate and measure the deviation angle. Therefore, it is necessary to classify the deviation angle in 15 second increments and select AT cut plates. In this way, even if the accuracy of the cutting angle is poor, it is possible to obtain several groups of AT-cut plates in which the variation in deviation angle is within a range of 15 seconds. Each of these groups is used effectively.

In conventional cut surface inspection equipment, an operator sets an AT cut plate of quartz crystal on a sample stand facing a predetermined direction, and then inspects the deviation angle from a predetermined specified angle by X-ray diffraction measurement. Ta. Then, according to the test results, an operator classified the deviation angle in 15 second increments to select the samples. In response, a fully automatic cut surface inspection device that automatically performs a series of these operations has also been developed.

Furthermore, in order to classify the deviation angle of the AT-cut plate in 15 second increments, it is required that the angle measurement accuracy by X-ray diffraction measurement be extremely accurate. In normal X-ray diffraction measurement,
A sample is directly irradiated with X-rays from a radiation source, and the diffraction angle is determined from the peak profile of the diffracted X-rays. In this case, the half width of the diffraction peak becomes an angle of about 4 to 5 minutes. If the peak angle is determined from such a wide diffraction peak, good angle measurement accuracy cannot be expected. Therefore, recently, attempts have been made to utilize an X-ray optical system based on the two-crystal method in a cut surface inspection device. In the two-crystal method, X-rays from an X-ray source are diffracted by a first crystal to make the X-rays monochromatic, and the sample is irradiated with the X-rays. This results in
The half width of the above-mentioned diffraction peak is reduced to about 15 to 30 seconds, and the angle measurement accuracy is significantly improved.

[Problem to be solved by the invention] As mentioned above, in the inspection device for the deviation angle of the AT cut crystal plate, automation and high precision have been individually attempted, or have these attempts been combined to complete a system? I can't find anything that did it.

An object of the present invention is to provide a highly accurate and fully automated cut surface inspection device.

[Means for Solving the Problems] In order to achieve the above object, a cut surface inspection device according to the present invention is a cut surface inspection device that inspects the deviation angle of a cut surface of a sample by X-ray diffraction measurement. A sample feeding device that aligns the X-rays in a predetermined direction and supplies them to the sample stage; It is characterized by having an X-ray optical system configured to perform measurement, and a sample discharge device that selects and discharges a sample according to the measured deviation angle.

The configuration of such an automatic sample supply device and sample discharge device can be as follows. That is, the sample supply device includes a vibrating sample alignment device, an optical attitude determination device, and a sample supply robot using a vacuum chuck. In addition, the sample ejecting device is composed of a sample ejecting robot using a vacuum chuck and a rotating chute type sample sorting device.

[Function] According to the cut surface inspection device of the present invention, sample supply, measurement, and discharge are fully automated. That is, the sample is first
The samples are aligned in a predetermined direction by the sample supply device and set on the sample stage. When the deviation angle of the cut surface is measured by X-ray diffraction measurement of the sample, the sample is automatically sorted according to the deviation angle by the sample discharge device.

In addition, this cut surface inspection apparatus uses an X-ray optical system using a two-crystal method using the first crystal and the sample, so that the diffraction peak angle can be determined with high precision.

[Example] Next, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a plan layout diagram of an embodiment of the present invention. This embodiment is an apparatus for inspecting the deviation angle of the cut surface of an AT cut plate of crystal. This inspection device includes a first inspection unit 1 and a second inspection unit 2, and an X-ray tube 3.
1 in common.

The configuration of each unit is the same. Therefore, in the following description, the configuration of the first inspection unit 1 will be mainly described.

The first inspection unit 1 includes a sample alignment device 1o, a sample supply port hot 20, an X-ray optical system 30, and a sample discharge robot 40.
, a sample sorting device 50 is provided.

The sample alignment device 10 and the sample supply robot 20 constitute a sample supply device, and the sample discharge robot 40 and the sample sorting device 5 constitute a sample supply device.
0 constitutes the sample ejection device.

The sample alignment device 10 uses vibration to align rectangular samples (AT-cut crystal plates).
1, a circular vibration hole 12, and a linear alignment table 13. In the middle of the alignment table 13, there is provided an attitude determination device that detects and eliminates samples oriented in inappropriate directions. FIG. 2 shows this posture determining device. First, to explain the shape of the sample 60, it has a square shape with a - side of 10 mm, a thickness of 0.1 to Q, 4 mm, and a chamfer 61 of 01.5 is formed at the adjacent apex. It is. The sample 60 is pushed out from the vibrating bowl 12 to the alignment table 13 with one side of the rectangle touching each other and moves in the direction of arrow 16, but it is difficult to determine which direction the two chamfers 61 are facing. are scattered. Therefore, in order to allow samples 60 in the correct orientation to pass from the samples 60 in different directions, there is an orientation determination device. The attitude determination device includes three pairs of photoelectric detection units, including three light emitting sections 14a, 14b, and 14c, and three light receiving sections 15a, 15b, and 15c. The position of the chamfer 61 is detected based on the detection results of the three light receiving sections of these photoelectric detection units, and it is determined whether the posture of the sample 60 is good or bad. The state of the sample 60 shown in FIG. 2 is the correct posture, and at this time, the light receiving sections 15a and 15b detect light, and the light receiving section 15C does not detect light. If the detection results are any other combination, it means that the sample 60 is not facing the correct position. Further, when all the light receiving sections detect light, it indicates that the sample 60 is not present.

If it is detected that the sample 60 is not in the correct posture, the sample 60 is removed from the alignment table 13 by compressed air,
It is supposed to go back to the vibrating bowl.

Returning to FIG. 1, the sample supply robot 20
This is for supplying the samples at the tips of the sample onto the sample stage 36 one by one. This sample supply rod 20 includes an X-moving kite 21 and a Y-moving guide 22, and the Y-moving guide 22 moves along the X-moving guide 21. An arm 23 extending vertically downward moves along the Y movement guide 22. Therefore, the arm 23 is in the X direction 25 and
It is movable in direction 26. A vacuum chuck 24 is provided at the lower end of the arm 23, and is capable of adsorbing a sample by vacuum suction.

The X-ray optical system 30 of this cut surface inspection apparatus employs a two-crystal method optical system. FIG. 3 is a front view of the X-ray optical system 30. X-rays 34 from the X-ray tube 31 are diffracted by the first crystal 32 and then hit the sample 60, and the diffracted X-rays are detected by the X-ray detector 33. The first crystal 32 is made of quartz and is set so that X-rays are diffracted on the same lattice plane as the diffraction lattice plane of the sample 60. Therefore, the X-rays 34 are monochromated into X-rays of a desired wavelength by the first crystal 32.

The X-ray tube 31 has X-ray extraction windows on both sides, and X-rays 35 can also be extracted on the opposite side for the second inspection unit 2 in FIG.

FIG. 4 is a perspective view of the sample stage 36. The sample stage 36 has three support protrusions 37 that support the sample 60 at three points, thereby allowing the lower surface of the sample 60 to be set at a predetermined position. One side of the sample 60 is pressed against the wall surface 39 of the sample stage 60 for positioning. Four air holes 38 are provided near the support projection 37, and these air holes 38 are connected to a negative pressure source. This results in
The lower surface of the sample 60 is under negative pressure, and the sample 60 is fixed on the support protrusion 37. The X-rays 34 hit the lower surface of the sample 60 and are diffracted.

Returning to FIG. 1, the sample outlet hot 40 is for sending the inspected sample on the sample stage 36 to the sample sorting device 50. This sample discharge robot 40 has an X movement guide 41
The arm 42 moves in the X direction 44 along the X movement guide 41. A vacuum chuck 43 (fifth
(see figure).

The sample sorting device 50 includes a circular storage box 51, and can classify samples into nine types according to the deviation angle of the cut surface. FIG. 5 is a perspective view of the sample sorting device 50. A circular storage box 51 is divided into nine compartments 52. There is a rotating cylinder 53 in the center of the storage box 51, and a chute 54 is fixed to the side surface of the rotating cylinder 53. Vacuum chuck 43 of sample ejection robot
The sample 60 dropped from the rotary cylinder 53 enters the opening 55, passes through the chute 54, and enters the desired compartment 52. The rotary cylinder 53 is rotated in advance to a predetermined position so that the outlet of the chute 54 faces a desired section 52 according to the deviation angle of the sample 60.

The nine sections 52 are classified as follows in accordance with the deviation angle of the cut surface in 15 second increments.

1st section -52,5 seconds or less 2nd section -52,5 to -37,5 seconds 3rd section -37,5 to -22,5 seconds 4th section -22,5 to -7,5 seconds 5th Section -7,5 ~ +7.5 seconds 6th section +7.5 ~ +22.5 seconds 7th section +22.5 ~ +37.5 seconds 8th section +37.5 ~ +52.5 seconds 9th section +52.5 seconds Note that the deviation angle can also be classified in other increments other than 15 second increments.

Next, the operation of this cut surface inspection device will be explained.

In Figure 1, a standard sample in which a predetermined lattice plane is accurately inclined by a predetermined angle with respect to the external surface is placed on the sample stand.
6, and perform seven notinks on the X-ray optical system. next,
A large number of samples are introduced into the input mt11 of the sample alignment device 10. The samples fall from the vibrating input tray 11 into the vibrating bowl 12, and are aligned along the outer periphery of the vibrating bowl 12 while rotating clockwise due to the vibration of the vibrating bowl.

The aligned samples are pushed out onto the alignment table 13, and samples with inappropriate postures are removed by the posture discrimination device.

The sample at the tip of the alignment table 13 is transferred to the sample supply robot 20.
is suctioned by the vacuum chuck 24 and placed on the sample stage 36. When the deviation angle of the cut surface of the sample is measured by the X-ray optical system 30, the sample is sent to the sample sorting device 50 by the vacuum chuck of the sample discharge robot 40, and placed in a predetermined section of the storage box 51 according to the deviation angle. being classified. In this example, the inspection time per sample is about 17 seconds.

Since this cut surface inspection device has two inspection units, the inspection efficiency can be doubled by using both inspection units at the same time. Further, different types of samples can be inspected separately by each inspection unit, and the deviation angle classification increments can be made different even for samples of the same type.

Although the cut surface inspection device described above is for inspecting AT cut plates of quartz, this invention is not limited to this AT cut plate, but can be used to inspect the deviation angle of cut plates of various single crystal samples. can.

[Effects of the Invention] As explained above, this invention automatically performs everything from supplying the sample to sorting and discharging it, and also employs the two-crystal method X-ray optical system, so it can be performed with high precision and fully automatically. It is now possible to inspect the cut surface of

[Brief explanation of the drawing]

FIG. 1 is a plan layout of an embodiment of the present invention, FIG. 2 is a perspective view of the attitude determination device, FIG. 3 is a front view of the X-ray optical system, FIG. 4 is a perspective view of the sample stage, and FIG. The figure is a perspective view of the sample sorting device. 10...Sample alignment device 20・Sample supply lohoto 30...X-ray optical system 32・First crystal 40...Sample discharge robot 50...'J:, Family sorting device 60...Sample

Claims (2)

[Claims] (1) A cut surface inspection device that inspects the deviation angle of a cut surface of a sample by X-ray diffraction measurement includes a sample supply device that aligns the sample in a predetermined direction and supplies it to a sample stage, and An X-ray optical system configured to diffract X-rays in a first crystal, irradiate the sample, and measure the diffracted X-rays from the sample with an X-ray detector, and select the sample according to the measured deviation angle. A cut surface inspection device having a sample discharging device. (2) The sample supply device includes a vibrating sample alignment device;
It is equipped with an optical attitude determination device and a sample supply robot that uses a vacuum chuck, and the sample discharge device is equipped with a sample discharge robot that uses a vacuum chuck and a rotary chute type sample sorting device. The cut surface inspection device according to claim 1, characterized in that: