JPH0933457A - Method and apparatus for inspecting cut face - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance a sorting accuracy for deviation angles by measuring automatically deviation angles of both a front surface and a rear surface of a cut plate according to an X-ray diffraction method. SOLUTION: A sample 10 at a front end of an alignment stage 30 of a sample alignment part 12 is sucked by a suction pad of an arm 38 of a sample supply robot 16, and loaded onto a sample stage 14. A deviation angle of one cut face (lower face) of the sample 10 is measured by an X-ray diffraction-measuring part 18. Then, the sample 10 is sucked by a suction pad of an arm 62 of a sample transfer robot 24 and sent to a sample-reversing mechanism 20 to be turned upside down. The sample is thereafter loaded on the sample stage 14 again. A deviation angle of the other cut face is measured. After the deviation angles of both faces are measured, the sample 10 is sucked by the suction pad of the arm 62 and sent to a sample-sorting/storing part 22. The sample 10 is dropped to a corresponding sample throw-in port 64 in accordance with the measured deviation angles.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection of a deviation angle of a cut surface of a plate-shaped single crystal sample (for example, an AT cut plate of quartz) by X-ray diffraction measurement, and the sample according to the deviation angle. The present invention relates to a method and an apparatus for inspecting a cut surface for selecting.

[0002]

2. Description of the Related Art An AT cut plate made of quartz is specified so that a predetermined crystal lattice plane is inclined at a predetermined angle with respect to the cut plane. Explaining the “cut surface”, the outer surface of the cut plate cut into a plate shape is composed of a flat surface and a back surface (there is no distinction between front and back) and side edges connecting them, but And the back side is called "cut side". The tilt angle formed by the cut surface and the crystal lattice surface becomes important as a factor that determines the characteristics of the crystal unit.

In an actual cut plate, the above-mentioned value of the tilt angle slightly deviates from the reference tilt angle due to a cutting error. It is desired that this error be within the range of about 15 seconds. However, the accuracy of the cutting angle of the AT cut plate is usually only about 1 minute. Therefore, in order to obtain an AT-cut plate in which the variation of the deviation with respect to the reference tilt angle (hereinafter referred to as deviation angle) is set within 15 seconds, the deviation angle of the cut AT-cut plate is measured by X-ray diffraction measurement. It is necessary to select the AT cut plate by classifying the deviation angle in 15 second intervals after the inspection. By doing so, it is possible to obtain several groups of AT-cut plates whose variation in deviation angle is within the range of 15 seconds even if the precision of the cutting angle is poor. Each of these groups is effectively used according to the purpose.

As a conventional cut surface inspection device, an X-ray diffractometer is used to automatically inspect the deviation angle of an AT cut plate of quartz, and the deviation angle is automatically classified by a predetermined step width. There is one that selects AT cut boards. This type of cut surface inspection apparatus is described in Japanese Patent Laid-Open No. 4-252943.

[0005]

The above-described conventional cut surface inspection apparatus automatically measures the deviation angle of only one cut surface of the cut plate and selects the cut plate based on the measurement result. However, it was found that the selected AT cut plates often contained cut plates having a deviation angle outside the classification range. By investigating the cause, it was found that the deviation angle may be different between the front surface and the back surface of the cut plate. That is, it was found that even if the deviation angle measured on one cut surface of the cut plate belongs to a certain classification range, the deviation angle on the other cut surface may deviate from the classification range. The reason is as follows. If the front surface and the back surface of the cut plate are perfectly parallel and completely flat, the deviation angle measured for the front surface and the deviation angle measured for the back surface should be the same in principle. However, if the front surface and the back surface are not perfectly parallel, or if they are not completely flat due to warpage or the like, the deviation angles will be different between the front surface and the back surface.

The present invention has been made to solve the above-mentioned problems, and an object thereof is to provide a cut surface inspection method in which deviation angles are automatically measured for both the front surface and the back surface to improve the sorting accuracy. To provide a device.

[0007]

According to the present invention, a sample is placed on a sample table, and a deviation angle of one cut surface of the sample is measured. Then, the sample is turned over and then placed on the sample table again and the other cut surface is placed. Also, the deviation angle can be measured. When the deviation angles of both cut surfaces are measured, the sample can be sorted and stored according to the deviation angles. As a result, the measurement accuracy is improved as compared with the conventional method in which the deviation angle of the sample is automatically measured using only one cut surface.

[0008]

1 is a plan view showing the construction of an embodiment of the cut surface inspection apparatus of the present invention. This cut surface inspection device is a device for inspecting and selecting the deviation angle of the cut surface of the AT cut plate of quartz. This apparatus is roughly divided into a sample alignment section 12 that aligns the samples 10, a sample supply robot 16 that supplies the sample to the sample stage 14, and an X-ray diffraction measurement section 18 that measures the deviation angle of the cut surface of the sample. , A sample reversing mechanism 20 for inverting the sample, a sample selecting / accommodating section 22 for selecting and accommodating the sample according to the deviation angle, and a sample transfer between the sample table 14, the sample inverting mechanism 20, and the sample selecting / accommodating section 22. The sample transport robot 24 is provided. Of these, the sample aligning unit 12 and the sample supply robot 16 constitute a sample supply unit, and the sample transport robot 24 and the sample reversing mechanism 2 are included.
0 constitutes a sample reversing unit, and the sample transport robot 24 and the sample sorting / accommodating unit 22 constitute a sample discharging unit. The sample transport robot 24 constitutes a part of the sample reversing unit for the functional portion for transferring the sample between the sample stage 14 and the sample reversing mechanism 20, and the sample transport robot 24 transfers the sample to the sample selection storage unit 22. The functional part for sorting and transporting the sample forms a part of the sample discharging part.

The sample aligning section 12 functions to align roughly square samples (AT cut plates) by utilizing vibration, and is composed of a loading tray 26, a circular vibrating bowl 28, and a linear aligning table 30. Has become. An optical attitude determination device that detects a sample that does not face a predetermined direction and removes it is provided in the middle of the alignment table 30.

FIG. 4 shows the configuration of the attitude determination device. First,
Explaining the shape of the sample 10, it has a square shape with one side of 10 mm and a thickness of 0.1 to 0.4 mm.
C1.5 chamfers 32 are formed at two adjacent apexes. The sample 10 is extruded from the vibrating bowl onto the alignment table with one sides of the squares in contact with each other. However, the direction in which the positions of the two chamfers 32 face is different. Therefore, there is a posture determination device in order to allow only the sample 32 having the correct posture to pass from the sample 10 having the different directions. The attitude determination device includes three pairs of photoelectric detection units, and three light emitting units 3
4a, 34b, 34c and three light receiving parts 36a, 36
b and 36c. The position of the chamfer 32 is detected based on the detection results of the three light receiving portions of these photoelectric detection units, and the quality of the posture of the sample 10 is determined. FIG.
If the state of the sample 10 shown in is a correct posture,
At this time, the light receiving units 36a and 36b detect light, and the light receiving unit 36c does not detect light. If the detection result is any other combination, it means that the sample 10 is not in the correct posture. Also, if all the photodetectors detect light,
The sample 10 does not exist. When it is detected that the sample 10 is not in the correct posture, the sample 10 is removed from the alignment table by compressed air and is returned to the vibrating bowl.

Returning to FIG. 1, the sample supply robot 16 is
Samples at the tip of the alignment table 30 are supplied to the sample table 14 one by one. The sample supply robot 16 includes a rotatable horizontal arm 38. Below the tip of the arm 38 is a suction pad capable of sucking a sample by the action of vacuum suction. One side of the sample on the sample table 14 is pressed against the reference surface,
Accurately oriented.

The X-ray diffraction measuring unit 18 is a stationary X-ray tube 4.
0 and a stationary X-ray detector 42. FIG.
(A) is a front view of an X-ray diffraction measurement unit. The X-rays 44 emitted from the X-ray tube 40 hit one cut surface (lower surface) of the sample 10 on the sample table 14. X-ray 46 diffracted here is X
It is detected by the line detector 42. The sample table 14 is formed with three protrusions 48 (which are well shown in FIG. 2).
The sample 10 rests on these protrusions 48. Sample table 14
A groove 50 (see FIG. 2) for ensuring passage of X-rays is provided in the center of the
See also) is formed. As shown in FIG.
An air hole 52 is opened in the sample table 14, and the air hole 5
2 is connected to a negative pressure source, and the sample 10 is held on the sample table 14 by the action of negative pressure.

FIG. 6 is an enlarged front view of the vicinity of the sample 10. The sample 10 shown in this figure is an AT cut plate of quartz, and the crystal lattice plane 54 of (0, 1, -1, 1) is 3 ° with respect to the cut plane 56 so that the crystal lattice plane 54 becomes leftward in the figure.
It is inclined. The incident X-ray 44 is incident on the cut surface 56 at an angle of 16 ° 20 '. At this time, the diffracted X-ray 46 is 26 ° 4 with respect to the incident X-ray 44.
Diffract at an angle of 0 ', and the X-ray detector 42 is arranged in this direction. The rotation center line 58 of the sample table is the cut surface 56.
It is aligned so that it is above it and extends perpendicular to the page. The sample stage and the sample 10 on it can be rotated about this rotation center line 58 in a minute angular range, and by finding the angular position of the sample stage when the detected X-ray intensity is maximum. The deviation angle of how much the crystal lattice plane 54 deviates from the predetermined reference tilt angle (3 °) can be obtained. When adjusting the origin of the X-ray diffraction measurement unit, a standard sample having a predetermined reference inclination angle is used, and the sample stage is rotated so that the diffracted X-rays from the standard sample can be detected. The position is the origin. Based on the tilt angle of this standard sample,
The error of the tilt angle of the measurement sample is measured, and this becomes the deviation angle.

Returning to FIG. 1, the sample transfer robot 24 is
The sample can be transported among the sample table 14, the sample reversing mechanism 20, and the sample selection storage section 22. This sample transport robot 24
Has an arm 62 movable along the X movement guide 60. Below the tip of the arm 62 is a vacuum suction pad.

The sample sorting / accommodating section 22 is provided with six sample inlets 64 and six accommodating boxes 66 corresponding thereto. The input port 64 is connected to the corresponding storage box 66 via a dedicated shooter.

In this embodiment, a classification method is implemented in which the deviation angle of the cut surface is within a specific angle range of 15 seconds, and the others are rejected.
That is, a predetermined deviation angle is set, and if the deviation angle is minus 7.5 seconds or more and less than plus 7.5 seconds, the deviation is set to pass. And the above-mentioned 6 storage boxes 6
6 are classified as shown in Table 1 below.

[Table 1] First storage box, both sides pass Second storage box, one side passes, other side exceeds the standard on the plus side Third storage box Both sides exceed the standard on the plus side Fourth storage box One side Passed and the other side exceeded the standard on the negative side. 5th storage box Both sides exceeded the standard on the negative side. 6th storage box One side was on the positive side and the other side was on the negative side.

FIG. 2 is a perspective view of the sample reversing mechanism 20.
A pair of gripping members 70 and 72 are provided on the rectangular inversion table 68 so as to be openable and closable, and these gripping members are opened and closed by an air cylinder. The reversing table 68 is rotationally driven by a motor 74 via a pair of toothed pulleys and a toothed belt 76. The reversing table 68 rotates about the horizontal rotation axis 73 by 180 ° in one rotation operation. The sample 10 on the sample table 14 is sucked by the suction pad 77 of the sample transfer robot and then transferred between the holding members 70 and 72 in the open state. When the gripping members 70 and 72 are closed and the sample 10 is held by the gripping members 70 and 72, the suction pad 7 is removed from the sample 10.
7 leaves. Then, the reversing table 68 is rotated by 180 ° and the sample 10 is turned upside down. The sample 10 turned upside down is adsorbed by the adsorption pad 77, and the gripping members 70, 72
When is opened, the sample 10 is placed on the sample table 10 again.

FIG. 3A shows a gripping member 7 of the sample reversing mechanism.
It is a front sectional view of 0 and 72. The holding member 70 has a recess 7
8 is formed, and the contact body 80 is slidably inserted in the recess 78. A guide rod 82 is fixed to the back surface of the contact body 80, the guide rod 82 penetrates the grip member 70, and a retaining ring 84 is fixed to the exposed portion of the guide rod 82. A compression coil spring 86 is inserted between the contact body 80 and the wall surface of the recess 78. As a result, the contact body 80 is given an elastic force in the direction of protruding from the recess 78 (in the direction in which the grip member 70 is closed), and stops at the retaining ring 84. A groove 88 having a V-shaped cross section is formed in the contact body 80, and the side edge of the sample 10 is sandwiched by the groove 88 from both sides. The other holding member 72 has the same structure. Projecting pieces 90 and 92 are fixed to the gripping members 70 and 72, and the projecting pieces 9 and 92 are fixed.
The structure is such that the stopper 94 is sandwiched between 0 and 92. The protruding pieces 90 and 92 and the stopper 94 are actually incorporated inside the reversing table 68 in FIG. When the sample 10 carried by the suction pad 77 comes between the gripping members 70, 72, the gripping members 70, 72 are closed.

FIG. 3B shows a state in which the gripping members 70 and 72 are closed. The gripping members 70 and 72 move inward by the action of the air cylinder. Projecting pieces 90, 9
When 2 hits the stopper 94, the gripping members 70, 72 stop. At this time, the sample 1 is formed by the groove 88 of the contact body 80.
The side edge of 0 is pinched. If the sample 10 is more than necessary, the gripping member 7
The stopper 9 described above is used so that it is not pressed by 0, 72.
A length of 4 is set. Groove 88 is slightly sample 10
When the groove 88 comes into contact with the sample 10, the contact body 80 withdraws relatively to the gripping members 70 and 72 against the compression coil spring 86. Therefore, the sample 10 is sandwiched by the elastic restoring force of the compression coil spring 86. In this state, the gripping members 70, 72
Rotates about an axis of rotation parallel to the cut surface of the sample 10 (perpendicular to the paper surface) by 180 °. This allows
The sample 10 is turned upside down.

Next, the overall operation of this cut surface inspection apparatus will be described. In FIG. 1, first, a large number of samples 10 are loaded into a loading tray 26 of the sample alignment unit 12. The sample falls from the vibrating input tray 26 into the vibrating bowl 28, and the vibrating bowl 2
The vibration of 8 causes the vibration bowl 28 to rotate in a clockwise direction to be aligned along the outer circumference of the vibrating bowl 28. The aligned samples are pushed out to the alignment table 30, but of these samples, those having an inappropriate posture are eliminated by the posture determination unit. The sample at the tip of the alignment table 30 is adsorbed on the adsorption pad of the arm 38 of the sample supply robot 16 and placed on the sample table 14. When the deviation angle of one cut surface (lower surface) of the sample is measured by the X-ray diffraction measurement unit 18, the sample is adsorbed by the adsorption pad of the arm 62 of the sample transport robot 24,
It is sent to the sample reversing mechanism 20. The sample is turned upside down by the sample reversing mechanism 20, is again adsorbed by the adsorption pad of the arm 62 of the sample transport robot 24, and is placed on the sample table 14 with the other cut surface facing downward. The deviation angle is also measured for the other cut surface. When the deviation angles of both cut surfaces are measured, the sample is adsorbed to the adsorption pad of the arm 62 of the sample transport robot 24 and sent to the sample selection storage unit 22. Then, the sample corresponds to the sample inlet 6 according to the measured deviation angle.
Dropped to 4.

The present invention is not limited to the above-mentioned embodiment, but the following modifications are possible. (1) When classifying the deviation angle of the sample, it is possible to classify by any angle step instead of the above 15 second step. (2) The posture determination device for the sample is not limited to the optical posture determination device shown in FIG. 4, and a posture determination method using optical rotation, a posture determination method using low-precision X-ray diffraction measurement, etc. Other means may be used. (3) The mechanism for transporting the sample is not limited to the suction pad as described above, and other transport means may be used. (4) The present invention is applicable not only to an AT cut plate of quartz but also to any cut plate in which a predetermined crystal lattice plane is inclined with respect to the cut surface.

[0022]

According to the present invention, when the deviation angle is measured on one of the cut surfaces of the sample, the deviation angle can be automatically measured on the other cut surface after turning the sample upside down. The measurement accuracy is higher than the conventional method in which the deviation angle of the sample is automatically measured only on the cut surface.
In particular, in the case of a sample in which the parallelism between the front surface and the back surface is inferior, the problem that the sample is selected according to only the measurement angle of one cut surface is solved.

[Brief description of drawings]

FIG. 1 is a plan view showing a configuration of an embodiment of a cut surface inspection apparatus of the present invention.

FIG. 2 is a perspective view of a sample reversing mechanism.

FIG. 3 is a front sectional view of a gripping member of the sample reversing mechanism.

FIG. 4 is a perspective view of a main part of a posture determination device.

FIG. 5 is a front view of an X-ray diffraction measurement unit and a front cross-sectional view of a sample table.

FIG. 6 is an enlarged front view of the vicinity of the sample.

[Explanation of symbols]

 10 sample 12 sample alignment part 14 sample stage 16 sample supply robot 18 X-ray diffraction measurement part 20 sample inversion mechanism 22 sample selection storage part 24 sample transfer robot 40 X-ray tube 42 X-ray detector 64 sample input port 66 storage box 68 inversion Platform 70, 72 Gripping member 74 Motor 76 Toothed belt

Claims (4)

[Claims] 1. A cut surface inspection apparatus having the following configuration. (A) A sample supply unit that supplies a sample, which is cut into a plate shape so that a predetermined crystal lattice plane has a predetermined reference inclination angle with respect to the cut plane, in a predetermined direction to the sample stage. (B) By irradiating the sample with X-rays from an X-ray source and detecting the diffracted X-rays from the sample with an X-ray detector, the deviation angle from the reference inclination angle of the cut surface of the sample can be determined. X-ray diffraction measurement unit to measure. (C) A sample reversing unit that picks up the sample on the sample table, turns it over, and returns it to the sample table. (D) A sample discharging section for selecting a sample whose deviation angle has been measured according to the deviation angle. 2. The sample reversing unit includes a pair of openable and closable gripping members for sandwiching a side edge of the sample, and these gripping members rotate about a rotation axis parallel to a cut surface of the sample. The cut surface inspection apparatus according to claim 1, wherein the cut surface inspection apparatus is capable. 3. The pair of gripping members each include a contact body to which elastic force is applied in the closing direction of the gripping members,
The cut surface inspection apparatus according to claim 2, wherein a V-shaped groove for contacting a side edge of the sample is formed in the contact body. 4. A cut surface inspection method comprising the following steps. (A) A step of aligning a plate-shaped sample in a predetermined direction so that a predetermined crystal lattice plane has a predetermined reference inclination angle with respect to the cut surface and supplying the sample to a sample stage. (B) A step of irradiating one cut surface of the sample with X-rays and detecting a diffracted X-ray from the cut surface to measure a deviation angle from the reference inclination angle for the one cut surface. (C) A step of picking up the sample on the sample table, turning it over, and supplying the inverted sample to the sample table again. (D) A step of irradiating the other cut surface of the sample with X-rays and detecting a diffracted X-ray from the cut surface to measure a deviation angle from the reference inclination angle for the other cut surface. (E) A step of selecting the samples having the deviation angles measured on both cut surfaces according to the deviation angles.