JPS63177042A - Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus - Google Patents

Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus

Info

Publication number
JPS63177042A
JPS63177042A JP950087A JP950087A JPS63177042A JP S63177042 A JPS63177042 A JP S63177042A JP 950087 A JP950087 A JP 950087A JP 950087 A JP950087 A JP 950087A JP S63177042 A JPS63177042 A JP S63177042A
Authority
JP
Japan
Prior art keywords
printed circuit
circuit board
solder
light
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP950087A
Other languages
Japanese (ja)
Inventor
Kenju Muraoka
村岡 建樹
Masahiko Ikeguchi
雅彦 池口
Hisashi Hirano
恒 平野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nagoya Electric Works Co Ltd
Original Assignee
Nagoya Electric Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagoya Electric Works Co Ltd filed Critical Nagoya Electric Works Co Ltd
Priority to JP950087A priority Critical patent/JPS63177042A/en
Publication of JPS63177042A publication Critical patent/JPS63177042A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95684Patterns showing highly reflecting parts, e.g. metallic elements

Abstract

PURPOSE:To enhance the detection accuracy of solder non-wetting, by a method wherein beam is allowed to irradiate all of the soldered parts of the chip part mounted on a printed circuit board to be inspected and the total receiving quantity of the sputter beams of the beams from the soldered parts is detected. CONSTITUTION:Finely converged beam B is allowed to irradiate a printed circuit board P to be inspected and the sputter beam of the beam from the printed circuit board P is detected by a beam receiving part 13 to perform the inspection of the printed circuit board P. The beam receiving part 13 has a beam receiving surface S having a shape covering the chip part T mounted on the printed circuit board P and the sputter beams reflected from the soldered parts of the chip part T are detected by a large number of the beam receiving elements arranged to the entire beam receiving surface S. Then, the beam B is allowed to irradiate all of the soldered parts H1, H2 of the chip part T mounted on the printed circuit board P and the sputter beams L1, L2 of the beams B from all of the soldered parts H1, H2 are received and non-soldered parts are detected on the basis of the total receiving quantity of said beams.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、細く絞られたレーザ光などのビームスポット
を実装済プリント基板上で掃引し、半田付は不良により
実装済プリント基板上に形成された半田フヌレの有無の
検出などを自動的に行うようにした実装済プリント基板
自動検査装置における半田フヌレ検出方式に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention sweeps a narrowly focused beam spot of a laser beam or the like on a mounted printed circuit board, and prevents soldering from forming on the mounted printed circuit board due to defective soldering. The present invention relates to a solder flange detection method in a mounted printed circuit board automatic inspection device that automatically detects the presence or absence of solder flange.

〔従来の技術〕[Conventional technology]

従来、実装済プリント基板における半田付は不良による
ブリッジあるいは接合不良の検出などを行う方法として
、プリント基板の部品穴に合わせて多数のピンを配設し
たヘッドを用い、このヘッドによってピンを被検査プリ
ント基板の半田面に接触させて各ピン間の導通状態によ
り不良個所を検出する接触検査方式がある。しかしなが
ら、この方式においては、種類の異なるプリント基板毎
にヘッドを準備する必要があり、また、ヘッドのピンの
間隔はピンの太さによって制限されるのでチップリード
の間隔が密なICチップなどを実装したプリント基板な
どパターンの緻密なプリント基板に対しては検査が困難
であるという問題があった。
Conventionally, in soldering on mounted printed circuit boards, a head with a large number of pins arranged to match the component holes of the printed circuit board is used to detect bridging or poor bonding due to defects, and this head is used to detect the pins to be inspected. There is a contact inspection method that detects defective parts by checking the conduction state between each pin by contacting the solder surface of a printed circuit board. However, with this method, it is necessary to prepare a head for each type of printed circuit board, and the spacing between the pins of the head is limited by the thickness of the pins, so it is necessary to prepare a head for each type of printed circuit board. There is a problem in that it is difficult to inspect printed circuit boards with dense patterns, such as mounted printed circuit boards.

上記のような問題を解消するために、レーザ光などのビ
ームを走査して被検査プリント基板上でビームスポット
を掃引し、このビームスポットのスパッタ光(反射光)
等を検知してブリッジなどの検査を行う非接触式の実装
済プリント基板自動検査装置なるものが本出願人によっ
て提案され、特開昭61−76940に開示されている
In order to solve the above problems, a beam such as a laser beam is scanned to sweep the beam spot on the printed circuit board to be inspected, and the sputtered light (reflected light) of this beam spot is
A non-contact type automatic mounted printed circuit board inspection device for detecting bridges and the like was proposed by the present applicant and disclosed in JP-A-61-76940.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

プリント基板の導電薄に半田ペースト等によってリード
が半田接合されるフラットパッケージ等についての検査
を前記の接触検査方式によって行うと、半田フヌレによ
りチップリードとプリント基板の導電薄とがうまく接合
されていない個所があっても前記ヘッドのビンによって
チップリードとプリントパターンとが圧接されるので正
常に半田接合が行われているものと判断され、半田フヌ
レが検出できないとうい問題がある。
When testing flat packages, etc., in which the leads are soldered to the conductive thin layer of the printed circuit board using solder paste, etc., using the contact inspection method described above, it is found that the chip leads and the thin conductive layer of the printed circuit board are not properly bonded due to solder flange. Even if there is a spot, the chip lead and the printed pattern are pressed against each other by the pin of the head, so it is determined that the solder joint is normally performed, and there is a problem that solder flange cannot be detected.

また、本出願人が提案した前記の装置においては、プリ
ント基板に実装されたチップ部品の半田フヌレを検出す
るために部品穴の部分にレーザビームを照射し、レーザ
ビームが部品穴を透過した場合に半田フヌレを検出する
ようにしたものであるが、本発明は、半田部からのスパ
ッタ光を検出して半田の付着状態を調べることにより半
田フヌレを検出することを目的とする。
In addition, in the above-mentioned device proposed by the present applicant, a laser beam is irradiated to the component hole in order to detect solder flange of a chip component mounted on a printed circuit board, and when the laser beam passes through the component hole, However, it is an object of the present invention to detect solder bulges by detecting sputtered light from a solder portion and checking the state of solder adhesion.

〔問題点を解決するための手段〕[Means for solving problems]

第1図は、本発明の実装済プリント基板自動検査装置に
おける半田フヌレ検出方式を説明する図であり、本発明
は、上記の問題を解消して半田フヌレの検出を行うため
に、細く絞られたビームを被検査プリント基板上に照射
し、この被検査プリント基板からの上記ビームのスパッ
タ光を検知してプリント基板の検査を行う実装済プリン
ト基板自動検査装置において、被検査プリント基板上に
実装されたチップ部品Tの全ての半田部HにビームBを
照射し、その全ての半田部からの上記ビームのスパッタ
光を受光し、その聴受光量に基づいて半田フヌレの検出
を行うようにした。
FIG. 1 is a diagram illustrating the solder flange detection method in the mounted printed circuit board automatic inspection apparatus of the present invention. In an automatic printed circuit board inspection device that inspects printed circuit boards by irradiating a beam onto the printed circuit board to be inspected and detecting the sputtered light of the beam from the printed circuit board to be inspected, The beam B is irradiated onto all the solder parts H of the chip component T that has been soldered, the sputtered light of the beam from all the solder parts is received, and solder flange is detected based on the amount of the received light. .

〔作用〕[Effect]

第2図は、前記第1図に示した本発明の検出方式におい
て、受光されるスパッタ光の強度変化を示す図であり、
例えばレーザビームをチップ部品T上を掃引して照射す
ると、半田フヌレが生じていなければ同図(A)に示す
ように半田部H1で反射されるスパッタ光L1による出
力部分S1と半田部H2で反射されるスパッタ光L2に
よる出力部分S2とが得られるので聴受光量はこの出力
部分S1と出力部分S2との総和になるが、例えば同図
(B)に示したように、半田フヌレが生じていると上記
出力部分S1と出力部分S2との内掛なくともいずれか
の出力が得られないために例えチップ部品の角からのス
パッタ光による出力部83などがあっても聴受光量が上
記半田フヌレが生じていない場合より少なくなるので、
全ての半田部からのスパッタ光の聴受光量を検出し、予
め設定された基準の受光量と比較すれば、半田フヌレの
検出を行うことができる。
FIG. 2 is a diagram showing changes in the intensity of sputtered light received in the detection method of the present invention shown in FIG. 1,
For example, when a laser beam is swept and irradiated onto a chip component T, if no solder flange occurs, the output portion S1 of the sputtered light L1 reflected by the solder portion H1 and the output portion S1 of the solder portion H2 as shown in FIG. Since an output portion S2 is obtained by the reflected sputtering light L2, the amount of light heard and received is the sum of the output portion S1 and the output portion S2. However, as shown in FIG. If this is the case, the amount of light heard and received will not be the same even if there is an output part 83 due to sputtered light from the corner of the chip component because the output of any one of the output parts S1 and S2 will not be obtained. There will be fewer solder creases than if they had not occurred, so
Solder flange can be detected by detecting the amount of sputtered light from all the solder parts and comparing it with the amount of received light of a preset standard.

〔実施例〕〔Example〕

第3図は本発明を適用した実装済プリント基板自動検査
装置の全体を示す正面図であり、11はケーシング、1
2はこのケーシング内に配設された被検査物であるプリ
ント基板Pが載置されてX軸方向とY軸方向とに自由に
移動されるX−Yステージである。13は後述説明する
ように上記X−Yステージ12の上方に配置され上記被
検査プリント基板Pからのスパッタ光を検出する受光部
であり、内部の受光面には受光素子が多数配置されてい
る。14は上記X−Yステージ12の下方に設置された
受光器であり、プリント基板上の基準点を設定するとき
などに上記受光部13を1fflJするレーザ光をプリ
ント基板に設けられた基準孔を介して受光するものであ
る。15はケーシング11の上面に設けられた操作スイ
ッチ群であり、16は装置の動作状態を示す表示灯、1
7は検査結果をプリントアウトするプリンタである。
FIG. 3 is a front view showing the entire mounted printed circuit board automatic inspection device to which the present invention is applied, in which 11 is a casing;
Reference numeral 2 denotes an X-Y stage on which a printed circuit board P, which is an object to be inspected, is placed inside the casing and is freely moved in the X-axis direction and the Y-axis direction. As will be explained later, a light receiving section 13 is arranged above the X-Y stage 12 and detects sputtered light from the printed circuit board P to be inspected, and a large number of light receiving elements are arranged on the internal light receiving surface. . Reference numeral 14 denotes a light receiver installed below the X-Y stage 12, and when setting a reference point on a printed circuit board, a laser beam that hits the light receiving section 13 by 1fflJ is transmitted through a reference hole provided on the printed circuit board. It receives light through the 15 is a group of operation switches provided on the top surface of the casing 11; 16 is an indicator light indicating the operating status of the device;
7 is a printer that prints out the test results.

この実装済プリント基板自動検査装置では、検査に先立
って被検査プリント基板上の基準位置、検査位置あるい
はプリント基板の種類などを識別する基板名などの検査
用データが予め記憶装置などに登録され、検査を行うと
きには、被検査プリント基板をX−Yステージ12に設
置して基板名などを図示しない端末装置から入力すると
、予め記録された検査個所の位置情報などの検査用デー
タに基づいて自動的に検査が行われ、検査が終了すると
検出した半田フヌレの個所あるいは個数などの検査結果
がプリンタ17からプリントアウトされると共に、図示
しないマーカにより被検査プリント基板の半田フヌレ個
所付近にマークがつけられる。
In this mounted printed circuit board automatic inspection device, inspection data such as a board name for identifying the reference position, inspection position, or type of printed circuit board on the printed circuit board to be inspected is registered in advance in a storage device etc. prior to inspection. When performing an inspection, place the printed circuit board to be inspected on the X-Y stage 12 and input the board name etc. from a terminal device (not shown). When the inspection is completed, the printer 17 prints out the inspection results such as the location or number of solder creases detected, and a mark (not shown) is placed near the solder crease locations on the printed circuit board to be inspected. .

第4図は上記第3図に示した装置の光学系を示す斜視図
であり、21はレーザ光を放射するHe−Neレーザ銃
、22はビームスポットを充分に絞るために上記He−
Neレーザ銃21が放射するレーザ光を一部5龍径程度
の平行ビームに拡張するためのエキスパンダである。2
3は前記X−Yステージ12のY軸方向にビームスポッ
トが掃引されるようにレーザビームを走査するY軸回転
ミラー23aと、同様にX軸方向にビームスポットが掃
引されるようにレーザビームを走査するX軸回転ミラー
23bとを備えたガルバノメータであり、このガルバノ
メータ23によって各回転ミラーの可動範囲に基づ(立
体角内でレーザビームが走査される。24は上記ガルバ
ノメーク23によって操作されたレーザビームを第1の
ミラー25および第2のミラー26を介してプリント基
板P上に集光する集光レンズである。
FIG. 4 is a perspective view showing the optical system of the apparatus shown in FIG.
This is an expander for partially expanding the laser beam emitted by the Ne laser gun 21 into a parallel beam of approximately 5 diameters. 2
Reference numeral 3 denotes a Y-axis rotating mirror 23a that scans the laser beam so that the beam spot is swept in the Y-axis direction of the X-Y stage 12, and a Y-axis rotating mirror 23a that scans the laser beam so that the beam spot is swept in the X-axis direction. This is a galvanometer equipped with a scanning X-axis rotating mirror 23b, and the laser beam is scanned by this galvanometer 23 based on the movable range of each rotating mirror (within a solid angle. 24 is operated by the galvanometer 23). This is a condensing lens that condenses a laser beam onto a printed circuit board P via a first mirror 25 and a second mirror 26.

前記受光部13は、前記第1図に示したように、プリン
ト基板に実装されたチップ部品Tを覆うような形状の受
光面Sを有しており、この受光面全面に配設された多数
の受光素子によってチップ部品の半田部で反射されたス
パッタ光が検出される。
As shown in FIG. 1, the light-receiving section 13 has a light-receiving surface S that is shaped to cover a chip component T mounted on a printed circuit board. Sputtered light reflected from the solder portion of the chip component is detected by the light receiving element.

また、この受光部13はその上面の受光面にも受光素子
が配設されているが、半田部からのスパッタ光が比較的
低い角度で反射されることを考慮して側面部の受光素子
によってスパッタ光を受光するようにし、例えばチップ
部品本体から反射されるスパッタ光による受光量のばら
つきによる誤検出などを回避するようにしである。
In addition, the light receiving element 13 is also provided with a light receiving element on the upper light receiving surface, but considering that the sputtered light from the solder part is reflected at a relatively low angle, the light receiving element on the side surface is This is to receive sputtered light to avoid erroneous detection due to variations in the amount of received light due to, for example, sputtered light reflected from the chip component body.

なお、この装置においては、上記ガルバノメータ23に
よって走査されたレーザビームからその一部をビームス
プリッタ27で分離し、このビームスプリッタ27を透
過したビームBを上記のようにプリント基viP上に照
射するとともに、ビームスプリンタ27によって反射さ
れたビームを第2の集光レンズ28によって光点位置検
出素子29の受光面上に集光させ、この光点位置検出素
子29によって検出されるビームスポットの位置情報に
基づいてプリント基板Pに照射されるビームBのスポッ
ト位置をサーボ制御するようにしである。
In this device, a part of the laser beam scanned by the galvanometer 23 is separated by the beam splitter 27, and the beam B transmitted through the beam splitter 27 is irradiated onto the printing substrate viP as described above. The beam reflected by the beam splinter 27 is focused onto the light receiving surface of the light spot position detection element 29 by the second condenser lens 28, and the position information of the beam spot detected by the light spot position detection element 29 is Based on this, the spot position of the beam B irradiated onto the printed circuit board P is servo-controlled.

以上の光学系により、プリント基板Pに照射されるレー
ザビームBは上記ガルバノメータ23のY軸回転ミラー
23aおよびX軸回転ミラー23bの可動範囲に基づく
矩形の範囲内を走査されてビームスポットがプリント基
板に実装されているチップ部品の半田部に照射され、上
記受光部13によってスパッタ光が受光されてスパッタ
光の強度に応じた出力が図示しない処理装置に印加され
、一つのチップ部品の検査の間に上記受光部13が出力
する出力値を積算し、この被検査チップ部品に対応して
予め登録されている一定の闇値との比較を行って半田フ
ヌレの検出が行われる。
With the above optical system, the laser beam B irradiated onto the printed circuit board P is scanned within a rectangular range based on the movable range of the Y-axis rotation mirror 23a and the X-axis rotation mirror 23b of the galvanometer 23, and the beam spot is focused on the printed circuit board. The sputtered light is irradiated onto the solder part of the chip component mounted on the chip component, the sputtered light is received by the light receiving section 13, and an output corresponding to the intensity of the sputtered light is applied to a processing device (not shown), during the inspection of one chip component. Solder flange is detected by integrating the output values output by the light receiving section 13 and comparing them with a certain dark value registered in advance corresponding to the chip component to be inspected.

なお、本発明の検査方式のように半田部にレーザビーム
を照射し、そのスパッタ光を検知する方法は、例えば第
1図に示したチップ部品Tの各半田部H1あるいはH2
のそれぞれについて個別に検査を行うようにすることも
できるが、チップ部品の位置ずれなどを考慮すると、前
記したように全ての半田部について一度に検査番行うよ
うにするのが望ましい。
Note that the method of irradiating a laser beam onto a solder portion and detecting the sputtered light, as in the inspection method of the present invention, is applicable to each solder portion H1 or H2 of the chip component T shown in FIG. 1, for example.
It is also possible to individually test each of the solder parts, but in consideration of misalignment of the chip components, it is preferable to test all the solder parts at once as described above.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、レーザ光などのビームスポットを被検
査プリント基板上で掃引してプリント基板の検査を行う
実装済プリント基板自動検査装置において、被検査プリ
ント基板上に実装されたチップ部品の全ての半田部にビ
ームを照射し、その全ての半田部からの上記ビームのス
パッタ光を受光し、その縁受光量に基づいて半田フヌレ
の検出を行うようにしたので、半田フヌレに対する検査
精度を向上させた実装済プリント基板自動検査装置を得
ることができる。
According to the present invention, in an automatic mounted printed circuit board inspection device that inspects a printed circuit board by sweeping a beam spot of a laser beam or the like over the printed circuit board to be inspected, all chip components mounted on the printed circuit board to be inspected can be inspected. The beam is irradiated onto the solder parts of the solder part, the sputtered light of the beam is received from all the solder parts, and solder creases are detected based on the amount of light received at the edges, improving the inspection accuracy for solder creases. It is possible to obtain a mounted printed circuit board automatic inspection device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実装済プリント基板自動検査装置にお
ける半田フヌレ検出方式を説明する図、第2図は本発明
における受光されるスパッタ光の強度変化を示す図、 第3図は本発明を適用した実装済プリント基板自動検査
装置の全体を示す図、 第4図は本発明を適用した実装済プリント基板自動検査
装置の光学系を示す図である。 P・・・被検査プリント基板、T・・・チップ部品、H
・・・半田部、B・・・ビーム。
Fig. 1 is a diagram illustrating the solder flange detection method in the automatic inspection device for mounted printed circuit boards of the present invention, Fig. 2 is a diagram illustrating the intensity change of the received sputtering light in the present invention, and Fig. 3 is a diagram illustrating the method of detecting solder flange in the automatic inspection device for mounted printed circuit boards of the present invention. FIG. 4 is a diagram showing the entire mounted printed circuit board automatic inspection apparatus to which the present invention is applied. FIG. 4 is a diagram showing the optical system of the mounted printed circuit board automatic inspection apparatus to which the present invention is applied. P: Printed circuit board to be inspected, T: Chip component, H
...Solder part, B...beam.

Claims (1)

【特許請求の範囲】[Claims] 細く絞られたビームを被検査プリント基板上に照射し、
この被検査プリント基板からの上記ビームの反射光を検
知してプリント基板の検査を行う実装済プリント基板自
動検査装置において、被検査プリント基板(P)上に実
装されたチップ部品(T)の全ての半田部(H)にビー
ム(B)を照射し、その全ての半田部からの上記ビーム
の反射光を受光し、その総受光量に基づいて半田フヌレ
の検出を行うようにしたことを特徴とする実装済プリン
ト基板自動検査装置における半田フヌレ検出方式。
A narrowly focused beam is irradiated onto the printed circuit board to be inspected,
In this mounted printed circuit board automatic inspection device that inspects the printed circuit board by detecting the reflected light of the beam from the printed circuit board to be inspected, all of the chip components (T) mounted on the printed circuit board (P) to be inspected are A beam (B) is irradiated onto the solder portion (H) of the solder portion, the reflected light of the beam from all the solder portions is received, and solder flange is detected based on the total amount of received light. Solder flange detection method in automatic inspection equipment for mounted printed circuit boards.
JP950087A 1987-01-19 1987-01-19 Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus Pending JPS63177042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP950087A JPS63177042A (en) 1987-01-19 1987-01-19 Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP950087A JPS63177042A (en) 1987-01-19 1987-01-19 Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus

Publications (1)

Publication Number Publication Date
JPS63177042A true JPS63177042A (en) 1988-07-21

Family

ID=11721957

Family Applications (1)

Application Number Title Priority Date Filing Date
JP950087A Pending JPS63177042A (en) 1987-01-19 1987-01-19 Detection system for non-soldered part in mounted printed circuit board automatic inspection apparatus

Country Status (1)

Country Link
JP (1) JPS63177042A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0426165A2 (en) * 1989-11-02 1991-05-08 Matsushita Electric Industrial Co., Ltd. Circuit board inspecting apparatus
US5192983A (en) * 1989-12-19 1993-03-09 Matsushita Electric Industrial Co., Ltd. Apparatus for and method of checking external appearance of soldering state
US5206705A (en) * 1989-12-13 1993-04-27 Matsushita Electric Industrial Co., Ltd. Method of checking external shape of solder portion

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196140A (en) * 1981-05-27 1982-12-02 Fujitsu Ltd Tester for inspecting appearance of soldered printed board
JPS6176940A (en) * 1984-09-25 1986-04-19 Nagoya Denki Kogyo Kk Automatic inspecting device of mounted printed board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196140A (en) * 1981-05-27 1982-12-02 Fujitsu Ltd Tester for inspecting appearance of soldered printed board
JPS6176940A (en) * 1984-09-25 1986-04-19 Nagoya Denki Kogyo Kk Automatic inspecting device of mounted printed board

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0426165A2 (en) * 1989-11-02 1991-05-08 Matsushita Electric Industrial Co., Ltd. Circuit board inspecting apparatus
US5206705A (en) * 1989-12-13 1993-04-27 Matsushita Electric Industrial Co., Ltd. Method of checking external shape of solder portion
US5192983A (en) * 1989-12-19 1993-03-09 Matsushita Electric Industrial Co., Ltd. Apparatus for and method of checking external appearance of soldering state

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