JPH0420227U - - Google Patents

Info

Publication number
JPH0420227U
JPH0420227U JP6142290U JP6142290U JPH0420227U JP H0420227 U JPH0420227 U JP H0420227U JP 6142290 U JP6142290 U JP 6142290U JP 6142290 U JP6142290 U JP 6142290U JP H0420227 U JPH0420227 U JP H0420227U
Authority
JP
Japan
Prior art keywords
wafer
wafer chuck
motor
developing device
pressure nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6142290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6142290U priority Critical patent/JPH0420227U/ja
Publication of JPH0420227U publication Critical patent/JPH0420227U/ja
Pending legal-status Critical Current

Links

JP6142290U 1990-06-11 1990-06-11 Pending JPH0420227U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6142290U JPH0420227U (enrdf_load_html_response) 1990-06-11 1990-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6142290U JPH0420227U (enrdf_load_html_response) 1990-06-11 1990-06-11

Publications (1)

Publication Number Publication Date
JPH0420227U true JPH0420227U (enrdf_load_html_response) 1992-02-20

Family

ID=31589661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6142290U Pending JPH0420227U (enrdf_load_html_response) 1990-06-11 1990-06-11

Country Status (1)

Country Link
JP (1) JPH0420227U (enrdf_load_html_response)

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