JP3168769B2 - Work warp sorting device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for selecting whether a plate-shaped work is warped or not.

[0002]

2. Description of the Related Art Conventionally, a plate-shaped ceramic sintered body has been used for a ceramic substrate or various ceramic electronic components. In this type of application, a relatively small plate-shaped ceramic sintered body is used, but if the main surface is warped,
The electrodes and the like cannot be formed accurately. Therefore, after obtaining a plate-like sintered body, it is necessary to select whether or not there is a warp, and use only a non-warped good product.

[0003] The above-described sorting of the warpage of the plate-like member has been conventionally performed using an apparatus shown in Figs. The sorting device shown in FIG. 6 includes a uniaxial unit 2 set so that the table 1 runs on the upper surface and in a uniaxial direction. A plate-shaped work 3 to be measured is placed on the table 1. A laser light emitting device 4 is arranged on the side of the uniaxial unit 2, and a laser light receiving / measuring device 5 is arranged on a side opposite to the uniaxial unit 2 with respect to the laser light emitting device 4.

[0006] In the sorting apparatus shown in FIG. 6, as shown in FIG. 7, a laser beam A is projected from a laser emitting device 4 toward a work 3 on a table 1, and the laser beam reaches a laser receiving / measuring device 5. By detecting the light, the presence or absence of the warp of the work 3 is selected.

In the sorting device shown in FIG. 8, the work 3 is slid on the inclined surface 6a of the inclined table 6 and moved downward as indicated by the arrow. In the middle of the inclined surface 6a, spacers 7a, 7 having a height corresponding to the thickness of the work 3 are provided.
b are fixed near both side edges of the inclined surface 6a. A locking plate 8 is bridged over the upper surfaces of the spacers 7a and 7b as shown in the figure, and is fixed to the upper surfaces of the spacers 7a and 7b. The distance between the lower surface of the locking plate 8 and the inclined surface 6 a is made equal to the thickness of the target work 3.

At the time of sorting, by sliding the work 3, the work 3 without warp passes through the space between the lower surface of the locking plate 8 and the inclined surface 6a and drops downward.
For the warped work 3, the locking plate 8
Cannot be passed through the space between the lower surface of the pair and the inclined surface 6a, and is locked by the locking plate 8. Therefore, by collecting only the work 3 that has fallen to the lower surface of the inclined surface 6a as a non-defective product, the presence or absence of the warp of the work 3 is selected.

[0007]

The sorting device shown in FIG. 6 comprises a laser emitting device 4 and a laser receiving / measuring device 5
However, there is a disadvantage that the measurement system is very expensive. In addition, the parallelism between the measurement table 1 and the laser receiving / measuring device 5 must be maintained with high accuracy, and a complicated adjustment operation has been required. In addition, the accuracy of the traveling direction of the single-axis unit 2 must be sufficiently improved.

On the other hand, the sorting apparatus shown in FIG. 8 does not require such an expensive apparatus and does not require complicated adjustment work. However, the lower surface of the locking plate 8 and the inclined surface 6a
Since the sorting is performed on the basis of the interval between the workpieces, there is a disadvantage that the warpage of the work cannot be sorted with high accuracy, and when the warping occurs, the degree of the warping cannot be grasped.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an inexpensive work that can accurately and accurately determine the presence or absence of a warp and the degree of the warp in a plate-like work, and that does not require a complicated and highly accurate setting operation. It is to provide a device.

[0010]

SUMMARY OF THE INVENTION The present invention is an apparatus for selecting the warpage of a plate-like work, and an area where the work is placed on a surface on which the plate-like work to be measured is placed. A measuring table having a suction hole opened in the measuring table, and in a state where the work is placed on the measuring table, suction of the measuring table is performed in order to select a warp of the work from the measuring table surface by suction. It is characterized by comprising suction means connected to the hole, and vacuum degree measuring means for measuring the degree of vacuum at a portion between the suction hole and the suction means.

[0011]

In the work warp selection apparatus of the present invention, the work is started by driving the suction means while the work is placed on the work placement area of the measurement table. When the work is warped, a gap exists between the work surface and the measurement table surface. Therefore, the ultimate vacuum degree at the portion from the suction hole to the suction means does not sufficiently increase, and the presence and degree of warpage is determined based on the ultimate vacuum degree measured by the vacuum degree measuring means.

On the other hand, when the work does not warp, the work surface and the measurement table surface are brought into close contact by driving the suction means, and the degree of vacuum from the suction hole to the suction means reaches the suction means. It is almost equal to the degree of vacuum applied. Therefore, it can be determined that the workpiece is not warped based on the ultimate vacuum.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be clarified by describing embodiments with reference to the drawings.

FIGS. 1 and 2 are a cross-sectional view and a perspective view, respectively, showing a main part and a whole of a workpiece warpage selecting apparatus according to an embodiment of the present invention. The device for selecting a warp of a work according to the present embodiment has a substantially rectangular measurement table 11. The measurement table 11 is made of a rigid material such as a metal and has an upper surface 11a.
And has a substantially rectangular concave portion 11b that is open. A plate-shaped work 12 to be measured is arranged in the recess 11b.
A plurality of suction holes 13 and 14 are provided on the bottom surface 11c of the concave portion 11b.
Is open. The suction holes 13 and 14 are provided in the measurement table 1.
1 and is connected to a suction path 11d formed in the inside.

The suction passage 11d is open to the side surface 11e of the measurement table 11, and a connection tube 15 is connected to the suction passage 11d, as is apparent from FIG. The connection tube 15 extends in a direction indicated by an arrow A in FIG. 2 and is connected to suction means (not shown).

As the suction means, a vacuum source such as a known rotary pump or diffusion pump can be used.
In the middle of the connection tube 15, a branch tube 16 is provided.
Is connected to the branch tube 16, and a vacuum measurement device 17 is connected to the branch tube 16. The degree-of-vacuum measuring device 17 can be constituted by a known pressure gauge or the like.

Referring to FIGS. 1 and 2, a method of selecting a warp in the work warp selecting apparatus of the present embodiment will be described. First, a plate-shaped work 12 to be measured is placed in the recess 11b. In this state, a suction unit (not shown) is driven. In this case, as shown in FIG. 1, when the work 12 is warped, the work placement surface 11c
And the lower surface of the work 12 as shown in FIG. Therefore, the ultimate vacuum in the suction passage 11d and the connection tube 15 does not become sufficiently high, and the ultimate vacuum is measured by the vacuum measuring device 17. Therefore, the presence or absence of warpage is determined based on the measured ultimate vacuum.

Further, the magnitude of the warp is selected according to the numerical value of the ultimate vacuum degree. That is, when the warpage is large, the ultimate vacuum degree does not become sufficiently high, so that the magnitude of the warp can be estimated based on the ultimate vacuum degree.

On the other hand, when there is no warpage, the lower surface of the work 12 is brought into close contact with the work mounting surface 11, and the degree of vacuum in the suction passage 11d and the connection tube 15 is reduced by the suction means. The degree of vacuum is equal to or almost equal to the degree of vacuum reached. Therefore, by measuring the degree of vacuum with the vacuum measuring device 17, it is possible to confirm that there is no warpage.

Even when the workpiece 12 is warped, as shown in FIG.
b, only along the side opposite to the work mounting surface 11c, the suction hole 13,
14 will be blocked. Therefore, the ultimate degree of vacuum in this case is the same as when the workpiece is not warped. Therefore, simply arranging the work 12 as shown in FIG. 3 cannot accurately detect whether or not the work 12 is warped. Therefore, in the case of using the device for selecting the warpage of the work of the present embodiment, it is necessary to reverse the work 12 and to select the warp of the work again.

That is, when the work 12 shown in FIG. 3 is turned over, both ends 12a and 12b come into contact with the work mounting surface 11c, so that the suction holes 13 and 1 are provided.
4 is not blocked by the work 12, and the warpage of the work 12 can be reliably detected.

Next, specific experimental results will be described.
A rectangular ceramic sintered plate having a planar shape of 23.1 × 33.8 mm was prepared as a work. This ceramic sintered plate was manufactured with a target of a thickness of 700 μm. FIG. 4 shows the distance from the plane to the maximum height position of the work when the work is placed on the plane due to the warpage.
As shown in (a) and (b), measurement was performed in advance using a height gauge at nine points a to i and j to r on the front and back surfaces of the work 12. The points a to r thus measured
, The largest value of the workpiece heights was defined as the maximum value, and (the maximum value-700) μm was defined as the warpage value.

Next, the ultimate degree of vacuum was measured for the 30 workpieces whose warpage values were measured in advance using a height gauge as described above using the workpiece warpage sorting apparatus of the above embodiment.

FIG. 5 shows the correlation between the warpage value measured using the height gauge and the ultimate vacuum measured using the work warp sorting apparatus of the embodiment. The X-axis direction in FIG. 5 is a measured warpage value using a height gauge,
The Y-axis direction is the ultimate vacuum measured using the apparatus of the embodiment. The correlation coefficient between the ultimate vacuum and the warp value in FIG. 5 was r = −0.962. Therefore, it can be seen that the sorting result of the work warp sorting apparatus of this embodiment has a very high correlation with the actual work warpage value measured using the height gauge. In addition, the simple regression equation of the result shown in FIG.

[0025]

(Equation 1)

## EQU1 ## Here, x is a warp value, and y is a degree of vacuum. The standard value of the warpage of the 30 workpieces subjected to the above measurement was 200 μm. Therefore, the set value in the vacuum measurement device is obtained by substituting 200 for x in the above simple regression equation.

[0027]

(Equation 2)

## EQU1 ## Therefore, when a vacuum switch is used as the vacuum degree measuring device 17, the set value is 115 m.
If the pressure is set to mHg, the presence or absence of the warpage of the work can be reliably selected using a vacuum switch.

In the embodiment described above, a ceramic sintered plate is used as an example of the work, but the work warp selection device of the present invention is not limited to the warp of a plate member other than the ceramic sintered body. It can be used for general screening.

Although a plurality of suction holes 13 and 14 are provided in the embodiment, only one suction hole may be provided, and the suction holes 13 and 14 may have an appropriate shape and number depending on the size of the main surface of the target work. Can be formed.

[0031]

According to the present invention, the warpage of a plate-like work can be measured using a measuring table, a suction means, and an ultimate vacuum measuring device. Does not require expensive equipment.

Furthermore, since the degree of vacuum at the portion from the suction hole to the suction means varies in accordance with the warp of the work, the work warp is selected only by obtaining the ultimate vacuum degree. In addition to being able to sort out the warpage with high accuracy, the degree of the warp can be grasped.

Further, as described above, since the warpage of the work is selected in accordance with the degree of vacuum in a portion between the suction hole of the measurement table and the suction means, a conventional measuring device using a laser beam is used. This eliminates the need for highly accurate setting work.

Therefore, by using the device for selecting the warpage of the work of the present invention, it is possible to select the warpage of the plate-like work at low cost, with high efficiency, and with high accuracy.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view for explaining a main part of a workpiece warpage sorting apparatus according to an embodiment.

FIG. 2 is a perspective view showing a workpiece warpage sorting apparatus according to the embodiment.

FIG. 3 is a cross-sectional view showing an example of a state where a work is placed on a measurement table in the embodiment.

FIGS. 4A and 4B are a front view and a back view, respectively, for explaining a portion where the height of a work is measured by a height gauge in an experimental example.

FIG. 5 is a diagram illustrating a relationship between a warp value of a workpiece measured in an experimental example and a degree of ultimate vacuum measured by the apparatus of the embodiment.

FIG. 6 is a perspective view showing an example of a conventional work warpage sorting device.

FIG. 7 is a partially cutaway sectional view showing a method for measuring the warpage of the work when the work warp selection device of FIG. 6 is used.

FIG. 8 is a perspective view showing another example of the conventional work warpage sorting device.

[Explanation of symbols]

 11 ... Measurement table 11c ... Work placement surface 13,14 ... Suction hole 12 ... Work 15 ... Connection tube 17 ... Vacuum degree measuring device

Claims (1)

(57) [Claims] 1. A measuring table having a suction hole opened in an area where a workpiece to be measured is placed on a surface on which the plate-like workpiece is placed, and the workpiece is placed on the measuring table. By suctioning in a state, in order to measure the warpage of the work from the measurement table surface, suction means connected to the suction hole of the measurement table, and a vacuum at a portion between the suction hole and the suction means A workpiece warpage sorting device, comprising: a vacuum degree measuring means for measuring a degree.