JP3394021B2 - Coated cutting tool - Google Patents
Coated cutting toolInfo
- Publication number
- JP3394021B2 JP3394021B2 JP2000200206A JP2000200206A JP3394021B2 JP 3394021 B2 JP3394021 B2 JP 3394021B2 JP 2000200206 A JP2000200206 A JP 2000200206A JP 2000200206 A JP2000200206 A JP 2000200206A JP 3394021 B2 JP3394021 B2 JP 3394021B2
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- film
- based film
- cutting tool
- crsi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Description
【0001】[0001]
【発明が属する技術分野】本発明は、金属材料等の切削
加工に使用される被覆切削工具に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coated cutting tool used for cutting metal materials and the like.
【0002】[0002]
【従来の技術】近年の高能率、高精度切削においては切
削工具表面に被覆する耐摩耗皮膜と被削材との凝着およ
び溶着現象が切削性能に大きな影響を及ぼす。すなわ
ち、現在主流のTiAlN皮膜など、高温特性および耐
アブレッシブ摩耗性を追求した高硬度皮膜においては被
削材との凝着および溶着現象等に起因した摩擦抵抗の増
加により、十分な切削寿命が得られないばかりでなく、
切削加工面のむしれ現象により、加工精度を劣化させた
りなどの課題がある。ところで、金型などの表面処理で
はCrN皮膜が摺動特性および被処理物との親和性に優
れ、結果として潤滑作用を有し優れた特性を示すことが
知られる。そこで、前記課題を解決する試みとして、こ
のCrN皮膜の潤滑性を切削工具に応用した事例が特開
平11−156992号、特表平11−505573号
に開示されている。また、BNを混在させCrN皮膜の
耐摩耗性を改善した例として特開平7−150337号
がある。2. Description of the Related Art In recent years, in high-efficiency and high-precision cutting, the phenomenon of adhesion and welding between a wear-resistant coating on the surface of a cutting tool and a work material has a great influence on the cutting performance. That is, in the case of high hardness coatings that pursue high temperature characteristics and abrasive wear resistance, such as the TiAlN coatings that are currently the mainstream, a sufficient cutting life can be obtained due to the increase in frictional resistance due to the adhesion with the work material and the welding phenomenon. Not only not
There are problems such as deterioration of processing accuracy due to the peeling phenomenon of the cutting surface. By the way, it is known that in the surface treatment of a mold or the like, the CrN film has excellent sliding characteristics and affinity with the object to be treated, and as a result, has a lubricating action and exhibits excellent characteristics. Therefore, as an attempt to solve the above problems, examples of applying the lubricity of this CrN coating to a cutting tool are disclosed in JP-A-11-156992 and JP-A-11-505573. Also, as an example of improving the wear resistance of the CrN coating by mixing BN, there is JP-A-7-150337.
【0003】[0003]
【発明が解決しようとする課題】しかしCrN皮膜は皮
膜硬度が十分ではなく、皮膜中に残留する圧縮応力も極
めて低いことより、過酷な切削環境下においては耐摩耗
性が十分ではなく、また熱クラックによる皮膜剥離が生
じてしまう。特に湿式切削加工においては耐熱クラック
性が極めて悪く熱クラックによる皮膜破壊もしくは剥離
が生じる。本発明はこうした事情に鑑み、被削材との凝
着および溶着現象等に起因した摩擦抵抗の増加を抑制
し、皮膜剥離及び熱クラックによる異常摩耗の生じるこ
とのない耐凝着皮膜を採用した被覆切削工具を提供する
ことを課題とする。However, since the CrN film has insufficient film hardness and the compressive stress remaining in the film is extremely low, it does not have sufficient wear resistance in a severe cutting environment, and the heat resistance Film peeling due to cracks will occur. In particular, in wet cutting, the resistance to heat cracking is extremely poor and film breakage or peeling due to heat cracking occurs. In view of these circumstances, the present invention employs an anti-adhesion coating that suppresses an increase in frictional resistance due to adhesion with a work material and a welding phenomenon, and does not cause abnormal wear due to film peeling and thermal cracking. An object is to provide a coated cutting tool.
【0004】[0004]
【課題を解決するための手段】本発明の要旨は、切削工
具基体に1層又は多層からなる被覆層を被覆した被覆切
削工具において、該被覆層の少なくとも1層は(Cra
Si1−a)(NxB1 −x)、但し0.7≦a<1、
0.4≦x≦1、で示される化学組成からなり、かつ、
Siの窒化物相及び/又はBの窒化物相を含むCrSi
系膜であることを特徴とする被覆切削工具である。The gist of the present invention is a coated cutting tool in which a cutting tool substrate is coated with a coating layer consisting of one layer or multiple layers, and at least one of the coating layers is (Cr a
Si 1-a ) (N x B 1 -x ), where 0.7 ≦ a <1,
0.4 ≦ x ≦ 1, and has a chemical composition represented by:
CrSi containing Si nitride phase and / or B nitride phase
It is a coated cutting tool characterized by being a system film.
【0005】[0005]
【発明の実施の形態】このような構成を採用すること
で、高速切削加工などの過酷な切削環境下においても皮
膜剥離を生ずることなく切削工具の性能が極めて良好と
なり、被加工物の精度が著しく向上することが判明し、
従来技術の課題を解決するに至った。CrSi系膜のC
r窒化物への適量の添加元素は、優れた性能を発揮する
ものの、Cr含有量が金属成分の原子比率で70at%
未満となる場合には、切削特性が十分に得られないばか
りでなく、Cr窒化物中にSiまたはBが過度に固溶し
てしまい、皮膜が非常に脆くなり耐凝着性能が低下す
る。このことより、CrSi系膜へのSiの添加は30
at%以下とする必要がある。また、Cr窒化物中への
Bの添加量は低摩擦化および耐摩耗性の観点から、非金
属成分の60at%以下とする必要がある。なお、本明
細書ではBを非金属成分として扱う。By adopting such a structure, the performance of the cutting tool becomes extremely good without causing film peeling even under a severe cutting environment such as high-speed cutting and the accuracy of the work piece is improved. Proved to be significantly improved,
The problems of the prior art have been solved. C of CrSi-based film
Although an appropriate amount of additive element to the r-nitride exhibits excellent performance, the Cr content is 70 at% in terms of atomic ratio of metal component.
If the amount is less than the above, not only the cutting characteristics are not sufficiently obtained, but also Si or B is excessively dissolved in the Cr nitride, so that the coating becomes very brittle and the adhesion resistance is deteriorated. From this, the addition of Si to the CrSi-based film is 30
It must be at% or less. In addition, the amount of B added to the Cr nitride needs to be 60 at% or less of the non-metal component from the viewpoints of low friction and wear resistance. In this specification, B is treated as a non-metal component.
【0006】Cr窒化物の耐摩耗性および耐熱クラック
性を改善する手段として、Cr窒化物中にSiおよび/
またはBを添加し、Cr窒化物中にSi窒化物相または
Bの窒化物相を介在させることが極めて有効である。本
発明に係るCrSi系膜を透過電子顕微鏡により詳細に
観察した結果、このSiの窒化物相またはBの窒化物相
は20nm程度のナノ結晶であり、fcc構造を有し柱
状に成長するCrN相内にこのナノ結晶が分散したもの
であることを確認した。このナノ結晶が格子歪を発生し
分散強化機構により、皮膜中の残留圧縮応力を適度に上
昇させ、耐凝着性を劣化させることなく皮膜を高硬度化
し耐摩耗性の著しい改善が成されたものと考えられる。
更に、この適度な残留圧縮応力は、湿式切削加工におけ
る熱クラックの抑制、更には高速切削加工などのより過
酷な切削環境化においても効果的に作用する為、安定し
た切削を可能にする。特にSiの窒化物相の介在は湿式
切削における改善に大きく寄与している。更に、Bの窒
化物はCr窒化物の更なる低摩擦化に寄与し、切削加工
面のむしれ現象または被加工物の再付着を抑制し加工面
を著しく改善するに至った。As a means for improving the wear resistance and heat crack resistance of Cr nitride, Si and / or
Alternatively, it is extremely effective to add B and interpose the Si nitride phase or the B nitride phase in the Cr nitride. As a result of observing the CrSi-based film according to the present invention in detail with a transmission electron microscope, the Si nitride phase or the B nitride phase is a nanocrystal of about 20 nm, and has a fcc structure and grows into a columnar CrN phase. It was confirmed that the nanocrystals were dispersed inside. The nanocrystals generate lattice strain, and the dispersion strengthening mechanism moderately increases the residual compressive stress in the coating, making the coating highly hard without deteriorating the adhesion resistance and significantly improving the wear resistance. It is considered to be a thing.
Further, this moderate residual compressive stress effectively suppresses thermal cracks in wet cutting, and also works effectively in a more severe cutting environment such as high-speed cutting, thus enabling stable cutting. In particular, the intervening Si nitride phase greatly contributes to improvement in wet cutting. Furthermore, the nitride of B contributes to the further reduction of the friction of Cr nitride, suppresses the peeling phenomenon of the machined surface or the re-adhesion of the workpiece, and has significantly improved the machined surface.
【0007】上記CrSi系膜は、静的および動的条件
下において優れた密着性、低摩擦を有すものの、調質材
など高硬度を有する被削材に対しては単一皮膜では十分
な切削性能を示さない場合がある。そこで、優れた耐摩
耗性、耐酸化性を有する膜を併用する必要があるが、こ
の膜として最適なのは、金属元素として少なくともTi
とAlを含み、非金属元素として少なくNを含むTiA
l系膜である。これを採用することで、高速切削に対応
する被覆切削工具を得ることが可能となる。TiAl系
膜とCrSi系膜を交互に、それぞれ1層以上積層する
事により、高速切削に対応する被覆切削工具を得ること
が可能となる。TiAl系膜は耐酸化性と耐摩耗性をバ
ランス良く有するばかりでなく、請求項3記載の密着性
改善方法によりCrSi系膜との密着性が特に優れるた
め、CrSi系膜の特性を補完し、その性能を最大限に
発揮させるものである。このときCrSi系膜は硬質皮
膜の最上層に有ることが好ましいが、必ずしも最上層で
なくとも、その効果を十分に発揮するものである。Although the CrSi-based film has excellent adhesion and low friction under static and dynamic conditions, a single film is sufficient for a work material having high hardness such as a temper material. It may not show cutting performance. Therefore, it is necessary to use a film having excellent wear resistance and oxidation resistance in combination, but the most suitable film for this film is at least Ti as a metal element.
TiA containing Al and Al, and containing a small amount of N as a non-metal element
It is an l-based film. By adopting this, it becomes possible to obtain a coated cutting tool compatible with high-speed cutting. By alternately laminating one or more layers of the TiAl-based film and the CrSi-based film, it is possible to obtain a coated cutting tool compatible with high-speed cutting. The TiAl-based film not only has a good balance of oxidation resistance and wear resistance, but also has excellent adhesion to the CrSi-based film by the adhesion-improving method according to claim 3, so that the characteristics of the CrSi-based film are complemented, It maximizes its performance. At this time, the CrSi-based film is preferably on the uppermost layer of the hard film, but the effect is not limited to the uppermost layer, and the effect is sufficiently exhibited.
【0008】さらに、該TiAl系膜と該CrSi系膜
の夫々の(111)面のX線回折から算出される格子定
数の比の値を0.98乃至1.02とすることで、Cr
Si系膜とTiAl系膜の原子間での格子不整合が低減
し、その結果、著しい密着性の向上を示す。この値はT
iAl系膜の(111)面より算出される格子定数を、
通常はその直上に成膜されるCrSi系膜の(111)
面より算出される格子定数で除した値である。より具体
的には、TiAl系膜とCrSi系膜の(111)面か
ら算出される格子定数がそれぞれ0.412nm乃至
0.420nmの範囲内であれば上記格子定数の比の値
が満足され、このことが、CrSi系膜とTiAl系膜
の原子間での格子不整合を低減し、TiAl系膜とCr
Si系膜の膜界面強度が著しく向上し、界面剥離が生じ
なくなり、その結果、著しい密着性の向上を示すものと
なった。この格子定数の調整方法としても成膜条件に大
きく依存するため、目的とした格子定数となるように適
宜調整する必要がある。主に影響的なパラメータとして
はバイアス電圧であるがTiAl系膜の直上には比較的
エネルギーの低い側が好ましい。より具体的にはバイア
ス電圧が−30〜−200Vが良い。即ち、成膜過程に
おける膜種の切り替え前後においてこのバイアスを適用
することにより高密着が得られる。Further, by setting the ratio of lattice constants calculated from the X-ray diffraction of the (111) planes of the TiAl-based film and the CrSi-based film to 0.98 to 1.02, Cr
The lattice mismatch between atoms of the Si-based film and the TiAl-based film is reduced, and as a result, the adhesiveness is remarkably improved. This value is T
The lattice constant calculated from the (111) plane of the iAl-based film is
Usually, a (111) CrSi-based film formed immediately above
It is a value divided by the lattice constant calculated from the plane. More specifically, if the lattice constants calculated from the (111) planes of the TiAl-based film and the CrSi-based film are in the range of 0.412 nm to 0.420 nm, respectively, the value of the lattice constant ratio is satisfied, This reduces the lattice mismatch between the atoms of the CrSi-based film and the TiAl-based film, and reduces the TiAl-based film and the Cr-based film.
The interfacial strength of the Si-based film was remarkably improved, and interfacial peeling did not occur. As a result, the adhesion was remarkably improved. Since the method of adjusting the lattice constant also depends largely on the film forming conditions, it is necessary to appropriately adjust the lattice constant so that the desired lattice constant is obtained. Although the bias voltage is the main influential parameter, the side of relatively low energy is preferable directly above the TiAl-based film. More specifically, the bias voltage is preferably -30 to -200V. That is, high adhesion can be obtained by applying this bias before and after switching the film type in the film forming process.
【0009】本発明におけるCrSi系膜は上述の如く
単独で使用しても工具として十分な性能を発揮しない場
合があるため、耐摩耗性、耐酸化性を補う膜を別途設
け、併用する必要がある。現時点ではこの膜として公知
のTiAl系膜が最適と思われるので、以下ではこれを
用いて説明するが、本願の請求項1に係る発明の実施に
おいては必ずしもTiAl系膜を併用する必要はない。Since the CrSi-based film in the present invention may not exhibit sufficient performance as a tool even if it is used alone as described above, it is necessary to separately provide a film for supplementing wear resistance and oxidation resistance and use together. is there. At this point in time, a known TiAl-based film is considered to be the most suitable, so the following description will be made using this film, but it is not always necessary to use a TiAl-based film together in the practice of the invention according to claim 1 of the present application.
【0010】[0010]
【実施例】本発明に係る前記CrSi系膜を基体表面に
形成する方法としては、イオンプレーティング法やスパ
ッタリング法等に代表されるPVD法が挙げられるが、
例えばアークイオンプレーティング法による成膜におい
ては以下による方法を用いれば良い。まず炉内を3×1
05Paまで真空排気を行った後にArによる基体の清
浄化および活性化を行う。その後、アーク放電により蒸
発源であるカソードからイオン化させたCr、Siおよ
びBをN2雰囲気中でイオンプレーティングすることに
よって得られる。更に目的とする皮膜組成に応じて組成
を調整したターゲットを使用すれば、目的の皮膜組成が
安定して得らる。EXAMPLES As a method of forming the CrSi-based film according to the present invention on the surface of a substrate, there is a PVD method typified by an ion plating method and a sputtering method.
For example, in the film formation by the arc ion plating method, the following method may be used. First, in the furnace 3 × 1
After evacuation to 0 5 Pa, the substrate is cleaned and activated with Ar. After that, Cr, Si, and B ionized from the cathode, which is the evaporation source by arc discharge, are obtained by ion plating in an N 2 atmosphere. Further, if a target whose composition is adjusted according to the target film composition is used, the target film composition can be stably obtained.
【0011】本発明において極めて重要であるSi窒化
物相またはBの窒化物相が分散したCrSi系膜の形成
は、成膜時の被覆条件に大きく依存する。即ち、皮膜形
成に関与するイオンが放出するエネルギー(以下、イオ
ンエネルギーと言う。)がきわめて重要であると本発明
者は考える。被覆時におけるイオンエネルギーの大小は
基体に印可するバイアス電圧に依存するので、本発明で
はバイアス電圧の設定が重要である。すなわち、比較的
低バイアス電圧の−50Vの場合には、Cr窒化物のf
cc構造におけるCr原子が、Si原子またはB原子と
置換し、Cr窒化物中に独立したSi窒化物相およびB
窒化物相は確認されなかった。すなわち、Cr窒化物中
にSiの窒化物相およびBの窒化物相を介在せしめるた
めには極めて高いイオンエネルギーで成膜する必要があ
る。イオンエネルギーは反応容器内圧力、イオン種など
にも依存するが、これらは目的とする被膜組成やイオン
源の性能によって制約を受けるため、変化させる余地が
少ない。よって、イオンエネルギーを高める手段として
はバイアス電圧が最も効果的なパラメータであり、−2
00〜−500V程度が好ましく、この範囲内であれば
Si窒化物相またはBの窒化物相がナノ単位で分散した
極めて優れた特性を示すCrSi系膜が得られ易い。そ
のほか、イオンエネルギーを高める手段として雰囲気中
に酸素など活性な気体成分を微量添加し、アーク放電中
のプラズマを活性化することも有効な手段である。The formation of the CrSi-based film in which the Si nitride phase or the B nitride phase is dispersed, which is extremely important in the present invention, largely depends on the coating conditions during film formation. That is, the present inventors consider that the energy released by the ions involved in film formation (hereinafter referred to as ion energy) is extremely important. Since the magnitude of the ion energy during coating depends on the bias voltage applied to the substrate, the setting of the bias voltage is important in the present invention. That is, in the case of a relatively low bias voltage of −50 V, f of Cr nitride is
Cr atoms in the cc structure are replaced with Si atoms or B atoms, and independent Si nitride phase and B in Cr nitride
No nitride phase was identified. That is, in order to interpose the Si nitride phase and the B nitride phase in the Cr nitride, it is necessary to form a film with extremely high ion energy. The ion energy also depends on the pressure in the reaction vessel, the ion species, etc., but these are limited by the target coating composition and the performance of the ion source, so there is little room for change. Therefore, the bias voltage is the most effective parameter for increasing the ion energy, and −2
A voltage of about 00 to -500 V is preferable, and within this range, a CrSi-based film having extremely excellent characteristics in which the Si nitride phase or the B nitride phase is dispersed in nano units is easily obtained. In addition, as a means for increasing the ion energy, it is also effective to add a small amount of an active gas component such as oxygen to the atmosphere to activate the plasma during arc discharge.
【0012】図1〜図3にX線光電子分光法により該C
rSi系膜内部に存在する化合物の結合エネルギーを測
定した結果を示す。図1はNの1S軌道における結合エ
ネルギーを示したものであるがCrNより構成される窒
化物が存在することを示すものである。図2はSiの2
P軌道における結合エネルギーを示したものであるがS
i3N4の結合が確認される。図3はBの1S軌道の結
合エネルギーを示したものであるがBNの結合が確認さ
れる。尚、当該ピークが表す結合エネルギーは図中に示
した。図1〜図3より、該CrSi系膜内にはSiの窒
化物およびBの窒化物相の結合が存在することが明らか
である。即ち、Cr窒化物、Si窒化物、B窒化物の結
合エネルギーが確認され、Cr窒化物中にSiおよびB
が窒化物として存在することが明らかとなった。1 to 3 show the C by X-ray photoelectron spectroscopy.
The result of having measured the binding energy of the compound which exists inside a rSi type | system | group film is shown. FIG. 1 shows the binding energy of N in the 1S orbit, but shows the existence of a nitride composed of CrN. Figure 2 shows Si 2
It shows the binding energy in P orbital, but S
Binding of i 3 N 4 is confirmed. FIG. 3 shows the binding energy of the 1S orbital of B, but the binding of BN is confirmed. The binding energy represented by the peak is shown in the figure. It is apparent from FIGS. 1 to 3 that there is a bond of Si nitride and B nitride phase in the CrSi-based film. That is, the binding energy of Cr nitride, Si nitride, and B nitride was confirmed, and Si and B were contained in the Cr nitride.
Has been revealed to exist as a nitride.
【0013】バイアス電圧を高くすると基体温度も上昇
する傾向がある。基体材質の要求から温度が制限される
場合は基体の冷却手段が必要となる場合がある。また、
基体温度によってSi窒化物相、Bの窒化物相の生成量
が変化する。本発明者の研究によれば温度の上昇と共に
生成量は減少し、700℃以上ではSi窒化物相、Bの
窒化物相が検出できない場合もあった。よって、好まし
い基体温度は500℃以下、より好ましくは350℃以
下であると考える。本発明の被覆切削工具は、その被覆
方法については、特に限定されるものではないが、被覆
母材への熱影響、工具の疲労強度、皮膜の密着性等を考
慮した場合、比較的低温で被覆でき、被覆した皮膜に圧
縮応力が残留し、密着性の優れるアーク放電方式イオン
プレーティング等の被覆基体側にバイアス電圧を印加す
る物理蒸着法であることが望ましい。以下、本発明を実
施例に基づいて説明する。When the bias voltage is increased, the substrate temperature also tends to rise. When the temperature is limited due to the requirements of the substrate material, a cooling means for the substrate may be required. Also,
The production amounts of the Si nitride phase and the B nitride phase change depending on the substrate temperature. According to the research conducted by the present inventor, the production amount decreases as the temperature rises, and the Si nitride phase and the B nitride phase may not be detected at 700 ° C. or higher in some cases. Therefore, it is considered that the preferable substrate temperature is 500 ° C. or lower, and more preferably 350 ° C. or lower. The coated cutting tool of the present invention is not particularly limited in its coating method, but when considering the thermal influence on the coating base material, the fatigue strength of the tool, the adhesion of the coating, etc., at a relatively low temperature. A physical vapor deposition method that applies a bias voltage to the side of a coated substrate such as an arc discharge type ion plating that can be coated, has a compressive stress remaining in the coated film, and has excellent adhesion is preferable. Hereinafter, the present invention will be described based on examples.
【0014】[0014]
【実施例】アークイオンプレーティング装置を用い、金
属成分の蒸発源である各種合金製ターゲット、ならびに
反応ガスであるN2ガスを用い、被覆基体温度400℃
とし、反応ガス圧力を1×10−1〜7×100Paお
よびバイアス電圧を−30〜−500Vの条件下で目的
の皮膜が成膜されるよう適宜調整した。被覆基体には外
径10mmの超硬合金製2枚刃スケアエンドミル、R5
mmの超硬合金製2枚刃ボールエンドミルを用い、全皮
膜の厚みが4乃至は5μmとなるように成膜した。成膜
順序は先ずTiAl系膜を2.5μm、次にCrSi系
膜を1.5μm成膜した。各試料のCrSi系膜および
TiAl系膜の組成、CrSi系膜内に含有される窒化
物および窒硼化物、またTiAl系膜およびCrSi系
膜の(111)面から算出される格子定数およびその比
の値を表1に示す。[Example] Using an arc ion plating apparatus, using various alloy targets which are evaporation sources of metal components and N 2 gas which is a reaction gas, the coated substrate temperature is 400 ° C.
The reaction gas pressure was adjusted to 1 × 10 −1 to 7 × 10 0 Pa and the bias voltage was appropriately adjusted to form a target film under the conditions of −30 to −500 V. For the coated substrate, cemented carbide 2-flute scare end mill with an outer diameter of 10 mm, R5
A 2-blade ball end mill made of cemented carbide having a thickness of 4 mm was used to form a film having a total thickness of 4 to 5 μm. The order of film formation was such that a TiAl-based film was 2.5 μm first, and then a CrSi-based film was 1.5 μm. Composition of CrSi-based film and TiAl-based film of each sample, nitride and boride contained in the CrSi-based film, and lattice constants calculated from the (111) planes of the TiAl-based film and CrSi-based film and their ratios. The values of are shown in Table 1.
【0015】[0015]
【表1】 [Table 1]
【0016】また、比較例の成膜条件においても表1に
記載した組成および格子定数になるよう調整した。なお
表1において、組成の表示は金属成分、非金属成分を夫
々合わせて100となるよう、原子比で表記したが、こ
れは金属成分と非金属成分の原子比が1:1であること
を意味するものではない。得られた被覆エンドミルを用
い切削試験を行った。工具寿命は刃先の欠けないしは摩
耗等により工具が切削不能または、切削した加工面の精
度が著しく劣化した時の切削長とした。切削諸元を次に
示す。The composition and lattice constants shown in Table 1 were also adjusted under the film forming conditions of the comparative example. In addition, in Table 1, the compositional representation is expressed by atomic ratio so that the total of the metal component and the non-metal component is 100, but this means that the atomic ratio of the metal component and the non-metal component is 1: 1. It does not mean. A cutting test was conducted using the obtained coated end mill. The tool life was defined as the cutting length when the tool could not be cut due to chipping or wear of the cutting edge, or when the accuracy of the machined surface after cutting was significantly deteriorated. The cutting specifications are shown below.
【0017】2枚刃超硬合金製スケアエンドミルの切削
諸元は、側面切削、ダウンカット、被削材S50C(H
B220)、切り込み量Ad10mm×Rd1mm、切
削速度250m/min、送り0.06mm/刃、エア
ーブロー使用、とした。The cutting specifications of the two-flute cemented carbide scare end mill are side cutting, down cutting, and work material S50C (H
B220), cutting amount Ad10 mm × Rd1 mm, cutting speed 250 m / min, feed 0.06 mm / blade, air blow used.
【0018】2枚刃超硬合金製ボールエンドミルの切削
諸元は、ダウンカット、被削材S50C(HB22
0)、切り込み量Ad0.2mm×Pick Feed
0.2mm、回転数10000min−1、テーブル送
り量4000mm/min、水溶性切削液使用、とし
た。The cutting specifications of the two-blade cemented carbide ball end mill are downcut, work material S50C (HB22
0), depth of cut Ad 0.2mm × Pick Feed
0.2 mm, rotation speed 10000 min −1 , table feed rate 4000 mm / min, and water-soluble cutting fluid used.
【0019】本発明例2はCrSi系膜にBが未添加の
場合であるが、比較例11に比して切削長が長い。本発
明例3はSiが0.5原子%と極微量ではあるが、比較
例14に対して優れた切削性能を示すことが分かる。本
発明例5はBを50原子%添加したものであるが、Bの
添加量を多くするに従い切削長は同等であるが、70原
子%とした比較例12では欠損が生じた。本発明例6は
Siを20原子%添加したものであるが、本発明例に比
して寿命が長い。本発明例8、9はTiAlN膜にN
b,またはYを添加した場合の本発明例であるが、本発
明例に比して優れた切削性能が得られた。本発明例10
はTiAl系膜の(111)面から算出される格子定数
をCrSi系膜の(111)面から算出される格子定数
で除した値が0.98至る1.02の範囲外であり、C
rSi系膜の皮膜組成及び検出化合物は本発明範囲内で
ある場合の皮膜例を示すが、本発明例試料番号1〜9に
比べて幾分切削長が短くなって入るものの従来の皮膜に
比べては格段に長い切削長が得られた。Inventive Example 2 is a case where B is not added to the CrSi-based film, but the cutting length is longer than that of Comparative Example 11. It can be seen that the present invention example 3 shows excellent cutting performance as compared with the comparative example 14, although Si is a very small amount of 0.5 atom%. Inventive Example 5 was prepared by adding 50 atomic% of B. The cutting length was the same as the amount of B was increased, but in Comparative Example 12 in which 70 atomic% was added, defects were generated. Inventive Example 6 has 20 atomic% of Si added, but has a longer life than the inventive example. Inventive Examples 8 and 9 have TiAlN film with N
This is an example of the present invention when b or Y is added, and excellent cutting performance was obtained as compared with the example of the present invention. Invention Example 10
Is a value obtained by dividing the lattice constant calculated from the (111) plane of the TiAl-based film by the lattice constant calculated from the (111) plane of the CrSi-based film, which is outside the range of 1.08 to 0.98, and C
An example of the coating composition and detection compound of the rSi-based film is shown in the case of being within the range of the present invention. The cutting length is somewhat shorter than that of sample samples 1 to 9 of the present invention, but it is smaller than the conventional coating. A significantly longer cutting length was obtained.
【0020】以上より、本発明例1〜10は、切削時の
摩擦に対する抵抗を著しく低減し、硬質皮膜との密着
力、硬さと靭性のバランスを考慮したCrSi系膜およ
びTiAl系膜を併用しているので、凝着や溶着現象に
起因した異常摩耗が進行することもなく、また熱クラッ
クに対しも優れた特性を示し、総合して工具寿命が著し
く向上し、また凝着や溶着現象による切削加工面の加工
精度の劣化を抑制し従来の課題を大きく改善するに至っ
た。本発明の皮膜はボールエンドミル、特に湿式で用い
るボールエンドミルに好適である。種々ある切削工具の
中でも断続性が強くかつ微小な取り代で仕上げ加工が行
われ、被加工物の仕上げ精度が要求されるボールエンド
ミルにおいては、工具表面への凝着および溶着等および
切削時の熱クラックなどに切削性能が大きく左右され
る。また、ボールエンドミルなどの連続的に切削速度の
変化する形状においては、この切削時の熱クラックに加
えて、切削速度ゼロ付近では切削取りしろも微小となり
摺動特性をも要求される。以上の如く、これらの特性は
エンドミルにおいて特に要求される特性であることが明
らかである。From the above, Examples 1 to 10 of the present invention use a CrSi-based film and a TiAl-based film in combination in which the resistance to friction during cutting is significantly reduced and the adhesion with the hard film and the balance between hardness and toughness are taken into consideration. As a result, abnormal wear due to adhesion and welding phenomena does not progress, and it exhibits excellent properties against thermal cracks, and overall tool life is significantly improved. We have succeeded in greatly improving the conventional problems by suppressing the deterioration of the machining accuracy of the machined surface. The coating film of the present invention is suitable for a ball end mill, particularly for a wet ball end mill. Among the various cutting tools, ball end mills that have strong discontinuity and a small machining allowance for finishing, and that require finishing accuracy of the work piece, require adhesion and welding on the tool surface and during cutting. Cutting performance is greatly affected by thermal cracks. Further, in a shape such as a ball end mill in which the cutting speed changes continuously, in addition to the thermal cracks at the time of cutting, the cutting margin becomes minute near zero cutting speed, and sliding characteristics are required. As described above, it is clear that these characteristics are the characteristics particularly required in the end mill.
【0021】これらに対し、比較例11、12は、Cr
Si系膜内のSiおよびBの添加量が請求範囲よりも多
い場合であり、耐凝着性及び耐溶着性が十分ではなく、
凝着による異常摩耗が発生した。比較例13は本請求範
囲内の皮膜組成及びCrSi系膜、TiAl系膜の格子
定数の比であるが、CrSi系膜内にSi3N4,BN
の化合物が介在しない場合の比較例であり本発明例に比
して寿命が短い。比較例14は、Crに元素を添加しな
い場合であるが熱クラックによる皮膜剥離が発生し十分
な特性が発揮できない。比較例、15、16、17、1
8、19、20、21は、従来までの硬質皮膜における
切削性能を示すが、何れも本発明例に比較して著しく劣
る結果となった。On the other hand, in Comparative Examples 11 and 12, Cr is
When the amount of Si and B added in the Si-based film is larger than the claimed range, the adhesion resistance and the welding resistance are not sufficient,
Abnormal wear occurred due to adhesion. Comparative Example 13: Film composition and CrSi-based film in the present claims, is a ratio of the lattice constant of the TiAl-based film, Si 3 N 4 in CrSi system within the membrane, BN
This is a comparative example in which the compound of 1 is not present, and has a shorter life than the example of the present invention. Comparative Example 14 is a case where an element is not added to Cr, but film peeling due to thermal cracking occurs and sufficient characteristics cannot be exhibited. Comparative Examples, 15, 16, 17, 1
Nos. 8, 19, 20, and 21 show the cutting performance of conventional hard coatings, but all of them are significantly inferior to the examples of the present invention.
【0022】[0022]
【発明の効果】以上の如く、本発明の被覆切削工具は、
従来までの被覆切削工具に比べ優れた密着性、低摩擦を
有すことから、更なる高速切削加工において格段に長い
工具寿命が得られ、切削加工における生産性の向上に極
めて有効である。As described above, the coated cutting tool of the present invention is
Since it has excellent adhesion and low friction compared to conventional coated cutting tools, it can achieve a significantly longer tool life in further high-speed cutting and is extremely effective in improving productivity in cutting.
【図1】図1は、CrSi系膜中のCrNの結合エネル
ギーを表すX線光電子分光スペクトルを示す。FIG. 1 shows an X-ray photoelectron spectroscopy spectrum showing the binding energy of CrN in a CrSi-based film.
【図2】図2は、CrSi系膜中のSi3N4の結合エ
ネルギーを表すX線光電子分光スペクトルを示す。FIG. 2 shows an X-ray photoelectron spectroscopy spectrum showing the binding energy of Si 3 N 4 in a CrSi-based film.
【図3】図3は、CrSi系膜中のBNの結合エネルギ
ーを表すX線光電子分光スペクトルを示す。FIG. 3 shows an X-ray photoelectron spectroscopy spectrum showing the binding energy of BN in a CrSi-based film.
Claims (3)
覆層を被覆した被覆切削工具において、該被覆層の少な
くとも1層は(CraSi1−a)(NxB1−x)、
但し、0.7≦a<1、0.4≦x≦1、で示される化
学組成からなり、かつ、Cr窒化物中にSiの窒化物相
及び/又はBの窒化物相を含むCrSi系膜であること
を特徴とする被覆切削工具。1. A coated cutting tool comprising a cutting tool substrate coated with a coating layer comprising one layer or multiple layers, wherein at least one layer of the coating layer is (CraSi1-a) (NxB1-x),
However, a CrSi system having a chemical composition represented by 0.7 ≦ a <1 and 0.4 ≦ x ≦ 1 and including a Si nitride phase and / or a B nitride phase in a Cr nitride. A coated cutting tool characterized by being a film.
て、該被覆層の少なくとも1層は金属元素として少なく
ともTiとAlを含み、非金属元素として少なくともN
を含むTiAl系膜であることを特徴とする被覆切削工
具。2. The coated cutting tool according to claim 1, wherein at least one of the coating layers contains at least Ti and Al as metal elements and at least N as a non-metal element.
A coated cutting tool comprising a TiAl-based film containing:
て、該TiAl系膜と該CrSi系膜の夫々の(11
1)面のX線回折から算出される格子定数を夫々dT及
びdCとしたとき、dT/dCの値が0.98以上、
1.02以下であることを特徴とする被覆切削工具。3. The coated cutting tool according to claim 2, wherein each of the TiAl-based film and the CrSi-based film (11
1) When the lattice constants calculated from the X-ray diffraction of the plane are dT and dC, respectively, the value of dT / dC is 0.98 or more,
A coated cutting tool, which is 1.02 or less.
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Cited By (1)
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CN104988461A (en) * | 2015-07-31 | 2015-10-21 | 宁波威霖住宅设施有限公司 | Treatment method for high corrosion resistance of iron base material surfaces |
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JP4112296B2 (en) * | 2002-07-01 | 2008-07-02 | 日立ツール株式会社 | Coated cutting tool and coating method thereof |
JP3996809B2 (en) | 2002-07-11 | 2007-10-24 | 住友電工ハードメタル株式会社 | Coated cutting tool |
JP4038448B2 (en) | 2003-03-25 | 2008-01-23 | 株式会社神戸製鋼所 | Hard coating |
JP2006118051A (en) * | 2003-12-18 | 2006-05-11 | Hitachi Tool Engineering Ltd | Method for producing hard film |
JP4373897B2 (en) * | 2004-11-25 | 2009-11-25 | 日立ツール株式会社 | Hard film coating member and coating method thereof |
JP2006206960A (en) * | 2005-01-28 | 2006-08-10 | Hitachi Tool Engineering Ltd | Sliding member coated with hard film |
JP4383407B2 (en) * | 2005-05-26 | 2009-12-16 | 日立ツール株式会社 | Hard coating coated member |
US7537822B2 (en) * | 2005-05-26 | 2009-05-26 | Hitachi Tool Engineering, Ltd. | Hard-coated member |
JP4916176B2 (en) * | 2006-01-12 | 2012-04-11 | 日立ツール株式会社 | Covering member |
JP4869282B2 (en) * | 2008-04-21 | 2012-02-08 | 株式会社東芝 | Hard coating and hard coating member using the same |
JP5234926B2 (en) | 2008-04-24 | 2013-07-10 | 株式会社神戸製鋼所 | Hard film and hard film forming target |
JP5552913B2 (en) * | 2010-03-30 | 2014-07-16 | 三菱マテリアル株式会社 | Surface-coated cutting tool with excellent fracture resistance due to hard coating layer |
KR101471257B1 (en) * | 2012-12-27 | 2014-12-09 | 한국야금 주식회사 | Multilayered thin layer for cutting tools and cutting tools comprising the same |
CN117529382A (en) * | 2021-07-30 | 2024-02-06 | 京瓷株式会社 | Coated cutting tool and cutting tool |
-
2000
- 2000-06-30 JP JP2000200206A patent/JP3394021B2/en not_active Expired - Lifetime
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