JPH0420261B2 - - Google Patents
Info
- Publication number
- JPH0420261B2 JPH0420261B2 JP57167138A JP16713882A JPH0420261B2 JP H0420261 B2 JPH0420261 B2 JP H0420261B2 JP 57167138 A JP57167138 A JP 57167138A JP 16713882 A JP16713882 A JP 16713882A JP H0420261 B2 JPH0420261 B2 JP H0420261B2
- Authority
- JP
- Japan
- Prior art keywords
- isolation region
- film
- semiconductor layer
- etching
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/763—Polycrystalline semiconductor regions
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57167138A JPS5956741A (ja) | 1982-09-24 | 1982-09-24 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57167138A JPS5956741A (ja) | 1982-09-24 | 1982-09-24 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5956741A JPS5956741A (ja) | 1984-04-02 |
| JPH0420261B2 true JPH0420261B2 (enrdf_load_stackoverflow) | 1992-04-02 |
Family
ID=15844126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57167138A Granted JPS5956741A (ja) | 1982-09-24 | 1982-09-24 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5956741A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2914117B2 (ja) * | 1993-08-28 | 1999-06-28 | 日本電気株式会社 | 半導体装置の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57204144A (en) * | 1981-06-10 | 1982-12-14 | Hitachi Ltd | Insulating and isolating method for semiconductor integrated circuit |
-
1982
- 1982-09-24 JP JP57167138A patent/JPS5956741A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5956741A (ja) | 1984-04-02 |