JP3343727B2 - Hard coating tool - Google Patents

Hard coating tool

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Publication number
JP3343727B2
JP3343727B2 JP13803999A JP13803999A JP3343727B2 JP 3343727 B2 JP3343727 B2 JP 3343727B2 JP 13803999 A JP13803999 A JP 13803999A JP 13803999 A JP13803999 A JP 13803999A JP 3343727 B2 JP3343727 B2 JP 3343727B2
Authority
JP
Japan
Prior art keywords
layer
cutting
film
tool
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13803999A
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Japanese (ja)
Other versions
JP2000326107A (en
Inventor
謙一 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
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Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP13803999A priority Critical patent/JP3343727B2/en
Publication of JP2000326107A publication Critical patent/JP2000326107A/en
Application granted granted Critical
Publication of JP3343727B2 publication Critical patent/JP3343727B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、金属材料等の切削
加工に使用される硬質皮膜被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for cutting metal materials and the like.

【0002】[0002]

【従来の技術】従来はTiN、TiCN等を被覆した切
削工具が汎用的かつ一般的であった。TiNは比較的耐
酸化性に優れるため、切削時の発熱によって生じる工具
のすくい面摩耗に対して、優れた耐摩耗性を示すだけで
なく、母材との密着性も良好であることが特長である。
また、TiCNは、TiNに比べ高硬度であるため、工
具の逃げ面摩耗に対して優れた特性を示す。しかしなが
ら、金属加工の高能率化を目的とした切削速度の高速化
傾向に対し、上記硬質皮膜では、十分な耐酸化性、耐摩
耗性を示さなくなった。この様な背景から、皮膜の耐酸
化性、耐摩耗性をより向上させる研究がなされ、その結
果、特開昭62−56565号、特開平2−19415
9号に代表されるTiAlN皮膜が開発され切削工具に
適用されている。
2. Description of the Related Art Conventionally, cutting tools coated with TiN, TiCN and the like have been widely used. Since TiN has relatively excellent oxidation resistance, it not only exhibits excellent wear resistance against tool rake surface wear caused by heat generated during cutting, but also has good adhesion to the base material. It is.
Moreover, since TiCN has a higher hardness than TiN, it exhibits excellent characteristics with respect to flank wear of a tool. However, in response to the tendency to increase the cutting speed for the purpose of increasing the efficiency of metal working, the hard coating does not exhibit sufficient oxidation resistance and wear resistance. From such a background, studies have been made to further improve the oxidation resistance and abrasion resistance of the coating. As a result, JP-A-62-56565 and JP-A-2-19415 have been studied.
No. 9 has been developed and applied to cutting tools.

【0003】[0003]

【発明が解決しようとする課題】TiAlN皮膜は、そ
の皮膜中に含有するTiとAlの成分比率により異なる
ものの、概略2300〜2800のビッカース硬さを有
すだけではなく、耐酸化性が、前記TiN、TiCNに
比べ優れるため、刃先が高温に達する切削条件下におい
ては、切削工具の性能を著しく向上させる。しかしなが
ら、近年では切削速度が更に高速化する傾向に加え、乾
式での切削加工が環境問題上重要視され、切削工具の使
用環境はますます苛酷なものとなってきている。
The TiAlN film has a Vickers hardness of approximately 2300 to 2800, although it varies depending on the component ratio of Ti and Al contained in the film. Since it is superior to TiN and TiCN, it greatly improves the performance of the cutting tool under cutting conditions in which the cutting edge reaches a high temperature. However, in recent years, in addition to the tendency for the cutting speed to be further increased, dry cutting is regarded as important in terms of environmental issues, and the use environment of cutting tools is becoming increasingly severe.

【0004】本発明者等の研究によれば、大気中におけ
るTiAlN皮膜の酸化開始温度は、TiNの450℃
に対し、Alの添加量に依存して750〜900℃に向
上する。しかしながら、前述の乾式高速切削加工におい
ては、使用する工具の刃先温度が900℃以上の高温に
達するため、前記TiAlN皮膜では、十分な工具寿命
が得られないのが現状である。
According to the study of the present inventors, the oxidation start temperature of a TiAlN film in the atmosphere is 450 ° C. of TiN.
On the other hand, the temperature increases to 750 to 900 ° C. depending on the amount of Al added. However, in the above-mentioned dry high-speed cutting, the cutting edge temperature of a tool to be used reaches a high temperature of 900 ° C. or more, and therefore, at present, a sufficient tool life cannot be obtained with the TiAlN film.

【0005】本発明はこうした事情に鑑みなされたもの
であって、従来のTiAlN皮膜に対し、更に耐酸化
性、耐摩耗性を改善し、切削加工の乾式化、高速化に対
応する硬質皮膜被覆工具を提供することが目的である。
The present invention has been made in view of the above circumstances, and provides a hard coating capable of improving the oxidation resistance and abrasion resistance of a conventional TiAlN coating, and corresponding to dry cutting and high-speed cutting. The purpose is to provide a tool.

【0006】[0006]

【課題を解決するための手段】発明者等は、硬質皮膜の
耐酸化性、耐摩耗性および密着性に及ぼす、様々な元素
の影響および皮膜の層構造について詳細な検討を行った
結果、Siを適量含有したTiを主成分とする窒化物、
炭窒化物、酸窒化物もしくは酸炭窒化物(以下、TiS
i系窒化物等と記す)と、TiとAlを主成分とした窒
化物、炭窒化物、酸窒化物もしくは酸炭窒化物(以下、
TiAl系窒化物等と記す)に含まれる金属成分を特定
値内に制限した皮膜を、TiSi系窒化物等の格子定数
を0.417nm以上0.423nm以下になるよう、
それぞれ一層以上交互に被覆し、その際、金属成分とし
てTiを主体とする窒化物層を母材表面直上に被覆する
ことで、乾式の高速切削加工において、切削工具の性能
が極めて良好となることを見出し本発明に到達した。
The inventors of the present invention have conducted detailed studies on the effects of various elements on the oxidation resistance, abrasion resistance and adhesion of a hard coating and the layer structure of the coating. A nitride mainly containing Ti containing an appropriate amount of
Carbonitride, oxynitride or oxycarbonitride (hereinafter referred to as TiS
i-type nitride, etc.), and nitrides, carbonitrides, oxynitrides or oxycarbonitrides (hereinafter, referred to as nitrides) mainly containing Ti and Al.
A film in which the metal component contained in TiAl-based nitride or the like is limited to a specific value is adjusted so that the lattice constant of TiSi-based nitride or the like becomes 0.417 nm or more and 0.423 nm or less.
By alternately coating one or more layers at that time, by coating a nitride layer mainly composed of Ti as a metal component directly on the surface of the base material, the performance of the cutting tool becomes extremely good in dry high-speed cutting. And arrived at the present invention.

【0007】すなわち本発明は、高速度鋼、超硬合金、
サーメット、セラミックスの何れかを母材とし、金属成
分のみの原子%で、Siが10%以上60%以下、B、
Al、V、Cr、Y、Zr、Nb、Mo、Hf、Ta、
Wの1種または2種以上で10%未満、残Tiで構成さ
れる窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれ
かであり、NaCl型結晶構造を有し、かつ格子定数が
0.417nm以上0.423nm以下であるa層と、
金属成分のみの原子%が、Al:40%越え75%以
下、B、Si、V、Cr、Y、Zr、Nb、Mo、H
f、Ta、Wの1種または2種以上で10%未満、残T
iで構成される窒化物、炭窒化物、酸窒化物、酸炭窒化
物のいずれかで、NaCl型結晶構造を有すb層が、そ
れぞれ一層以上交互に被覆され、かつ母材表面直上には
金属成分としてTiを主体とする窒化物で層厚が0.1
μm以上1μm以下のc層があり、さらにc層直上はb
層であることを特徴とする硬質皮膜被覆工具であり、上
記硬質皮膜は、物理蒸着法により被覆されたことが望ま
しい。
That is, the present invention relates to high-speed steel, cemented carbide,
Either cermet or ceramics as base material, Si is 10% or more and 60% or less in atomic% of metal component only, B,
Al, V, Cr, Y, Zr, Nb, Mo, Hf, Ta,
One or more of W, less than 10%, any of nitride, carbonitride, oxynitride, and oxycarbonitride composed of remaining Ti, having a NaCl-type crystal structure, and a lattice An a layer having a constant of 0.417 nm or more and 0.423 nm or less;
Atomic% of metal component alone: Al: more than 40% and 75% or less, B, Si, V, Cr, Y, Zr, Nb, Mo, H
f, Ta, one or more of W, less than 10%, residual T
a layer b having a NaCl-type crystal structure is alternately coated with at least one layer each of a nitride, a carbonitride, an oxynitride, and an oxycarbonitride composed of i. Is a nitride mainly composed of Ti as a metal component and has a layer thickness of 0.1
There is a c layer of not less than 1 μm and not more than 1 μm, and b
A hard film-coated tool characterized by being a layer, wherein the hard film is preferably coated by a physical vapor deposition method.

【0008】[0008]

【発明の実施の形態】はじめに請求項中記載のa層に関
して、その構成要件について詳しく述べる。一般にTi
AlN皮膜は、大気中で酸化テストを行うと、皮膜表面
近傍のAlが最表面に外向拡散し、そこでアルミナ層を
形成する。本発明者らの研究によれば、このことが耐酸
化性向上の理由と考えられるが、この時、アルミナ層直
下には、Alを含有しない非常にポーラスなTi酸化物
が形成する。静的である酸化テストにおいては、最表面
に形成されたアルミナ層が、酸化の進行である酸素の内
向拡散に対し、酸化保護膜として機能するものの、動的
な切削加工においては、最表面のアルミナ層は、その直
下のポーラスなTi酸化物層より容易に剥離してしま
い、酸化の進行に対し十分な効果を発揮しない。
BEST MODE FOR CARRYING OUT THE INVENTION First, the constituent requirements of the layer a described in the claims will be described in detail. Generally Ti
When an oxidation test is performed on the AlN film in the air, Al near the surface of the film diffuses outward to the outermost surface, where an alumina layer is formed. According to the study of the present inventors, this is considered to be the reason for improving the oxidation resistance. At this time, a very porous Ti oxide containing no Al is formed immediately below the alumina layer. In the static oxidation test, the alumina layer formed on the outermost surface functions as an oxidation protective film against the inward diffusion of oxygen, which is the progress of oxidation. The alumina layer is easily separated from the porous Ti oxide layer immediately below the alumina layer, and does not exert a sufficient effect on the progress of oxidation.

【0009】しかしながら、TiSi系窒化物等は皮膜
自体の耐酸化性が極めて高いだけでなく、最表面に酸化
保護膜となるSiを含有する非常に緻密な複合酸化物層
が形成され、また、その直下には酸化保護膜の剥離原因
となるポーラスなTi酸化物が形成されないことを確認
した。上記効果を得るには、Siが皮膜の金属成分のみ
の原子%で、10%以上含有していなければならず、逆
に60%を越えて含有すると、皮膜の延性ないしは硬さ
の低下が顕著になり、切削工具としての使用に耐えられ
なくなる。
However, TiSi-based nitrides and the like not only have extremely high oxidation resistance of the film itself, but also form a very dense composite oxide layer containing Si which serves as an oxide protective film on the outermost surface. It was confirmed that a porous Ti oxide, which would cause peeling of the oxide protective film, was not formed immediately below. In order to obtain the above effect, Si must be contained in an amount of 10% or more in atomic% of only the metal component of the film. Conversely, if it exceeds 60%, the decrease in ductility or hardness of the film is remarkable. And cannot be used as a cutting tool.

【0010】B、Al、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wは、TiSi系窒化物等の皮膜中に
おいて固溶強化元素として働き、皮膜の高硬度化に有効
である。そのため、必要に応じB、Al、V、Cr、
Y、Zr、Nb、Mo、Hf、Ta、Wの1種または2
種以上を微量添加することが望ましい。しかしながら皮
膜の金属成分のみの原子%で10%以上添加すると、前
述したSi含有による耐酸化性向上効果が得られなくな
る。よって、B、Al、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wは、1種または2種以上で10%未
満とする。
B, Al, V, Cr, Y, Zr, Nb, M
o, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiSi-based nitride, and are effective in increasing the hardness of the film. Therefore, B, Al, V, Cr,
One or two of Y, Zr, Nb, Mo, Hf, Ta, W
It is desirable to add a trace amount of the seed or more. However, if 10% or more of the atomic component of only the metal component of the coating is added, the effect of improving the oxidation resistance due to the Si content described above cannot be obtained. Therefore, B, Al, V, Cr, Y, Zr, Nb, M
o, Hf, Ta, and W are one or more kinds and less than 10%.

【0011】本発明a層は、その格子定数を0.417
nm以上0.423nm以下にすることで高硬度化が達
成でき、著しく耐摩耗性に優れた皮膜が得られる。発明
者等の研究によれば、請求項記載の成分範囲において
は、単一a層の格子定数は0.424〜0.426nm
であり、単一b層の格子定数は0.415〜0.417
nmと単一b層の方が極端に小さいことを確認してい
る。しかしながら、a層およびb層をそれぞれ一層以上
交互に被覆し、その際の基体に印加するバイアス電圧を
適当な値に制御することで、a層は、その下地に位置す
るb層と結晶格子レベルで整合する。その結果、a層の
結晶格子は単一で存在する場合よりも縮小することとな
り、a層には格子歪みが発生し、その硬さが向上する。
a層およびb層を被覆する際、基体に印加するバイアス
電圧は、アーク放電方式イオンプレーティングや、スパ
ッタリングといった物理蒸着法の違いや、同様の手法で
あっても成膜装置の基本的な仕様によって絶対値は異な
るものの、a層とb層の界面における結晶格子の整合性
を確保するには、両層を近似のバイアス電圧で成膜する
ことにより達成できる。
The layer a of the present invention has a lattice constant of 0.417.
When the thickness is at least nm and at most 0.423 nm, high hardness can be achieved, and a film having extremely excellent wear resistance can be obtained. According to the study by the inventors, in the component range described in the claims, the lattice constant of the single a layer is 0.424 to 0.426 nm.
And the lattice constant of the single b layer is 0.415 to 0.417.
It has been confirmed that the nm and the single b layer are extremely small. However, the layer a and the layer b are alternately coated one or more times, and the bias voltage applied to the substrate at that time is controlled to an appropriate value. To match. As a result, the crystal lattice of the a layer is smaller than that of a single layer, lattice distortion occurs in the a layer, and the hardness is improved.
When coating the a layer and the b layer, the bias voltage applied to the substrate is different from the physical vapor deposition method such as the arc discharge type ion plating and the sputtering, and the basic specification of the film forming apparatus even if the same method is used. Although the absolute value differs depending on the type, the matching of the crystal lattice at the interface between the a layer and the b layer can be achieved by forming the two layers at an approximate bias voltage.

【0012】次に請求項中記載のb層に関して、その構
成要件について詳しく述べる。TiAl系窒化物等の皮
膜であるb層におけるAlの役割は、皮膜の耐摩耗性お
よび耐酸化性を向上させることである。皮膜の耐摩摩耗
性および耐酸化性は、皮膜中のAl含有量の増加に伴っ
て向上する。しかしながら、75%を越えて含有する
と、皮膜の硬さが低下し、工具として必要な耐摩耗性が
得られなくなる。そのため、耐摩耗性、耐酸化性をバラ
ンス良く得るためには、b層中のAl含有量を、皮膜の
金属成分のみの原子%で、40%越え75%以下に調整
することが重要である。
Next, the constituent requirements of the layer b described in the claims will be described in detail. The role of Al in the b layer, which is a film of a TiAl-based nitride or the like, is to improve the wear resistance and oxidation resistance of the film. The abrasion and oxidation resistance of the coating improves with increasing Al content in the coating. However, if the content exceeds 75%, the hardness of the film is reduced, and the wear resistance required for a tool cannot be obtained. Therefore, in order to obtain a good balance between wear resistance and oxidation resistance, it is important to adjust the Al content in the b layer to be more than 40% and not more than 75% by atomic% of only the metal component of the film. .

【0013】B、Si、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wは、TiAl系窒化物等の皮膜中に
おいて固溶強化元素として働き、皮膜の高硬度化に有効
である。そのため、必要に応じB、Si、V、Cr、
Y、Zr、Nb、Mo、Hf、Ta、Wの1種または2
種以上を微量添加することが望ましい。しかしながら皮
膜の金属成分のみの原子%で10%以上添加すると、皮
膜の靭性が極端に低下する。そのため、耐摩耗性、耐酸
化性、靭性をバランス良く得るためには、B、Si、
V、Cr、Y、Zr、Nb、Mo、Hf、Ta、Wは1
種または2種以上で10%未満とする。
B, Si, V, Cr, Y, Zr, Nb, M
o, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiAl-based nitride and are effective in increasing the hardness of the film. Therefore, B, Si, V, Cr,
One or two of Y, Zr, Nb, Mo, Hf, Ta, W
It is desirable to add a trace amount of the seed or more. However, when 10% or more of the metal component of the coating is added in atomic%, the toughness of the coating is extremely reduced. Therefore, in order to obtain a good balance of wear resistance, oxidation resistance, and toughness, B, Si,
V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W are 1
More than 10% of species or two or more species.

【0014】上記a層およびb層は、いずれも母材との
密着性においては十分でない。そのため、母材表面直上
には、b層および母材との密着性に優れ、適度に耐摩耗
性、耐酸化性等を有す金属成分としてTiを主体とする
窒化物のc層が必要である。c層はa層およびb層に比
べ硬さの低いTiNであることが望ましいが、TiNに
周期律表IVa族、Va族、VIa族金属およびAl、S
i、Y、Co等を微量に含有する場合、具体的には金属
成分のみの原子%で10at%未満の含有量においても
同様の効果が得られる。
Neither the a layer nor the b layer has sufficient adhesion to the base material. Therefore, just above the surface of the base material, a layer c of a nitride mainly composed of Ti as a metal component having excellent adhesion to the b layer and the base material and having appropriate wear resistance and oxidation resistance is required. is there. The c-layer is preferably made of TiN having a lower hardness than the a-layer and the b-layer. However, TiN is made of a metal belonging to the group IVa, Va, or VIa of the periodic table and Al, S
When a small amount of i, Y, Co, or the like is contained, the same effect can be obtained even when the content is less than 10 at% in atomic% of the metal component alone.

【0015】c層の層厚は0.1μm以上1μm以下に
限定される。c層の層厚が厚いほど密着性の向上は顕著
になる。しかしながら、一般に切削中においては、刃先
部の皮膜は斜め断面の形態で摩耗するため、a層および
b層に比べ耐酸化性の低いc層より優先的に酸化が進行
する。そのためc層の層厚が厚い場合、つまり切削中の
摩耗によるc層の露出面積が大きい場合は、c層の優先
酸化が顕著となり、切削工具の性能は著しく向上しな
い。また、極端にc層の層厚が薄い場合は、密着性向上
効果が顕著に表れない。以上のような理由からc層の層
厚を0.1μm以上1μm以下とする。望ましくは0.
2μm以上0.4μm以下である。
The thickness of the layer c is limited to 0.1 μm or more and 1 μm or less. The greater the thickness of the layer c, the more noticeable the improvement in adhesion. However, in general, during cutting, the coating at the cutting edge wears in the form of an oblique cross section, and therefore oxidation proceeds preferentially over the c layer, which has lower oxidation resistance than the a layer and the b layer. Therefore, when the thickness of the c layer is large, that is, when the exposed area of the c layer due to abrasion during cutting is large, preferential oxidation of the c layer becomes remarkable, and the performance of the cutting tool is not significantly improved. Further, when the thickness of the layer c is extremely thin, the effect of improving the adhesion is not remarkably exhibited. For the reasons described above, the layer thickness of the c layer is set to 0.1 μm or more and 1 μm or less. Preferably, 0.
It is 2 μm or more and 0.4 μm or less.

【0016】以上のように本発明においては、母材との
密着性に優れるc層を母材表面直上に被覆し、その上に
皮膜自体の耐摩耗性および耐酸化性をバランス良く有す
NaCl型結晶構造のb層と、著しく耐酸化性に優れる
a層を、b層と同じNaCl型結晶構造の状態で被覆す
ることが極めて重要であり、その結果、乾式の高速切削
に対応する切削工具を得ることが可能となる。また、母
材表面直上にc層を被覆し、その上にb層を被覆した
後、a層ならびにb層をそれぞれ交互に積層した多層皮
膜によっても同様の効果が得られる。
As described above, in the present invention, a layer c having excellent adhesion to the base material is coated directly on the surface of the base material, and NaCl having a good balance of wear resistance and oxidation resistance of the coating itself is provided thereon. It is extremely important to coat the b-layer having the type crystal structure and the a-layer having remarkably excellent oxidation resistance in the same NaCl type crystal structure as the b-layer, and as a result, a cutting tool corresponding to dry high-speed cutting Can be obtained. A similar effect can be obtained by a multilayer coating in which a layer c is coated immediately above the base material surface, a layer b is coated thereon, and then an a layer and a b layer are alternately laminated.

【0017】また、a層およびb層の各層は必要に応じ
て窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれか
に調整でき、それらを被覆した工具についても同様の効
果が得られる。本発明の硬質皮膜被覆工具は、その被覆
方法については、特に限定されるものではないが、被覆
母材への熱影響、工具の疲労強度、皮膜の密着性、およ
びa層とb層の整合性等を考慮した場合、比較的低温で
被覆でき、被覆した皮膜に圧縮応力が残留するアーク放
電方式イオンプレーティング、もしくはスパッタリング
等の被覆母材側にバイアス電圧を印加する物理蒸着法で
あることが望ましい。以下、本発明を実施例に基づいて
説明する。
Each of the layers a and b can be adjusted to any of nitride, carbonitride, oxynitride and oxycarbonitride as required, and the same effect can be obtained with tools coated with them. can get. The method for coating the hard film-coated tool of the present invention is not particularly limited, but the thermal effect on the coated base material, the fatigue strength of the tool, the adhesion of the film, and the matching between the a layer and the b layer are not particularly limited. In consideration of the properties, etc., it can be coated at a relatively low temperature and compressive stress remains in the coated film Arc discharge type ion plating or physical vapor deposition method applying a bias voltage to the coating base material side such as sputtering Is desirable. Hereinafter, the present invention will be described based on examples.

【0018】[0018]

【実施例】小型アークイオンプレーティング装置を用
い、金属成分の蒸発源である各種合金製ターゲット、な
らびに反応ガスであるNガス、CHガス、Ar/O
混合ガスから目的の皮膜が得られるものを選択し、被
覆基体温度400℃、反応ガス圧力3.0Paの条件下
にて、被覆基体である超硬合金製6枚刃エンドミル(外
径8mm)および超硬合金製ドリル(外径8mm)に、
全皮膜の厚みが4μmとなるように成膜を行った。な
お、本発明例の全てと、比較例54、55、56、5
8、59については、a層ならびにb層ともに−100
Vの同じバイアス電圧を印加し成膜したが、比較例5
1、52、53、57については、a層を−30V、b
層を−200Vとそれぞれ異なったバイアス電圧を印加
し成膜した。また、本発明例ならびに比較例のc層およ
び従来例については、全て−150Vのバイアス電圧を
印加し成膜した。本発明例および比較例のa層およびb
層の厚みについては、基本的にほぼ1:1であるが、表
中の総積層数が2層のものについては、a層を約0.5
μmとしたため、b層は全皮膜の厚みよりa層、c層
(表中記載)を差し引いた層厚である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Using a small arc ion plating apparatus, targets made of various alloys as evaporation sources of metal components, N 2 gas, CH 4 gas, and Ar / O as reaction gases were used.
(2 ) A cemented carbide 6-flute end mill (outer diameter 8 mm), which is a coated substrate, is selected from the mixed gas under the conditions of a coated substrate temperature of 400 ° C. and a reaction gas pressure of 3.0 Pa. And a cemented carbide drill (outside diameter 8mm)
The film was formed so that the thickness of the entire film was 4 μm. In addition, all of the present invention examples and comparative examples 54, 55, 56, 5
Regarding 8, 59, both the a-layer and the b-layer have -100
The same bias voltage of V was applied to form a film.
For 1, 52, 53, and 57, the a layer was set to −30 V, b
The layers were formed by applying different bias voltages to -200V. Further, the c layer of the present invention example and the comparative example and the conventional example were all formed by applying a bias voltage of -150 V. A layer and b of the present invention and comparative examples
The thickness of the layers is basically about 1: 1. However, when the total number of layers in the table is two, the thickness of the a layer is about 0.5.
The layer b is a layer thickness obtained by subtracting the layer a and the layer c (described in the table) from the thickness of the entire coating.

【0019】得られた硬質皮膜被覆エンドミルおよびド
リルを用い、次に示す乾式の高速切削条件にて、刃先の
欠けないしは摩耗等により工具が切削不能となるまで加
工を行い、その時の切削長,穴あけ数を工具寿命とし
た。表1に本発明例、表2に比較例の硬質皮膜に関する
詳細およびそれらの切削結果を示す。a層の格子定数に
ついてはX線回折より算出した。併せて表3に従来例の
切削結果を示す。
Using the obtained hard film-coated end mill and drill, processing is performed under the following dry high-speed cutting conditions until the tool cannot be cut due to chipping or wear of the cutting edge, and the cutting length and drilling at that time. The number was defined as the tool life. Table 1 shows the details of the hard coatings of the present invention and Table 2 and the cutting results thereof. The lattice constant of the a-layer was calculated from X-ray diffraction. Table 3 also shows the cutting results of the conventional example.

【0020】エンドミル切削条件は、工具として超硬合
金製6枚刃エンドミル、外径8mmを用いて、側面切削
をダウンカットで、被削材はSKD11(HRC6
0)、切り込み量Ad=12mm、Rd=0.2mm、
切削速度=200m/min、送り量0.03mm/t
ooth、切削油=なし、但し、エアーブローを使用で
行った。
End mill cutting conditions are as follows: a 6-blade end mill made of cemented carbide, an outer diameter of 8 mm is used as a tool, and the side cut is down cut. The work material is SKD11 (HRC6).
0), cutting amount Ad = 12 mm, Rd = 0.2 mm,
Cutting speed = 200m / min, feed amount 0.03mm / t
ooth, cutting oil = none, but using air blow.

【0021】次に、ドリルの切削条件は、工具として超
硬合金製ドリル、外径8mmを用いて、被削材SCM4
40(HRC30)の穴加工を、切削速度=90m/m
in、送り量=0.2mm/rev、切削油=なし、但
し、エアーブローを使用し、穴深さ24mmの止まり穴
の加工で行った。また、加工穴数は最高2000穴で終
わりとした。
Next, the cutting conditions of the drill were as follows: a cemented carbide drill was used as a tool, and an outer diameter of 8 mm was used.
40 (HRC30) drilling, cutting speed = 90m / m
in, feed rate = 0.2 mm / rev, cutting oil = none, but using an air blow to machine a blind hole with a hole depth of 24 mm. In addition, the number of machined holes ended at a maximum of 2000 holes.

【0022】[0022]

【表1】 [Table 1]

【0023】[0023]

【表2】 [Table 2]

【0024】[0024]

【表3】 [Table 3]

【0025】表1、表2および表3より、本発明例は、
比較例ならびに従来例と比べて、工具寿命が著しく向上
しており、乾式高速切削加工に十分対応することがわか
る。比較例51は、皮膜組成については本発明に含まれ
るものであるが、皮膜の層構造が異なるため、エンドミ
ルおよびドリル、両工具の切削において、皮膜の剥離が
早期に生じ、非常に短寿命となった。比較例53、57
は、皮膜の組成、層構造については本発明に含まれるも
のであるが、a層の格子定数が満足していないため、十
分な皮膜硬さが得られず本発明例に比べ短寿命となっ
た。また、比較例59においても、従来例に比べ比較的
良好な工具寿命を示すものの、c層の層厚が厚いため、
本発明例に比べると短寿命である。
From Tables 1, 2 and 3, the examples of the present invention
The tool life is remarkably improved as compared with the comparative example and the conventional example, and it can be seen that the tool life is sufficiently compatible with dry high-speed cutting. In Comparative Example 51, the coating composition is included in the present invention. However, since the coating has a different layer structure, peeling of the coating occurs early in cutting of the end mill, the drill, and both tools, resulting in a very short life. became. Comparative Examples 53 and 57
Although the composition and layer structure of the film are included in the present invention, since the lattice constant of the a layer is not satisfied, sufficient film hardness cannot be obtained and the life is shorter than that of the examples of the present invention. Was. Also in Comparative Example 59, although a relatively good tool life was exhibited as compared with the conventional example, the layer thickness of the c layer was large.
It has a shorter life than the present invention.

【0026】[0026]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた耐酸化性、耐摩耗性を
有すことから、乾式高速切削加工において格段に長い工
具寿命が得られ、切削加工における生産性の向上だけで
なく環境問題への対応にも極めて有効である。
As described above, the hard-coated tool of the present invention has superior oxidation resistance and wear resistance as compared with the conventional coated tool, so that the tool life in dry high-speed cutting is significantly longer. It is extremely effective not only for improving productivity in cutting but also for addressing environmental issues.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 高速度鋼、超硬合金、サーメット、セラ
ミックスの何れかを母材とし、金属成分のみの原子%
で、Siが10%以上60%以下、B、Al、V、C
r、Y、Zr、Nb、Mo、Hf、Ta、Wの1種また
は2種以上で10%未満、残Tiで構成される窒化物、
炭窒化物、酸窒化物、酸炭窒化物のいずれかであり、N
aCl型結晶構造を有し、かつ格子定数が0.417n
m以上0.423nm以下であるa層と、金属成分のみ
の原子%が、Al:40%越え75%以下、B、Si、
V、Cr、Y、Zr、Nb、Mo、Hf、Ta、Wの1
種または2種以上で10%未満、残Tiで構成される窒
化物、炭窒化物、酸窒化物、酸炭窒化物のいずれかで、
NaCl型結晶構造を有すb層が、それぞれ一層以上交
互に被覆され、かつ母材表面直上には金属成分としてT
iを主体とする窒化物で層厚が0.1μm以上1μm以
下のc層があり、さらにc層直上はb層であることを特
徴とする硬質皮膜被覆工具。
1. A high-speed steel, a cemented carbide, a cermet, or a ceramic as a base material, and an atomic% of only a metal component.
And Si is 10% or more and 60% or less, B, Al, V, C
a nitride composed of one or more of r, Y, Zr, Nb, Mo, Hf, Ta, W and less than 10%, with the balance being Ti;
Any of carbonitride, oxynitride and oxycarbonitride;
has an aCl-type crystal structure and a lattice constant of 0.417 n
a layer of not less than m and not more than 0.423 nm, and the atomic% of the metal component alone is more than 40% Al and not more than 75%, B, Si,
V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W
Species or two or more and less than 10%, with a nitride, carbonitride, oxynitride, or oxycarbonitride composed of residual Ti,
A layer b having an NaCl-type crystal structure is alternately coated one or more times, and T
A hard-coated tool, characterized in that there is a c layer having a thickness of 0.1 μm or more and 1 μm or less which is a nitride mainly composed of i and a b layer immediately above the c layer.
【請求項2】 請求項1記載の硬質皮膜を物理蒸着法に
より被覆したことを特徴とする硬質皮膜被覆工具。
2. A tool for coating a hard coating, wherein the hard coating according to claim 1 is coated by a physical vapor deposition method.
JP13803999A 1999-05-19 1999-05-19 Hard coating tool Expired - Fee Related JP3343727B2 (en)

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