TW201732220A - Tray testing device - Google Patents
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- TW201732220A TW201732220A TW105107058A TW105107058A TW201732220A TW 201732220 A TW201732220 A TW 201732220A TW 105107058 A TW105107058 A TW 105107058A TW 105107058 A TW105107058 A TW 105107058A TW 201732220 A TW201732220 A TW 201732220A
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Abstract
Description
本發明係關於一種承載盤檢驗裝置，尤指一種適用於裝載半導體元件之承載盤檢驗裝置。The present invention relates to a carrier inspection device, and more particularly to a carrier inspection device suitable for loading semiconductor components.
請參閱圖9及圖10，係習知厚薄規之檢驗方式之示意圖以及習知通道式檢測器之檢驗方式之示意圖。如圖9所示，圖中檢測者手中所握持之承載盤檢驗裝置係為一厚薄規91，其常用於量測二零件間之間隙，也可應用於檢測承載盤95之翹曲程度。使用時，若將厚薄規91插入承載盤95與桌面之間隙後，發現兩者間仍有空隙且無接觸到承載盤95表面，則判定為翹曲異常。再者，如圖10所示，圖中設置於一斜面920之承載盤檢驗裝置係為一通道式檢測器92，檢測者係將承載盤95置入通道式檢測器92之一具特定高度之通道921後，若承載盤95卡住無法順利滑入時，則判定為翹曲異常。然而，上述兩種承載盤檢驗裝置皆須以人力手動操作，檢驗過程制式化且耗費人力，缺乏自動化之檢驗效率。Please refer to FIG. 9 and FIG. 10 , which are schematic diagrams showing the inspection mode of the conventional thick gauge and the inspection mode of the conventional channel detector. As shown in FIG. 9, the carrier inspection device held by the examiner in the figure is a thick gauge 91, which is commonly used to measure the gap between two parts, and can also be used to detect the degree of warpage of the carrier 95. . In use, when the gauge gauge 91 is inserted into the gap between the carrier tray 95 and the table top, it is found that there is still a gap between the two without contact with the surface of the carrier tray 95, and it is determined that the warpage is abnormal. Furthermore, as shown in FIG. 10, the carrier inspection device disposed on a slope 920 is a channel detector 92, and the detector places the carrier 95 in a specific height of the channel detector 92. After the passage 921, if the carrier disk 95 is stuck and cannot smoothly slide in, it is determined that the warpage is abnormal. However, both of the above-mentioned carrier tray inspection devices have to be manually operated by humans, the inspection process is standardized and labor-intensive, and the inspection efficiency of automation is lacking.
因此，如圖11所示，係習知承載盤檢驗裝置之檢驗方式之示意圖。美國公告號第6453760號專利案已揭示一種承載盤檢驗裝置93，係將承載盤95置於一以輸送馬達932驅動之輸送帶930上，並以一夾具931將承載盤95固定於輸送帶930上，此外，位於輸送帶930之一側之一阻擋塊933係跟隨承載盤95同時移動，且依序對應位於同一側之三光耦934，用以反射每一光耦934所發射出之LED光束，當光耦934接收到反射光時，即可判定已到達承載盤95之檢測點。其中，習知技術係採用橫向式之光柵感測方式，利用一雷射光柵發射源935對應一接收該光源之雷射光柵感知器936，其原理係在判定未被承載盤95阻擋之雷射光之最高位置與一門檻高度進行比較，若該最高位置小於該門檻高度，即通過檢測；若該最高位置大於該門檻高度，即未通過檢測。然而，習知技術無法準確地量測出承載盤95之翹曲量，缺乏使用上之精確性，且僅透過光遮蔽之方式易受到外在環境干擾，量測誤差及檢測品質仍有改進的空間。Therefore, as shown in FIG. 11, a schematic diagram of a conventional inspection method of the carrier inspection device is shown. U.S. Patent No. 6,543,760 discloses a carrier inspection device 93 for placing a carrier 95 on a conveyor belt 930 driven by a conveyor motor 932 and securing the carrier 95 to the conveyor belt 930 with a clamp 931. In addition, one of the blocking blocks 933 located on one side of the conveyor belt 930 moves simultaneously with the carrier disk 95, and sequentially corresponds to the three photocouplers 934 on the same side for reflecting the LED beams emitted by each of the optical couplers 934. When the optocoupler 934 receives the reflected light, it can be determined that the detection point of the carrier 95 has been reached. Wherein, the conventional technique uses a horizontal grating sensing method, and a laser grating emitting source 935 corresponds to a laser grating sensor 936 that receives the light source, and the principle is to determine the laser light that is not blocked by the carrier disk 95. The highest position is compared with a threshold height. If the highest position is less than the threshold height, the detection is passed; if the highest position is greater than the threshold height, the detection is not passed. However, the conventional technology cannot accurately measure the amount of warpage of the carrier disk 95, lacks the accuracy of use, and is susceptible to external environment interference only by means of light shielding, and the measurement error and detection quality are still improved. space.
發明人緣因於此，本於積極發明之精神，亟思一種可以解決上述問題之承載盤檢驗裝置，幾經研究實驗終至完成本發明。Because of this, in the spirit of active invention, this paper considers a carrier inspection device that can solve the above problems, and finally completes the present invention after several research experiments.
本發明之主要目的係在提供一種承載盤檢驗裝置，用以檢驗承載盤是否已產生翹曲或變形的情況，避免在各機台中誤用過度變形的承載盤，造成半導體元件翻覆、彈出或破損，有效減少機台出現問題的機率，保持原有產能。The main object of the present invention is to provide a carrier inspection device for verifying whether a carrier disk has been warped or deformed, and to avoid misuse of an excessively deformed carrier disk in each machine, thereby causing the semiconductor component to be overturned, ejected or damaged. Effectively reduce the chance of problems on the machine and maintain the original capacity.
本發明之另一目的係在提供一種具有氣簾清潔效果之承載盤檢驗裝置，除了可自動化檢測承載盤翹曲量之外，同時可藉由一氣簾桿上之複數通氣孔噴出壓縮氣體，一併去除承載盤上之微塵，毋須再依靠人力用氣槍清潔承載盤表面。Another object of the present invention is to provide a carrier inspection device having an air curtain cleaning effect, in addition to automatically detecting the amount of warpage of the carrier disk, and simultaneously discharging the compressed gas through a plurality of vent holes on the air curtain rod. The dust on the carrier tray is removed, and it is no longer necessary to use a human air gun to clean the surface of the carrier.
為達成上述目的，本發明之承載盤檢驗裝置包括有一滑軌單元、二高度計以及一控制單元。滑軌單元包括有一軌道及一經由一皮帶帶動之橫移推桿，該皮帶係連接一動力源，其中，複數承載盤係依序放置於軌道上，並受橫移推桿之線性推移，用以建構出一可持續推送每一承載盤之輸送結構。此外，二高度計分別設置於一支撐架上，係提供一單點式光束對應每一承載盤之兩側端緣之上表面，用以感測承載盤之高度變化量，並透過電連接該動力源及該二高度計之控制單元，控制每一承載盤之啟動時序，使得每一承載盤可被照射一特定數量之單點式光束之量測點，以確保承載盤之每一部分皆符合在容許變形量之範圍內。In order to achieve the above object, the carrier inspection device of the present invention comprises a slide unit, a two altimeter and a control unit. The slide rail unit comprises a track and a traverse push rod driven by a belt, the belt is connected to a power source, wherein the plurality of load trays are sequentially placed on the track and linearly displaced by the traverse push rod, To construct a transport structure that can continuously push each carrier. In addition, the two altimeters are respectively disposed on a support frame, and provide a single-point beam corresponding to the upper surfaces of the two end edges of each of the carrier disks for sensing the height variation of the carrier disk and electrically connecting the power. The source and the control unit of the two altimeters control the starting timing of each carrier, so that each carrier can be illuminated by a specific number of single-point beam measuring points to ensure that each part of the carrier is in compliance Within the range of deformation.
上述支撐架可更固設有一開設複數通氣孔之氣簾桿，該氣簾桿係連通一壓縮氣體供應裝置，用以自動化清潔承載盤，減少微塵汙染承載盤及待測半導體元件。The support frame can be further provided with an air curtain rod for opening a plurality of vent holes, and the air curtain rod is connected to a compressed gas supply device for automatically cleaning the carrier tray, reducing the dust pollution bearing tray and the semiconductor component to be tested.
上述滑軌單元可更包括複數升降板及複數掛桿，用以建構出一良品儲放區及一不良品儲放區。該掛桿可分別承接並堆疊通過檢驗之承載盤及未通過檢驗之承載盤，具有集中放置之特性，直至收集到一定數量後，再經由人力或移行機構搬離承載盤檢驗裝置。The above-mentioned rail unit may further comprise a plurality of lifting plates and a plurality of hanging rods for constructing a good storage area and a defective storage area. The hanging rods can respectively receive and stack the passing trays that have passed the inspection and the carrying trays that have not passed the inspection, and have the characteristics of centralized placement, and after collecting a certain amount, the loading tray inspection device is removed by the human or the moving mechanism.
其中，根據檢驗裝置所制定之通過標準，當高度計所量測之高度差在一特定閾值以內時，承載盤將被輸送至良品儲放區；而當高度計所量測之高度差超過特定閾值時，承載盤將被輸送至不良品儲放區。所述之特定閾值可為0.76公釐。藉此，可防止過度變形之承載盤被誤用，避免半導體元件翻覆、彈出或破損的現象產生。Wherein, according to the passing standard established by the testing device, when the height difference measured by the altimeter is within a certain threshold, the carrying tray will be transported to the good storage area; and when the height difference measured by the altimeter exceeds a certain threshold The carrier tray will be transported to the defective product storage area. The specific threshold can be 0.76 mm. Thereby, the excessively deformed carrier can be prevented from being misused, and the phenomenon that the semiconductor element is overturned, ejected or damaged can be prevented.
此外，滑軌單元可更包括一進料區，設至於儲放區之相對側，可同樣利用升降板進行承載盤之進料輸送，承接由人力或移行機構所搬運之待檢驗之承載盤。In addition, the slide rail unit may further comprise a feeding zone, which is disposed on the opposite side of the storage zone, and can also use the lifting plate to carry out the feeding and conveying of the carrying tray, and undertake the carrying tray to be inspected which is transported by the manpower or the moving mechanism.
上述特定數量之單點式光束之量測點可為8個量測點，亦即，承載盤在滑軌單元輸送的過程中，經過二高度計之期間，採用分段推移之方式，讓二高度計左右分別照設4個點。藉此，可針對承載盤之每一部分進行檢驗，避免產生未檢驗到之局部翹曲區域。此外，可依據不同尺寸之承載盤，改變量測點之個數，其並不以8個量測點為限。The measurement points of the above-mentioned specific number of single-point beams may be 8 measuring points, that is, the carrying trays are transported in the process of the sliding rail unit, and the two altimeters are used in the period of the two altimeters. Set 4 points on the left and right respectively. Thereby, each part of the carrier tray can be inspected to avoid undetected local warpage areas. In addition, the number of measurement points can be changed according to different size of the carrier, which is not limited to 8 measurement points.
再者，本發明之另一承載盤檢驗裝置，包括有一滑軌單元、一高度計及一控制單元。其中，滑軌單元部分如前所述，用以建構出一可持續推送每一承載盤之輸送結構。而在高度計部分，係採用設置於一支撐架上之單一高度計，提供一陣列式光束對應該每一承載盤之上表面。控制單元電連接動力源及高度計，藉以控制每一承載盤之啟動時序，使得每一承載盤可被持續照射陣列式光束。藉由上述設計，可透過陣列式光束連續性地掃描承載盤之外輪廓，由承載盤之整體外觀判斷其是否具有高度差，係為另一種運用高度計檢測之實施方式。Furthermore, another carrier inspection device of the present invention includes a slide unit, an altimeter and a control unit. Wherein, the slide rail unit portion is configured to construct a transport structure for continuously pushing each of the carrier trays as described above. In the altimeter section, a single altimeter disposed on a support frame is provided to provide an array of beams corresponding to the upper surface of each carrier. The control unit is electrically connected to the power source and the altimeter to control the starting timing of each carrier, so that each carrier can be continuously illuminated by the array beam. With the above design, it is possible to continuously scan the outer contour of the carrier through the array beam, and whether the height difference is determined by the overall appearance of the carrier is another implementation method using the altimeter detection.
以上概述與接下來的詳細說明皆為示範性質是為了進一步說明本發明的申請專利範圍。而有關本發明的其他目的與優點，將在後續的說明與圖示加以闡述。The above summary and the following detailed description are exemplary in order to further illustrate the scope of the invention. Other objects and advantages of the present invention will be described in the following description and drawings.
請參閱圖1，係本發明第一實施例之承載盤檢驗裝置之立體圖。圖中出示一種承載盤檢驗裝置1，設置於一工作桌81上，該承載盤檢驗裝置1連結一人機介面82，可供使用者設定參數及使用操作。此外，在本實施例中，另設有一緊急開關83及一異常警示燈84，可供監控承載盤檢驗裝置1之使用狀態，一旦出現異常狀況，使用者可透過緊急開關83關閉本機台。1 is a perspective view of a carrier inspection device according to a first embodiment of the present invention. The figure shows a carrier inspection device 1 which is disposed on a work table 81. The carrier inspection device 1 is coupled to a human interface 82 for the user to set parameters and use operations. In addition, in this embodiment, an emergency switch 83 and an abnormal warning light 84 are additionally provided for monitoring the use state of the carrier inspection device 1. Once an abnormal condition occurs, the user can turn off the local machine through the emergency switch 83.
接著，請參閱圖2至圖4，係本發明第一實施例之承載盤檢驗裝置之局部立體圖、側視圖以及俯視圖。如圖所示，本發明之承載盤檢驗裝置1主要包括有一滑軌單元2、二高度計3、一控制單元4、一氣簾桿6、三升降板71及二組掛桿72。滑軌單元2包括有一軌道21及一經由一皮帶22帶動之橫移推桿23，該皮帶22係連接一動力源24，而本實施例所使用之動力源24係為一馬達。此外，複數承載盤5係依序放置於軌道21上，並受橫移推桿23之線性推移，用以建構出一可持續推送每一承載盤5之輸送結構。Next, referring to FIG. 2 to FIG. 4, a partial perspective view, a side view, and a plan view of a carrier inspection device according to a first embodiment of the present invention are shown. As shown in the figure, the carrier inspection device 1 of the present invention mainly comprises a slide unit 2, two altimeters 3, a control unit 4, an air curtain rod 6, three lifting plates 71 and two sets of hanging rods 72. The rail unit 2 includes a rail 21 and a traverse push rod 23 driven by a belt 22. The belt 22 is connected to a power source 24, and the power source 24 used in this embodiment is a motor. In addition, a plurality of carrier trays 5 are sequentially placed on the rails 21 and linearly displaced by the traverse pushers 23 for constructing a transport structure for continuously pushing each of the carrier trays 5.
關於軌道中各區域之細部結構，請一併參閱圖1。三升降板71係設置於軌道21兩側之容置空間內，用以提供一上升或下降之頂推力，順利抬升或卸下承載盤5。其中，每一升降板71係對應一特定區域，包括有：一進料區700、一良品儲放區701及一不良品儲放區702。而良品儲放區701及不良品儲放區702分別在軌道21上設有一組掛桿72，其用以承接並堆疊通過檢驗之承載盤5及未通過檢驗之承載盤5。此外，在本實施例中，每一掛桿72接近頂端之部分設有一滿料檢知器721(參閱圖1)，當集中收集至一定數量後，滿料檢知器721將提供一訊息，提醒使用者須將檢測後之承載盤5搬離承載盤檢驗裝置1。For details on the details of each area in the track, please refer to Figure 1. The three lifting plates 71 are disposed in the accommodating spaces on both sides of the rail 21 for providing a rising or falling top thrust, and smoothly lifting or unloading the carrier tray 5. Each of the lifting plates 71 corresponds to a specific area, and includes: a feeding area 700, a good storage area 701, and a defective storage area 702. The good storage area 701 and the defective product storage area 702 are respectively provided with a set of hanging rods 72 on the track 21 for receiving and stacking the tested carrying trays 5 and the unsupported carrying trays 5. In addition, in this embodiment, a portion of each of the hanging rods 72 near the top end is provided with a full material detector 721 (see FIG. 1). When the collection is concentrated to a certain amount, the full material detector 721 will provide a message. The user is reminded that the detected carrier tray 5 must be removed from the carrier inspection device 1.
另外，本發明之二高度計3係滑設於一支撐架31之一滑桿32上，在檢測前可對位微調其水平位置並鎖附固定後，才會進行後續之檢驗過程，以利精準量測承載盤5兩側端緣之高度值。其中，本實施例之二高度計3係採用單點式光束P，並依尺寸或精度需求分段推移承載盤5，使其兩側端緣分別對應高度計3所照射出之光束。In addition, the second altimeter 3 of the present invention is slidably disposed on one of the slide bars 32 of a support frame 31, and can be finely adjusted to the horizontal position before the detection and locked and fixed, and then the subsequent inspection process is performed to facilitate precision. The height values of the edge edges on both sides of the carrier disk 5 are measured. The second altimeter 3 of the embodiment adopts a single-point light beam P, and the carrier disk 5 is segmented and moved according to the size or precision requirement, so that the two end edges respectively correspond to the light beams irradiated by the altimeter 3.
請參閱圖5，係本發明第一實施例之承載盤量測點之示意圖。在本實施例中，二高度計3對應每一承載盤5係設定有8個量測點，其依尺寸或精度需可任意調整量測點之多寡，而不以8個量測點為限。圖中箭號表示承載盤5在滑軌單元2之輸送方向，而承載盤5係以分段推移的方式由下方經過二高度計3之單點式光束P，並於左右兩端緣分別檢測4個量測點完成單一承載盤5之高度檢驗作業。Please refer to FIG. 5, which is a schematic diagram of a measuring point of a carrier according to a first embodiment of the present invention. In this embodiment, the two altimeters 3 are provided with eight measuring points corresponding to each carrying tray 5, and the number of measuring points can be arbitrarily adjusted according to the size or precision, and is not limited to 8 measuring points. In the figure, the arrow indicates that the carrier 5 is in the conveying direction of the rail unit 2, and the carrier 5 is passed through the two-point beam P of the two altimeters 3 in a stepwise manner, and is detected at the left and right ends respectively. The measuring points complete the height inspection operation of the single carrier disk 5.
請回到圖2至圖4，本發明之控制單元4係電連接動力源24、二高度計3以及升降板71，且前述承載盤5之滑動方式、高度計3之量測點控制以及升降板71的位置皆由控制單元4來進行控制調整，有效掌握每一承載盤5之啟動時序。此外，請一併參閱圖6，係本發明第一實施例之氣簾桿之局部放大圖，當承載盤5完成變形量檢驗後，會經過一開設複數通氣孔61之氣簾桿6，該氣簾桿6固設於一支撐架31上並連通一壓縮氣體供應裝置(圖未示)。藉此，透過上述通氣孔61噴出壓縮氣體，用以除去承載盤5上之微塵，俾能讓操作者毋須再依靠人力使用氣槍清潔承載盤5。再者，當承載盤5完成清潔作業後，控制單元4會依據高度計3所量測之高度差(高度計所量測之高度扣除承載盤之原厚度)是否在一特定閾值內作為判斷基準，在本實施例中，所述特定閾值係為0.76公釐。若是，則該承載盤5通過檢驗，將被輸送至良品儲放區701；若否，則該承載盤5未通過檢驗，將被輸送至不良品儲放區702。Referring back to FIG. 2 to FIG. 4, the control unit 4 of the present invention electrically connects the power source 24, the two altimeters 3, and the lifting plate 71, and the sliding mode of the carrier tray 5, the measuring point control of the altimeter 3, and the lifting plate 71 The position of the control unit 4 is controlled and adjusted, and the start timing of each carrier 5 is effectively grasped. In addition, please refer to FIG. 6 , which is a partial enlarged view of the air curtain rod according to the first embodiment of the present invention. After the load plate 5 completes the deformation amount inspection, it passes through an air curtain rod 6 which opens a plurality of vent holes 61 , and the air curtain rod 6 is fixed on a support frame 31 and connected to a compressed gas supply device (not shown). Thereby, the compressed gas is ejected through the vent hole 61 to remove the dust on the carrier disk 5, so that the operator can no longer rely on the manpower to clean the carrier disk 5 by using an air gun. Furthermore, after the carrying tray 5 completes the cleaning operation, the control unit 4 determines whether the height difference measured by the altimeter 3 (the height measured by the altimeter minus the original thickness of the carrying tray) is within a certain threshold as a criterion for judging In this embodiment, the specific threshold is 0.76 mm. If so, the carrier 5 is inspected and transported to the good storage area 701; if not, the carrier 5 is not inspected and will be transported to the defective storage area 702.
藉由上述設計，透過自動化裝置檢驗承載盤是否已產生翹曲或變形的情況，大幅減少人力的耗費並提升工作效率，同時避免在各機台中誤用過度變形的承載盤，造成半導體元件翻覆、彈出或破損，有效減少機台出現問題的機率，保持原有產能。With the above design, it is verified by the automation device whether the carrier disk has been warped or deformed, the labor cost is greatly reduced and the work efficiency is improved, and the excessively deformed carrier disk is misused in each machine table, thereby causing the semiconductor component to be overturned and ejected. Or damage, effectively reduce the chance of problems on the machine, and maintain the original capacity.
請參閱圖7及圖8，係本發明第二實施例之承載盤檢驗裝置之側視圖及承載盤量測點之示意圖。如圖7所示，在本實施例中，承載盤檢驗裝置10包括有一滑軌單元2、一高度計30及一控制單元4。其中，滑軌單元2部分如前所述，用以建構出一可持續推送每一承載盤5之輸送結構。而在高度計30部分，係僅採用單一高度計，滑設於一支撐架31之一滑桿32上，在檢測前可對位微調其水平位置並鎖附固定後，才會進行後續之檢驗過程，以利精準量測承載盤5外輪廓之高度值。此外，本實施例之高度計30係採用陣列式光束R，使得橫移推桿23可在定速下推移承載盤5，讓陣列式光束R可連續地掃描承載盤5之外輪廓，並由整體外觀判斷其是否具有高度差。如圖8所示，在本實施例中，高度計30之陣列式光束R係由承載盤5之端緣處開始進行檢驗，涵蓋整體承載盤5之外輪廓，而量測精度則由橫移推桿23之推移速度來決定。其中，圖中箭號表示承載盤5在滑軌單元2之輸送方向。Please refer to FIG. 7 and FIG. 8 , which are schematic views of a side view of a carrier inspection device and a measurement point of a carrier according to a second embodiment of the present invention. As shown in FIG. 7, in the present embodiment, the carrier inspection device 10 includes a slide unit 2, an altimeter 30, and a control unit 4. The slide rail unit 2 is partially constructed as described above for constructing a transport structure for continuously pushing each of the carrier trays 5. In the 30 part of the altimeter, only a single altimeter is used, which is slidably disposed on one of the slide bars 32 of a support frame 31, and the horizontal position of the support frame 31 can be finely adjusted and locked and fixed before the detection, and then the subsequent inspection process is performed. In order to accurately measure the height value of the outer contour of the carrier disk 5. In addition, the altimeter 30 of the present embodiment adopts the array light beam R, so that the traverse push rod 23 can push the carrier disk 5 at a constant speed, so that the array light beam R can continuously scan the outer contour of the carrier disk 5, and the whole The appearance judges whether it has a height difference. As shown in FIG. 8, in the present embodiment, the array beam R of the altimeter 30 is inspected from the edge of the carrier 5, covering the outer contour of the overall carrier 5, and the measurement accuracy is pushed by the traverse. The speed of the rod 23 is determined. Here, the arrow in the figure indicates the conveying direction of the carrier 5 in the rail unit 2.
同樣地，本實施例之控制單元4會依據高度計30所量測之各點之高度差(高度計30所量測之高度扣除承載盤5之原厚度)是否每一點皆在一特定閾值內作為判斷基準，在本實施例中，所述特定閾值係為0.76公釐。若是，則該承載盤5通過檢驗，將被輸送至良品儲放區701；若否，則該承載盤5未通過檢驗，將被輸送至不良品儲放區702。Similarly, the control unit 4 of the present embodiment judges whether the height difference of each point measured by the altimeter 30 (the height measured by the altimeter 30 deducts the original thickness of the carrying tray 5) is determined within a certain threshold. Benchmark, in the present embodiment, the specific threshold is 0.76 mm. If so, the carrier 5 is inspected and transported to the good storage area 701; if not, the carrier 5 is not inspected and will be transported to the defective storage area 702.
上述實施例僅係為了方便說明而舉例而已，本發明所主張之權利範圍自應以申請專利範圍所述為準，而非僅限於上述實施例。The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.
1,10‧‧‧承載盤檢驗裝置
2‧‧‧滑軌單元
21‧‧‧軌道
22‧‧‧皮帶
23‧‧‧橫移推桿
24‧‧‧動力源
3,30‧‧‧高度計
31‧‧‧支撐架
32‧‧‧滑桿
4‧‧‧控制單元
5‧‧‧承載盤
6‧‧‧氣簾桿
61‧‧‧通氣孔
700‧‧‧進料區
701‧‧‧良品儲放區
702‧‧‧不良品儲放區
71‧‧‧升降板
72‧‧‧掛桿
721‧‧‧滿料檢知器
81‧‧‧工作桌
82‧‧‧人機介面
83‧‧‧緊急開關
84‧‧‧異常警示燈
91‧‧‧厚薄規
92‧‧‧通道式檢測器
920‧‧‧斜面
921‧‧‧通道
93‧‧‧承載盤檢驗裝置
930‧‧‧輸送帶
931‧‧‧夾具
932‧‧‧輸送馬達
933‧‧‧阻擋塊
934‧‧‧光耦
935‧‧‧雷射光柵發射源
936‧‧‧雷射光柵感知器
95‧‧‧承載盤
P‧‧‧單點式光束
R‧‧‧陣列式光束
1,10‧‧‧Loading plate inspection device
2‧‧‧slide unit
21‧‧‧ Track
22‧‧‧Land
23‧‧‧ traverse pusher
24‧‧‧Power source
3,30‧‧‧ altimeter
31‧‧‧Support frame
32‧‧‧Slider
4‧‧‧Control unit
5‧‧‧ Carrying tray
6‧‧‧Air curtain rod
61‧‧‧Ventinel
700‧‧‧Feeding area
701‧‧‧Good storage area
702‧‧‧Don't store
71‧‧‧ lifting plate
72‧‧‧hanging rod
721‧‧‧ Full material detector
81‧‧‧Working table
82‧‧‧Human Machine Interface
83‧‧‧Emergency switch
84‧‧‧Abnormal warning light
91‧‧‧thick gauge
92‧‧‧Channel detector
920‧‧‧Slope
921‧‧‧ channel
93‧‧‧Loading tray inspection device
930‧‧‧ conveyor belt
931‧‧‧ fixture
932‧‧‧Transport motor
933‧‧‧block block
934‧‧‧Photocoupler
935‧‧‧Laser grating emission source
936‧‧‧Laser Grating Sensor
95‧‧‧ Carrying tray
P‧‧‧Single point beam
R‧‧‧Array Beam
圖1係本發明第一實施例之承載盤檢驗裝置之立體圖。 圖2係本發明第一實施例之承載盤檢驗裝置之局部立體圖。 圖3係本發明第一實施例之承載盤檢驗裝置之側視圖。 圖4係本發明第一實施例之承載盤檢驗裝置之俯視圖。 圖5係本發明第一實施例之承載盤量測點之示意圖。 圖6係本發明第一實施例之氣簾桿之局部放大圖。 圖7係本發明第二實施例之承載盤檢驗裝置之側視圖。 圖8係本發明第二實施例之承載盤量測點之示意圖。 圖9係習知厚薄規之檢驗方式之示意圖。 圖10係習知通道式檢測器之檢驗方式之示意圖。 圖11係習知承載盤檢驗裝置之檢驗方式之示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a carrier inspection device according to a first embodiment of the present invention. Figure 2 is a partial perspective view of the carrier inspection device of the first embodiment of the present invention. Figure 3 is a side elevational view of the carrier inspection device of the first embodiment of the present invention. Figure 4 is a plan view of the carrier inspection device of the first embodiment of the present invention. Fig. 5 is a schematic view showing the measuring point of the carrying tray of the first embodiment of the present invention. Figure 6 is a partially enlarged view of the air curtain rod of the first embodiment of the present invention. Figure 7 is a side elevational view of a carrier inspection device in accordance with a second embodiment of the present invention. Fig. 8 is a schematic view showing the measuring point of the carrying tray of the second embodiment of the present invention. Fig. 9 is a schematic view showing the inspection method of a conventional thick gauge. Figure 10 is a schematic illustration of the inspection mode of a conventional channel type detector. Figure 11 is a schematic illustration of the manner of inspection of a conventional carrier tray inspection device.
1‧‧‧承載盤檢驗裝置 1‧‧‧Loading tray inspection device
2‧‧‧滑軌單元 2‧‧‧slide unit
21‧‧‧軌道 21‧‧‧ Track
22‧‧‧皮帶 22‧‧‧Land
23‧‧‧橫移推桿 23‧‧‧ traverse pusher
24‧‧‧動力源 24‧‧‧Power source
3‧‧‧高度計 3‧‧‧ altimeter
5‧‧‧承載盤 5‧‧‧ Carrying tray
6‧‧‧氣簾桿 6‧‧‧Air curtain rod
71‧‧‧升降板 71‧‧‧ lifting plate
72‧‧‧掛桿 72‧‧‧hanging rod
Claims (9)
Priority Applications (1)
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| TW105107058A TWI588443B (en) | 2016-03-08 | 2016-03-08 | Tray testing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105107058A TWI588443B (en) | 2016-03-08 | 2016-03-08 | Tray testing device |
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| Publication Number | Publication Date |
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| TWI588443B TWI588443B (en) | 2017-06-21 |
| TW201732220A true TW201732220A (en) | 2017-09-16 |
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| CN108091584B (en) * | 2017-12-06 | 2019-01-15 | 英特尔产品（成都）有限公司 | The method, apparatus and system stacked for checking semiconductor core flake products |
| TWI671133B (en) * | 2018-07-06 | 2019-09-11 | 鴻勁精密股份有限公司 | Support for electronic components and electronic component classification device using the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3442368A (en) * | 1967-01-26 | 1969-05-06 | Heifetz Metal Crafts Inc | Tray conveyors |
| US7353954B1 (en) * | 1998-07-08 | 2008-04-08 | Charles A. Lemaire | Tray flipper and method for parts inspection |
| KR100304254B1 (en) * | 1998-12-08 | 2002-03-21 | 윤종용 | Module Vision Inspection Equipment |
| US6453760B1 (en) * | 2000-07-03 | 2002-09-24 | Advanced Micro Device, Inc. | Automated detection of unacceptable warpage of trays for holding integrated circuit packages |
| CN201010338Y (en) * | 2007-02-13 | 2008-01-23 | 格兰达技术（深圳）有限公司 | Holding tray conveyer of IC full-automatic holding tray type detecting braider |
| CN102770359B (en) * | 2010-02-26 | 2014-11-05 | 康宁股份有限公司 | Conveyor tray apparatus with air bearing and air curtain and methods of use |
| CN102550174B (en) * | 2011-12-16 | 2013-09-04 | 北京京鹏环球科技股份有限公司 | Tray seeder with self-cleaning suction nozzles |
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