JP3347687B2 - Hard coating tool - Google Patents

Hard coating tool

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Publication number
JP3347687B2
JP3347687B2 JP13804099A JP13804099A JP3347687B2 JP 3347687 B2 JP3347687 B2 JP 3347687B2 JP 13804099 A JP13804099 A JP 13804099A JP 13804099 A JP13804099 A JP 13804099A JP 3347687 B2 JP3347687 B2 JP 3347687B2
Authority
JP
Japan
Prior art keywords
layer
film
cutting
tool
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13804099A
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Japanese (ja)
Other versions
JP2000326108A (en
Inventor
謙一 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
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Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP13804099A priority Critical patent/JP3347687B2/en
Publication of JP2000326108A publication Critical patent/JP2000326108A/en
Application granted granted Critical
Publication of JP3347687B2 publication Critical patent/JP3347687B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、金属材料等の切削
加工に使用される硬質皮膜被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for cutting metal materials and the like.

【0002】[0002]

【従来の技術】従来はTiN、TiCN等を被覆した切
削工具が汎用的かつ一般的であった。TiNは比較的耐
酸化性に優れるため、切削時の発熱によって生じる工具
のすくい面摩耗に対して、優れた耐摩耗性を示すだけで
なく、母材との密着性も良好であることが特長である。
また、TiCNは、TiNに比べ高硬度であるため、工
具の逃げ面摩耗に対して優れた特性を示す。しかしなが
ら、金属加工の高能率化を目的とした切削速度の高速化
傾向に対し、上記硬質皮膜では、十分な耐酸化性、耐摩
耗性を示さなくなった。この様な背景から、皮膜の耐酸
化性、耐摩耗性をより向上させる研究がなされ、その結
果、特開昭62−56565号、特開平2−19415
9号に代表されるTiAlN皮膜が開発され切削工具に
適用されている。
2. Description of the Related Art Conventionally, cutting tools coated with TiN, TiCN and the like have been widely used. Since TiN has relatively excellent oxidation resistance, it not only exhibits excellent wear resistance against tool rake surface wear caused by heat generated during cutting, but also has good adhesion to the base material. It is.
Moreover, since TiCN has a higher hardness than TiN, it exhibits excellent characteristics with respect to flank wear of a tool. However, in response to the tendency to increase the cutting speed for the purpose of increasing the efficiency of metal working, the hard coating does not exhibit sufficient oxidation resistance and wear resistance. From such a background, studies have been made to further improve the oxidation resistance and abrasion resistance of the coating. As a result, JP-A-62-56565 and JP-A-2-19415 have been studied.
No. 9 has been developed and applied to cutting tools.

【0003】[0003]

【発明が解決しようとする課題】TiAlN皮膜は、そ
の皮膜中に含有するTiとAlの成分比率により異なる
ものの、概略2300〜2800のビッカース硬さを有
すだけではなく、耐酸化性が、前記TiN、TiCNに
比べ優れるため、刃先が高温に達する切削条件下におい
ては、切削工具の性能を著しく向上させる。しかしなが
ら、近年では切削速度が更に高速化する傾向に加え、乾
式での切削加工が環境問題上重要視され、切削工具の使
用環境はますます苛酷なものとなってきている。
The TiAlN film has a Vickers hardness of approximately 2300 to 2800, although it varies depending on the component ratio of Ti and Al contained in the film. Since it is superior to TiN and TiCN, it greatly improves the performance of the cutting tool under cutting conditions in which the cutting edge reaches a high temperature. However, in recent years, in addition to the tendency for the cutting speed to be further increased, dry cutting is regarded as important in terms of environmental issues, and the use environment of cutting tools is becoming increasingly severe.

【0004】本発明者等の研究によれば、大気中におけ
るTiAlN皮膜の酸化開始温度は、TiNの450℃
に対し、Alの添加量に依存して750〜900℃に向
上する。しかしながら、前述の乾式高速切削加工におい
ては、使用する工具の刃先温度が900℃以上の高温に
達するため、前記TiAlN皮膜では、十分な工具寿命
が得られないのが現状である。
According to the study of the present inventors, the oxidation start temperature of a TiAlN film in the atmosphere is 450 ° C. of TiN.
On the other hand, the temperature increases to 750 to 900 ° C. depending on the amount of Al added. However, in the above-mentioned dry high-speed cutting, the cutting edge temperature of a tool to be used reaches a high temperature of 900 ° C. or more, and therefore, at present, a sufficient tool life cannot be obtained with the TiAlN film.

【0005】本発明はこうした事情に鑑みなされたもの
であって、従来のTiAlN皮膜に対し、更に耐酸化
性、耐摩耗性を改善し、切削加工の乾式化、高速化に対
応する硬質皮膜被覆工具を提供することが目的である。
The present invention has been made in view of the above circumstances, and provides a hard coating capable of improving the oxidation resistance and abrasion resistance of a conventional TiAlN coating, and corresponding to dry cutting and high-speed cutting. The purpose is to provide a tool.

【0006】[0006]

【課題を解決するための手段】発明者等は、硬質皮膜の
耐酸化性、耐摩耗性および密着性に及ぼす、様々な元素
の影響および皮膜の層構造について詳細な検討を行った
結果、Siを適量含有したTiを主成分とする窒化物、
炭窒化物、酸窒化物もしくは酸炭窒化物(以下、TiS
i系窒化物等と記す)と、TiとAlを主成分とした窒
化物、炭窒化物、酸窒化物もしくは酸炭窒化物(以下、
TiAl系窒化物等と記す)に含まれる金属成分を特定
値内に制限した皮膜を、TiSi系窒化物等の微細組織
構造が、Tiを主成分とする窒化物、炭窒化物、酸窒化
物もしくは酸炭窒化物中に、Si3N4およびSiが独
立した相として存在するよう、それぞれ一層以上交互に
被覆し、その際、金属成分としてTiを主体とする窒化
物層を母材表面直上に成膜することで、乾式の高速切削
加工において、切削工具の性能が極めて良好となること
を見出し本発明に到達した。
The inventors of the present invention have conducted detailed studies on the effects of various elements on the oxidation resistance, abrasion resistance and adhesion of a hard coating and the layer structure of the coating. A nitride mainly containing Ti containing an appropriate amount of
Carbonitride, oxynitride or oxycarbonitride (hereinafter referred to as TiS
i-type nitride, etc.), and nitrides, carbonitrides, oxynitrides or oxycarbonitrides (hereinafter, referred to as nitrides) mainly containing Ti and Al.
A film in which the metal component contained in TiAl-based nitride or the like is limited to a specific value is formed by forming a fine structure such as TiSi-based nitride into a nitride, carbonitride, or oxynitride containing Ti as a main component. Alternatively, one or more layers are alternately coated so that Si3N4 and Si are present as independent phases in the oxycarbonitride, and a nitride layer mainly composed of Ti as a metal component is formed directly on the surface of the base material. By doing so, it was found that the performance of the cutting tool was extremely good in dry high-speed cutting, and the present invention was reached.

【0007】すなわち本発明は、高速度鋼、超硬合金、
サーメット、セラミックスの何れかを母材とし、金属成
分のみの原子%で、Siが10%以上60%以下、B、
Al、V、Cr、Y、Zr、Nb、Mo、Hf、Ta、
Wの1種または2種以上で10%未満、残り:Tiで構
成される窒化物、炭窒化物、酸窒化物、酸炭窒化物のい
ずれかで、SiおよびSiが独立した相として化
合物中に存在するa層と、金属成分のみの原子%が、A
lが40%を越え75%以下、B、Si、V、Cr、
Y、Zr、Nb、Mo、Hf、Ta、Wの1種または2
種以上で10%未満、残り:Tiで構成される窒化物、
炭窒化物、酸窒化物、酸炭窒化物のいずれかであるb層
が、それぞれ一層以上交互に被覆され、かつ前記母材表
面直上には金属成分としてTiを主体とする窒化物で層
厚が0.1μm以上1μm以下のc層があり、さらにc
層直上はb層であることを特徴とする硬質皮膜被覆工具
であり、上記硬質皮膜は、物理蒸着法により被覆された
ことが望ましい。
That is, the present invention relates to high-speed steel, cemented carbide,
Either cermet or ceramics as base material, Si is 10% or more and 60% or less in atomic% of metal component only, B,
Al, V, Cr, Y, Zr, Nb, Mo, Hf, Ta,
One or more of W and less than 10%, remaining: any of nitride, carbonitride, oxynitride, and oxycarbonitride composed of Ti, in which Si 3 N 4 and Si are independent phases A layer present in the compound as
1 is more than 40% and 75% or less, B, Si, V, Cr,
One or two of Y, Zr, Nb, Mo, Hf, Ta, W
Species and less than 10%, remainder: nitride composed of Ti,
The b layer, which is any one of carbonitride, oxynitride, and oxycarbonitride, is alternately coated one or more times, and is formed of a nitride mainly composed of Ti as a metal component immediately above the surface of the base material. Has a c layer of not less than 0.1 μm and not more than 1 μm;
Immediately above the layer is a hard film coating tool characterized by a layer b, and the hard film is preferably coated by a physical vapor deposition method.

【0008】[0008]

【発明の実施の形態】はじめに請求項中記載のa層に関
して、その構成要件について詳しく述べる。一般にTi
AlN皮膜は、大気中で酸化テストを行うと、皮膜表面
近傍のAlが最表面に外向拡散し、そこでアルミナ層を
形成する。本発明者らの研究によれば、このことが耐酸
化性向上の理由と考えられるが、この時、アルミナ層直
下には、Alを含有しない非常にポーラスなTi酸化物
が形成する。静的である酸化テストにおいては、最表面
に形成されたアルミナ層が、酸化の進行である酸素の内
向拡散に対し、酸化保護膜として機能するものの、動的
な切削加工においては、最表面のアルミナ層は、その直
下のポーラスなTi酸化物層より容易に剥離してしま
い、酸化の進行に対し十分な効果を発揮しない。
BEST MODE FOR CARRYING OUT THE INVENTION First, the constituent requirements of the layer a described in the claims will be described in detail. Generally Ti
When an oxidation test is performed on the AlN film in the air, Al near the surface of the film diffuses outward to the outermost surface, where an alumina layer is formed. According to the study of the present inventors, this is considered to be the reason for improving the oxidation resistance. At this time, a very porous Ti oxide containing no Al is formed immediately below the alumina layer. In the static oxidation test, the alumina layer formed on the outermost surface functions as an oxidation protective film against the inward diffusion of oxygen, which is the progress of oxidation. The alumina layer is easily separated from the porous Ti oxide layer immediately below the alumina layer, and does not exert a sufficient effect on the progress of oxidation.

【0009】しかしながら、TiSi系窒化物等は皮膜
自体の耐酸化性が極めて高いだけでなく、最表面に酸化
保護膜となるSiを含有する非常に緻密な複合酸化物層
が形成され、また、その直下には酸化保護膜の剥離原因
となるポーラスなTi酸化物が形成されないことを確認
した。上記効果を得るには、Siが皮膜の金属成分のみ
の原子%で、10%以上含有していなければならず、逆
に60%を越えて含有すると、皮膜の延性ないしは硬さ
の低下が顕著になり、切削工具としての使用に耐えられ
なくなる。
However, TiSi-based nitrides and the like not only have extremely high oxidation resistance of the film itself, but also form a very dense composite oxide layer containing Si which serves as an oxide protective film on the outermost surface. It was confirmed that a porous Ti oxide, which would cause peeling of the oxide protective film, was not formed immediately below. In order to obtain the above effect, Si must be contained in an amount of 10% or more in atomic% of only the metal component of the film. Conversely, if it exceeds 60%, the decrease in ductility or hardness of the film is remarkable. And cannot be used as a cutting tool.

【0010】B、Al、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wは、TiSi系窒化物等の皮膜中に
おいて固溶強化元素として働き、皮膜の高硬度化に有効
である。そのため、必要に応じB、Al、V、Cr、
Y、Zr、Nb、Mo、Hf、Ta、Wの1種または2
種以上を微量添加することが望ましい。しかしながら皮
膜の金属成分のみの原子%で10%以上添加すると、前
述したSi含有による耐酸化性向上効果が得られなくな
る。よって、B、Al、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wは、1種または2種以上で10%未
満とする。
B, Al, V, Cr, Y, Zr, Nb, M
o, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiSi-based nitride, and are effective in increasing the hardness of the film. Therefore, B, Al, V, Cr,
One or two of Y, Zr, Nb, Mo, Hf, Ta, W
It is desirable to add a trace amount of the seed or more. However, if 10% or more of the atomic component of only the metal component of the coating is added, the effect of improving the oxidation resistance due to the Si content described above cannot be obtained. Therefore, B, Al, V, Cr, Y, Zr, Nb, M
o, Hf, Ta, and W are one or more kinds and less than 10%.

【0011】a層の微細組織は、Tiを主成分とする窒
化物、炭窒化物、酸窒化物もしくは酸炭窒化物中に、S
i3N4およびSiが独立した相として存在する構造に
することで高硬度化が達成でき、著しく耐摩耗性に優れ
た皮膜が得られる。この様な構造を持つ皮膜、つまり本
発明a層を形成するには、アーク放電方式イオンプレー
ティングや、スパッタリングといった物理蒸着法の違い
や、同様の手法であっても成膜装置の基本的な仕様によ
って、その絶対値は異なるものの、被覆の際、基体に印
加するバイアス電圧を−10〜−100Vといった比較
的低い値にすることで達成できる。
The microstructure of the a-layer is a nitride, carbonitride, oxynitride or oxycarbonitride containing Ti as a main component.
By adopting a structure in which i3N4 and Si are present as independent phases, high hardness can be achieved, and a film having extremely excellent wear resistance can be obtained. In order to form a film having such a structure, that is, the layer a of the present invention, differences in physical vapor deposition methods such as an arc discharge type ion plating and sputtering, and the basic method of a film forming apparatus even with the same method. Although the absolute value differs depending on the specification, it can be achieved by setting the bias voltage applied to the substrate to a relatively low value such as -10 to -100 V during coating.

【0012】次に請求項中記載のb層に関して、その構
成要件について詳しく述べる。TiAl系窒化物等の皮
膜であるb層におけるAlの役割は、皮膜の耐摩耗性お
よび耐酸化性を向上させることである。皮膜の耐摩摩耗
性および耐酸化性は、皮膜中のAl含有量の増加に伴っ
て向上する。しかしながら、75%を越えて含有する
と、皮膜の硬さが低下し、工具として必要な耐摩耗性が
得られなくなる。そのため、耐摩耗性、耐酸化性をバラ
ンス良く得るためには、b層中のAl含有量を、皮膜の
金属成分のみの原子%で、40%越え75%以下に調整
することが重要である。
Next, the constituent requirements of the layer b described in the claims will be described in detail. The role of Al in the b layer, which is a film of a TiAl-based nitride or the like, is to improve the wear resistance and oxidation resistance of the film. The abrasion and oxidation resistance of the coating improves with increasing Al content in the coating. However, if the content exceeds 75%, the hardness of the film is reduced, and the wear resistance required for a tool cannot be obtained. Therefore, in order to obtain a good balance between wear resistance and oxidation resistance, it is important to adjust the Al content in the b layer to be more than 40% and not more than 75% by atomic% of only the metal component of the film. .

【0013】B、Si、V、Cr、Y、Zr、Nb、M
o、Hf、Ta、Wは、TiAl系窒化物等の皮膜中に
おいて固溶強化元素として働き、皮膜の高硬度化に有効
である。そのため、必要に応じB、Si、V、Cr、
Y、Zr、Nb、Mo、Hf、Ta、Wの1種または2
種以上を微量添加することが望ましい。しかしながら皮
膜の金属成分のみの原子%で10%以上添加すると、皮
膜の靭性が極端に低下する。そのため、耐摩耗性、耐酸
化性、靭性をバランス良く得るためには、B、Si、
V、Cr、Y、Zr、Nb、Mo、Hf、Ta、Wは1
種または2種以上で10%未満とする。
B, Si, V, Cr, Y, Zr, Nb, M
o, Hf, Ta, and W act as solid solution strengthening elements in a film such as a TiAl-based nitride and are effective in increasing the hardness of the film. Therefore, B, Si, V, Cr,
One or two of Y, Zr, Nb, Mo, Hf, Ta, W
It is desirable to add a trace amount of the seed or more. However, when 10% or more of the metal component of the coating is added in atomic%, the toughness of the coating is extremely reduced. Therefore, in order to obtain a good balance of wear resistance, oxidation resistance, and toughness, B, Si,
V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W are 1
More than 10% of species or two or more species.

【0014】上記a層およびb層は、いずれも母材との
密着性においては十分でない。そのため、母材表面直上
には、b層および母材との密着性に優れ、適度に耐摩耗
性、耐酸化性等を有す金属成分としてTiを主体とする
窒化物のc層が必要である。c層はa層およびb層に比
べ硬さの低いTiNであることが望ましいが、TiNに
周期律表IVa族、Va族、VIa族金属およびAl、S
i、Y、Co等を微量に含有する場合、具体的には金属
成分のみの原子%で10at%未満の含有量においても
同様の効果が得られる。
Neither the a layer nor the b layer has sufficient adhesion to the base material. Therefore, just above the surface of the base material, a layer c of a nitride mainly composed of Ti as a metal component having excellent adhesion to the b layer and the base material and having appropriate wear resistance and oxidation resistance is required. is there. The c-layer is preferably made of TiN having a lower hardness than the a-layer and the b-layer. However, TiN is made of a metal belonging to the group IVa, Va, or VIa of the periodic table and Al, S
When a small amount of i, Y, Co, or the like is contained, the same effect can be obtained even when the content is less than 10 at% in atomic% of the metal component alone.

【0015】c層の層厚は0.1μm以上1μm以下に
限定される。c層の層厚が厚いほど密着性の向上は顕著
になる。しかしながら、一般に切削中においては、刃先
部の皮膜は斜め断面の形態で摩耗するため、a層および
b層に比べ耐酸化性の低いc層より優先的に酸化が進行
する。そのためc層の層厚が厚い場合、つまり切削中の
摩耗によるc層の露出面積が大きい場合は、c層の優先
酸化が顕著となり、切削工具の性能は著しく向上しな
い。また、極端にc層の層厚が薄い場合は、密着性向上
効果が顕著に表れない。以上のような理由からc層の層
厚を0.1μm以上1μm以下とする。望ましくは0.
2μm以上0.4μm以下である。
The thickness of the layer c is limited to 0.1 μm or more and 1 μm or less. The greater the thickness of the layer c, the more noticeable the improvement in adhesion. However, in general, during cutting, the coating at the cutting edge wears in the form of an oblique cross section, and therefore oxidation proceeds preferentially over the c layer, which has lower oxidation resistance than the a layer and the b layer. Therefore, when the thickness of the c layer is large, that is, when the exposed area of the c layer due to abrasion during cutting is large, preferential oxidation of the c layer becomes remarkable, and the performance of the cutting tool is not significantly improved. Further, when the thickness of the layer c is extremely thin, the effect of improving the adhesion is not remarkably exhibited. For the reasons described above, the layer thickness of the c layer is set to 0.1 μm or more and 1 μm or less. Preferably, 0.
It is 2 μm or more and 0.4 μm or less.

【0016】以上のように本発明においては、母材との
密着性に優れるc層を母材表面直上に被覆し、その上に
皮膜自体の耐摩耗性および耐酸化性をバランス良く有す
b層と、著しく耐酸化性、耐摩耗性に優れるa層を被覆
することが極めて重要であり、その結果、乾式の高速切
削に対応する切削工具を得ることが可能となる。また、
母材表面直上にc層を被覆し、その上にb層を被覆した
後、a層ならびにb層をそれぞれ交互に積層した多層皮
膜によっても同様の効果が得られる。
As described above, in the present invention, a layer c having excellent adhesion to the base material is coated directly on the surface of the base material, and the a layer having the abrasion resistance and the oxidation resistance of the film itself in good balance. It is extremely important to coat the layer and the layer a, which has remarkably excellent oxidation resistance and wear resistance, and as a result, it becomes possible to obtain a cutting tool corresponding to dry high-speed cutting. Also,
The same effect can be obtained by a multilayer coating in which a layer c is coated immediately above the base material surface and a layer b is coated thereon, and then the layers a and b are alternately laminated.

【0017】また、a層およびb層の各層は必要に応じ
て窒化物、炭窒化物、酸窒化物、酸炭窒化物のいずれか
に調整でき、それらを被覆した工具についても同様の効
果が得られる。
Each of the layers a and b can be adjusted to any of nitride, carbonitride, oxynitride and oxycarbonitride as required, and the same effect can be obtained with tools coated with them. can get.

【0018】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性等を考慮
した場合、比較的低温で被覆でき、被覆した皮膜に圧縮
応力が残留するアーク放電方式イオンプレーティング、
もしくはスパッタリング等の被覆母材側にバイアス電圧
を印加する物理蒸着法であることが望ましい。以下、本
発明を実施例に基づいて説明する。
The method of coating the hard film-coated tool of the present invention is not particularly limited, but when considering the heat effect on the coated base material, the fatigue strength of the tool, the adhesion of the film, etc. Arc discharge ion plating that can be coated at a relatively low temperature and compressive stress remains in the coated film,
Alternatively, a physical vapor deposition method of applying a bias voltage to the coating base material side such as sputtering is preferable. Hereinafter, the present invention will be described based on examples.

【0019】[0019]

【実施例】小型アークイオンプレーティング装置を用
い、金属成分の蒸発源である各種合金製ターゲット、な
らびに反応ガスであるNガス、CHガス、Ar/O
混合ガスから目的の皮膜が得られるものを選択し、被
覆基体温度400℃、反応ガス圧力3.0Paの条件下
にて、被覆基体である超硬合金製6枚刃エンドミル(外
径8mm)および超硬合金製ドリル(外径8mm)に、
全皮膜の厚みが4μmとなるように成膜を行った。な
お、本発明例の全てと、比較例51、52、53、5
4、55、56、57、58については、−30Vのバ
イアス電圧を印加し成膜したが、比較例59について
は、−200Vのバイアス電圧を印加し成膜した。ま
た、本発明例ならびに比較例のc層および従来例につい
ては、全て−150Vのバイアス電圧を印加し成膜し
た。本発明例および比較例のa層およびb層の厚みにつ
いては、基本的にほぼ1:1であるが、表中の総積層数
が2層のものについては、a層を約0.5μmとしたた
め、b層は全皮膜の厚みよりa層、c層(表中記載)を
差し引いた層厚である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Using a small arc ion plating apparatus, targets made of various alloys as evaporation sources of metal components, N 2 gas, CH 4 gas, and Ar / O as reaction gases were used.
(2 ) A cemented carbide 6-flute end mill (outer diameter 8 mm), which is a coated substrate, is selected from the mixed gas under the conditions of a coated substrate temperature of 400 ° C. and a reaction gas pressure of 3.0 Pa. And a cemented carbide drill (outside diameter 8mm)
The film was formed so that the thickness of the entire film was 4 μm. In addition, all of the present invention examples and comparative examples 51, 52, 53, 5
For 4, 55, 56, 57, and 58, a film was formed by applying a bias voltage of -30 V, but for Comparative Example 59, a film was formed by applying a bias voltage of -200 V. Further, the c layer of the present invention example and the comparative example and the conventional example were all formed by applying a bias voltage of -150 V. The thicknesses of the a-layer and the b-layer of the present invention example and the comparative example are basically about 1: 1. However, in the case where the total number of layers in the table is two, the a-layer is about 0.5 μm. Therefore, the layer b has a thickness obtained by subtracting the layer a and the layer c (described in the table) from the thickness of the entire coating.

【0020】得られた硬質皮膜被覆エンドミルおよびド
リルを用い、次に示す乾式の高速切削条件にて、刃先の
欠けないしは摩耗等により工具が切削不能となるまで加
工を行い、その時の切削長を工具寿命とした。表1に本
発明例、表2に比較例、表3に従来例の硬質皮膜に関す
る詳細およびそれらの切削結果を示す。a層中のSi
ならびにSiの有無についてはXPSにて確認を行
い、Siならびに(もしくは)Siの存在が認め
られた皮膜については表中に記した。
Using the obtained hard film-coated end mill and drill, machining is performed under the following dry high-speed cutting conditions until the tool cannot be cut due to chipping or wear of the cutting edge, and the cutting length at that time is determined by the tool length. Life time. Table 1 shows examples of the present invention, Table 2 shows comparative examples, and Table 3 shows details of hard coatings of conventional examples and cutting results thereof. Si 3 in a layer
The presence or absence of N 4 and Si was confirmed by XPS, and the films in which the presence of Si 3 N 4 and / or Si was recognized are described in the table.

【0021】エンドミル切削条件は、工具として超硬合
金製6枚刃エンドミル、外径8mmを用いて、側面切削
をダウンカットで、被削材はSKD11(HRC6
0)、切り込み量Ad=12mm、Rd=0.2mm、
切削速度=200m/min、送り量0.03mm/t
ooth、切削油=なし、但し、エアーブローを使用で
行った。
The cutting conditions of the end mill were as follows: a 6-blade end mill made of cemented carbide, an outer diameter of 8 mm was used as the tool, the side cutting was down cut, and the work material was SKD11 (HRC6).
0), cutting amount Ad = 12 mm, Rd = 0.2 mm,
Cutting speed = 200m / min, feed amount 0.03mm / t
ooth, cutting oil = none, but using air blow.

【0022】次に、ドリルの切削条件は、工具として超
硬合金製ドリル、外径8mmを用いて、被削材SCM4
40(HRC30)の穴加工を、切削速度=90m/m
in、送り量=0.2mm/rev、切削油=なし、但
し、エアーブローを使用し、穴深さ24mmの止まり穴
の加工で行った。また、加工穴数は最高2000穴で終
わりとした。
Next, the cutting conditions of the drill were as follows: a drill made of cemented carbide as a tool, an outer diameter of 8 mm;
40 (HRC30) drilling, cutting speed = 90m / m
in, feed rate = 0.2 mm / rev, cutting oil = none, but using an air blow to machine a blind hole with a hole depth of 24 mm. In addition, the number of machined holes ended at a maximum of 2000 holes.

【0023】[0023]

【表1】 [Table 1]

【0024】[0024]

【表2】 [Table 2]

【0025】[0025]

【表3】 [Table 3]

【0026】表1、表2および表3より、本発明例は、
比較例ならびに従来例と比べて、工具寿命が著しく向上
しており、乾式高速切削加工に十分対応することがわか
る。比較例50は、皮膜の組成、層構造およびa層の組
織構造ともに本発明例に含まれるものであるため、比較
例の中では最も工具性能は優れるが、c層の層厚が厚す
ぎるために本発明例に比べて工具寿命が劣る結果となっ
た。また、比較例51は、皮膜の組成については本発明
に含まれるものであるが、皮膜の層構造が異なるため、
エンドミルおよびドリル、両工具の切削において、皮膜
の剥離が早期に生じ、非常に短寿命となった。比較例5
8は、皮膜の組成、層構造については本発明に含まれる
ものであるが、a層には、Si相のみしか存在していな
いため、十分な皮膜硬さが得られず本発明例に比べ短寿
命となった。
From Tables 1, 2 and 3, the examples of the present invention are as follows.
The tool life is remarkably improved as compared with the comparative example and the conventional example, and it can be seen that the tool life is sufficiently compatible with dry high-speed cutting. In Comparative Example 50, the composition of the coating, the layer structure, and the microstructure of the a-layer were all included in the present invention. Therefore, the tool performance was the most excellent in the comparative examples, but the thickness of the c-layer was too large. In addition, the tool life was inferior to the example of the present invention. In Comparative Example 51, the composition of the film is included in the present invention, but since the layer structure of the film is different,
In cutting of the end mill, the drill, and both tools, peeling of the film occurred early, and the life was extremely short. Comparative Example 5
8 is included in the present invention with respect to the composition and layer structure of the film, but since the a layer contains only the Si phase, sufficient film hardness cannot be obtained, and compared to the examples of the present invention. Short life.

【0027】[0027]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた耐酸化性、耐摩耗性を
有すことから、乾式高速切削加工において格段に長い工
具寿命が得られ、切削加工における生産性の向上だけで
なく環境問題への対応にも極めて有効である。
As described above, the hard-coated tool of the present invention has superior oxidation resistance and wear resistance as compared with the conventional coated tool, so that the tool life in dry high-speed cutting is significantly longer. It is extremely effective not only for improving productivity in cutting but also for addressing environmental issues.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 高速度鋼、超硬合金、サーメット、セラ
ミックスの何れかを母材とし、金属成分のみの原子%
で、Siが10%以上60%以下、B、Al、V、C
r、Y、Zr、Nb、Mo、Hf、Ta、Wの1種また
は2種以上で10%未満、残り:Tiで構成される窒化
物、炭窒化物、酸窒化物、酸炭窒化物のいずれかで、S
およびSiが独立した相として化合物中に存在
するa層と、金属成分のみの原子%が、Al40%を
越え75%以下、B、Si、V、Cr、Y、Zr、N
b、Mo、Hf、Ta、Wの1種または2種以上で10
%未満、残り:Tiで構成される窒化物、炭窒化物、酸
窒化物、酸炭窒化物のいずれかであるb層が、それぞれ
一層以上交互に被覆され、かつ前記母材表面直上には金
属成分としてTiを主体とする窒化物で層厚が0.1μ
m以上1μm以下のc層があり、さらにc層直上はb層
であることを特徴とする硬質皮膜被覆工具。
1. A high-speed steel, a cemented carbide, a cermet, or a ceramic as a base material, and an atomic% of only a metal component.
And Si is 10% or more and 60% or less, B, Al, V, C
r, Y, Zr, Nb, Mo, Hf, Ta, 1 kind or less than 10% in more than one W, rest: nitride composed of Ti, carbonitride, oxynitride, oxycarbonitride product S
a layer in which i 3 N 4 and Si are present as independent phases in the compound, and the atomic% of the metal component alone is more than 40% and 75% or less, B, Si, V, Cr, Y, Zr, N
b, Mo, Hf, Ta, W or one or more of 10
% Less, rest: composed of Ti nitrides, carbonitrides, oxynitrides, b layer is either oxycarbonitride material is coated alternately one or more layers respectively, and directly above the base metal surface Is a nitride mainly composed of Ti as a metal component and has a layer thickness of 0.1 μm.
A hard-coated tool, comprising a c-layer having a length of m to 1 μm and a b-layer immediately above the c-layer.
【請求項2】 請求項1記載の硬質皮膜を物理蒸着法に
より被覆したことを特徴とする硬質皮膜被覆工具。
2. A tool for coating a hard coating, wherein the hard coating according to claim 1 is coated by a physical vapor deposition method.
JP13804099A 1999-05-19 1999-05-19 Hard coating tool Expired - Fee Related JP3347687B2 (en)

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