JP3248897B2 - Hard coating tool - Google Patents

Hard coating tool

Info

Publication number
JP3248897B2
JP3248897B2 JP2000076872A JP2000076872A JP3248897B2 JP 3248897 B2 JP3248897 B2 JP 3248897B2 JP 2000076872 A JP2000076872 A JP 2000076872A JP 2000076872 A JP2000076872 A JP 2000076872A JP 3248897 B2 JP3248897 B2 JP 3248897B2
Authority
JP
Japan
Prior art keywords
layer
film
cutting
coated
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000076872A
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Japanese (ja)
Other versions
JP2000334606A (en
Inventor
謙一 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
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Filing date
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Priority to JP2000076872A priority Critical patent/JP3248897B2/en
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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、金属材料等の切削
加工に使用される硬質皮膜被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for cutting metal materials and the like.

【0002】[0002]

【従来の技術】従来はTiN、TiCN等を被覆した切
削工具が汎用的かつ一般的であった。TiNは比較的耐
酸化性に優れるため、切削時の発熱によって生じる工具
のすくい面摩耗に対して、優れた耐摩耗性を示すだけで
なく、母材との密着性も良好であることが特長である。
また、TiCNは、TiNに比べ高硬度であるため、工
具の逃げ面摩耗に対して優れた特性を示す。しかしなが
ら、金属加工の高能率化を目的とした切削速度の高速化
傾向に対し、上記硬質皮膜では、十分な耐酸化性、耐摩
耗性を示さなくなった。この様な背景から、皮膜の耐酸
化性、耐摩耗性をより向上させる研究がなされ、その結
果、特開昭62−56565号、特開平2−19415
9号に代表されるTiAlN皮膜が開発され切削工具に
適用されている。
2. Description of the Related Art Conventionally, cutting tools coated with TiN, TiCN and the like have been widely used. Since TiN has relatively excellent oxidation resistance, it not only exhibits excellent wear resistance against tool rake surface wear caused by heat generated during cutting, but also has good adhesion to the base material. It is.
Moreover, since TiCN has a higher hardness than TiN, it exhibits excellent characteristics with respect to flank wear of a tool. However, in response to the tendency to increase the cutting speed for the purpose of increasing the efficiency of metal working, the hard coating does not exhibit sufficient oxidation resistance and wear resistance. From such a background, studies have been made to further improve the oxidation resistance and abrasion resistance of the coating. As a result, JP-A-62-56565 and JP-A-2-19415 have been studied.
No. 9 has been developed and applied to cutting tools.

【0003】[0003]

【発明が解決しようとする課題】TiAlN皮膜は、そ
の皮膜中に含有するTiとAlの成分比率により異なる
ものの、概略2300〜2800のビッカース硬さを有
すだけではなく、耐酸化性が、前記TiN、TiCNに
比べ優れるため、刃先が高温に達する切削条件下におい
ては、切削工具の性能を著しく向上させる。しかしなが
ら、近年では切削速度が更に高速化する傾向に加え、乾
式での切削加工が環境問題上重要視され、切削工具の使
用環境はますます苛酷なものとなってきている。本発明
者等の研究によれば、大気中におけるTiAlN皮膜の
酸化開始温度は、TiNの450℃に対し、Alの添加
量に依存して750〜900℃に向上する。しかしなが
ら、前述の乾式高速切削加工においては、使用する工具
の刃先温度が900℃以上の高温に達するため、前記T
iAlN皮膜では、十分な工具寿命が得られないのが現
状である。
The TiAlN film has a Vickers hardness of approximately 2300 to 2800, although it varies depending on the component ratio of Ti and Al contained in the film. Since it is superior to TiN and TiCN, it greatly improves the performance of the cutting tool under cutting conditions in which the cutting edge reaches a high temperature. However, in recent years, in addition to the tendency for the cutting speed to be further increased, dry cutting is regarded as important in terms of environmental issues, and the use environment of cutting tools is becoming increasingly severe. According to the study by the present inventors, the oxidation start temperature of the TiAlN film in the air is increased from 750 ° C. to 750 ° C. to 900 ° C. depending on the amount of Al added to 450 ° C. of TiN. However, in the above-described dry high-speed cutting, the temperature of the cutting edge of the tool to be used reaches a high temperature of 900 ° C. or more.
At present, sufficient tool life cannot be obtained with the iAlN coating.

【0004】[0004]

【本発明の目的】本発明はこうした事情に鑑みなされた
ものであって、従来のTiAlN皮膜に対し、更に耐酸
化性、耐摩耗性を改善し、切削加工の乾式化、高速化に
対応する硬質皮膜被覆工具を提供することが目的であ
る。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is intended to improve the oxidation resistance and wear resistance of a conventional TiAlN film and to cope with a dry and high-speed cutting process. It is an object to provide a hard film coated tool.

【0005】[0005]

【課題を解決するための手段】発明者等は、硬質皮膜の
耐酸化性、耐摩耗性および密着性に及ぼす、様々な元素
の影響および皮膜の層構造について詳細な検討を行った
結果、Siを適量含有したTiを主成分とする窒化物、
炭窒化物、酸窒化物もしくは酸炭窒化物(以下TiSi
系窒化物等と記す)と、TiとAlを主成分とした窒化
物、炭窒化物、酸窒化物もしくは酸炭窒化物(以下Ti
Al系窒化物等と記す)に含まれる金属成分を特定値内
に制限した皮膜を、それぞれ一層以上交互に被覆し、そ
の際、上述のTiAl系窒化物等の皮膜を母材表面直上
にし、かつTiSi系窒化物等の微細組織構造が、Ti
を主成分とする窒化物、炭窒化物、酸窒化物もしくは酸
炭窒化物中に、SiおよびSiが独立した相とし
て存在するように成膜することで、乾式の高速切削加工
において、切削工具の性能が極めて良好となることを見
出し本発明に到達した。
The inventors of the present invention have conducted detailed studies on the effects of various elements on the oxidation resistance, abrasion resistance and adhesion of a hard coating and the layer structure of the coating. A nitride mainly containing Ti containing an appropriate amount of
Carbonitride, oxynitride or oxycarbonitride (hereinafter TiSi
And nitrides mainly composed of Ti and Al, carbonitrides, oxynitrides or oxycarbonitrides (hereinafter referred to as Ti
Al-based nitride) is coated with a coating in which the metal component contained in the alloy is limited to a specific value, and the coating is alternately coated one or more times. At this time, the coating of the TiAl-based nitride or the like is directly above the surface of the base material, And the microstructure structure of TiSi-based nitride or the like
By forming a film such that Si 3 N 4 and Si are present as independent phases in a nitride, carbonitride, oxynitride or oxycarbonitride containing The present inventors have found that the performance of a cutting tool is extremely good, and have reached the present invention.

【0006】すなわち本発明は、高速度鋼、超硬合金、
サーメット、セラミックスの何れかを母材とし、硬質皮
膜のa層は金属成分のみの原子%で、Siが10%以上
60%以下、B、Al、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wの1種または2種以上で10%未
満、残りTiで構成される窒化物、炭窒化物、酸窒化
物、酸炭窒化物のいずれかで、SiおよびSiが
独立した相として化合物中に存在し、b層は金属成分の
みの原子%が、Al:40%越え75%以下、B、S
i、V、Cr、Y、Zr、Nb、Mo、Hf、Ta、W
の1種または2種以上で10%未満、残りTiで構成さ
れる窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれ
かであり、該a層、b層がそれぞれ一層以上交互に被覆
され、かつ、b層が母材表面直上にあることを特徴とす
る硬質皮膜被覆工具であり、更に上記硬質皮膜は、物理
蒸着法により被覆されたことが望ましい。
That is, the present invention relates to high-speed steel, cemented carbide,
Either cermet or ceramics as a base material, layer a of the hard coating is atomic% of only metal component, Si is 10% or more and 60% or less, B, Al, V, Cr, Y, Zr, Nb, M
one or more of o, Hf, Ta, and W, less than 10%, and the remaining Ti is a nitride, carbonitride, oxynitride, or oxycarbonitride, and is composed of Si 3 N 4 and Si exists in the compound as an independent phase, and in the b layer, the atomic% of the metal component alone is more than 40% and 75% or less of Al: B, S
i, V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W
One or two or more of the following, less than 10%, with the balance being Ti: nitride, carbonitride, oxynitride, or oxycarbonitride, wherein the a layer and the b layer are alternately at least one layer each And the b layer is located just above the surface of the base material, and the hard film is preferably coated by a physical vapor deposition method.

【0007】[0007]

【発明の実施の形態】はじめに請求項中記載のa層に関
して、その構成要件について詳しく述べる。一般にTi
AlN皮膜は、大気中で酸化テストを行うと、皮膜表面
近傍のAlが最表面に外向拡散し、そこでアルミナ層を
形成する。本発明者らの研究によれば、このことが耐酸
化性向上の理由と考えられるが、この時、アルミナ層直
下には、Alを含有しない非常にポーラスなTi酸化物
が形成する。静的である酸化テストにおいては、最表面
に形成されたアルミナ層が、酸化の進行である酸素の内
向拡散に対し、酸化保護膜として機能するものの、動的
な切削加工においては、最表面のアルミナ層は、その直
下のポーラスなTi酸化物層より容易に剥離してしま
い、酸化の進行に対し十分な効果を発揮しない。しかし
ながら、TiSi系窒化物等は皮膜自体の耐酸化性が極
めて高いだけでなく、最表面に酸化保護膜となるSiを
含有する非常に緻密な複合酸化物層が形成され、また、
その直下には酸化保護膜の剥離原因となるポーラスなT
i酸化物が形成されないことを確認した。上記効果を得
るには、Siが皮膜の金属成分のみの原子%で、10%
以上含有していなければならず、逆に60%を越えて含
有すると、皮膜の延性ないしは硬さの低下が顕著にな
り、切削工具としての使用に耐えられなくなる。
BEST MODE FOR CARRYING OUT THE INVENTION First, the constituent requirements of the layer a described in the claims will be described in detail. Generally Ti
When an oxidation test is performed on the AlN film in the air, Al near the surface of the film diffuses outward to the outermost surface, where an alumina layer is formed. According to the study of the present inventors, this is considered to be the reason for improving the oxidation resistance. At this time, a very porous Ti oxide containing no Al is formed immediately below the alumina layer. In the static oxidation test, the alumina layer formed on the outermost surface functions as an oxidation protective film against the inward diffusion of oxygen, which is the progress of oxidation. The alumina layer is easily separated from the porous Ti oxide layer immediately below the alumina layer, and does not exert a sufficient effect on the progress of oxidation. However, TiSi-based nitrides and the like not only have extremely high oxidation resistance of the film itself, but also form a very dense composite oxide layer containing Si that serves as an oxidation protection film on the outermost surface.
Immediately below it, a porous T which causes the oxidation protective film to peel off
It was confirmed that no i-oxide was formed. In order to obtain the above-mentioned effect, Si is 10% by atomic% of only the metal component of the film.
If the content exceeds 60%, on the other hand, the ductility or the hardness of the film is remarkably reduced, and the film cannot be used as a cutting tool.

【0008】a層に含まれるB、Al、V、Cr、Y、
Zr、Nb、Mo、Hf、Ta、Wは、TiSi系窒化
物等の皮膜中において固溶強化元素として働き、皮膜の
高硬度化に有効である。必要に応じB、Al、V、C
r、Y、Zr、Nb、Mo、Hf、Ta、Wの1種また
は2種以上を微量添加することが望ましい。しかしなが
ら皮膜の金属成分のみの原子%で10%以上添加する
と、前述したSi含有による耐酸化性向上効果が得られ
なくなる。よって、B、Al、V、Cr、Y、Zr、N
b、Mo、Hf、Ta、Wは、1種または2種以上で1
0%未満とする。更に、a層の微細組織は、Tiを主成
分とする窒化物、炭窒化物、酸窒化物もしくは酸炭窒化
物中に、SiおよびSiが独立した相として存在
する構造にすることで高硬度化が達成でき、著しく耐摩
耗性に優れた皮膜が得られる。この様な構造を持つ皮
膜、つまり本発明a層を形成するには、アーク放電方式
イオンプレーティングや、スパッタリングといった物理
蒸着法の違いや、同様の手法であっても成膜装置の基本
的な仕様によって、その絶対値は異なるものの、被覆の
際、基体に印加するバイアス電圧を−10〜−100V
といった比較的低い値にすることで達成できる。
The B, Al, V, Cr, Y,
Zr, Nb, Mo, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiSi-based nitride and are effective in increasing the hardness of the film. B, Al, V, C as required
It is desirable to add one or more of r, Y, Zr, Nb, Mo, Hf, Ta, and W in trace amounts. However, if 10% or more of the atomic percentage of only the metal component of the coating is added, the effect of improving the oxidation resistance due to the Si content described above cannot be obtained. Therefore, B, Al, V, Cr, Y, Zr, N
b, Mo, Hf, Ta, W are one kind or two or more kinds,
Less than 0%. Further, the microstructure of the a-layer has a structure in which Si 3 N 4 and Si are present as independent phases in a nitride, carbonitride, oxynitride or oxycarbonitride containing Ti as a main component. , High hardness can be achieved, and a film having remarkably excellent wear resistance can be obtained. In order to form a film having such a structure, that is, the layer a of the present invention, differences in physical vapor deposition methods such as an arc discharge type ion plating and sputtering, and the basic method of a film forming apparatus even with the same method. Although the absolute value differs depending on the specification, the bias voltage applied to the substrate during coating is -10 to -100 V
This can be achieved by setting a relatively low value.

【0009】b層中のAlの役割は、皮膜の耐摩耗性お
よび耐酸化性を向上させることである。皮膜中における
Al含有量が少ないほど、母材と皮膜の密着性は良好と
なるが、皮膜の金属成分のみの原子%で、Alが40%
以下となると、皮膜の耐摩耗性、耐酸化性を向上させる
効果が得られない。しかしながら、75%を越えて含有
すると、母材と皮膜の密着性が劣化するだけでなく、逆
に皮膜の硬さも低下し、工具として必要な耐摩耗性が得
られない。そのため、密着性、耐摩耗性、耐酸化性をバ
ランス良く得るためには、b層のAl含有量を、皮膜の
金属成分のみの原子%で、40%越え75%以下に調整
することが重要である。B、Si、V、Cr、Y、Z
r、Nb、Mo、Hf、Ta、Wは、TiAl系窒化物
等の皮膜中において固溶強化元素として働き、皮膜の高
硬度化に有効である。そのため、必要に応じB、Si、
V、Cr、Y、Zr、Nb、Mo、Hf、Ta、Wの1
種または2種以上を微量添加することが望ましい。しか
しながら皮膜の金属成分のみの原子%で10%以上添加
すると、母材と皮膜の密着性が低下する。そのため、密
着性、耐摩耗性、耐酸化性をバランス良く得るために
は、B、Si、V、Cr、Y、Zr、Nb、Mo、H
f、Ta、Wは1種または2種以上で10%未満とす
る。
The role of Al in the b layer is to improve the wear resistance and oxidation resistance of the film. The lower the Al content in the coating, the better the adhesion between the base material and the coating. However, the atomic percentage of the metal component of the coating alone is 40%.
If it is less than the above, the effect of improving the wear resistance and oxidation resistance of the film cannot be obtained. However, if the content exceeds 75%, not only the adhesion between the base material and the film is deteriorated, but also the hardness of the film is lowered, and the wear resistance required for a tool cannot be obtained. Therefore, in order to obtain a good balance of adhesion, abrasion resistance and oxidation resistance, it is important to adjust the Al content of the b layer to be more than 40% and not more than 75% by atomic% of only the metal component of the film. It is. B, Si, V, Cr, Y, Z
r, Nb, Mo, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiAl-based nitride and are effective in increasing the hardness of the film. Therefore, if necessary, B, Si,
V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W
It is desirable to add a kind or two or more kinds in trace amounts. However, if 10% or more is added in atomic% of only the metal component of the film, the adhesion between the base material and the film is reduced. Therefore, B, Si, V, Cr, Y, Zr, Nb, Mo, and H are necessary to obtain a good balance of adhesion, abrasion resistance, and oxidation resistance.
f, Ta, and W are one or two or more and less than 10%.

【0010】上述のように、本発明においては母材との
密着性、皮膜自体の耐摩耗性および耐酸化性をバランス
良く有すb層を母材表面直上に被覆し、その上に著しく
耐酸化性、耐摩耗性に優れるa層を被覆することが極め
て重要であり、その結果、乾式の高速切削に対応する切
削工具を得ることが可能となる。また、母材表面直上に
b層を被覆した後、a層ならびにb層をそれぞれ交互に
積層した多層皮膜によっても同様の効果が得られる。ま
た、各層は必要に応じて窒化物、炭窒化物、酸窒化物、
酸炭窒化物のいずれかに調整でき、それらを被覆した工
具についても同様の効果が得られる。本発明の硬質皮膜
被覆工具は、その被覆方法については、特に限定される
ものではないが、被覆母材への熱影響、工具の疲労強
度、皮膜の密着性、およびa層とb層の整合性等を考慮
した場合、比較的低温で被覆でき、被覆した皮膜に圧縮
応力が残留するアーク放電方式イオンプレーティング、
もしくはスパッタリング等の被覆母材側にバイアス電圧
を印加する物理蒸着法であることが望ましい。以下本発
明を実施例に基づいて説明する。
As described above, in the present invention, a layer b having a good balance between adhesion to the base material, abrasion resistance and oxidation resistance of the film itself is coated directly on the base material surface, and a significantly acid-resistant layer is formed thereon. It is extremely important to coat the layer a, which is excellent in wearability and wear resistance, and as a result, it becomes possible to obtain a cutting tool corresponding to dry high-speed cutting. The same effect can be obtained by a multilayer coating in which a layer b and a layer b are alternately laminated after coating the layer b directly on the surface of the base material. In addition, each layer may include nitride, carbonitride, oxynitride,
It can be adjusted to any of oxycarbonitrides, and the same effect can be obtained for tools coated with them. The method for coating the hard film-coated tool of the present invention is not particularly limited, but the thermal effect on the coated base material, the fatigue strength of the tool, the adhesion of the film, and the matching between the a layer and the b layer are not particularly limited. When considering the properties, etc., it is possible to coat at a relatively low temperature, and the arc discharge type ion plating that compressive stress remains in the coated film,
Alternatively, a physical vapor deposition method of applying a bias voltage to the coating base material side such as sputtering is preferable. Hereinafter, the present invention will be described based on examples.

【0011】[0011]

【実施例】小型アークイオンプレーティング装置を用
い、金属成分の蒸発源である各種合金製ターゲット、な
らびに反応ガスであるNガス、CHガス、Ar
/O 混合ガスから目的の皮膜が得られるものを選択
し、被覆基体温度400℃、反応ガス圧力3.0Paの
条件下にて、被覆基体である外径8mmの超硬合金製6
枚刃エンドミルおよび超硬合金製インサートに、全皮膜
の厚みが4μmとなるように成膜を行った。なお、本発
明例の全てと、比較例51、52、53、54、55、
56、57、58については、−30Vのバイアス電圧
を印加し成膜したが、比較例59については、−200
Vのバイアス電圧を印加し成膜した。また、従来例につ
いては、全て−100Vのバイアス電圧を印加し成膜し
た。
[Embodiment] Using a small arc ion plating device
Various alloy targets, which are evaporation sources for metal components,
The reaction gas N2Gas, CH4Gas, Ar
/ O 2Select the one that can obtain the target film from the mixed gas
And a coating substrate temperature of 400 ° C. and a reaction gas pressure of 3.0 Pa.
Under the conditions, the coated substrate 6
Full coating on single-flute end mills and cemented carbide inserts
Was formed so as to have a thickness of 4 μm. In addition,
All of the clear examples and Comparative Examples 51, 52, 53, 54, 55,
For 56, 57 and 58, a bias voltage of -30V
Was applied, and in Comparative Example 59, -200 was applied.
A bias voltage of V was applied to form a film. In addition,
In all cases, a bias voltage of -100 V is applied to form a film.
Was.

【0012】得られた硬質皮膜被覆エンドミルおよびイ
ンサートを用い、次の乾式の高速切削条件にて、刃先の
欠けないしは摩耗等により工具が切削不能となるまで加
工を行い、その時の切削長を工具寿命とした。エンドミ
ルの切削諸元は、、側面切削ダウンカットにて、被削材
SKD11(60HRC)を、切削速度200m/mi
n、送り量0.03mm/刃、切り込み量Ad=12m
m、Rd=0.2mmでエアーブローを用いて行った。
インサートの切削諸元は、直径160mmの正面フライ
ス(インサート形状=SEE42TN)にて、巾100
mm×長さ250mmの平面加工を、被削材:SKD6
1(45HRC)にて、切削速度200m/min、送
り量0.15mm/刃、切り込み量:2.0mmで行っ
た。表1に本発明例、表2に比較例、表3に従来例の硬
質皮膜に関する詳細およびそれらの切削結果を示す。a
層中のSiならびにSiの有無についてはXPS
にて確認を行い、Siならびに(もしくは)Si
の存在が認められた皮膜については表中に記した。
Using the obtained hard film-coated end mill and insert, processing is performed under the following dry high-speed cutting conditions until the tool cannot be cut due to chipping or wear of the cutting edge, and the cutting length at that time is determined by the tool life. And The cutting specifications of the end mill are as follows: side cut down cut, work material SKD11 (60HRC), cutting speed 200m / mi
n, feed amount 0.03 mm / tooth, cutting amount Ad = 12 m
m, Rd = 0.2 mm using air blow.
The cutting specifications of the insert were 100 mm in width using a face mill (insert shape = SEE42TN) with a diameter of 160 mm.
mm x 250 mm length plane processing, work material: SKD6
1 (45 HRC) at a cutting speed of 200 m / min, a feed amount of 0.15 mm / blade, and a cutting amount of 2.0 mm. Table 1 shows examples of the present invention, Table 2 shows comparative examples, and Table 3 shows details of hard coatings of conventional examples and cutting results thereof. a
For the presence or absence of Si 3 N 4 and Si in the layer, use XPS
To confirm that Si 3 N 4 and / or Si
The films in which the presence of was recognized are described in the table.

【0013】[0013]

【表1】 [Table 1]

【0014】[0014]

【表2】 [Table 2]

【0015】[0015]

【表3】 [Table 3]

【0016】表1、表2および表3より、本発明例は、
比較例ならびに従来例と比べて、工具寿命が著しく向上
しており、乾式高速切削加工に十分対応することがわか
る。比較例52は、皮膜の組成については本発明に含ま
れるものであるが、皮膜の層構造が異なるため、エンド
ミルおよびインサート、両工具の切削において、皮膜の
剥離が早期に生じ、非常に短寿命となった。比較例59
は、皮膜の組成、層構造については本発明に含まれるも
のであるが、a層には、Si相のみしか存在していない
ため、十分な皮膜硬さが得られず本発明例に比べ短寿命
となった。また、比較例57のようにb層のAl含有量
が著しく多い場合は、切削中に母材とb層の界面より剥
離が生じ、極端な短寿命となった。
From Tables 1, 2 and 3, the present invention example
The tool life is remarkably improved as compared with the comparative example and the conventional example, and it can be seen that the tool life is sufficiently compatible with dry high-speed cutting. In Comparative Example 52, the composition of the film is included in the present invention. However, since the layer structure of the film is different, peeling of the film occurs early in cutting of the end mill, the insert, and both tools, resulting in a very short life. It became. Comparative Example 59
Indicates that the composition and layer structure of the film are included in the present invention. However, since only the Si phase is present in the a layer, sufficient film hardness cannot be obtained and the Life has expired. Further, when the Al content of the b layer was extremely large as in Comparative Example 57, peeling occurred at the interface between the base material and the b layer during cutting, resulting in an extremely short life.

【0017】[0017]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた耐酸化性、耐摩耗性を
有すことから、乾式高速切削加工において格段に長い工
具寿命が得られ、切削加工における生産性の向上に極め
て有効である。
As described above, the hard-coated tool of the present invention has superior oxidation resistance and wear resistance as compared with the conventional coated tool, so that the tool life in dry high-speed cutting is significantly longer. This is extremely effective in improving productivity in cutting.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B23B 27/14 B23C 5/16 C23C 14/06 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) B23B 27/14 B23C 5/16 C23C 14/06

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 高速度鋼、超硬合金、サーメット、セラ
ミックスの何れかを母材とし、硬質皮膜のa層は金属成
分のみの原子%で、Siが10%以上60%以下、B、
Al、V、Cr、Y、Zr、Nb、Mo、Hf、Ta、
Wの1種または2種以上で10%未満、残りTiで構成
される窒化物、炭窒化物、酸窒化物、酸炭窒化物のいず
れかで、SiおよびSiが独立した相として化合
物中に存在し、b層は金属成分のみの原子%が、Al:
40%越え75%以下、B、Si、V、Cr、Y、Z
r、Nb、Mo、Hf、Ta、Wの1種または2種以上
で10%未満、残りTiで構成される窒化物、炭窒化
物、酸窒化物、酸炭窒化物のいずれかであり、該a層、
b層がそれぞれ一層以上交互に被覆され、かつ、b層が
母材表面直上にあることを特徴とする硬質皮膜被覆工
具。
A high-speed steel, cemented carbide, cermet, or ceramic is used as a base material, and an a layer of a hard coating is an atomic% of only a metal component, and Si is 10% or more and 60% or less, and B,
Al, V, Cr, Y, Zr, Nb, Mo, Hf, Ta,
One or more of W and less than 10%, the rest being any of nitrides, carbonitrides, oxynitrides, oxycarbonitrides composed of Ti, with Si 3 N 4 and Si as independent phases The b layer is present in the compound and the atomic% of the metal component alone is Al:
Over 40% and up to 75%, B, Si, V, Cr, Y, Z
one or more of r, Nb, Mo, Hf, Ta, and W, which is less than 10%, and the rest is any of nitride, carbonitride, oxynitride, and oxycarbonitride, The a layer,
A hard-coated tool, characterized in that the b-layers are alternately coated one or more times, and the b-layer is directly above the surface of the base material.
【請求項2】 請求項1記載の硬質皮膜被覆工具におい
て、該硬質皮膜は物理蒸着法により被覆されたことを特
徴とする硬質皮膜被覆工具。
2. The tool according to claim 1, wherein said hard coating is coated by physical vapor deposition.
JP2000076872A 1999-03-19 2000-03-17 Hard coating tool Expired - Lifetime JP3248897B2 (en)

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