JPH0419543Y2 - - Google Patents
Info
- Publication number
- JPH0419543Y2 JPH0419543Y2 JP1986125564U JP12556486U JPH0419543Y2 JP H0419543 Y2 JPH0419543 Y2 JP H0419543Y2 JP 1986125564 U JP1986125564 U JP 1986125564U JP 12556486 U JP12556486 U JP 12556486U JP H0419543 Y2 JPH0419543 Y2 JP H0419543Y2
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- pellicle
- flat surface
- pellicle frame
- inclined surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000853 adhesive Substances 0.000 claims description 20
- 230000001070 adhesive effect Effects 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims 4
- 239000000428 dust Substances 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000002950 deficient Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 230000001788 irregular Effects 0.000 claims 1
- 229920006254 polymer film Polymers 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986125564U JPH0419543Y2 (US06299757-20011009-C00006.png) | 1986-08-18 | 1986-08-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986125564U JPH0419543Y2 (US06299757-20011009-C00006.png) | 1986-08-18 | 1986-08-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6330846U JPS6330846U (US06299757-20011009-C00006.png) | 1988-02-29 |
JPH0419543Y2 true JPH0419543Y2 (US06299757-20011009-C00006.png) | 1992-05-01 |
Family
ID=31018569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986125564U Expired JPH0419543Y2 (US06299757-20011009-C00006.png) | 1986-08-18 | 1986-08-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0419543Y2 (US06299757-20011009-C00006.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0812418B2 (ja) * | 1987-05-28 | 1996-02-07 | 三井石油化学工業株式会社 | ペリクルの製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5655837U (US06299757-20011009-C00006.png) * | 1979-10-02 | 1981-05-15 |
-
1986
- 1986-08-18 JP JP1986125564U patent/JPH0419543Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6330846U (US06299757-20011009-C00006.png) | 1988-02-29 |
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