JP3586217B2 - Wear-resistant film-coated tools - Google Patents
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Description
【０００１】
【発明が属する技術分野】
本発明は、高硬度鋼の高速切削加工に使用される硬質皮膜被覆工具に関するものである。
【０００２】
【従来の技術】
金属加工の高能率化を目的とした調質鋼の直切削においては、特開昭６２−５６５６５号公報、特開平２−１９４１５９号公報に代表されるＴｉＡｌＮ皮膜が開発され切削工具に適用されている。ＴｉＡｌＮ皮膜は、ＴｉＮ、ＴｉＣＮに比べ耐酸化性が優れるため、刃先が高温に達する調質鋼の切削においては、切削工具の性能を著しく向上させるものである。
【０００３】
しかしながら、近年では更なる加工の高能率、高精度化の要求を満たす為、切削速度の高速化に加え、環境問題及び加工コスト低減の観点から乾式での切削加工が重要視されている。こうような切削環境下においては、切削工具表面に被覆される耐摩耗皮膜と切削される材料（以下、被削材と称す。）との溶着現象が切削性能に大きな影響を及ぼすとともに、切削温度がより高温になりＴｉＡｌＮ系皮膜でも耐酸化が十分ではない状況にある。すなわち、従来までの前記ＴｉＮ、ＴｉＣＮおよびＴｉＡｌＮ皮膜はこのような苛酷な切削環境下においては、被削材との溶着現象等に起因した摩擦抵抗の増加及び酸化の進行により、十分な切削性能を得られなく、また酸化による摩耗進行を十分に抑制できていなくなったのが現状である。
【０００４】
このような問題を解決する為に、耐溶着性を改善する観点より特表平１１−５０２７７５号公報に示される二硫化モリブデンや、特開平７−１６４２１１号公報に示される炭化タングステンおよびダイヤモンドライクカーボンからなる潤滑性皮膜を硬質皮膜最表面に積層した切削工具が開発されているが、いずれも硬質皮膜との密着性が悪く、皮膜そのものが非常に脆い上耐酸化性に乏しく、切削時に剥離または破壊、酸化摩滅などにより上記切削環境下においては十分対応できてはいない。
【０００５】
また耐酸化性を改善する観点から特開平７−２３７０１０号公報や特開平１０−１３０６２０号公報に代表されるようにＴｉＡｌＮに第３成分を添加する事例があるものの、第３成分の添加によるだけでは十分に満足される耐酸化性の向上は実現されていないのが実状である。また特開平８−１１８１０６号公報にはＴｉＳｉＮの事例も提案されているが、単なるＴｉＳｉＮでは耐酸化性を改善するには至っていない。
【０００６】
また特開平１１−１３８０３８号公報にみられるように硬質皮膜内部にＳｉ３Ｎ４粒等を介在させる事例もみられるがＳｉ３Ｎ４粒界を介して酸化が進行するため十分な耐酸化性を付与するに至っていない。
【０００７】
【発明が解決しようとする課題】
本発明はこうした事情に鑑み、切削加工の乾式化、高速化に対応可能な、即ち、耐酸化性に優れるとともに被削材との溶着性が少ない硬質層を提案し、耐酸化及び耐溶着性を同時に実現し、高硬度鋼を乾式で高速切削出来うる耐摩耗皮膜被覆工具を提供することを課題とする。
【０００８】
【課題を解決するための手段】
本発明者は、硬質皮膜の耐摩耗性と様々な被削材と摩擦抵抗の低減に及ぼす影響および皮膜の層構造について詳細な検討を行った結果、耐溶着性を付与する（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）、但し、０．５≦ａ＜１．０、０．５≦ｘ≦１．０で示される化学組成からなるＡ層を被覆することにより耐溶着性を改善し、さらにその結晶形態を制御することにより、耐酸化性及び耐摩耗性を同時に付与された硬質皮膜被覆工具とする事により、高硬度鋼の乾式高速切削加工において切削工具の性能が極めて良好となることを見出し本発明に到達した。またより密着性を改善するために下地層としてＣｒとＡｌを主成分とする硬質層を併用することにより、より一層切削性能の優れた被覆工具を実現するものである。また上記耐摩耗皮膜は、物理蒸着法により被覆されることが望ましい。
【０００９】
【作用】
はじめに、Ａ層に関して、その各構成の作用について詳しく述べる。元来ＣｒＮは潤滑性を有する皮膜として知られており、その摩擦係数は０．６前後である。（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）、但し、０．５≦ａ＜１．０、０．５≦ｘ≦１．０、で示される化学組成からなるＣｒとＳｉより構成される窒化物もしく窒硼化物は、大気中、室温における鋼との摩擦係数が従来のＴｉＡｌ窒化物皮膜の０．８、ＣｒＮの０．６に比べ、０．４と低摩擦を示すが、特に高温下ではその数値がさらに０．２前後に激減する。これは高温下で皮膜内のＳｉが切粉との間の反応により皮膜表面に内部拡散し、皮膜表面で低融点のＳｉ酸化物を形成することに起因することが確認された。
【００１０】
この低融点のＳｉ酸化物により（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）皮膜はＣｒＮそのものが有する潤滑特性にさらに潤滑性が付与され、著しく特性の優れた潤滑皮膜として機能し、溶着による切削抵抗の増大を抑制する作用を有するものであることが確認された。さらに硼素の添加により、硼素が皮膜内部でＢＮ相を形成し、このＢＮ相の有する潤滑性の作用により、より一層潤滑性が向上することが明らかとなった。
【００１１】
耐酸化性の向上に対し、本発明者らは鋭意検討した結果、（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）相の結晶形態が耐酸化性に大きく影響を及ぼし、結晶形態を制御することにより、一般的に耐酸化性が優れると言われる（ＴｉＡｌ）Ｎ系皮膜より優れる耐酸化性を持たせることができるという驚くべき知見を得るに至った。（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）相は被覆時のイオンエネルギーにより結晶形態が異なり、イオンエネルギーが低い場合は全体的に柱状結晶を呈し、その中にＳｉ３Ｎ４粒子が介在した形態となる。イオンエネルギーが高い場合は、全体的にアモルファス状に近い状態となり、ＣｒＮＢの中にＳｉとＮの結合が確認される状態となる。イオンエネルギーが中程度であり、かつ被覆温度が５５０℃以上の場合は完全アモルファスのＣｒＳｉＢＮ相が微細結晶で存在し、このＣｒＳｉＢＮ相のＳｉ含有量は、マトリックスとなるＣｒＳｉＢＮ相のＳｉ量より富む形態となることが確認された。温度が低いとイオンエネルギーが高い場合と同様の結晶形態を呈することが確認された。温度、イオンエネルギーと結晶形態との相関理由は今後の物理学的研究が必要である。
【００１２】
中でも完全アモルファスＣｒＳｉＢＮ相が微細結晶で存在する場合結晶粒界が非常に整合した粒界となり、欠陥が少なく、酸素の粒界での拡散を著しく抑制し、非常に優れた耐酸化性を有することが確認された。同時に微細結晶で介在することにより、マトリックスを格子歪強化し、硬度が向上し結果耐摩耗性をも向上することになった。さらに最表面には１〜５ｎｍのＣｒの安定酸化層が形成されより一層優れた耐酸化性を有する結果となった。
【００１３】
被覆条件としては比較的イオンエネルギーが中程度となる、−１００Ｖ〜−１５０Ｖの印荷バイアス、反応圧力は１Ｐａ〜５Ｐａ程度、被覆温度は５５０℃以上が好ましい範囲である。
【００１４】
本発明の硬質皮膜を構成するＡ層の金属元素の組成は、（ＣｒａＳｉ１−ａ）において、ａの値が０．５≦ａ＜１．０という式を満足させることが必要である。ａの値が０．５未満の場合、Ｓｉ含有量が多くなりすぎて、皮膜そのものの靭性が劣化し、乾式高速切削において皮膜の内部破壊や破壊にともなう皮膜の剥離が顕著となり、十分な性能を発揮できない。
【００１５】
また、上記Ａ層に係る窒化物もしくは窒硼化物の場合、ＮｘＢ１−ｘで０．５≦ｘ≦１．０を満足することが必要であり、ｘの値が０．５未満の場合は、皮膜の硬度が著しく上昇し、残留圧縮応力が増大し、皮膜の密着性が劣化するため十分な切削性能を示さない。
【００１６】
アモルファスＣｒＳｉＢＮ相の微細結晶粒径は５００ｎｍを越えると格子歪の効果が少なく、皮膜の硬度向上寄与が低下するため、５００ｎｍ以下である方がより好ましい。
【００１７】
ここで用いられる下地（ＣｒＡｌ）系硬質層は、場合によっては第３の金属成分を添加されたものでも同様の作用が期待されることは、言うまでもないことである。
【００１８】
本発明の硬質皮膜被覆工具は、その被覆方法については、特に限定されるものではないが、被覆母材への熱影響、工具の疲労強度、皮膜の密着性等を考慮した場合、比較的低温で被覆でき、被覆した皮膜に圧縮応力が残留するアーク放電方式イオンプレーティング、もしくはスパッタリング等の被覆基体側にバイアス電圧を印加する物理蒸着法であることが望ましい。
【００１９】
【実施例】
以下本発明を実施例に基づいて説明する。アークイオンプレーティング装置を用い、金属成分の蒸発源である各種合金製ターゲット、ならびに反応ガスであるＮ２ガスから目的の皮膜が得られるものを選択し、被覆基体温度６００℃、反応ガス圧力３．０Ｐａの条件下にて、被覆基体である外径１０ｍｍの超硬合金製２枚刃エンドミルおよび超硬合金製インサートに−１３０Ｖの電位を印加し、全皮膜総厚みが３μｍとなるように成膜した。また硼素、Ｓｉは蒸発源であるターゲットに必要量添加した。試作した本発明例並びに比較例を表１に示す。尚、多層の場合はＡ層の総厚１．５μ、他層の総厚１．５μとなるよう均等に被覆した。比較例に示す（ＣｒＳｉ）Ｎ系皮膜は４５０℃で被覆したものでアモルファスナノ結晶の介在しない単純な固溶体の事例である。
【００２０】
【表１】
得られた硬質皮膜被覆エンドミルおよび硬質皮膜被覆インサートを用い切削試験を行った。工具寿命は刃先の欠けないしは摩耗等により工具が切削不能となった時の切削長とした。得られた結果を表１に併記する。切削諸元を次に示す。
【００２２】
２枚刃超硬エンドミルの切削条件は、側面切削ダウンカット、被削材Ｓ５０Ｃ（硬さＨＢ２２０）、切り込みＡｄ１０ｍｍ×Ｒｄ１ｍｍ、切削速度２５０ｍ／ｍｉｎ、送り０．０６ｍｍ／ｔｏｏｔｈ、エアーブロー使用、とした。
【００２３】
インサート切削条件は、工具形状ＳＥＥ４２ＴＮ、巾１００ｍｍ×長さ２５０ｍｍの面取り加工、被削材ＳＫＤ６１（硬さＨＲＣ４５）、切り込み２．０ｍｍ、切削速度１５０ｍ／ｍｉｎ、送り０．１５ｍｍ／ｒｅｖ、乾式切削とした。表１に試験結果を併記する。
【００２４】
耐酸化性はそれぞれ２．５μ合計５μの皮膜を被覆し９００℃大気中で１時間保持した時に形成される酸化層の厚さで評価した。摩擦係数は６００℃においてＳＫＤ６１のボールを用い、一般的なボールオンディスク法により測定した。それらの結果を表２に示す。
【００２５】
【表２】
比較例１６、１７はＳｉもしくは硼素の量が多すぎる場合の比較例であり、静的評価数値は満足するものの密着性が十分ではなく工具寿命が短い結果である。比較例１９、２０はＡ層が単純な固溶体の場合の事例である。比較例１３、１４、１５は、ＴｉＡｌＮ系皮膜に第３成分を添加した事例であり、耐酸化性は改善はされるものの、本発明例と比べれば改善効果が少ない。
【００２７】
これらに対し本発明例は、静的評価特性に優れると同時に、密着性にも優れ、溶着現象に起因した異常摩耗や皮膜の酸化摩耗、皮膜剥離が進行することもなく、総合して工具寿命が著しく向上する。従って、本発明は高硬度鋼の乾式高速切削加工に十分対応するものである。
【００２８】
【発明の効果】
以上の如く、本発明の硬質皮膜被覆工具は、従来の被覆工具に比べ優れた高密着性、低摩擦、高耐酸化性を同時に有すことから、乾式高速切削加工において格段に長い工具寿命が得られ、切削加工における生産性の向上に極めて有効であるものである。
【図面の簡単な説明】
【図１】図１は、本発明例の（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）マトリックス内に介在する微細アモルファス結晶（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）のＴＥＭ像を示す。
【図２】図２は、図１中のスポット１に対応する（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）マトリックスの極微電子線回折像を示す。
【図３】図３は、図１中のスポット２に対応する（ＣｒａＳｉ１−ａ）（ＮｘＢ１−ｘ）微細アモルファス結晶（ＴｉａＳｉ１−ａ）（ＮｘＢ１−ｘ）の極微電子線回折像を示す。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a hard-coated tool used for high-speed cutting of high-hardness steel.
[0002]
[Prior art]
In the direct cutting of tempered steel for the purpose of improving the efficiency of metal working, a TiAlN coating represented by JP-A-62-56565 and JP-A-2-194159 has been developed and applied to cutting tools. I have. Since the TiAlN film has better oxidation resistance than TiN and TiCN, the performance of a cutting tool is remarkably improved in cutting of tempered steel whose cutting edge reaches a high temperature.
[0003]
However, in recent years, in order to meet the demand for higher efficiency and higher precision of processing, dry cutting has been regarded as important in view of environmental problems and reduction of processing cost, in addition to increasing the cutting speed. In such a cutting environment, the welding phenomenon between the wear-resistant film coated on the surface of the cutting tool and the material to be cut (hereinafter, referred to as a work material) has a great effect on the cutting performance and the cutting temperature. Have become higher in temperature, and oxidation resistance is not sufficient even with a TiAlN-based film. That is, the conventional TiN, TiCN and TiAlN coatings have sufficient cutting performance under such severe cutting environment due to the increase in frictional resistance and the progress of oxidation caused by the welding phenomenon with the work material and the like. At present, it is not possible to obtain any further, and it is no longer possible to sufficiently suppress the progress of wear due to oxidation.
[0004]
In order to solve such a problem, molybdenum disulfide disclosed in Japanese Patent Application Laid-Open No. H11-502775, tungsten carbide and diamond-like carbon disclosed in Japanese Patent Application Laid-Open No. H7-164211, from the viewpoint of improving welding resistance, are disclosed. Cutting tools have been developed in which a lubricating film consisting of is laminated on the outermost surface of the hard film, but all have poor adhesion to the hard film, and the film itself is very brittle and has poor oxidation resistance. Due to destruction, oxidative wear and the like, it has not been possible to sufficiently cope with the above cutting environment.
[0005]
Further, from the viewpoint of improving oxidation resistance, there is a case where a third component is added to TiAlN as represented by JP-A-7-237010 and JP-A-10-130620, but only by adding the third component. In fact, no satisfactory improvement in oxidation resistance has been realized. Japanese Patent Application Laid-Open No. 8-118106 also proposes a case of TiSiN, but mere TiSiN does not improve oxidation resistance.
[0006]
In addition, as shown in Japanese Patent Application Laid-Open No. 11-138038, there are cases in which Si 3 N 4 grains and the like are interposed in the hard coating. However, since oxidation proceeds through Si 3 N 4 grain boundaries, sufficient oxidation resistance can be obtained. Has not been granted.
[0007]
[Problems to be solved by the invention]
In view of these circumstances, the present invention proposes a hard layer that can cope with dry and high-speed cutting, that is, has excellent oxidation resistance and low weldability to a work material. It is an object of the present invention to provide a wear-resistant film-coated tool capable of dry cutting high-hardness steel at high speed at the same time.
[0008]
[Means for Solving the Problems]
The present inventor has conducted detailed studies on the wear resistance of the hard coating, the effect on various work materials and the reduction of frictional resistance, and the layer structure of the coating, and as a result, imparts welding resistance (Cr a Si 1 - a) (N x B 1 - x), where welding resistance by coating the layer a composed of a chemical composition represented by 0.5 ≦ a <1.0,0.5 ≦ x ≦ 1.0 By controlling the crystal morphology and improving the oxidation resistance and abrasion resistance of the hard coating coated tool, the performance of the cutting tool in dry high-speed cutting of high hardness steel is extremely improved. It has been found that the present invention is excellent, and the present invention has been achieved. Further, by using a hard layer mainly composed of Cr and Al as a base layer in order to further improve the adhesiveness, a coated tool having more excellent cutting performance is realized. Further, it is desirable that the wear-resistant coating is coated by a physical vapor deposition method.
[0009]
[Action]
First, the operation of each component of the layer A will be described in detail. CrN is originally known as a film having lubricity, and its coefficient of friction is around 0.6. (Cr a Si 1 - a ) (N x B 1 - x ) where 0.5 ≦ a <1.0 and 0.5 ≦ x ≦ 1.0 The composed nitride or boronitride exhibits a low friction coefficient with steel at room temperature in the atmosphere at room temperature, 0.4 compared to 0.8 of conventional TiAl nitride film and 0.6 of CrN. However, especially under a high temperature, the value is drastically reduced to about 0.2. It was confirmed that this was caused by the fact that Si in the film diffused inside the film surface at a high temperature due to a reaction between the film and the chips, and a low-melting-point Si oxide was formed on the film surface.
[0010]
By this Si oxide having a low melting point (Cr a Si 1 - a) (N x B 1 - x) coating further lubricity to lubricating property is imparted with the CrN itself, acts as an excellent lubricating film significantly characteristics It was confirmed that it had an effect of suppressing an increase in cutting resistance due to welding. Further, it was clarified that the addition of boron causes boron to form a BN phase inside the film, and that the lubricating action of the BN phase further improves the lubricity.
[0011]
To improve the oxidation resistance, the present inventors have a result of intensive studies, (Cr a Si 1 - a ) (N x B 1 - x) crystalline form of phase exerts a great influence on the oxidation resistance, the crystalline form Has led to the surprising finding that oxidation resistance superior to (TiAl) N-based coatings, which is generally said to be excellent in oxidation resistance, can be provided. (Cr a Si 1 - a) (N x B 1 - x) phase have different crystal form by ion energy during coating, if a low ion energy exhibited an overall columnar crystals, Si 3 N 4 therein It is in the form of particles interposed. When the ion energy is high, the overall state is close to an amorphous state, and a state in which the bond between Si and N is confirmed in CrNB. When the ion energy is medium and the coating temperature is 550 ° C. or higher, a completely amorphous CrSiBN phase exists as fine crystals, and the Si content of the CrSiBN phase is richer than the Si content of the CrSiBN phase serving as a matrix. Was confirmed. It was confirmed that when the temperature was low, a crystal form similar to that when the ion energy was high was exhibited. The reason for the correlation between temperature, ion energy and crystal morphology requires future physical studies.
[0012]
Above all, when the completely amorphous CrSiBN phase exists in fine crystals, the crystal grain boundaries become very aligned grain boundaries, have few defects, remarkably suppress diffusion of oxygen at the grain boundaries, and have extremely excellent oxidation resistance. Was confirmed. At the same time, by interposing fine crystals, the matrix was strengthened in lattice strain, the hardness was improved, and as a result, the wear resistance was also improved. Further, a stable oxide layer of Cr having a thickness of 1 to 5 nm was formed on the outermost surface, resulting in a more excellent oxidation resistance.
[0013]
The coating conditions are preferably a coating bias of -100 V to -150 V, a reaction pressure of about 1 Pa to 5 Pa, and a coating temperature of 550 ° C. or higher, where the ion energy is relatively moderate.
[0014]
The composition of the metal element of the layer A constituting the hard coating of the present invention needs to satisfy the expression of 0.5 ≦ a <1.0 in (Cr a Si 1-a ). . When the value of a is less than 0.5, the Si content becomes too large, the toughness of the coating itself deteriorates, and the internal destruction of the coating and the peeling of the coating accompanying the destruction become remarkable in dry high-speed cutting. Can not be demonstrated.
[0015]
Further, in the case of the nitride or boride according to the layer A, it is necessary to satisfy 0.5 ≦ x ≦ 1.0 in N x B 1−x , and the value of x is less than 0.5. In this case, the hardness of the coating increases significantly, the residual compressive stress increases, and the adhesion of the coating deteriorates, so that sufficient cutting performance is not exhibited.
[0016]
If the fine crystal grain size of the amorphous CrSiBN phase exceeds 500 nm, the effect of lattice distortion is small and the contribution to improving the hardness of the film is reduced, so that it is more preferably 500 nm or less.
[0017]
It goes without saying that the same effect can be expected even if the underlayer (CrAl) -based hard layer used here is added with the third metal component in some cases.
[0018]
The hard-coated tool of the present invention is not particularly limited in its coating method.However, in consideration of the thermal effect on the coated base material, the fatigue strength of the tool, the adhesion of the coating, etc., the coating method is relatively low. It is preferable to use a physical vapor deposition method in which a bias voltage is applied to the coated substrate side, such as arc discharge ion plating or sputtering, in which compressive stress remains in the coated film.
[0019]
【Example】
Hereinafter, the present invention will be described based on examples. Using an arc ion plating apparatus, a target made of various alloys as a source of evaporation of metal components, and a target from which a target film can be obtained from N 2 gas as a reaction gas, were selected. Under a pressure of 0.0 Pa, a potential of -130 V was applied to the coated substrate, ie, a two-blade end mill made of cemented carbide having an outer diameter of 10 mm and a cemented carbide insert, so that the total thickness of the entire coating was 3 μm. Filmed. Boron and Si were added in necessary amounts to a target as an evaporation source. Table 1 shows the prototypes of the present invention and comparative examples. In the case of a multilayer, the layers A were uniformly coated so as to have a total thickness of 1.5 μm and the other layers had a total thickness of 1.5 μm. The (CrSi) N-based coating shown in the comparative example is a simple solid solution coated at 450 ° C. without amorphous nanocrystals.
[0020]
[Table 1]
A cutting test was performed using the obtained hard film-coated end mill and hard film-coated insert. The tool life was defined as the cutting length when the tool could not be cut due to chipping or wear of the cutting edge. The results obtained are also shown in Table 1. The cutting specifications are shown below.
[0022]
The cutting conditions of the two-blade carbide end mill were side cutting down cut, work material S50C (hardness HB220), depth of cut Ad10 mm x Rd1 mm, cutting speed 250 m / min, feed 0.06 mm / tooth, and air blow. .
[0023]
Insert cutting conditions include tool shape SEE42TN, width 100 mm x length 250 mm chamfering, work material SKD61 (hardness HRC45), depth of cut 2.0 mm, cutting speed 150 m / min, feed 0.15 mm / rev, dry cutting. did. Table 1 also shows the test results.
[0024]
The oxidation resistance was evaluated based on the thickness of the oxide layer formed when each of the films was coated with a total of 2.5 μm and 5 μm and held at 900 ° C. in the atmosphere for 1 hour. The coefficient of friction was measured at 600 ° C. using a ball of SKD61 by a general ball-on-disk method. Table 2 shows the results.
[0025]
[Table 2]
Comparative Examples 16 and 17 are comparative examples in which the amount of Si or boron is too large. Although the static evaluation values are satisfied, the adhesion is not sufficient and the tool life is short. Comparative Examples 19 and 20 are cases where the layer A is a simple solid solution. Comparative Examples 13, 14, and 15 are examples in which the third component was added to the TiAlN-based coating, and although the oxidation resistance was improved, the improvement effect was less than that of the present invention.
[0027]
On the other hand, the examples of the present invention are excellent in static evaluation characteristics and also excellent in adhesion, and are free from abnormal wear, film oxidative wear, and film peeling due to the welding phenomenon, and the tool life is comprehensive. Is significantly improved. Therefore, the present invention is sufficient for dry high-speed cutting of high hardness steel.
[0028]
【The invention's effect】
As described above, the hard-coated tool of the present invention has excellent adhesion, low friction, and high oxidation resistance at the same time as the conventional coated tool, so that the tool life in dry high-speed cutting is significantly longer. This is extremely effective in improving productivity in cutting.
[Brief description of the drawings]
Figure 1 is the present invention embodiment (Cr a Si 1 - a) (N x B 1 - x) fine amorphous crystals interposed in the matrix (Cr a Si 1 - a) (N x B 1 - The TEM image of x ) is shown.
Figure 2 corresponds to the spot 1 in Figure 1 (Cr a Si 1 - a ) - shows the (N x B 1 x) nanobeam electron diffraction image of the matrix.
Figure 3 corresponds to the spot 2 in FIG. 1 (Cr a Si 1 - a ) (N x B 1 - x) fine amorphous crystal (Ti a Si 1 - a) (N x B 1 - 2 shows an electron microscopic diffraction image of x ).
Claims (3)
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| JP3621943B2 (en) | 2003-07-25 | 2005-02-23 | 三菱重工業株式会社 | High wear resistance and high hardness coating |
| JP2005330539A (en) * | 2004-05-20 | 2005-12-02 | Tungaloy Corp | Abrasion-resistant coated member |
| PL1771602T3 (en) | 2004-07-15 | 2011-07-29 | Oerlikon Trading Ag | Highly oxidation resistant hard coating materials for cutting tools |
| JP4756445B2 (en) * | 2005-02-16 | 2011-08-24 | 三菱マテリアル株式会社 | Surface-coated cermet cutting tool with excellent wear resistance due to high-speed cutting of heat-resistant alloys |
| JP4706912B2 (en) * | 2005-07-29 | 2011-06-22 | 三菱マテリアル株式会社 | Surface-coated cemented carbide cutting tool with excellent wear resistance due to high-speed gear cutting of alloy steel |
| JP4706916B2 (en) * | 2005-09-02 | 2011-06-22 | 三菱マテリアル株式会社 | Surface coated high speed tool steel gear cutting tool with excellent wear resistance with hard coating layer in high speed gear cutting of alloy steel |
| JP5070622B2 (en) * | 2007-06-07 | 2012-11-14 | 住友電工ハードメタル株式会社 | Surface coated cutting tool |
| JP5234515B2 (en) * | 2009-03-04 | 2013-07-10 | 三菱マテリアル株式会社 | A surface-coated cutting tool with a hard coating layer that provides excellent fracture resistance and wear resistance |
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