JPH04201003A - Cutting tool made of surface-coated ceramic - Google Patents
Cutting tool made of surface-coated ceramicInfo
- Publication number
- JPH04201003A JPH04201003A JP32825490A JP32825490A JPH04201003A JP H04201003 A JPH04201003 A JP H04201003A JP 32825490 A JP32825490 A JP 32825490A JP 32825490 A JP32825490 A JP 32825490A JP H04201003 A JPH04201003 A JP H04201003A
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- cutting
- vapor deposition
- physical vapor
- coated layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 22
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 17
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 17
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 7
- 239000011247 coating layer Substances 0.000 claims description 40
- 239000010410 layer Substances 0.000 claims description 29
- 238000005240 physical vapour deposition Methods 0.000 claims description 24
- 239000010936 titanium Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 239000011224 oxide ceramic Substances 0.000 claims 2
- 229910052574 oxide ceramic Inorganic materials 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 15
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052593 corundum Inorganic materials 0.000 abstract description 4
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract description 4
- 238000005289 physical deposition Methods 0.000 abstract 5
- 229910001018 Cast iron Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、酸化アルミニウム（以下Ａｌ２Ｏ３で示す
）系セラミックスまたは窒化けい素（以下、Ｓ ＋ ３
Ｎ ４で示す）系セラミックスからなる基体の表面に、
物理蒸着法にて形成された耐摩耗性のすぐれたＴ１とＡ
ｌの複合窒化物〔以下、（Ｔｉ、Ａｌ）Ｎで示す〕被覆
層の前記基体表面に対する密着性を向上させた表面被覆
セラミックス製切削工具に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to aluminum oxide (hereinafter referred to as Al2O3) based ceramics or silicon nitride (hereinafter referred to as S + 3
On the surface of a base made of ceramics (denoted as N4),
T1 and A with excellent wear resistance formed by physical vapor deposition
The present invention relates to a surface-coated ceramic cutting tool in which the adhesion of a coating layer of a composite nitride (hereinafter referred to as (Ti, Al)N) to the substrate surface is improved.
従来、例えば特開昭６２−５６５６５号公報に記載され
る通り、ＷＣＣ超超硬合金高速度工具鋼などで構成され
た基体の表面に、物理蒸着法を用いて、耐摩耗性のすぐ
れたＴｉとＡｌの複合窒化物〔以下、（Ｔｉ、Ａｌ）Ｎ
て示す〕からなる硬質被覆層を形成してなる表面被覆切
削工具が提案されている。Conventionally, as described in JP-A No. 62-56565, for example, Ti, which has excellent wear resistance, has been deposited on the surface of a base made of WCC cemented carbide high speed tool steel using a physical vapor deposition method. and Al composite nitride [hereinafter referred to as (Ti, Al)N
A surface-coated cutting tool has been proposed in which a hard coating layer is formed.
一方、近年の切削機械の高性能化はめざましく、これに
伴ない、より速い速度での切削や、より一段の高切込み
あるいは高送りなどの重切削が行なわれる状況にあるか
、このような苛酷な切削条件下では、上記の従来表面被
覆切削工具においては、（Ｔｉ、Ａｊｌ’）Ｎ被覆層の
基体表面に対する密着性が十分でないために、これに満
足に対応することができないのが現状である。On the other hand, the performance of cutting machines has improved dramatically in recent years, and as a result, heavy cutting such as faster cutting speeds, higher depths of cut, and higher feed rates are being carried out, and such harsh cutting conditions are becoming more difficult. Under such cutting conditions, the above-mentioned conventional surface-coated cutting tools cannot satisfactorily cope with these conditions because the adhesion of the (Ti,Ajl')N coating layer to the substrate surface is insufficient. be.
そこで、本発明者等は、上述のような観点から、上記の
従来表面被覆切削工具に着目し、（Ｔ１゜Ａｌ）Ｎ被覆
層の基体表面に対する密着性を向上せしめるべく研究を
行なった結果、基体をＡｌ２Ｏ３系セラミックスおよび
Ｓ】３Ｎ４系セラミツクスに特定した上で、この基体の
表面に、物理蒸着法にて形成した窒化チタン（以下Ｔｉ
Ｎて示す）被覆層を介して、上記の耐摩耗性のすくれた
（Ｔｉ、Ａｌ）Ｎ被覆層を形成すると、前記ＴｉＮ被覆
層の前記基体および（Ｔｉ、Ａｌ）Ｎ被覆層に対する密
着性が著しく高いものであることから、苛酷な条件での
切削に供しても（Ｔｉ、Ａｌ）Ｎ被覆層に剥離の発生が
なく、かつ切刃に欠損の発生もなく、すぐれた切削性能
を長期に亘って発揮するようになり、さらにこの上に同
じく物理蒸着法を用いてＴｉＮを被覆すると、耐欠損性
が一段と向上するようになるという研究結果を得たので
ある。Therefore, from the above-mentioned viewpoint, the present inventors focused on the above-mentioned conventional surface-coated cutting tools and conducted research to improve the adhesion of the (T1゜Al)N coating layer to the substrate surface. After specifying the substrate to be Al2O3 ceramics and S]3N4 ceramics, titanium nitride (hereinafter referred to as Ti) was formed on the surface of this substrate by physical vapor deposition.
When the wear-resistant (Ti, Al)N coating layer is formed through the coating layer (indicated by N), the adhesion of the TiN coating layer to the substrate and the (Ti, Al)N coating layer increases. Even when subjected to cutting under severe conditions, the (Ti, Al)N coating layer does not peel off, and the cutting edge does not suffer from damage, ensuring excellent cutting performance over a long period of time. The research results showed that if TiN was coated on top of this using the same physical vapor deposition method, the chipping resistance would be further improved.
この発明は、上記の研究結果にもとづいてなされたもの
であって、
Ａ Ｉ ２０３系セラミツクスまたはＳｉ３Ｎ４系セラ
ミックスからなる基体の表面に、
平均層厚で０１〜１μｍのＴｉＮからなる密着性物理蒸
着被覆層を介して、
平均層厚で０．５〜５μｍの（Ｔｉ、ＡＡ’ ）Ｎから
なる耐摩耗性物理蒸着被覆層を形成し、
さらに、必要に応じて、その上に同じく平均層厚で０１
〜３μｍのＴｉＮからなる耐欠損性物理蒸削工具に特徴
を有するものである。This invention was made based on the above research results, and includes an adhesive physical vapor deposition coating of TiN having an average layer thickness of 01 to 1 μm on the surface of a substrate made of AI 203 ceramics or Si3N4 ceramics. A wear-resistant physical vapor deposition coating layer of (Ti, AA')N with an average layer thickness of 0.5 to 5 μm is formed through the layer, and if necessary, a wear-resistant physical vapor deposition coating layer with the same average layer thickness is formed on top of the layer, if necessary. 01
It is characterized by a fracture-resistant physical steaming tool made of TiN with a thickness of ~3 μm.
つぎに、この発明の切削工具において、これを構成する
被覆層の平均層厚を上記の通りに限定した理由を説明す
る。Next, in the cutting tool of the present invention, the reason why the average layer thickness of the coating layer constituting the cutting tool is limited as described above will be explained.
ｆａ） 密着性物理蒸着被覆層
このＴｉＮ被覆層には、上記の通り基体および（Ｔｉ、
ＡＡ’）Ｎ被覆層に対して強固に接合し、苛酷な切削条
件下でも（Ｔｉ、ＡＡ’）Ｎ被覆層の剥離を防止する作
用があるが、その平均層厚か０．１μｍ未満ては前記作
用に所望の効果か得られず、一方その平均層厚か１μｍ
を越えても前記作用により一層の向上効果が得られない
ことから、経済性も考慮して、その平均層厚を０１〜１
μｍと定めた。fa) Adhesive Physical Vapor Deposition Coating Layer This TiN coating layer includes a substrate and (Ti,
It has the effect of strongly bonding to the AA')N coating layer and preventing the peeling of the (Ti, AA')N coating layer even under severe cutting conditions, but if the average layer thickness is less than 0.1 μm. The desired effect was not obtained in the above action, and on the other hand, the average layer thickness was 1 μm.
Even if the average layer thickness exceeds 0.01 to 0.01, no further improvement effect can be obtained due to the above action.
It was determined as μm.
（ｂ） 耐摩耗性物理蒸着被覆層
この（Ｔｉ、Ａｌ）Ｎ被覆層は、きわめて硬質であり、
これの形成によって耐摩耗性が著しく向上するようにな
るか、その平均層厚が０５μｍ未満では所望のすぐれた
耐摩耗性を確保することができす、一方その平均層厚か
５μｍを越えると、チッピング（微小欠け）か発生し易
くなることから、その平均層厚を０５〜５μｍと定めた
。(b) Abrasion-resistant physical vapor deposition coating layer This (Ti, Al)N coating layer is extremely hard;
If the average layer thickness is less than 0.5 μm, the desired excellent wear resistance can be achieved, but if the average layer thickness exceeds 5 μm, the wear resistance can be significantly improved. Since chipping (microscopic chipping) is likely to occur, the average layer thickness was set at 0.5 to 5 μm.
なお、（Ｔｉ、Ａｌ）Ｎを組成式： （Ｔｉ工ｉ、−
Ｘ） Ｎて現わした場合、Ｘの値を０２５〜０．９５と
するのかよく、これは、Ｘの値がｌ）、２５未満になる
と被覆層に急激な硬さ低下か起り、十分な耐摩耗性を得
ることができなくなり、一方Ｘの値が０９５を越えると
高温耐酸化性が低下し、特に切刃の逃げ面摩耗が進行す
るようになるという理由によるものである。In addition, (Ti, Al)N has the composition formula: (Ti, Al)N, -
When expressed as X)N, the value of This is because it becomes impossible to obtain wear resistance, and on the other hand, if the value of
ｆｃ） 耐欠損性物理蒸着被覆層
最外層に形成されるＴｉＮ被覆層には切刃の耐欠損性を
改善する作用があるので必要に応して形成されるか、そ
の平均層厚か０１μｍ未満では所望の耐欠損性向上効果
は得られず、一方その平均層厚か３μ口を越えても耐欠
損性により一層の向上効果が現われないことから、その
平均層厚を０１〜３μｍと定めた。fc) Fracture-resistant physical vapor deposition coating layer The TiN coating layer formed as the outermost layer has the effect of improving the fracture resistance of the cutting edge, so it may be formed as necessary, or its average layer thickness may be less than 0.1 μm. However, even if the average layer thickness exceeds 3 μm, further improvement in chip resistance does not appear, so the average layer thickness was set at 0.1 to 3 μm. .
工具を実施例により具体的に説明する。The tool will be specifically explained using examples.
いずれも通常の粉末冶金法で製造され、かつそれぞれ第
１表に示される成分組成をもったＡｌ Ｏ系セラミッ
クス基体および８１３Ｎ４系セラミックス基体を用意し
、これら基体を、物理蒸着装置の１種であるアーク放電
型イオンブレーティング装置の基板上に載置し、まず、
陰 極 純Ｔ１、
反応雰囲気： ｌ ｘｌＯ＋ＯＩＬのＮ２、基板印加電
圧・−４００■、
陰極電流： ｌｌ０Ａ。An AlO-based ceramic substrate and an 813N4-based ceramic substrate, both of which are manufactured by a normal powder metallurgy method and each have the composition shown in Table 1, are prepared, and these substrates are processed using a type of physical vapor deposition apparatus. Place it on the board of the arc discharge type ion blating device, and
Cathode pure T1, reaction atmosphere: lxlO+OIL N2, substrate applied voltage -400■, cathode current: ll0A.
の条件でＴｉＮの物理蒸着を行ない、反応時間にて層厚
を調節して、それぞれ第１表に示される平均層厚の密着
性物理蒸着被覆層（ＴｉＮ被覆層）を形成し、
ついで、陰極として、Ａｌ含有量を５〜７５重量％の範
囲内で種々変化させた各種のＴｉ−ＡＡ’合金を用いる
以外は同一の条件で、（Ｔｉ、Ａｌ）Ｎの物理蒸着を行
ない、同様に反応時間にて層厚を調整し、かつＴｉ−Ａ
１合金中のＡＡ含有量にて■１とＡｌの割合を変化させ
て、それぞれ第１表に示される組成および平均層厚の耐
摩耗性物理蒸着被覆層（（Ｔｉ、Ａｌ）Ｎ被覆層〕を形
成し、さらに必要に応して、再び陰極として純Ｔｉを用
い、上記の条件と同じ条件でＴｉＮの物理蒸着を行ない
、それぞれ第１表に示される平均層厚の耐欠損性物理蒸
着被覆層（ＴｉＮ被覆層）を形成することにより、いず
れもＳ Ｐ Ｇ Ｎ １２４０８のチップ形状をもった
本発明表面被覆セラミックス製切削工具（以下本発明被
覆切削工具という）１〜３３をそれぞれ製造した。Physical vapor deposition of TiN was carried out under the following conditions, and the layer thickness was adjusted by the reaction time to form an adhesive physical vapor deposition coating layer (TiN coating layer) with the average layer thickness shown in Table 1. Physical vapor deposition of (Ti, Al)N was carried out under the same conditions except that various Ti-AA' alloys with varying Al contents in the range of 5 to 75% by weight were used, and the reaction was carried out in the same manner. Adjust the layer thickness with time, and Ti-A
(Ti, Al)N coating layer with the composition and average layer thickness shown in Table 1 by changing the ratio of 1 and Al according to the AA content in the alloy. If necessary, physical vapor deposition of TiN is performed again under the same conditions as above using pure Ti as a cathode to form a defect-resistant physical vapor deposited coating with the average layer thickness shown in Table 1. By forming a layer (TiN coating layer), cutting tools 1 to 33 made of the surface-coated ceramic of the present invention (hereinafter referred to as the coated cutting tool of the present invention) each having a chip shape of S P GN 12408 were manufactured.
また、比較の目的で、上記の密着性物理蒸着被覆層およ
び耐欠損性物理蒸着被覆層の形成を行なわない以外は、
同一の条件で同じく第１表に示される組成および平均層
厚の耐摩耗性物理蒸着被覆層（（Ｔｉ、Ａｌ）Ｎ被覆層
〕たけを形成することにより従来表面被覆セラミックス
製切削工具（以下従来被覆切削工具という）１〜１０を
製造した。In addition, for comparison purposes, except that the above-mentioned adhesive physical vapor deposition coating layer and chipping-resistant physical vapor deposition coating layer were not formed,
By forming a wear-resistant physical vapor deposition coating layer ((Ti, Al)N coating layer) with the composition and average layer thickness shown in Table 1 under the same conditions, conventional 1 to 10 (referred to as coated cutting tools) were manufactured.
つぎに、この結果得られた各種の切削工具について、
Ａ、被削材：円周にそって等間隔て６本の切込み溝を放
射状に有する直径・２５０ｍｍφのＦｅ１２（鋳鉄）製
置板材、
切削速度・３１０〜ｌｌ０ｍ／田ｉｎ（面外側−中心）
、送 リ ： ０．６ｍｍ／ ＋ｃｖ、、切込み
ＩＯ職、
の条件（切削条件Ａという）での鋳鉄片側面の高送り乾
式断続切削試験、
Ｂ、被削材：Ｆｅ１２の丸棒、
切削速度 ５００ｍ／ｍｉｎ、
送 リ゛０．３ｍｍ ／ ｔ ｅ ｖ、、切込み・
１．５ｍｍ。Next, regarding the various cutting tools obtained as a result, A. Workpiece material: Fe12 (cast iron) plate material with a diameter of 250 mmφ and having six cutting grooves radially spaced at equal intervals along the circumference; Speed: 310~ll0m/in (outside surface - center)
, Feed: 0.6mm/ +cv, , Depth of cut
IO job, high feed dry intermittent cutting test on the side surface of a cast iron piece under conditions (referred to as cutting conditions A), B. Work material: Fe12 round bar, cutting speed 500 m/min, feed rate 0.3 mm/te. v,, cut depth・
1.5mm.
切削時間 ３０分、
の条件（切削条件Ｂという）での鋳鉄の高速乾式％式％
Ｃ１被削材をＦｅ１２とする以外は切削条件Ａと同し条
件（切削条件Ｃという）での鋳鉄片側面の高送り乾式断
続切削試験、
Ｄ、被削材をＦｅ１２とする以外は切削条件Ｂと同じ条
件（切削条件りという）での鋳鉄の高速乾式％式％
Ｅ、切込みを３．０＋ｎｍとする以外は切削条件Ａと同
じ条件（切削条件Ｅという）での鋳鉄片側面の高送り高
切込み乾式断続切削試験、
Ｆ、被削材をＦｅ１２とする以外は切削条件Ｂと同し条
件（切削条件Ｆという）での鋳鉄の高速乾式％式％
以上Ａ−Ｆのうち少なくともいずれかの切削条件で切削
試験を行ない、切削条件Ａ、 Ｃ，およびＥでは切刃
に欠損が発生するまでの面削り回数、切削条件Ｂおよび
Ｄては切刃の逃げ面摩耗幅、切削条件Ｆては切刃の逃げ
面摩耗幅か０３画に至るまでの切削時間をそれぞれ測定
した。これらの測定結果を第１表に示した。Cutting time: 30 minutes, high-speed dry % formula for cast iron under the conditions (referred to as cutting conditions B) Side surface of a cast iron piece under the same conditions as cutting conditions A (referred to as cutting conditions C) except that the C1 work material is Fe12 High-speed dry interrupted cutting test of cast iron under the same conditions as cutting conditions B (referred to as cutting conditions) except that the work material is Fe12 (D), except that the work material is Fe12 is a high-feed, high-cut dry intermittent cutting test on the side surface of a cast iron piece under the same conditions as cutting condition A (referred to as cutting condition E); A cutting test was conducted under at least one of the cutting conditions A-F above, and under cutting conditions A, C, and E, the number of face millings until chipping occurred on the cutting edge was determined. Under cutting conditions B and D, the flank wear width of the cutting edge was measured, and under cutting condition F, the cutting time until the flank wear width of the cutting edge reached 03 strokes was measured. The results of these measurements are shown in Table 1.
第１表に示される結果から、本発明被覆切削工具１〜３
３は、いずれも密着性物理蒸着被覆層であるＴｉＮ層の
介在によって（Ｔｉ、Ａｌ）Ｎ被覆層の基体表面に対す
る密着性か著しく向上したものになっているので、上記
の通りの苛酷な条件下ての切削にも（Ｔｉ、ＡＡ）Ｎ被
覆層か剥離することなく、かつ切刃に欠損が発生するこ
となく、（Ｔｉ、ＡＡ’）Ｎ被覆層のもつすぐれた耐摩
耗性を十分に発揮するのに対して、ＴｉＮ被覆層の形成
かない従来被覆切削工具１〜１０は、（Ｔｉ、ＡＡ）Ｎ
被覆層の基体表面に対する密着性が不十分なために、上
記の苛酷な条件での切削では、切削開始後、短時間で欠
損や剥離が生し、使用寿命に至ることが明らかである。From the results shown in Table 1, the coated cutting tools 1 to 3 of the present invention
3, the adhesion of the (Ti, Al)N coating layer to the substrate surface is significantly improved due to the interposition of the TiN layer, which is an adhesive physical vapor deposition coating layer, so it can be used under the severe conditions described above. The excellent wear resistance of the (Ti, AA')N coating layer can be fully maintained even during lower cutting without peeling off the (Ti, AA)N coating layer or causing damage to the cutting edge. In contrast, the conventional coated cutting tools 1 to 10, which do not have a TiN coating layer, have (Ti, AA)N
It is clear that because the adhesion of the coating layer to the substrate surface is insufficient, when cutting under the above-mentioned severe conditions, chipping and peeling occur within a short period of time after the start of cutting, leading to the end of the service life.
上述のように、この発明の表面被覆セラミックス製切削
工具は、これを構成する硬質の（Ｔｉ。As mentioned above, the surface-coated ceramic cutting tool of the present invention is composed of hard (Ti).
ＡＡ’）Ｎ被覆層のＡ １２０３系セラミックス基体お
よびＳｉ３Ｎ４系セラミックス基体の表面に対する密着
性が著しく高く、苛酷な条件下での切削にも欠損や剥離
することがないので、切削機械の高性能化にも満足して
対応することかでき、かつ実用に際してずくれた切削性
能を長期に亘って発揮するのである。The adhesion of the AA')N coating layer to the surface of the A1203 ceramic substrate and the Si3N4 ceramic substrate is extremely high, and it will not break or peel off even when cutting under severe conditions, improving the performance of cutting machines. It can satisfactorily cope with various conditions and exhibits excellent cutting performance over a long period of time in practical use.
Claims (2)
素系セラミックスからなる基体の表面に、平均層厚で０
．１〜１μｍの窒化チタンからなる密着性物理蒸着被覆
層を介して、平均層厚で０．５〜５μｍのＴｉとＡｌの
複合窒化物からなる耐摩耗性物理蒸着被覆層、を形成し
てなる表面被覆セラミックス製切削工具。(1) On the surface of a substrate made of aluminum oxide ceramics or silicon nitride ceramics, the average layer thickness is 0.
．． A wear-resistant physical vapor deposition coating layer made of a composite nitride of Ti and Al having an average layer thickness of 0.5 to 5 μm is formed via an adhesive physical vapor deposition coating layer made of titanium nitride with a thickness of 1 to 1 μm. Cutting tools made of surface-coated ceramics.
素系セラミックスからなる基体の表面に、平均層厚で０
．１〜１μｍの窒化チタンからなる密着性物理蒸着被覆
層を介して、平均層厚で０．５〜５μｍのＴｉとＡｌの
複合窒化物からなる耐摩耗性物理蒸着被覆層を形成し、
さらに、その上に同じく平均層厚で０．１〜３μｍの窒
化チタンからなる耐欠損性物理蒸着被覆層、を形成して
なる表面被覆セラミックス製切削工具。(2) On the surface of the substrate made of aluminum oxide ceramics or silicon nitride ceramics, the average layer thickness is 0.
．． Forming a wear-resistant physical vapor deposition coating layer made of a composite nitride of Ti and Al with an average layer thickness of 0.5 to 5 μm via an adhesive physical vapor deposition coating layer made of titanium nitride with a thickness of 1 to 1 μm,
Furthermore, a surface-coated ceramic cutting tool is formed by forming thereon a chipping-resistant physical vapor deposition coating layer of titanium nitride having an average layer thickness of 0.1 to 3 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2328254A JP2993116B2 (en) | 1990-11-28 | 1990-11-28 | Surface-coated ceramic cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2328254A JP2993116B2 (en) | 1990-11-28 | 1990-11-28 | Surface-coated ceramic cutting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04201003A true JPH04201003A (en) | 1992-07-22 |
| JP2993116B2 JP2993116B2 (en) | 1999-12-20 |
Family
ID=18208166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2328254A Expired - Fee Related JP2993116B2 (en) | 1990-11-28 | 1990-11-28 | Surface-coated ceramic cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2993116B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6313054B1 (en) * | 1997-12-26 | 2001-11-06 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered body, method for manufacturing the same, and cutting insert formed of the sintered body |
| EP0709353B2 (en) † | 1994-10-27 | 2007-11-28 | Sumitomo Electric Industries, Limited | Hard composite material for tools |
-
1990
- 1990-11-28 JP JP2328254A patent/JP2993116B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0709353B2 (en) † | 1994-10-27 | 2007-11-28 | Sumitomo Electric Industries, Limited | Hard composite material for tools |
| US6313054B1 (en) * | 1997-12-26 | 2001-11-06 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered body, method for manufacturing the same, and cutting insert formed of the sintered body |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2993116B2 (en) | 1999-12-20 |
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