JPH0419303B2 - - Google Patents

Info

Publication number
JPH0419303B2
JPH0419303B2 JP61002216A JP221686A JPH0419303B2 JP H0419303 B2 JPH0419303 B2 JP H0419303B2 JP 61002216 A JP61002216 A JP 61002216A JP 221686 A JP221686 A JP 221686A JP H0419303 B2 JPH0419303 B2 JP H0419303B2
Authority
JP
Japan
Prior art keywords
chamber
substrate
degassing
film forming
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61002216A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62161959A (ja
Inventor
Hidenori Suwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP221686A priority Critical patent/JPS62161959A/ja
Publication of JPS62161959A publication Critical patent/JPS62161959A/ja
Publication of JPH0419303B2 publication Critical patent/JPH0419303B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP221686A 1986-01-10 1986-01-10 インライン式成膜装置 Granted JPS62161959A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP221686A JPS62161959A (ja) 1986-01-10 1986-01-10 インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP221686A JPS62161959A (ja) 1986-01-10 1986-01-10 インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPS62161959A JPS62161959A (ja) 1987-07-17
JPH0419303B2 true JPH0419303B2 (OSRAM) 1992-03-30

Family

ID=11523160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP221686A Granted JPS62161959A (ja) 1986-01-10 1986-01-10 インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPS62161959A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100945431B1 (ko) 2007-10-05 2010-03-05 한국원자력연구원 다층기판홀더를 이용한 양산형 박막증착장치
KR100945429B1 (ko) 2007-10-05 2010-03-05 한국원자력연구원 대량의 기판 장착 및 탈착 시스템을 이용한 양산형박막증착 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT975790B (it) * 1972-11-21 1974-08-10 Bartoli F Strumento perimetrico perfezionato
JPS5814337A (ja) * 1981-07-17 1983-01-27 Pioneer Electronic Corp デイスク等の被処理物の連続メタライジング装置

Also Published As

Publication number Publication date
JPS62161959A (ja) 1987-07-17

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