JPH04203618A - Groove machining method for dynamic pressure bearing made of ceramics - Google Patents
Groove machining method for dynamic pressure bearing made of ceramicsInfo
- Publication number
- JPH04203618A JPH04203618A JP2337845A JP33784590A JPH04203618A JP H04203618 A JPH04203618 A JP H04203618A JP 2337845 A JP2337845 A JP 2337845A JP 33784590 A JP33784590 A JP 33784590A JP H04203618 A JPH04203618 A JP H04203618A
- Authority
- JP
- Japan
- Prior art keywords
- organic material
- laser beam
- groove
- bearing base
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 31
- 238000003754 machining Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 title claims description 20
- 239000011368 organic material Substances 0.000 claims abstract description 33
- 238000012545 processing Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000004506 ultrasonic cleaning Methods 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000003973 paint Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 238000004814 ceramic processing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- -1 neodymium yttrium aluminum Chemical compound 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C17/00—Sliding-contact bearings for exclusively rotary movement
- F16C17/04—Sliding-contact bearings for exclusively rotary movement for axial load only
- F16C17/045—Sliding-contact bearings for exclusively rotary movement for axial load only with grooves in the bearing surface to generate hydrodynamic pressure, e.g. spiral groove thrust bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Sliding-Contact Bearings (AREA)
- Laser Beam Processing (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はセラミックス製動圧軸受の溝加工方法に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for machining grooves in ceramic hydrodynamic bearings.
セラミックス製動圧軸受の加工方法の一つとして、Ｑス
イッチ付きＮｄ：ＹＡＧ（ネオジウムイツトリウム ア
ルミニウム ガーネット）レーザ（以下、単に’ ＹＡ
ＧＱスイッチパルスレーザ、と記す）装置を用いる方法
がある。One of the processing methods for ceramic hydrodynamic bearings is the use of a Q-switched Nd:YAG (neodymium yttrium aluminum garnet) laser (hereinafter simply 'YA').
There is a method using a device (referred to as a GQ switch pulse laser).
ＹＡＧＱスイッチパルスレーザは、ピーク出力が大きく
とれるため、セラミック加工性に優れたレーザ装置であ
る。また、装置の安定性、信頼る。The YAGQ switch pulse laser is a laser device with excellent ceramic processing properties because it can provide a large peak output. Also, the stability of the device is reliable.
性、価格面等から多くの利点を有するものであし〔発明
が解決しようとする課題〕
上記のようにＹＡＧＱスイッチパルスレーザは、セラミ
ック加工に優れているにもかかわらず、実際は下記のよ
うな欠点があり、セラミックス製動圧軸受の溝加工には
利用きれなかった。[Problems to be solved by the invention] Although the YAGQ switched pulse laser is excellent in ceramic processing as described above, it actually has the following drawbacks. Therefore, it could not be used for groove machining of ceramic hydrodynamic bearings.
（１）レーザ照射時間が経過するに従って当該加工対象
物に熱が蓄積し、これによりクラックの発生等による製
品の重大な欠陥を与える。(1) As the laser irradiation time elapses, heat accumulates in the workpiece, which causes serious defects in the product due to cracks and the like.
〈２〉溝外側面角部の堆積部の生成及び断面形状の非対
称性による性能への影響等の問題がある外、更にレーザ
装置及びレーザ光の特性から下記の問題がある。<2> In addition to problems such as the formation of a deposited portion at the corner of the outer side surface of the groove and the influence on performance due to the asymmetry of the cross-sectional shape, there are also the following problems due to the characteristics of the laser device and laser light.
（３）精度良く均一に加工するためには、加工対象面で
のレーザ光の吸収率が一定で、且つ当該部での吸収率が
高く、レーザ光を効率よく吸収することが望まれるか、
これらの条件は被加工物であるセラミック材料の下記の
要因により左右される。(3) In order to process accurately and uniformly, it is desirable that the absorption rate of the laser beam on the surface to be processed is constant, and that the absorption rate of the part concerned is high and absorbs the laser beam efficiently.
These conditions are influenced by the following factors of the ceramic material to be processed.
（８）材質及び成分等による物性
（ｂ）材料の色
（ｃ）表面粗き
（ｄ）洗浄状態
（ｅ）上記（ａ）〜（ｄ）の均一性
（ｆ）大量生産においては、各個体試料の均一性も要求
される。(8) Physical properties due to material and components, etc. (b) Color of material, (c) Surface roughness, (d) Cleaning condition, (e) Uniformity of the above (a) to (d), (f) In mass production, each individual Sample uniformity is also required.
（４）セラミックス基体に溝の形状及びパターンを正確
に描いて加工するためには、レーザ光照射位置の正確き
が要求されるが、これは下記の要因により左右される。(4) In order to accurately draw and process the shape and pattern of grooves on a ceramic substrate, precision in the laser beam irradiation position is required, and this is influenced by the following factors.
（４−１）レーザ発振器のボインティングスタビリテイ
−（レーザスポットが当った位置の安定性）の問題で、
実際には限界がある。その原因とＣで、
（ａ）冷却水の温度の変動
（ｂ）投入電力の変動及び励起ランプ光の変動（ｃ）レ
ーザ発振器の据付部の振動
（ｄ）伝送部及びその雰囲気
等がある。(4-1) Due to the problem of pointing stability of the laser oscillator (stability of the position where the laser spot hits),
In reality, there are limits. The causes include (a) fluctuations in the temperature of the cooling water, (b) fluctuations in the input power and excitation lamp light, (c) vibrations in the installation part of the laser oscillator, and (d) the transmission part and its atmosphere.
（４−２）走査又は加工テーブルの問題がある。(4-2) There is a problem with scanning or processing tables.
（ａ）位置決め精度 （ｂ）移動速度の制御及び等速性 （ｃ）複雑な形状への対応 等である。(a) Positioning accuracy (b) Movement speed control and uniformity (c) Dealing with complex shapes etc.
本発明は上述の点に鑑みてなきれたもので、上記（３）
、 （４）の問題の解決ができるセラミックス製動圧
軸受の溝加工方法を提供することを目的とする。The present invention has been developed in view of the above-mentioned points, and includes the above (3).
An object of the present invention is to provide a groove machining method for a ceramic hydrodynamic bearing that can solve the problem (4).
上記課題を解決するため本発明は、焼結後のセラミック
ス製軸受基体の摺動面となる部分に表面仕上げを施し、
該摺動面にＹＡＧレーザ光を選択的に且つ効率よく吸収
する有機材料を所望の加工溝の形状パターンに均一に付
着し、該有機材料を付着してなる加工溝の形状パターン
にＹＡＧＱスイッチパルスレーザ光を照射することによ
り、該形状パターン通りの溝を形成し、しかる後加工時
の生成物の除去と同時に前記付着した有機材料の残留部
分を除去することを特徴とする。In order to solve the above problems, the present invention provides a surface finish to the sliding surface of the ceramic bearing base after sintering,
An organic material that selectively and efficiently absorbs YAG laser light is uniformly adhered to the sliding surface in a desired pattern of the processed groove, and a YAGQ switch pulse is applied to the pattern of the processed groove formed by adhering the organic material. The method is characterized in that grooves are formed in accordance with the shape pattern by irradiation with laser light, and the residual portion of the attached organic material is removed simultaneously with the removal of products during post-processing.
本発明はセラミックス製軸受基体の摺動面にＹＡＧレー
ザ光を選択的に且つ効率よく吸収する有機材料を所望の
加工溝の形状パターンに均一に付着し、該有機材料を付
着してなる加工溝の形状パターンにＹＡＧＱスイッチパ
ルスレーザ光を照射するので、軸受基体にＹＡＧレーザ
光の吸収率の低いセラミック材料を用いた場合や加工面
が鏡面仕上げにより反射率が高い場合及び透過率が高い
場合でも、有機材料が極めて効率良くレーザ光を吸収し
、スムーズに溝加工ができる。In the present invention, an organic material that selectively and efficiently absorbs YAG laser light is uniformly adhered to the sliding surface of a ceramic bearing base in a desired shape pattern of a processed groove, and the processed groove is formed by adhering the organic material. Since YAGQ switch pulse laser light is irradiated on the shape pattern of The organic material absorbs laser light extremely efficiently, allowing smooth groove processing.
また、レーザ光が被加工予定部分から多少ずれて照射き
れても有機材料が選択的にレーザ光を吸収するので、溝
形状に影響を与えることなく、その結果位置決め精度を
軽減できる。Furthermore, even if the laser beam is irradiated with a slight deviation from the part to be processed, the organic material selectively absorbs the laser beam, so the groove shape is not affected, and as a result, positioning accuracy can be reduced.
また、レーザ照射後に残留した有機材料を除去する際、
洗浄工程を兼ねるので工程を減らすことができる。In addition, when removing organic materials remaining after laser irradiation,
Since it also serves as a cleaning process, the number of steps can be reduced.
以下、本発明の実施例を図面に基ついて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１１Ｋ（ａ）、（ｂ）はセラミックス製動圧軸受の溝
加工方法を説明するための図である。焼結後のセラミッ
クス製軸受基体１の摺動面となる部分に表面仕上げを施
し、該摺動面に同図（ａ）の斜線を付した部分２ａのよ
うに、ＹＡＧレーザ光を効率よく吸収する黒色の有機材
料を同図（ｂ）に示す加工溝２の形状パターンに均一に
付着する。この有機材料を付着したセラミックス製軸受
基体１をＹＡＧレーザ加工装置に取り付け、有機材料を
付着した部分２ａにＹＡＧＱスイッチパルスレーザ光を
照射する。レーザ光の走査はＸＹ子テーブル用い、溝２
の形状、即ち有機材料を付着した部分２ａに沿ってＹＡ
ＧＱスイッチパルスレーザ光が照射されるように、テー
ブルを移動し、レーザ光を照射する。このようにレーザ
光の照射を繰り返すことにより、セラミックス製軸受基
体１の前記有機材料の付着部分２ａが除去され溝２が形
成きれる。本実施例では、セラミ７り材として、Ａｌ２
Ｏ３を用いＹＡＧＱスイッチパルスレーザ光の繰り返し
数を０．３２ｋＨｚとし、ＸＹ子テーブル移動速度を５
ｍｎ／ｓｅｃとして、セラミックス竪軸受基体１０表面
に溝深さ１０μｍ程度の動圧発生用の溝２を形成した。11K (a) and (b) are diagrams for explaining a groove machining method for a ceramic hydrodynamic bearing. After sintering, the sliding surface of the ceramic bearing base 1 is surface-finished to efficiently absorb YAG laser light, as shown in the shaded area 2a in FIG. A black organic material is uniformly adhered to the shape pattern of the processed groove 2 shown in FIG. 2(b). The ceramic bearing base 1 to which the organic material is adhered is attached to a YAG laser processing device, and the portion 2a to which the organic material is adhered is irradiated with YAGQ switch pulse laser light. Laser beam scanning uses an XY child table, groove 2
shape, that is, YA along the part 2a to which the organic material is attached.
The table is moved so that the GQ switch pulse laser beam is irradiated, and the laser beam is irradiated. By repeating the laser beam irradiation in this manner, the portion 2a of the ceramic bearing base 1 to which the organic material is attached is removed and the groove 2 is completely formed. In this example, Al2 is used as the ceramic material.
Using O3, the repetition rate of the YAGQ switch pulse laser beam was set to 0.32kHz, and the XY child table movement speed was set to 5.
mn/sec, grooves 2 for generating dynamic pressure with a groove depth of about 10 μm were formed on the surface of the ceramic vertical bearing base 10.
次に、溝加工が施されたセラミックス製軸受基体１を１
．１−トリクロロエタン中に入れ、超音波洗浄を行ない
、セラミックス製軸受基体１の被加工部分に残留した有
機塗料を溶解すると共に、レーザ照射により、生成した
酸化物を除去及び洗浄し、第１図（ｂ）に示すようにセ
ラミックス製軸受基体１に溝２が形成きれる。Next, the grooved ceramic bearing base 1 is
．． The ceramic bearing base 1 is placed in 1-trichloroethane and subjected to ultrasonic cleaning to dissolve the organic paint remaining on the processed portion of the ceramic bearing base 1, and the generated oxide is removed and cleaned by laser irradiation. As shown in b), grooves 2 are completely formed in the ceramic bearing base 1.
」−記のようにセラミックス製軸受基体１の表面に動圧
発生用溝２の形状のレーザ光を効率良く吸収できる有機
材料を付着さ＋ｉることにより、ＹＡＧＱスイッチパル
スレーザ光を照射した場合、有機材料部分にはし・−ザ
光が効率良く吸収されるのに対して、セラミック表面が
露出している部分はレーザ光が反射及び透過きれるため
レーザ光の吸収が悪くなる。従って、レーザ光がイ１′
機材料を多少はみ出て照射きれても、有機材料の形状通
りに溝加工ができ、有機材料の溝形状を精度よく形成す
ることにより、高精度の動圧発生用の溝２を形成できる
。上記において部分２ａに付着する有機材料は、ＹＡＧ
レーザ光を選択的且つ効率良く吸収できる材料であれは
とのようなものでもよく、例えは、黒色顔料を添加した
アクリル樹脂塗料、顔料を添加したビニル樹脂塗料、顔
料を添加したアルキド樹脂塗料なとべ〉′キのようなも
のが適している。また、液状或いはシーｌ−状のいずれ
でもよい。また、有機材料の付着の方法は、描写、貼付
等があるが、いずれの方法を採用するかは、材料の性状
により変化させればよい。” - When an organic material capable of efficiently absorbing laser light in the shape of dynamic pressure generating grooves 2 is adhered to the surface of a ceramic bearing base 1 as shown in the figure above, YAGQ switch pulse laser light is irradiated. While the organic material portion efficiently absorbs the laser beam, the exposed portion of the ceramic surface reflects and transmits the laser beam, resulting in poor absorption of the laser beam. Therefore, the laser beam is
Even if the irradiation is completed with some part of the organic material protruding, the groove can be processed according to the shape of the organic material, and by forming the groove shape of the organic material with high precision, the groove 2 for generating dynamic pressure can be formed with high precision. In the above, the organic material attached to the portion 2a is YAG
Any material that can selectively and efficiently absorb laser light may be used, for example, acrylic resin paint with added black pigment, vinyl resin paint with added pigment, alkyd resin paint with added pigment. Something like Tobe〉′ki is suitable. Further, it may be in either liquid form or seal form. Further, methods for attaching the organic material include drawing, pasting, etc., and which method to adopt may be changed depending on the properties of the material.
なお、上記実施例にいては、ＹＡＧレーザ光の走査にＸ
Ｙ子テーブル移動させる方法を用いたが、これに替えて
ガルバノ鏡によりレーザビームを伝送、走査するガルハ
メータ型オプティカルスキャナ方式、又はレーザビーム
を導く光ファイ・・先端を走査する光フアイバ方式のい
ずれでもよい。また、本発明の溝加工方法はセラミック
ス製動圧軸受の溝加ニ一般に適用でき、セラミックス製
軸受基体及び溝形状を問わず適用できる。Note that in the above embodiment, X is used for scanning the YAG laser beam.
We used a method of moving the Y-column table, but instead of this, we can use either a galvanometer type optical scanner method that transmits and scans the laser beam using a galvano mirror, or an optical fiber method that scans the tip of the optical fiber that guides the laser beam. good. Furthermore, the grooving method of the present invention is generally applicable to grooving of ceramic hydrodynamic bearings, and can be applied regardless of the ceramic bearing base and groove shape.
また、上記のような加工方法においては、−度加工条件
を設定すれば、同一寸法で精度の高いセラミックス製動
圧軸受の溝加工かでき、更に、加工工程の自動化を簡単
に行なうことができ、加工費等各種費用を大幅に低減で
きる。In addition, in the above-mentioned processing method, by setting the -degree processing conditions, it is possible to machine grooves in ceramic hydrodynamic bearings with the same dimensions and high precision, and furthermore, the processing process can be easily automated. , various costs such as processing costs can be significantly reduced.
以上説明したように本発明は、セラミックス製軸受基体
の摺動面にＹＡＧレーザ光を選択的に且つ効率よく吸収
する有機材料を所望の加工溝の形状パターンに均一に付
着さゼ、この付着部分にＹＡＧＱスイッチパルスレーザ
光を照射するので以下のような優れた効果が得られる。As explained above, the present invention involves uniformly attaching an organic material that selectively and efficiently absorbs YAG laser light to the sliding surface of a ceramic bearing base in a desired groove shape pattern, and applying the organic material to the sliding surface of a ceramic bearing base. Since the YAGQ switch pulse laser beam is irradiated to the YAGQ switch pulse laser beam, the following excellent effects can be obtained.
（１）軸受基体にＹＡＧレーザ光の吸収率の低いセラミ
ックス材料を用いた場合や加工面が鏡面仕上げにより反
射率が高い場合及び透過率か高い場合でも、有機材料が
極めて効率良くシ・−ザ光を吸収するのでスムーズに溝
加工かできる。即ち、あらゆるセラミックス材料並びに
その加工面状態に左右されることなく、溝加工か行なえ
る。(1) Even when a ceramic material with low absorption rate of YAG laser light is used for the bearing base, or when the machined surface has a mirror finish with high reflectance or high transmittance, organic materials can be used for extremely efficient shearing. Since it absorbs light, it allows smooth groove processing. That is, groove machining can be performed without being affected by any ceramic material or the condition of its machined surface.
（２）レーザ光が被加工予定部分から多少すれて照射さ
れても有機材料が選択的にレーザ光を吸収するので、溝
形状に影響を与えることなく、その結果位置決め精度を
軽減できる。(2) Since the organic material selectively absorbs the laser light even if the laser light is irradiated with some deviation from the part to be processed, the groove shape is not affected, and as a result, positioning accuracy can be reduced.
（３）レーザ照射後に残留した有機材料を除去する際、
洗浄工程を兼ねるので工程を減らすことができる。(3) When removing organic materials remaining after laser irradiation,
Since it also serves as a cleaning process, the number of steps can be reduced.
り４）使用実績が多く安定したＹＡＧＱスイッチパルス
レーザ光を使用するので、安定で信頼の高い加工ができ
る。4) Since the YAGQ switch pulsed laser beam, which has been used extensively and is stable, is used, stable and highly reliable processing is possible.
第１図（ａ）、（ｂ）はセラミックス製動圧軸受の溝加
工方法を説明するための図である。
図中、１ ・・セラミックス製軸受基体、２・・溝。
特許出願人 株式会社荏原製作所
代理人 弁理士 熊 谷 隆（外１名）（ｄ）
（ｂ）
第１図FIGS. 1(a) and 1(b) are diagrams for explaining a groove machining method for a ceramic hydrodynamic bearing. In the figure, 1: Ceramic bearing base, 2: Groove. Patent applicant Ebara Corporation Representative Patent attorney Takashi Kumagai (1 other person) (d) (b) Figure 1
Claims (2)
部分に表面仕上げを施し、該摺動面にＹＡＧレーザ光を
選択的に且つ効率よく吸収する有機材料を所望の加工溝
の形状パターンに均一に付着し、該有機材料を付着して
なる加工溝の形状パターンにＹＡＧＱスイッチパルスレ
ーザ光を照射することにより、該形状パターン通りの溝
を形成し、しかる後加工時の生成物の除去と同時に前記
付着した有機材料の残留部分を除去することを特徴とす
るセラミックス製動圧軸受の溝加工方法。(1) Surface finishing is applied to the sliding surface of the sintered ceramic bearing base, and an organic material that selectively and efficiently absorbs YAG laser light is applied to the sliding surface to form the desired groove shape. By irradiating YAGQ switch pulse laser light onto the shape pattern of the processed groove formed by adhering the organic material uniformly to the pattern, a groove according to the shape pattern is formed, and after that, the product during processing is A method for machining grooves in a ceramic hydrodynamic bearing, characterized in that the residual portion of the attached organic material is removed at the same time as the removal.
いずれかにより付着することを特徴とする請求項（１）
記載のセラミックス製動圧軸受の溝加工方法。(2) Claim (1) characterized in that the organic material is attached by any one of drawing, transfer, or pasting.
Grooving method for ceramic hydrodynamic bearings described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2337845A JPH0674808B2 (en) | 1990-11-30 | 1990-11-30 | Grooving method for ceramic dynamic bearings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2337845A JPH0674808B2 (en) | 1990-11-30 | 1990-11-30 | Grooving method for ceramic dynamic bearings |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04203618A true JPH04203618A (en) | 1992-07-24 |
| JPH0674808B2 JPH0674808B2 (en) | 1994-09-21 |
Family
ID=18312516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2337845A Expired - Lifetime JPH0674808B2 (en) | 1990-11-30 | 1990-11-30 | Grooving method for ceramic dynamic bearings |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0674808B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5965043A (en) * | 1996-11-08 | 1999-10-12 | W. L. Gore & Associates, Inc. | Method for using ultrasonic treatment in combination with UV-lasers to enable plating of high aspect ratio micro-vias |
| JP2013510610A (en) * | 2009-11-12 | 2013-03-28 | デンタウルム ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディト ゲゼルシャフト | Method of manufacturing an orthodontic element |
| JP2014516000A (en) * | 2011-06-01 | 2014-07-07 | サントル ドゥ ルシェルシュ ドゥ ランデュストリー ベルジュ ドゥ ラ セラミック | Ceramic particle mixture and method for producing ceramic parts from the mixture |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20170298990A1 (en) * | 2016-04-18 | 2017-10-19 | Caterpillar Inc. | Self-lubricating roller bearing and methods of making and using self-lubricating roller bearing |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735682A (en) * | 1980-08-08 | 1982-02-26 | Nippon Seiko Kk | Formation of groove for generating dynamic pressure |
| JPS621886A (en) * | 1985-06-25 | 1987-01-07 | Matsushita Electric Ind Co Ltd | Fluid bearing shaft |
| JPS63238992A (en) * | 1987-03-27 | 1988-10-05 | Nippon Seiko Kk | Method for forming grooves for generating dynamic pressure |
| JPH01247566A (en) * | 1988-03-29 | 1989-10-03 | Mitsubishi Electric Corp | Production of fluid bearing |
-
1990
- 1990-11-30 JP JP2337845A patent/JPH0674808B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5735682A (en) * | 1980-08-08 | 1982-02-26 | Nippon Seiko Kk | Formation of groove for generating dynamic pressure |
| JPS621886A (en) * | 1985-06-25 | 1987-01-07 | Matsushita Electric Ind Co Ltd | Fluid bearing shaft |
| JPS63238992A (en) * | 1987-03-27 | 1988-10-05 | Nippon Seiko Kk | Method for forming grooves for generating dynamic pressure |
| JPH01247566A (en) * | 1988-03-29 | 1989-10-03 | Mitsubishi Electric Corp | Production of fluid bearing |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5965043A (en) * | 1996-11-08 | 1999-10-12 | W. L. Gore & Associates, Inc. | Method for using ultrasonic treatment in combination with UV-lasers to enable plating of high aspect ratio micro-vias |
| JP2013510610A (en) * | 2009-11-12 | 2013-03-28 | デンタウルム ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディト ゲゼルシャフト | Method of manufacturing an orthodontic element |
| JP2014516000A (en) * | 2011-06-01 | 2014-07-07 | サントル ドゥ ルシェルシュ ドゥ ランデュストリー ベルジュ ドゥ ラ セラミック | Ceramic particle mixture and method for producing ceramic parts from the mixture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0674808B2 (en) | 1994-09-21 |
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