JP3248898B2 - Hard coating tool - Google Patents

Hard coating tool

Info

Publication number
JP3248898B2
JP3248898B2 JP2000076873A JP2000076873A JP3248898B2 JP 3248898 B2 JP3248898 B2 JP 3248898B2 JP 2000076873 A JP2000076873 A JP 2000076873A JP 2000076873 A JP2000076873 A JP 2000076873A JP 3248898 B2 JP3248898 B2 JP 3248898B2
Authority
JP
Japan
Prior art keywords
layer
film
cutting
tool
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000076873A
Other languages
Japanese (ja)
Other versions
JP2000334607A (en
Inventor
謙一 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26416804&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP3248898(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP2000076873A priority Critical patent/JP3248898B2/en
Publication of JP2000334607A publication Critical patent/JP2000334607A/en
Application granted granted Critical
Publication of JP3248898B2 publication Critical patent/JP3248898B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、金属材料等の切削
加工に使用される硬質皮膜被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for cutting metal materials and the like.

【0002】[0002]

【従来の技術】従来はTiN、TiCN等を被覆した切
削工具が汎用的かつ一般的であった。TiNは比較的耐
酸化性に優れるため、切削時の発熱によって生じる工具
のすくい面摩耗に対して、優れた耐摩耗性を示すだけで
なく、母材との密着性も良好であることが特長である。
また、TiCNは、TiNに比べ高硬度であるため、工
具の逃げ面摩耗に対して優れた特性を示す。しかしなが
ら、金属加工の高能率化を目的とした切削速度の高速化
傾向に対し、上記硬質皮膜では、十分な耐酸化性、耐摩
耗性を示さなくなった。この様な背景から、皮膜の耐酸
化性、耐摩耗性をより向上させる研究がなされ、その結
果、特開昭62−56565号、特開平2−19415
9号に代表されるTiAlN皮膜が開発され切削工具に
適用されている。
2. Description of the Related Art Conventionally, cutting tools coated with TiN, TiCN and the like have been widely used. Since TiN has relatively excellent oxidation resistance, it not only exhibits excellent wear resistance against tool rake surface wear caused by heat generated during cutting, but also has good adhesion to the base material. It is.
Moreover, since TiCN has a higher hardness than TiN, it exhibits excellent characteristics with respect to flank wear of a tool. However, in response to the tendency to increase the cutting speed for the purpose of increasing the efficiency of metal working, the hard coating does not exhibit sufficient oxidation resistance and wear resistance. From such a background, studies have been made to further improve the oxidation resistance and abrasion resistance of the coating. As a result, JP-A-62-56565 and JP-A-2-19415 have been studied.
No. 9 has been developed and applied to cutting tools.

【0003】[0003]

【発明が解決しようとする課題】TiAlN皮膜は、そ
の皮膜中に含有するTiとAlの成分比率により異なる
ものの、概略2300〜2800のビッカース硬さを有
すだけではなく、耐酸化性が、前記TiN、TiCNに
比べ優れるため、刃先が高温に達する切削条件下におい
ては、切削工具の性能を著しく向上させる。しかしなが
ら、近年では切削速度が更に高速化する傾向に加え、乾
式での切削加工が環境問題上重要視され、切削工具の使
用環境はますます苛酷なものとなってきている。本発明
者等の研究によれば、大気中におけるTiAlN皮膜の
酸化開始温度は、TiNの450℃に対し、Alの添加
量に依存して750〜900℃に向上する。しかしなが
ら、前述の乾式高速切削加工においては、使用する工具
の刃先温度が900℃以上の高温に達するため、前記T
iAlN皮膜では、十分な工具寿命が得られないのが現
状である。
The TiAlN film has a Vickers hardness of approximately 2300 to 2800, although it varies depending on the component ratio of Ti and Al contained in the film. Since it is superior to TiN and TiCN, it greatly improves the performance of the cutting tool under cutting conditions in which the cutting edge reaches a high temperature. However, in recent years, in addition to the tendency for the cutting speed to be further increased, dry cutting is regarded as important in terms of environmental issues, and the use environment of cutting tools is becoming increasingly severe. According to the study by the present inventors, the oxidation start temperature of the TiAlN film in the air is increased from 750 ° C. to 750 ° C. to 900 ° C. depending on the amount of Al added to 450 ° C. of TiN. However, in the above-described dry high-speed cutting, the temperature of the cutting edge of the tool to be used reaches a high temperature of 900 ° C. or more.
At present, sufficient tool life cannot be obtained with the iAlN coating.

【0004】[0004]

【本発明の目的】本発明はこうした事情に鑑みなされた
ものであって、従来のTiAlN皮膜に対し、更に耐酸
化性、耐摩耗性を改善し、切削加工の乾式化、高速化に
対応する硬質皮膜被覆工具を提供することが目的であ
る。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is intended to improve the oxidation resistance and wear resistance of a conventional TiAlN film and to cope with a dry and high-speed cutting process. It is an object to provide a hard film coated tool.

【0005】[0005]

【課題を解決するための手段】発明者等は、硬質皮膜の
耐酸化性、耐摩耗性および密着性に及ぼす、様々な元素
の影響および皮膜の層構造について詳細な検討を行った
結果、Siを適量含有したTiを主成分とする窒化物、
炭窒化物、酸窒化物もしくは酸炭窒化物(以下、TiS
i系化合物等と記す。)と、TiとAlを主成分とした
窒化物、炭窒化物、酸窒化物もしくは酸炭窒化物(以
下、TiAl系化合物等と記す。)に含まれる金属成分
を特定値内に制限した皮膜を、それぞれ一層以上交互に
被覆し、その際、上述のTiAl系化合物等の皮膜を母
材表面直上にし、かつTiSi系化合物等の格子定数を
0.417nm以上0.423nm以下になるよう成膜
することで、乾式の高速切削加工において、切削工具の
性能が極めて良好となることを見出し本発明に到達し
た。すなわち、本発明は、高速度鋼、超硬合金、サーメ
ット、セラミックスの何れかを母材とし、硬質皮膜のa
層は金属成分のみの原子%で、Siが10%以上60%
以下、B、Al、V、Cr、Y、Zr、Nb、Mo、H
f、Ta、Wの1種または2種以上で10%未満、残り
Tiから構成される窒化物、炭窒化物、酸窒化物、酸炭
窒化物のいずれかであり、NaCl型結晶構造を有し、
かつ格子定数が0.417nm以上0.423nm以下
からなり、硬質皮膜のb層は金属成分のみの原子%が、
Al:40%越え75%以下、B、Si、V、Cr、
Y、Zr、Nb、Mo、Hf、Ta、Wの1種または2
種以上で10%未満、残Tiで構成される窒化物、炭窒
化物、酸窒化物、酸炭窒化物のいずれかで、NaCl型
結晶構造からなり、該a層、b層がそれぞれ一層以上交
互に被覆され、かつ、b層が母材表面直上にしたもので
あり、更に上記硬質皮膜は、物理蒸着法により被覆され
ることが望ましい。
The inventors of the present invention have conducted detailed studies on the effects of various elements on the oxidation resistance, abrasion resistance and adhesion of a hard coating and the layer structure of the coating. A nitride mainly containing Ti containing an appropriate amount of
Carbonitride, oxynitride or oxycarbonitride (hereinafter referred to as TiS
It is referred to as i-based compound or the like. ) And a film in which a metal component contained in a nitride, carbonitride, oxynitride or oxycarbonitride (hereinafter, referred to as TiAl-based compound or the like) mainly containing Ti and Al is limited to a specific value. Are alternately coated one or more times, and at this time, the film of the above-mentioned TiAl-based compound is formed directly on the surface of the base material, and the lattice constant of the TiSi-based compound is 0.417 nm or more and 0.423 nm or less. By doing so, it was found that the performance of the cutting tool was extremely good in dry high-speed cutting, and the present invention was reached. That is, the present invention uses any of high-speed steel, cemented carbide, cermet, and ceramics as a base material,
The layer is composed of atomic% of metal component only, and Si is 10% or more and 60%.
Hereinafter, B, Al, V, Cr, Y, Zr, Nb, Mo, H
One or more of f, Ta, and W is less than 10%, and is a nitride, carbonitride, oxynitride, or oxycarbonitride composed of remaining Ti, and has a NaCl-type crystal structure. And
And the lattice constant is 0.417 nm or more and 0.423 nm or less, and the b layer of the hard film has an atomic% of only the metal component
Al: more than 40% and 75% or less, B, Si, V, Cr,
One or two of Y, Zr, Nb, Mo, Hf, Ta, W
A nitride or carbonitride, oxynitride or oxycarbonitride composed of at least 10% and less than 10% of the remaining Ti, having a NaCl-type crystal structure, wherein each of the a layer and the b layer is at least one layer. It is preferable that the hard coating is alternately coated and the b layer is provided immediately above the surface of the base material, and the hard coating is coated by physical vapor deposition.

【0006】[0006]

【発明の実施の形態】一般にTiAlN皮膜は、大気中
で酸化テストを行うと、皮膜表面近傍のAlが最表面に
外向拡散し、そこでアルミナ層を形成する。本発明者ら
の研究によれば、このことが耐酸化性向上の理由と考え
られるが、この時、アルミナ層直下には、Alを含有し
ない非常にポーラスなTi酸化物が形成する。静的であ
る酸化テストにおいては、最表面に形成されたアルミナ
層が、酸化の進行である酸素の内向拡散に対し、酸化保
護膜として機能するものの、動的な切削加工において
は、最表面のアルミナ層は、その直下のポーラスなTi
酸化物層より容易に剥離してしまい、酸化の進行に対し
十分な効果を発揮しない。しかしながら、TiSi系化
合物等は皮膜自体の耐酸化性が極めて高いだけでなく、
最表面に酸化保護膜となるSiを含有する非常に緻密な
複合酸化物層が形成され、また、その直下には酸化保護
膜の剥離原因となるポーラスなTi酸化物が形成されな
いことを確認した。上記効果を得るには、Siが皮膜の
金属成分のみの原子%で、10%以上含有していなけれ
ばならず、逆に60%を越えて含有すると、皮膜の延性
ないしは硬さの低下が顕著になり、切削工具としての使
用に耐えられなくなる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS In general, when an oxidation test is performed in the atmosphere on a TiAlN film, Al near the surface of the film diffuses outward to the outermost surface, where an alumina layer is formed. According to the study of the present inventors, this is considered to be the reason for improving the oxidation resistance. At this time, a very porous Ti oxide containing no Al is formed immediately below the alumina layer. In the static oxidation test, the alumina layer formed on the outermost surface functions as an oxidation protective film against the inward diffusion of oxygen, which is the progress of oxidation. The alumina layer is directly under the porous Ti
It easily peels off from the oxide layer and does not exert a sufficient effect on the progress of oxidation. However, TiSi-based compounds and the like not only have extremely high oxidation resistance of the film itself,
It was confirmed that a very dense composite oxide layer containing Si serving as an oxide protective film was formed on the outermost surface, and that a porous Ti oxide causing peeling of the oxide protective film was not formed immediately below. . In order to obtain the above effect, Si must be contained in an amount of 10% or more in atomic% of only the metal component of the film. Conversely, if it exceeds 60%, the decrease in ductility or hardness of the film is remarkable. And cannot be used as a cutting tool.

【0007】a層に含ませるB、Al、V、Cr、Y、
Zr、Nb、Mo、Hf、Ta、Wは、TiSi系化合
物等の皮膜中において固溶強化元素として働き、皮膜の
高硬度化に有効である。そのため、必要に応じB、A
l、V、Cr、Y、Zr、Nb、Mo、Hf、Ta、W
の1種または2種以上を微量添加することが望ましい。
しかしながら皮膜の金属成分のみの原子%で10%以上
添加すると、前述したSi含有による耐酸化性向上効果
が得られなくなる。よって、B、Al、V、Cr、Y、
Zr、Nb、Mo、Hf、Ta、Wは、1種または2種
以上で10%未満とする。更にa層は、その格子定数を
0.417nm以上0.423nm以下にすることで高
硬度化が達成でき、著しく耐摩耗性に優れた皮膜が得ら
れる。発明者等の研究によれば、請求項記載の成分範囲
においては、単一のa層の格子定数は0.424〜0.
426nmであり、単一のb層の格子定数は0.415
〜0.417nmと単一のb層の方が極端に小さい。し
かしながら、a層およびb層をそれぞれ一層以上交互に
被覆し、その際の基体に印加するバイアス電圧を適当な
値に制御することで、a層は、その下地に位置するb層
と結晶格子レベルで整合する。その結果、a層の結晶格
子は単一で存在する場合よりも縮小することとなり、a
層には格子歪みが発生し、その硬さが向上する。a層お
よびb層を被覆する際、基体に印加するバイアス電圧
は、アーク放電方式イオンプレーティングや、スパッタ
リングといった物理蒸着法の違いや、同様の手法であっ
ても成膜装置の基本的な仕様によって絶対値は異なるも
のの、a層とb層の界面における結晶格子の整合性を確
保するには、両層を近似のバイアス電圧で成膜すること
により達成できる。
[0007] B, Al, V, Cr, Y,
Zr, Nb, Mo, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiSi-based compound and are effective in increasing the hardness of the film. Therefore, if necessary, B, A
1, V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W
It is desirable to add one or more of these in trace amounts.
However, if 10% or more of the atomic percentage of only the metal component of the coating is added, the effect of improving the oxidation resistance due to the Si content described above cannot be obtained. Therefore, B, Al, V, Cr, Y,
One or more of Zr, Nb, Mo, Hf, Ta, and W are less than 10%. Further, the a layer can achieve high hardness by setting the lattice constant to be 0.417 nm or more and 0.423 nm or less, and a film having extremely excellent wear resistance can be obtained. According to the study by the inventors, in the component range described in the claims, the lattice constant of a single a-layer is 0.424-0.
426 nm, and the lattice constant of a single b layer is 0.415
The single b-layer is extremely small, at ~ 0.417 nm. However, the layer a and the layer b are alternately coated one or more times, and the bias voltage applied to the substrate at that time is controlled to an appropriate value, so that the layer a and the crystal lattice level To match. As a result, the crystal lattice of the a-layer is smaller than that of a single layer, and a
The layer undergoes lattice distortion and its hardness increases. When coating the a layer and the b layer, the bias voltage applied to the substrate is different from the physical vapor deposition method such as the arc discharge type ion plating and sputtering, and the basic specification of the film forming apparatus even if the same method is used. Although the absolute value differs depending on the type, the matching of the crystal lattice at the interface between the a layer and the b layer can be achieved by forming both layers at an approximate bias voltage.

【0008】次に、b層におけるAlの役割は、皮膜の
耐摩耗性および耐酸化性を向上させることである。皮膜
中におけるAl含有量が少ないほど、母材と皮膜の密着
性は良好となるが、皮膜の金属成分のみの原子%で、A
lが40%以下となると、皮膜の耐摩耗性、耐酸化性を
向上させる効果が得られない。しかしながら、75%を
越えて含有すると、母材と皮膜の密着性が劣化するだけ
でなく、逆に皮膜の硬さも低下し、工具として必要な耐
摩耗性が得られない。そのため、密着性、耐摩耗性、耐
酸化性をバランス良く得るためには、b層のAl含有量
を、皮膜の金属成分のみの原子%で、40%越え75%
以下に調整することが重要である。B、Si、V、C
r、Y、Zr、Nb、Mo、Hf、Ta、Wは、TiA
l系化合物等の皮膜中において固溶強化元素として働
き、皮膜の高硬度化に有効である。そのため、必要に応
じB、Si、V、Cr、Y、Zr、Nb、Mo、Hf、
Ta、Wの1種または2種以上を微量添加することが望
ましい。しかしながら皮膜の金属成分のみの原子%で1
0%以上添加すると、母材と皮膜の密着性が低下する。
そのため、密着性、耐摩耗性、耐酸化性をバランス良く
得るためには、B、Si、V、Cr、Y、Zr、Nb、
Mo、Hf、Ta、Wは1種または2種以上で10%未
満とする。
Next, the role of Al in the b layer is to improve the wear resistance and oxidation resistance of the film. The lower the Al content in the coating, the better the adhesion between the base material and the coating.
If l is 40% or less, the effect of improving the wear resistance and oxidation resistance of the film cannot be obtained. However, if the content exceeds 75%, not only the adhesion between the base material and the film is deteriorated, but also the hardness of the film is lowered, and the wear resistance required for a tool cannot be obtained. Therefore, in order to obtain a good balance of adhesion, abrasion resistance, and oxidation resistance, the Al content of the b layer should be over 40% and 75% by atomic% of only the metal component of the film.
It is important to adjust the following. B, Si, V, C
r, Y, Zr, Nb, Mo, Hf, Ta and W are TiA
It acts as a solid solution strengthening element in a film such as an l-compound and is effective in increasing the hardness of the film. Therefore, B, Si, V, Cr, Y, Zr, Nb, Mo, Hf,
It is desirable to add a trace amount of one or more of Ta and W. However, the atomic percentage of only the metal component of the coating is 1
Addition of 0% or more lowers the adhesion between the base material and the film.
Therefore, in order to obtain a good balance of adhesion, abrasion resistance and oxidation resistance, B, Si, V, Cr, Y, Zr, Nb,
Mo, Hf, Ta, and W are one kind or two or more kinds and less than 10%.

【0009】上述のように本発明においては、母材との
密着性、皮膜自体の耐摩耗性および耐酸化性をバランス
良く有すNaCl型結晶構造のb層を母材表面直上に被
覆し、その上に著しく耐酸化性、耐摩耗性に優れるa層
をb層と同じNaCl型結晶構造の状態で被覆すること
が極めて重要であり、その結果、乾式の高速切削に対応
する切削工具を得ることが可能となる。また、母材表面
直上にb層を被覆した後、a層ならびにb層をそれぞれ
交互に積層した多層皮膜によっても同様の効果が得られ
る。また、各層は必要に応じて窒化物、炭窒化物、酸窒
化物、酸炭窒化物のいずれかに調整でき、それらを被覆
した工具についても同様の効果が得られる。
As described above, in the present invention, a b-layer having a NaCl-type crystal structure having a good balance of adhesion to the base material, abrasion resistance and oxidation resistance of the film itself is coated directly on the base material surface, It is extremely important to coat the layer a, which is remarkably excellent in oxidation resistance and wear resistance, on the layer with the same NaCl-type crystal structure as the layer b. As a result, a cutting tool corresponding to dry high-speed cutting is obtained. It becomes possible. The same effect can be obtained by a multilayer coating in which a layer b and a layer b are alternately laminated after coating the layer b directly on the surface of the base material. In addition, each layer can be adjusted to any of nitride, carbonitride, oxynitride, and oxycarbonitride as necessary, and the same effect can be obtained for a tool coated therewith.

【0010】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性、および
a層とb層の整合性等を考慮した場合、比較的低温で被
覆でき、被覆した皮膜に圧縮応力が残留するアーク放電
方式イオンプレーティング、もしくはスパッタリング等
の被覆母材側にバイアス電圧を印加する物理蒸着法であ
ることが望ましい。以下、本発明を実施例に基づいて説
明する。
The method of coating the hard film-coated tool of the present invention is not particularly limited, but the heat influence on the coated base material, the fatigue strength of the tool, the adhesion of the film, and the a layer and the b Considering the layer consistency, etc., the coating can be applied at a relatively low temperature and compressive stress remains in the coated film. An arc discharge type ion plating or a physical vapor deposition method that applies a bias voltage to the coating base material side such as sputtering. It is desirable that Hereinafter, the present invention will be described based on examples.

【0011】[0011]

【実施例】小型アークイオンプレーティング装置を用
い、金属成分の蒸発源である各種合金製ターゲット、な
らびに反応ガスであるNガス、CHガス、Ar
/O 混合ガスから目的の皮膜が得られるものを選択
し、被覆基体温度400℃、反応ガス圧力3.0Paの
条件下にて、被覆基体である外径8mmの超硬合金製6
枚刃エンドミルおよび超硬合金製インサートに、全皮膜
の厚みが4μmとなるように成膜を行った。なお、本発
明例の全てと、比較例54、55、56、58、59に
ついては、a層ならびにb層ともに−100Vの同じバ
イアス電圧を印加し成膜したが、比較例51、52、5
3、57については、a層を−30V、b層を−200
Vとそれぞれ異なったバイアス電圧を印加し成膜した。
また、従来例については、全て−100Vのバイアス電
圧を印加し成膜した。得られた硬質皮膜被覆エンドミル
およびインサートを用い、次の乾式の高速切削条件に
て、刃先の欠けないしは摩耗等により工具が切削不能と
なるまで加工を行い、その時の切削長を工具寿命とし
た。
[Embodiment] Using a small arc ion plating device
Various alloy targets, which are evaporation sources for metal components,
The reaction gas N2Gas, CH4Gas, Ar
/ O 2Select the one that can obtain the target film from the mixed gas
And a coating substrate temperature of 400 ° C. and a reaction gas pressure of 3.0 Pa.
Under the conditions, the coated substrate 6
Full coating on single-flute end mills and cemented carbide inserts
Was formed so as to have a thickness of 4 μm. In addition,
All of the light examples and Comparative Examples 54, 55, 56, 58, 59
The same level of -100 V was applied to both the layer a and the layer b.
Films were formed by applying an ias voltage.
For layers 3 and 57, the layer a is −30 V and the layer b is −200.
A bias voltage different from V was applied to form a film.
Further, in the conventional example, the bias voltage of
Pressure was applied to form a film. End mill with hard coating obtained
And inserts to meet the following dry high-speed cutting conditions
The tool cannot be cut due to chipping or wear of the cutting edge.
Machining until the cutting length is equal to the tool life.
Was.

【0012】エンドミルの切削諸元は、側面切削ダウン
カットにて、被削材SKD11(60HRC)を、切削
速度200m/min、送り量0.03mm/刃、切り
込み量Ad=12mm、Rd=0.2mmでエアーブロ
ーを用いて行った。インサートの切削諸元は、直径16
0mmの正面フライス(インサート形状=SEE42T
N)にて、巾100mm×長さ250mmの平面加工
を、被削材:SKD61(45HRC)にて、切削速度
200m/min、送り量0.15mm/刃、切り込み
量:2.0mmで行った。表1に本発明例、表2に比較
例、表3に従来例の硬質皮膜に関する詳細およびそれら
の切削結果を示す。a層中の格子定数に付いてはX線回
折により算出した。併せて、表3に示す。
The cutting specifications of the end mill are as follows: side cut down cut, cuts a workpiece SKD11 (60HRC) at a cutting speed of 200 m / min, feed amount 0.03 mm / tooth, cutting amount Ad = 12 mm, Rd = 0. This was performed using an air blow at 2 mm. The cutting specifications of the insert are 16
0 mm face mill (insert shape = SEE42T)
N), a plane processing of width 100 mm × length 250 mm was performed with a work material: SKD61 (45HRC) at a cutting speed of 200 m / min, a feed amount of 0.15 mm / blade, and a cutting amount: 2.0 mm. . Table 1 shows examples of the present invention, Table 2 shows comparative examples, and Table 3 shows details of hard coatings of conventional examples and cutting results thereof. The lattice constant in the a layer was calculated by X-ray diffraction. Table 3 also shows the results.

【0013】[0013]

【表1】 [Table 1]

【0014】[0014]

【表2】 [Table 2]

【0015】[0015]

【表3】 [Table 3]

【0016】表1、表2および表3より、本発明例は、
比較例ならびに従来例と比べて、工具寿命が著しく向上
しており、乾式高速切削加工に十分対応することがわか
る。比較例51は、皮膜の組成については本発明に含ま
れるものであるが、皮膜の層構造が異なるため、エンド
ミルおよびインサート、両工具の切削において、皮膜の
剥離が早期に生じ、非常に短寿命となった。比較例5
3、57は、皮膜の組成、層構造については本発明に含
まれるものであるが、a層の格子定数が満足していない
ため、十分な皮膜硬さが得られず本発明例に比べ短寿命
となった。
From Tables 1, 2 and 3, the present invention example
The tool life is remarkably improved as compared with the comparative example and the conventional example, and it can be seen that the tool life is sufficiently compatible with dry high-speed cutting. In Comparative Example 51, the composition of the film is included in the present invention. However, since the layer structure of the film is different, peeling of the film occurs early in cutting of the end mill, the insert, and both tools, resulting in a very short life. It became. Comparative Example 5
Nos. 3 and 57 are included in the present invention with respect to the composition and layer structure of the film, but since the lattice constant of the a layer is not satisfied, sufficient film hardness cannot be obtained, and the film thickness is shorter than that of the present invention. Life has expired.

【0017】[0017]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた耐酸化性、耐摩耗性を
有すことから、乾式高速切削加工において格段に長い工
具寿命が得られ、切削加工における生産性の向上に極め
て有効である。
As described above, the hard-coated tool of the present invention has superior oxidation resistance and wear resistance as compared with the conventional coated tool, so that the tool life in dry high-speed cutting is significantly longer. This is extremely effective in improving productivity in cutting.

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B23B 27/14 B23C 5/16 C23C 14/06 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 7 , DB name) B23B 27/14 B23C 5/16 C23C 14/06

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 高速度鋼、超硬合金、サーメット、セラ
ミックスの何れかを母材とし、硬質皮膜のa層は金属成
分のみの原子%で、Siが10%以上60%以下、B、
Al、V、Cr、Y、Zr、Nb、Mo、Hf、Ta、
Wの1種または2種以上で10%未満、残りTiから構
成される窒化物、炭窒化物、酸窒化物、酸炭窒化物のい
ずれかであり、NaCl型結晶構造を有し、かつ格子定
数が0.417nm以上0.423nm以下からなり、
硬質皮膜のb層は金属成分のみの原子%が、Al:40
%越え75%以下、B、Si、V、Cr、Y、Zr、N
b、Mo、Hf、Ta、Wの1種または2種以上で10
%未満、残Tiで構成される窒化物、炭窒化物、酸窒化
物、酸炭窒化物のいずれかで、NaCl型結晶構造から
なり、該a層、b層がそれぞれ一層以上交互に被覆さ
れ、かつ、b層が母材表面直上にあることを特徴とする
硬質皮膜被覆工具。
A high-speed steel, cemented carbide, cermet, or ceramic is used as a base material, and an a layer of a hard coating is an atomic% of only a metal component, and Si is 10% or more and 60% or less, and B,
Al, V, Cr, Y, Zr, Nb, Mo, Hf, Ta,
One or more of W and less than 10%, the rest being any of nitride, carbonitride, oxynitride or oxycarbonitride composed of Ti, having a NaCl-type crystal structure, and a lattice The constant is comprised between 0.417 nm and 0.423 nm,
The b layer of the hard coating has an atomic percentage of only the metal component of Al: 40%.
%, 75% or less, B, Si, V, Cr, Y, Zr, N
b, Mo, Hf, Ta, W or one or more of 10
%, Any of a nitride, carbonitride, oxynitride, or oxycarbonitride composed of the remaining Ti, having a NaCl-type crystal structure, wherein the a layer and the b layer are alternately coated one or more times. And a hard-film-coated tool, wherein the b layer is located immediately above the surface of the base material.
【請求項2】 請求項1記載の硬質皮膜被覆工具におい
て、該硬質皮膜は物理蒸着法により被覆されたことを特
徴とする硬質皮膜被覆工具。
2. The tool according to claim 1, wherein said hard coating is coated by physical vapor deposition.
JP2000076873A 1999-03-19 2000-03-17 Hard coating tool Expired - Lifetime JP3248898B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000076873A JP3248898B2 (en) 1999-03-19 2000-03-17 Hard coating tool

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP7565499 1999-03-19
JP11-75654 1999-03-19
JP2000076873A JP3248898B2 (en) 1999-03-19 2000-03-17 Hard coating tool

Publications (2)

Publication Number Publication Date
JP2000334607A JP2000334607A (en) 2000-12-05
JP3248898B2 true JP3248898B2 (en) 2002-01-21

Family

ID=26416804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000076873A Expired - Lifetime JP3248898B2 (en) 1999-03-19 2000-03-17 Hard coating tool

Country Status (1)

Country Link
JP (1) JP3248898B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2100985A1 (en) 2008-01-31 2009-09-16 Union Tool Co. Hard film for cutting tool

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010095800A (en) * 2000-12-28 2010-04-30 Kobe Steel Ltd Method of producing hard film
JP3690292B2 (en) * 2001-02-28 2005-08-31 三菱マテリアル神戸ツールズ株式会社 Surface coated cemented carbide cutting tool with excellent surface lubricity against chips
US7041335B2 (en) * 2002-06-04 2006-05-09 Applied Materials, Inc. Titanium tantalum nitride silicide layer
ES2552056T3 (en) * 2002-06-25 2015-11-25 Mitsubishi Materials Corporation Member of coated cutting tool
JP2006082208A (en) * 2004-09-17 2006-03-30 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
JP5037931B2 (en) * 2006-12-25 2012-10-03 京セラ株式会社 Surface coating tool
JP2009070726A (en) * 2007-09-14 2009-04-02 Teijin Ltd Method for manufacturing nonaqueous electrolyte battery
JP5094368B2 (en) * 2007-12-25 2012-12-12 京セラ株式会社 Cutting tools
JP5121486B2 (en) * 2008-02-12 2013-01-16 京セラ株式会社 Cutting tools
SE533883C2 (en) 2009-06-01 2011-02-22 Seco Tools Ab Nanolaminated coated cutting tool
SE533884C2 (en) * 2009-06-01 2011-02-22 Seco Tools Ab Nanolaminated coated cutting tool
JP5502677B2 (en) * 2009-09-28 2014-05-28 日立金属株式会社 Metal plastic working tool with excellent lubrication characteristics and method for producing the same
JP5376374B2 (en) * 2010-02-12 2013-12-25 住友電工ハードメタル株式会社 Surface coated cutting tool
JP5376375B2 (en) * 2010-02-12 2013-12-25 住友電工ハードメタル株式会社 Surface coated cutting tool
US8409695B2 (en) * 2010-05-28 2013-04-02 Kennametal Inc. Multilayer nitride hard coatings
BR112013033654B1 (en) * 2011-06-30 2020-12-29 Oerlikon Surface Solutions Ag, Trübbach method for making a coated body
JP6601694B2 (en) 2015-10-07 2019-11-06 株式会社タンガロイ Coated cutting tool
EP3450591A1 (en) * 2017-08-30 2019-03-06 Seco Tools Ab A coated cutting tool and a method for coating the cutting tool

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2100985A1 (en) 2008-01-31 2009-09-16 Union Tool Co. Hard film for cutting tool

Also Published As

Publication number Publication date
JP2000334607A (en) 2000-12-05

Similar Documents

Publication Publication Date Title
JP3248897B2 (en) Hard coating tool
JP3347687B2 (en) Hard coating tool
JP3248898B2 (en) Hard coating tool
JP3343727B2 (en) Hard coating tool
JP3598074B2 (en) Hard coating tool
EP2636764A1 (en) Nanolaminated coated cutting tool
JP3229947B2 (en) Surface-coated indexable inserts
JP3394021B2 (en) Coated cutting tool
JP3454428B2 (en) Wear-resistant film-coated tools
JP3586218B2 (en) Coated cutting tool
JP2840541B2 (en) Hard coating, hard coating tool and hard coating member excellent in wear resistance
JP2000218407A (en) Hard coating covering tool
JP3589396B2 (en) Hard coating tool
JP2019155569A (en) Surface-coated cutting tool having hard coating layer exerting excellent oxidation resistance and deposition resistance
JP2002337005A (en) Abrasive-resistant coating coated tool
JP4569981B2 (en) Hard coating tool
JP3586216B2 (en) Hard coating tool
JP3358696B2 (en) High strength coating
JPH08199338A (en) Coated hard alloy
JP3779948B2 (en) Hard coating tool
JP3679076B2 (en) Hard coating tool
JP2003291007A (en) Hard-coating coated tool
JP4214344B2 (en) Hard coating tool
JP3779951B2 (en) Hard coating tool
JP3598035B2 (en) Coated carbide end mill

Legal Events

Date Code Title Description
TRDD Decision of grant or rejection written
R150 Certificate of patent or registration of utility model

Ref document number: 3248898

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S202 Request for registration of non-exclusive licence

Free format text: JAPANESE INTERMEDIATE CODE: R315201

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S202 Request for registration of non-exclusive licence

Free format text: JAPANESE INTERMEDIATE CODE: R315201

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20071109

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081109

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081109

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081109

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

S202 Request for registration of non-exclusive licence

Free format text: JAPANESE INTERMEDIATE CODE: R315201

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091109

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101109

Year of fee payment: 9

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S202 Request for registration of non-exclusive licence

Free format text: JAPANESE INTERMEDIATE CODE: R315201

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101109

Year of fee payment: 9

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101109

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111109

Year of fee payment: 10

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111109

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121109

Year of fee payment: 11

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121109

Year of fee payment: 11

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131109

Year of fee payment: 12

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term