JPH04203916A - Inspecting method of external appearance - Google Patents

Inspecting method of external appearance

Info

Publication number
JPH04203916A
JPH04203916A JP2333924A JP33392490A JPH04203916A JP H04203916 A JPH04203916 A JP H04203916A JP 2333924 A JP2333924 A JP 2333924A JP 33392490 A JP33392490 A JP 33392490A JP H04203916 A JPH04203916 A JP H04203916A
Authority
JP
Japan
Prior art keywords
inspection
quality
data
solder
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2333924A
Other languages
Japanese (ja)
Other versions
JPH07117388B2 (en
Inventor
Nobushi Tokura
戸倉 暢史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2333924A priority Critical patent/JPH07117388B2/en
Priority to DE4143545A priority patent/DE4143545C2/en
Priority to DE4139189A priority patent/DE4139189C2/en
Publication of JPH04203916A publication Critical patent/JPH04203916A/en
Priority to US08/225,944 priority patent/US5598345A/en
Publication of JPH07117388B2 publication Critical patent/JPH07117388B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95684Patterns showing highly reflecting parts, e.g. metallic elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/308Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • H05K13/081Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
    • H05K13/0817Monitoring of soldering processes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8867Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95607Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615Inspecting patterns on the surface of objects using a comparative method with stored comparision signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N2021/95638Inspecting patterns on the surface of objects for PCB's
    • G01N2021/95661Inspecting patterns on the surface of objects for PCB's for leads, e.g. position, curvature

Abstract

PURPOSE:To execute determination efficiently by providing a first inspecting means for inspecting the quality of an external appearance and a second inspecting means for inspecting it precisely and by registering data of the first inspecting means on the basis of the result of determination of the quality by the second inspecting means. CONSTITUTION:Since the data on solders x1 and x2 are not registered in a memory M1, determination of the quality is not executed by a first inspecting means 21. Therefore, the solders x1 and x2 are measured precisely by a second inspecting means 22 so as to determine the quality. Products are assorted into good and bad ones in a table K3, the solder x1 is determined as bad, while the solder x2 is determined as good, and they are registered additionally in the memory M1. In this way, the product of which the quality can not be determined by the means 21 is subjected to precise inspection by the means 22, and based on the result of the inspection, fresh data are registered additionally in the memory M1. By using these additional data from the next inspection onward, the inspecting capacity of the means 21 can be increased step by step.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は外観検査方法上に係り、コンピュータに教示さ
れた良否判定データに基いて検査対象物の外観の良否判
定を行い、この良否判定データにより良否判定できなか
った検査対象物については、良否判定精密データに基い
て精密検査を行い、その検査結果を良否判定データに追
加登録していくことにより、検査能力を上げていくよう
にしたものである。
Detailed Description of the Invention (Industrial Field of Application) The present invention relates to an appearance inspection method, in which the appearance of an object to be inspected is judged to be good or bad based on quality judgment data taught by a computer. For inspection objects for which pass/fail judgment could not be determined, a detailed inspection is performed based on the pass/fail judgment precision data, and the inspection results are additionally registered in the pass/fail judgment data, thereby increasing the inspection ability. It is.

(従来の技術) 検査対象物を半田により基板に接着した後、搭載状態の
良否を判定する外観検査が行われる。
(Prior Art) After an object to be inspected is bonded to a board with solder, an appearance inspection is performed to determine whether the object is in good condition or not.

従来、このような外観検査は目視検査により行われてき
たが、近年は光学手段により自動検査することが次第に
普及してきている。
Conventionally, such appearance inspection has been carried out by visual inspection, but in recent years automatic inspection using optical means has become increasingly popular.

上記外観検査は、一般にカメラにより行われるものであ
り、特開平1−79874号公報に示されるものが提案
されている。このものは、検査対象物を垂直な上方から
観察するトップカメラと、斜上方から観察するサイドカ
メラを備えており、ト・ノブカメラにより検査対象物の
位置ずれ、欠品等を、またサイドカメラにより検査対象
物の浮きを検査するようになっている。
The above-mentioned appearance inspection is generally carried out using a camera, and the one shown in Japanese Patent Application Laid-Open No. 1-79874 has been proposed. This device is equipped with a top camera that observes the object to be inspected from vertically above, and a side camera that observes the object from diagonally above. It is designed to check for floating objects.

(発明が解決しようとする課題) 上記のようにト・7プカメラとサイトカメラを組み合わ
せた従来手段は、検査エリアが広く、また検査スピード
が速い等の特性を有している。
(Problems to be Solved by the Invention) As described above, the conventional means that combines a top camera and a sight camera has characteristics such as a wide inspection area and a fast inspection speed.

ところがカメラは、2次元的な平面情?[ま検知できる
が、高さ情報は検知できないため、例えば半田の外観検
査のような精密な高さ情報を必要とする外観検査はでき
ないものであった。
However, is the camera a two-dimensional plane? [However, since height information cannot be detected, visual inspections that require precise height information, such as solder visual inspections, cannot be performed.

ところで、精密な高さ情報が得られる手段として、レー
ザ装置が知られている。レーザ装置は、極細に絞られた
レーザ光をスポット的に検査対象物に照射してその反射
光を検出するものであり、精密な高さ計測ができる特性
を有している。したがってレーザ装置を使用すれば、精
密な外観検査ができるが、この場合、レーザ光をXY力
方向スキャンニングさせながら、レーザ光を検査対象物
の全面に照射しなければならないので、多大な時間を要
する欠点がある。
Incidentally, a laser device is known as a means for obtaining precise height information. A laser device is a device that irradiates an object to be inspected with a very finely focused laser beam in a spot manner and detects the reflected light, and has the property of being able to accurately measure height. Therefore, if a laser device is used, precise visual inspection can be performed, but in this case, the laser beam must be scanned in the XY force direction and the entire surface of the object to be inspected must be irradiated with the laser beam, which takes a lot of time. There are some drawbacks.

そこで本発明は、カメラやレーザ装置などの特性の異る
検査手段を使用して、高速且つ正確に検査対象物の外観
検査を行える手段を提供することを10勺とする。
Therefore, an object of the present invention is to provide a means for quickly and accurately inspecting the appearance of an object to be inspected using inspection means having different characteristics such as a camera or a laser device.

(課題を解決するための手段) 本発明は、コンピュータに教示された良否判定データに
基いて、検査対象物の外観の良否を検査する第1の検査
手段と、この良否判定データに基いて良否が判定できな
かった検査対象物について、コンピュータに教示された
良否判定精密データに基いて、検査対象物の外観の良否
を精密検査する第2の検査手段と、この第2の検査手段
による精密検査の良否判定結果に基いて、この検査対象
物に関する上記第1の検査手段の検査データを、良否判
定データとして上記コンピュータに追加?l録していく
ようにしたものである。
(Means for Solving the Problems) The present invention includes a first inspection means for inspecting the appearance of an object to be inspected based on pass/fail judgment data taught by a computer; a second inspection means for closely inspecting the appearance of the inspection object for which it could not be determined, based on precision judgment data taught by the computer, and a detailed inspection by the second inspection means; Based on the pass/fail judgment result, the inspection data of the first inspection means regarding this inspection object is added to the computer as pass/fail judgment data. It was designed to be recorded in sequence.

(作用) 1−記構成によれば、第1の検査手段により検査対象物
の外観検査を行い、その良否判定をする。またこの外観
検査により良否判定ができなかった検査対象物についで
は、第2の検査手段により精密検査を行って、良否判定
を行う。
(Operation) According to the configuration described in 1-, the first inspection means performs an external appearance inspection of the inspection object and determines its quality. Further, for the inspection objects for which the quality cannot be determined by this visual inspection, a detailed inspection is performed by the second inspection means to determine the quality.

そしてこの精密検査の良否判定結果に基いて、この検査
対象物に関する上記第1の検査手段の検査データを、良
否判定データとして上記コンピュータに追加登録してい
く。このように検査データを追加登録していけば、コン
ピュータのデータヘースは次第に増加し、上記第1の検
査手段の検査能力を次第に上げてい(ことができる。
Based on the quality determination result of this detailed inspection, the inspection data of the first inspection means regarding the object to be inspected is additionally registered in the computer as quality determination data. By additionally registering test data in this way, the data amount of the computer gradually increases, and the test capability of the first test means can be gradually increased.

(実施例) 次に、図面を参照しながら本発明の詳細な説明する。(Example) Next, the present invention will be described in detail with reference to the drawings.

第1図は外観検査装置の斜82図であって、■[まXY
テーフ゛ルであり、その]二面にセットされた基板2を
XY力方向移動させる。この基板2には、コンデンサチ
ップや抵抗チップのような箱形の検査対象物PAと、Q
FPやsopのようなリードを有する検査対象物PBが
搭載されている。
Figure 1 is a diagonal 82 view of the visual inspection device, and shows
It is a table, and the substrates 2 set on its two sides are moved in the XY force directions. On this board 2, there are box-shaped test objects PA such as capacitor chips and resistor chips, and Q
An inspection object PB having leads such as FP and sop is mounted.

XY子テーブルの上方には、1ツブカメラ3と、4個の
サイドカメラ4が設けられている。
A one-piece camera 3 and four side cameras 4 are provided above the XY child table.

5は1〜ツブカメラ3と一体的に設けられたリング状の
トップ光源、6はサイトカメラ4の下方に設けられたサ
イド光源であり、それぞれ」ニガ及び斜上方から検査対
象物P A、l’) r3に光を照射する。トップカメ
ラ3は、検査対象物PA、P Bを垂直な上方から観察
し、またサイドカメラ4は、斜上方から観察することに
より、検査対象物PA、PBの平面的な2次元の画像情
報を得るものである。上記カメラ3.4や光a5.6は
、第1の検査手段を構成している。
Reference numeral 5 indicates a ring-shaped top light source that is provided integrally with the camera 1 to the tube camera 3, and reference numeral 6 indicates a side light source that is provided below the sight camera 4. ) Irradiate light to r3. The top camera 3 observes the inspection objects PA, PB from vertically above, and the side camera 4 observes the inspection objects PA, PB from diagonally above to obtain planar two-dimensional image information of the inspection objects PA, PB. It's something you get. The camera 3.4 and the light a5.6 constitute a first inspection means.

7は基板2の上方に設けられたレーザ装置、8は受光部
である。第3図に示すように、この受光部8は、PSD
のような位置検出素子8aと、集光素子8bを備えてい
る。位置検出素子8aは、レーザ装置7から照射されて
、検査対象物Pに反射されたレーザ光を受光し、レーザ
光の入射位置から、検査対象物Pの高さ情報を得るもの
である。受光部8は、2個対設されており、基板2をx
y力方向移動させながら、各素子8によりxy力方向沿
った高さ情報が得られるようになっている。またレーザ
装置7は、ミラー9が内蔵されでおり、ミラー9の角度
を制御することにより、レーザ光を半田フィレットH等
に沿ってスキャンニングさせる。レーザ装置7と受光部
8は、第2の検査手段を構成している。第2の検査手段
としては、接触式3次元測定器なども適用できる。
7 is a laser device provided above the substrate 2, and 8 is a light receiving section. As shown in FIG. 3, this light receiving section 8 is a PSD
It includes a position detection element 8a and a condensing element 8b. The position detection element 8a receives the laser beam emitted from the laser device 7 and reflected by the inspection object P, and obtains height information of the inspection object P from the incident position of the laser beam. Two light receiving sections 8 are provided in pairs, and the substrate 2 is
While moving in the y-force direction, height information along the xy-force direction can be obtained by each element 8. Further, the laser device 7 has a built-in mirror 9, and by controlling the angle of the mirror 9, the laser beam is scanned along the solder fillet H and the like. The laser device 7 and the light receiving section 8 constitute a second inspection means. As the second inspection means, a contact type three-dimensional measuring device or the like can also be applied.

10はコンピュータであって、各カメラ3.4と受光部
8はこのコンピュータ10に接続すれており、カメラ3
.4や受光部8から得られる情報に基いて、半田形状の
演算や良否判断等を行う。
10 is a computer, each camera 3.4 and the light receiving section 8 are connected to this computer 10, and the camera 3.
.. Based on the information obtained from 4 and the light receiving section 8, calculations of the solder shape, quality judgment, etc. are performed.

カメラ3.4は、検査エリアが広く、また検査スピード
を速い等の特性を有している。しかしカメラ3.4は2
次元な平面情報しか検知できず、高さの計測はできない
ものであり、したがって半田フィレットHの正確な形状
計測等はできない短所を有している。これに対し、レー
ザ装置7と位置検出素子8aから成る検査手段は、極細
に絞られたレーザ光をスポット的に検査対象物に照射し
てその反射光を検出するものであることから、精密な高
さ計測ができるが、カメラ3.4のように、2次元情報
を一括認識できず、また検査スピードが遅い等の短所を
有している。
The camera 3.4 has characteristics such as a wide inspection area and a fast inspection speed. But camera 3.4 is 2
This method can only detect dimensional planar information and cannot measure height, so it has the disadvantage that it is not possible to accurately measure the shape of the solder fillet H. On the other hand, the inspection means consisting of the laser device 7 and the position detection element 8a irradiates the object to be inspected spot-wise with extremely finely focused laser light and detects the reflected light. Although it can measure height, it has disadvantages such as not being able to recognize two-dimensional information all at once and slow inspection speed like camera 3.4.

そこで本手段は、上記のような長所と短所を有するカメ
ラ3.4と、レーザ装置7を使い分けながら、検査対象
物の外観検査を行うものであり、次に本装置による電子
部品の外観検査方法を説明する。
Therefore, in this method, the appearance of an object to be inspected is inspected by selectively using the camera 3.4 and the laser device 7, which have the advantages and disadvantages described above. Explain.

第2図は、第1の検査手段3〜6により、コンピュータ
10に教示される良否判定データを示している。Aグル
ープは、箱形の電子部品PAであり、またBグループは
リードを有する電子部品PBである。
FIG. 2 shows the quality determination data taught to the computer 10 by the first inspection means 3-6. The A group is a box-shaped electronic component PA, and the B group is an electronic component PB having a lead.

AグループのHaは外観が良好な半田である。Ha in Group A is a solder with a good appearance.

まず第2図(a)において、トップ光a5を点灯してト
ップカメラ3により観察すると、正常な半田Haに照射
された光は、側方へ反射される。このため、トップカメ
ラ3には反射光は入射せず、トップカメラ3により半田
の暗い部分1−1 a aが観察され、半田の外観は良
好であることを判別できる。
First, in FIG. 2(a), when the top light a5 is turned on and observed with the top camera 3, the light irradiated onto the normal solder Ha is reflected to the side. Therefore, the reflected light does not enter the top camera 3, and the dark portion 1-1 aa of the solder is observed by the top camera 3, and it can be determined that the appearance of the solder is good.

また同図(b)において、Hbも良好な半田である。こ
の半田11 bの上面に照射された光は、上方に反射さ
れて、カメラ3に入射する。したがって暗い部分1−1
 b aの内部に、明るい部分Hbbが観察される。
In addition, in FIG. 6(b), Hb is also a good solder. The light irradiated onto the upper surface of the solder 11b is reflected upward and enters the camera 3. Therefore, dark part 1-1
A bright portion Hbb is observed inside b a.

また同図(C)において、半田Hcは未着である。この
半田Hcに上方から照射された光は、上方へ反射してカ
メラ3に入射するので、全体が明るい部分Hc aとし
て観察される。
In addition, in the same figure (C), the solder Hc has not yet arrived. The light irradiated onto the solder Hc from above is reflected upward and enters the camera 3, so that the entire solder Hc is observed as a bright portion Hca.

また同図(d)において、半田の溶融固化時の表面張力
により、検査対象物PAが立っている場合は、一方の半
田Hdlは、暗い部分Hdlaとして観察され、他方の
半田Hd 2は明るい部分Hd 2 aとして観察され
る。
In addition, in the same figure (d), when the inspection object PA is standing due to the surface tension when the solder melts and solidifies, one solder Hdl is observed as a dark area Hdla, and the other solder Hd2 is observed as a bright area. Observed as Hd 2 a.

次にBグループについて説明する。Lはり−1である。Next, group B will be explained. L beam is -1.

同図(a)において、半田Hfはり−ドLを基板に十分
に接着しているので、外観は良好である。上方から照射
された光は、斜上方に反射されて、カメラ3には入射し
ないので、暗い部分Hf aとして観察される。
In the figure (a), since the solder Hf beam L is sufficiently adhered to the substrate, the appearance is good. The light emitted from above is reflected diagonally upward and does not enter the camera 3, so it is observed as a dark area Hfa.

同図(b)の検査対象物PBは、j形のり−ドLを有し
ている。半田HgはリードLを基板に十分に接着してい
るので、外観は良好である。
The inspection object PB shown in FIG. 2B has a J-shaped glued L. Since the solder Hg sufficiently adheres the leads L to the substrate, the appearance is good.

サイド光@i6を点灯し、サイドカメラ4により観察す
ると、暗い部分Hgaの内部に、明るい部分Hg bが
観察される。
When the side light @i6 is turned on and observed using the side camera 4, a bright portion Hgb is observed inside the dark portion Hga.

同図(c)において、半田Hhは未着であり、上方から
照射された光は、上方のカメラ3に入射し、明るい部分
Hhaとして観察される。また同図(d)において、リ
ードLは半田Hiから浮いている。この場合、暗い部分
Hiaの内部に、明るい部分Hi bが観察される。
In the same figure (c), the solder Hh is not yet adhered, and the light irradiated from above enters the camera 3 above and is observed as a bright portion Hha. In addition, in FIG. 3(d), the lead L is floating from the solder Hi. In this case, a bright portion Hib is observed inside the dark portion Hia.

以上のように、カメラ3.4と光源5.6を切り換える
ことにより、様々の検査を行うことができるものであり
、勿論これ以外にも、上記特開平1−79874号公報
に記載されているように、検査対象物の浮きや位置ずれ
、さらには表裏反転や欠品等も検査することができる。
As mentioned above, by switching the camera 3.4 and the light source 5.6, various inspections can be performed, and of course there are also other inspections described in the above-mentioned Japanese Patent Application Laid-Open No. 1-79874. As such, it is possible to inspect for lifting or misalignment of the inspection object, as well as for turning it upside down or for missing items.

また良否判定データとして、暗い部分や明るい部分の面
積、長さなどを使用してもよい。
Moreover, the area, length, etc. of dark parts and bright parts may be used as quality determination data.

そこで、第2図に示す良否判定データを、コンピュータ
10のメモリMl  (第5図参照)に登録しておけば
、第1の検査手段3〜6により、電子部品Pの外観検査
を行うことができる。この場合、カメラ3.4に取り込
まれた検査対象物の画像が、第2図に示すどの画像とマ
ツチングするか否かを検査することにより、外観検査を
行う。そして、Aグループの(a)、(b)や、Bグル
ープの(a)、(b)にマツチングしたら、外観は良好
と判断され、またAグループの(c)、(d)や、Bグ
ループの(C)、(d)にマツチングしたら、外観は不
良と判断される。
Therefore, if the quality determination data shown in FIG. 2 is registered in the memory Ml of the computer 10 (see FIG. 5), the appearance inspection of the electronic component P can be performed by the first inspection means 3 to 6. can. In this case, the appearance inspection is performed by checking whether the image of the inspection object captured by the camera 3.4 matches with which image shown in FIG. 2. Then, if it matches (a) and (b) of group A and (a) and (b) of group B, the appearance is judged to be good, and (c) and (d) of group A and (a) and (b) of group B (C) and (d), the appearance is judged to be poor.

第4図は、レーザ装置7により計測した半田Hを示して
いる。この場合、基板2の上面を基準面GNDとして設
定し、半田l(の高さHxを計測する。半田過剰、半田
少は、検査対象物Pの厚さHtとの比較により判断され
る。例えば、検査対象物Pの厚さHtの1.5倍を上限
高さ■11として設定し、半田Hの高さl−1xがそれ
以上の場合は、半田過剰であって外観は不良と判断され
る。また厚さHtの例えば0.5倍を下限高さH2とし
、高さ11 xがそれ以下の場合は、半田少であって不
良と判断される。またその中間は良と判断される。
FIG. 4 shows the solder H measured by the laser device 7. In this case, the upper surface of the board 2 is set as the reference plane GND, and the height Hx of the solder l (is measured). Excessive solder or insufficient solder is determined by comparison with the thickness Ht of the inspection object P. For example, , 1.5 times the thickness Ht of the inspection object P is set as the upper limit height ■11, and if the height l-1x of the solder H is greater than that, it is determined that there is excess solder and the appearance is defective. For example, 0.5 times the thickness Ht is set as the lower limit height H2, and if the height 11 .

またフィレソl−角度は、所定角度θr (例えば20
°)を設定し、計測された角度θXがそれ以下の場合は
、半田フィレットは薄ずぎるものであって不良と判断さ
れる。あるいは、時間的余裕があるならば、レーザ光を
XY力方向繰り返しスキャンニングさせて、半田Hの立
体形状を精密に計測してもよい。
Also, the fillet saw l-angle is a predetermined angle θr (for example, 20
°), and if the measured angle θX is less than that, the solder fillet is judged to be too thin and defective. Alternatively, if there is time, the three-dimensional shape of the solder H may be precisely measured by repeatedly scanning the laser beam in the XY force directions.

レーザ装置7による精密な計測は、長時間を要する欠点
があるが、検査対象物の高さ情報が得られるので、検査
対象物の立体形状を計測し、正確な良否判断ができる長
所がある。したがって第4図を参照しながら説明したデ
ータを、良否判定精密データとしてコンピュータ10の
メモリM2 (第5図参照)に登録する。第4図は、良
否判定精密データを例示的に示したものである。
Precise measurement using the laser device 7 has the disadvantage that it requires a long time, but it has the advantage that height information of the object to be inspected can be obtained, so the three-dimensional shape of the object to be inspected can be measured and accurate judgments can be made. Therefore, the data described with reference to FIG. 4 is registered in the memory M2 (see FIG. 5) of the computer 10 as precision data for quality determination. FIG. 4 exemplarily shows the fine quality data.

第5図は外観検査システムを示している。図中、2は検
査対象となる基板である。21は上記カメラ3.4や、
光源5.6から構成される第1の検査手段である。テー
ブルに1は第1の検査手段21の画像である。22は上
記レーザ装置7や位置検出素子8から構成される第2の
検査手段である。
FIG. 5 shows the visual inspection system. In the figure, 2 is a board to be inspected. 21 is the camera 3.4 mentioned above,
The first inspection means consists of a light source 5.6. 1 on the table is an image of the first inspection means 21. Reference numeral 22 denotes a second inspection means composed of the laser device 7 and the position detection element 8.

テーブルに2は第2の検査手段22により計測された半
田の形状を示している。K3は振り分はテーブルである
。Ml、M2はコンピュータの210部であり、第2図
及び第4図に示した良否判定データが登録され°ζいる
0次に検査方法を説明する。
2 in the table shows the shape of solder measured by the second inspection means 22. K3 is allocated to the table. M1 and M2 are parts 210 of the computer, and the quality determination data shown in FIGS. 2 and 4 are registered. A zero-order inspection method will be described.

基板2をXYテープ/l/ Iに載置し、カメラ3.4
や光源5.6を切り替えて、電子部品Pを観察する。そ
してカメラ3.4に取り込まれた画像と、メモリMlに
登録された良否判定データを照合し、良否の判定を行う
。すなわち、カメラ3.4に取り込まれた画像が、第2
図において良とされる画像とマツチングすれば、その半
田の外観は良と判断される。また第2図において不良と
される画像とマツチングすれば、半田゛は不良と判断さ
れる。
Place the board 2 on the XY tape/l/I and attach the camera 3.4.
The electronic component P is observed by switching the light sources 5 and 6. Then, the image captured by the camera 3.4 is compared with the quality determination data registered in the memory M1, and the quality is determined. That is, the image captured by camera 3.4 is
If the solder is matched with the image that is considered good in the figure, the appearance of the solder is judged to be good. Furthermore, if the solder is matched with the image determined to be defective in FIG. 2, the solder is determined to be defective.

半田の形状は様々であり、すべての半田について、その
画像データをメモリM1に予め登録しておくことは困難
であり、メモリM1には代表的なデータのみが登録され
ている。したがって予め登録されたメモリM1のデータ
のみでは、良否判定できない半田が存在する。
There are various shapes of solder, and it is difficult to register the image data of all solders in the memory M1 in advance, and only representative data is registered in the memory M1. Therefore, there are solders that cannot be determined to be good or bad using only the pre-registered data in the memory M1.

第5図のテーブルに1において、xl、x2は、メモリ
M1にデータが登録されていないために、第1の検査手
段21では良否判定ができない半田を示している。そこ
でこのような半田x1、x2は、第2の検査手段22に
より精密に計測し、第4図を参照しながら説明した良否
判定精密データに基いて、良否の判定を行う。
In table 1 in FIG. 5, xl and x2 indicate solders for which the first inspection means 21 cannot determine whether the solder is good or bad because no data is registered in the memory M1. Therefore, such solders x1 and x2 are precisely measured by the second inspection means 22, and a pass/fail judgment is made based on the quality judgment precision data described with reference to FIG.

そしてテーブルに3において良品と不良品を振り分け、
半田x1、x2の画像を、メモリMlに追加登録する。
Then, sort out the good and defective items on the table in 3 categories,
Images of solders x1 and x2 are additionally registered in memory Ml.

半田x1は不良であり、メモリM1のAグループの不良
のバート■に追加登録される。また半田x2は良であり
、メモリM1のBグループの良品のパート■に追加登録
される。第2図の(e)は、上記半田x1、x2の画像
を、第1の検査手段3〜6の新たな良否判定データとし
て登録したことを示している。
The solder x1 is defective and is additionally registered in the defective part 2 of the A group of the memory M1. Furthermore, solder x2 is good and is additionally registered in the good part (2) of group B in memory M1. (e) in FIG. 2 shows that the images of the solders x1 and x2 are registered as new quality determination data for the first inspection means 3-6.

このようにして、第1の検査手段21により良否判定が
できないものについては、第2の検査手段22により精
密検査を行い、その結果に基いて、メモリM1に新たな
データを追加登録し、次回の検査からこの追加されたデ
ータを使用するようにすれば、第1の検査手段21の検
査能力を次第に上げて、究極的には、殆どすべての検査
対象物の良否判定ができるようになる。
In this way, if the first inspection means 21 cannot determine the quality of the product, the second inspection means 22 performs a detailed inspection, and based on the results, new data is additionally registered in the memory M1, and the next time By using this added data from the inspection, the inspection ability of the first inspection means 21 can be gradually increased, and ultimately it will be possible to judge the quality of almost all inspection objects.

なお上記実施例は、半田の外観の良否を判定する場合を
例にとって説明したが、本発明は、電子部品の品種判別
や欠けの有無検査、更には金属や錠剤などの形状検査や
傷検査、更には果実の選別検査などの外観検査にも適用
できるものであり、その利用分野は上記実施例に限定さ
れない。
Although the above embodiments have been described with reference to the case of determining the quality of the appearance of solder, the present invention can also be used to determine the type of electronic components, to inspect for chips, and to inspect the shape and flaws of metals, tablets, etc. Furthermore, it can be applied to visual inspection such as fruit sorting inspection, and its field of use is not limited to the above embodiments.

(発明の効果) 以上説明したように本発明は、コンピュータに教示され
た良否判定データに基いて、検査対象物の外観の良否を
検査する第1の検査手段と、この良否判定データに基い
て良否が判定できなかった検査対象物について、コンピ
ュータに教示された良否判定精密データに基いて、検査
対象物の外観の良否を精密検査する第2の検査手段と、
この第2の検査手段による精密検査の良否判定結果に基
いて、この検査対象物に関する上記第1の検査手段の検
査データを、良否判定データとして上記コンピュータに
追加登録していくようにしているので、検査対象物の良
否判定を能率よく行うことができる。特に本方法によれ
ば、第1の検査手段の検査能力を次第に上げていき、究
極的には、第1の検査手段により、はぼすべての検査対
象物の良否判定を高速度で、且つ正確に行うことができ
る。
(Effects of the Invention) As explained above, the present invention includes a first inspection means for inspecting the appearance quality of an object to be inspected based on quality determination data taught by a computer; A second inspection means for closely inspecting the appearance of the inspection object for which the quality of the inspection object could not be determined based on the precision data for quality determination taught by the computer;
Based on the pass/fail judgment result of the detailed inspection by the second inspection means, the inspection data of the first inspection means concerning the object to be inspected is additionally registered in the computer as pass/fail judgment data. , it is possible to efficiently determine the quality of the object to be inspected. In particular, according to this method, the inspection ability of the first inspection means is gradually increased, and ultimately, the first inspection means can judge the quality of almost all inspection objects at high speed and accurately. can be done.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の実施例を示すものであって、第1図は外観
検査装置の斜視図、第2図は良否判定データの図解図、
第3図はレーザ装置の側面図、第4図は良否判定精密デ
ータの図解図、第5図は検査システムのブロック図であ
る。 3.4・・・カメラ 7・・・レーザ装置 10・・・コンピュータ 21・・・第1の検査手段 22・・・第2の検査手段
The figures show an embodiment of the present invention, in which Fig. 1 is a perspective view of an external appearance inspection device, Fig. 2 is an illustrative view of pass/fail judgment data,
FIG. 3 is a side view of the laser device, FIG. 4 is an illustrative diagram of precision data for pass/fail determination, and FIG. 5 is a block diagram of the inspection system. 3.4...Camera 7...Laser device 10...Computer 21...First inspection means 22...Second inspection means

Claims (2)

【特許請求の範囲】[Claims] (1)コンピュータに教示された良否判定データに基い
て、検査対象物の外観の良否を検査する第1の検査手段
と、この良否判定データに基いて良否が判定できなかっ
た検査対象物について、コンピュータに教示された良否
判定精密データに基いて、検査対象物の外観の良否を精
密検査する第2の検査手段と、この第2の検査手段によ
る精密検査の良否判定結果に基いて、この検査対象物に
関する上記第1の検査手段の検査データを、良否判定デ
ータとして上記コンピュータに追加登録していくことを
特徴とする外観検査方法。
(1) A first inspection means for inspecting the quality of the appearance of the object to be inspected based on the quality determination data taught by the computer; and for the object to be inspected whose quality could not be determined based on the quality determination data; A second inspection means for closely inspecting the quality of the external appearance of the object to be inspected based on the precision data for quality determination taught by the computer; An appearance inspection method characterized in that inspection data of the first inspection means regarding the object is additionally registered in the computer as pass/fail determination data.
(2)上記第1の検査手段がカメラであって、且つ上記
良否判定データが検査対象物の平面形状の画像データで
あり、また上記第2の検査手段がレーザ手段であって、
上記良否判定用精密データが、検査対象物の高さ情報を
含むことを特徴とする上記特許請求の範囲第1項に記載
の外観検査方法。
(2) The first inspection means is a camera, the quality determination data is image data of the planar shape of the object to be inspected, and the second inspection means is a laser means,
2. The external appearance inspection method according to claim 1, wherein the precision data for quality determination includes height information of the object to be inspected.
JP2333924A 1990-11-29 1990-11-29 Appearance inspection method Expired - Fee Related JPH07117388B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2333924A JPH07117388B2 (en) 1990-11-29 1990-11-29 Appearance inspection method
DE4143545A DE4143545C2 (en) 1990-11-29 1991-11-28 Testing external quality of objects, esp. components on PCB
DE4139189A DE4139189C2 (en) 1990-11-29 1991-11-28 Device for optical solder joint testing
US08/225,944 US5598345A (en) 1990-11-29 1994-04-11 Method and apparatus for inspecting solder portions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2333924A JPH07117388B2 (en) 1990-11-29 1990-11-29 Appearance inspection method

Publications (2)

Publication Number Publication Date
JPH04203916A true JPH04203916A (en) 1992-07-24
JPH07117388B2 JPH07117388B2 (en) 1995-12-18

Family

ID=18271492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2333924A Expired - Fee Related JPH07117388B2 (en) 1990-11-29 1990-11-29 Appearance inspection method

Country Status (1)

Country Link
JP (1) JPH07117388B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686994A (en) * 1993-06-25 1997-11-11 Matsushita Electric Industrial Co., Ltd. Appearance inspection apparatus and appearance inspection method of electronic components
JPH10302049A (en) * 1997-04-28 1998-11-13 Kumamoto Techno Porisu Zaidan Image identification device, its method, image detection/ identification device provided with the image identification device and medium recording image identification program
JP2009194110A (en) * 2008-02-13 2009-08-27 Seishin Shoji Kk Defect detection method for chip resistor substrate, defect detection device for chip resistor substrate, and trimming device
DE102011005789A1 (en) 2010-08-16 2012-02-16 Saimu Corporation Apparatus for receiving RAMAN scatter signals and method therefor
CN103674961A (en) * 2012-09-14 2014-03-26 株式会社其恩斯 Appearance inspection device, appearance inspection method, and program
JP2014095707A (en) * 2012-11-12 2014-05-22 Koh Young Technology Inc Substrate inspection method
JP5981621B1 (en) * 2015-09-16 2016-08-31 昭立電気工業株式会社 Soldering apparatus and soldering method
WO2019207730A1 (en) * 2018-04-26 2019-10-31 ヤマハ発動機株式会社 Component mounting device and inspection method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138904A (en) * 1983-01-28 1984-08-09 Nippon Steel Corp Checking method of surface defect of running plate body

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59138904A (en) * 1983-01-28 1984-08-09 Nippon Steel Corp Checking method of surface defect of running plate body

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686994A (en) * 1993-06-25 1997-11-11 Matsushita Electric Industrial Co., Ltd. Appearance inspection apparatus and appearance inspection method of electronic components
JPH10302049A (en) * 1997-04-28 1998-11-13 Kumamoto Techno Porisu Zaidan Image identification device, its method, image detection/ identification device provided with the image identification device and medium recording image identification program
JP2009194110A (en) * 2008-02-13 2009-08-27 Seishin Shoji Kk Defect detection method for chip resistor substrate, defect detection device for chip resistor substrate, and trimming device
DE102011005789A1 (en) 2010-08-16 2012-02-16 Saimu Corporation Apparatus for receiving RAMAN scatter signals and method therefor
CN103674961A (en) * 2012-09-14 2014-03-26 株式会社其恩斯 Appearance inspection device, appearance inspection method, and program
JP2014095707A (en) * 2012-11-12 2014-05-22 Koh Young Technology Inc Substrate inspection method
JP5981621B1 (en) * 2015-09-16 2016-08-31 昭立電気工業株式会社 Soldering apparatus and soldering method
WO2019207730A1 (en) * 2018-04-26 2019-10-31 ヤマハ発動機株式会社 Component mounting device and inspection method
JPWO2019207730A1 (en) * 2018-04-26 2021-01-14 ヤマハ発動機株式会社 Component mounting equipment and inspection method

Also Published As

Publication number Publication date
JPH07117388B2 (en) 1995-12-18

Similar Documents

Publication Publication Date Title
JPH0348755A (en) Appearance inspection device for electronic parts
JP3189500B2 (en) Apparatus and method for inspecting appearance of electronic components
KR100283834B1 (en) Bonding method of semiconductor chip and its device
CN100544576C (en) Solder joint is determined method, solder inspection method and solder material inspecting device
US6055055A (en) Cross optical axis inspection system for integrated circuits
JPH04203916A (en) Inspecting method of external appearance
JPH04315907A (en) Solder wetting form examining method
JP2954332B2 (en) Image input method and device
KR100251482B1 (en) Pcb unit examining apparatus and method
Matsuyama et al. Automated solder joint inspection system using optical 3-D image detection
JP2000121333A (en) Appearance inspection apparatus and method
JPH0894330A (en) Non-contact appearance inspection device and non-contact capacity inspection device
JPH03276007A (en) Method for detecting tilt of terminal
JP2682581B2 (en) Bonding wire shape inspection method
JP2705458B2 (en) Mounting board appearance inspection device
JPH0372204A (en) Checking method of outer appearance of soldering part
JPH0372203A (en) Checking method of outer appearance of soldering part
JP3481704B2 (en) Height measuring method and device
JPS63177042A (en) Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus
JPH0310151A (en) Object inspecting device
JPH06317409A (en) Contour recognizing method and shape inspection method using it
JPH0310110A (en) Method and apparatus for measuring height
JPH01265143A (en) Inspection device for solder state
JPH05135157A (en) Outward appearance inspection device for mounted substrate
JPH02247513A (en) Inspecting device for hole charging state

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees