JPH041849B2 - - Google Patents

Info

Publication number
JPH041849B2
JPH041849B2 JP58244289A JP24428983A JPH041849B2 JP H041849 B2 JPH041849 B2 JP H041849B2 JP 58244289 A JP58244289 A JP 58244289A JP 24428983 A JP24428983 A JP 24428983A JP H041849 B2 JPH041849 B2 JP H041849B2
Authority
JP
Japan
Prior art keywords
spatial frequency
regular pattern
frequency filter
lens system
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58244289A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60135809A (ja
Inventor
Takashi Yokokura
Hideo Koda
Susumu Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Priority to JP24428983A priority Critical patent/JPS60135809A/ja
Publication of JPS60135809A publication Critical patent/JPS60135809A/ja
Publication of JPH041849B2 publication Critical patent/JPH041849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP24428983A 1983-12-26 1983-12-26 欠陥検査装置 Granted JPS60135809A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24428983A JPS60135809A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24428983A JPS60135809A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS60135809A JPS60135809A (ja) 1985-07-19
JPH041849B2 true JPH041849B2 (cs) 1992-01-14

Family

ID=17116522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24428983A Granted JPS60135809A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS60135809A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2801916B2 (ja) * 1988-09-29 1998-09-21 大日本印刷株式会社 欠陥検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597081B2 (ja) * 1973-07-28 1984-02-16 富士写真光機株式会社 像回転光学系
JPS5146144A (cs) * 1974-10-18 1976-04-20 Victor Company Of Japan
JPS51113596A (en) * 1975-03-31 1976-10-06 Hitachi Ltd Lasar-processing apparatus
JPS6038772B2 (ja) * 1978-04-12 1985-09-03 オリンパス光学工業株式会社 焦点調節方法および装置

Also Published As

Publication number Publication date
JPS60135809A (ja) 1985-07-19

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