JPS60135809A - 欠陥検査装置 - Google Patents

欠陥検査装置

Info

Publication number
JPS60135809A
JPS60135809A JP24428983A JP24428983A JPS60135809A JP S60135809 A JPS60135809 A JP S60135809A JP 24428983 A JP24428983 A JP 24428983A JP 24428983 A JP24428983 A JP 24428983A JP S60135809 A JPS60135809 A JP S60135809A
Authority
JP
Japan
Prior art keywords
regular pattern
objective lens
spatial frequency
frequency filter
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24428983A
Other languages
English (en)
Japanese (ja)
Other versions
JPH041849B2 (cs
Inventor
Takashi Yokokura
横倉　隆
Hideo Kiyouda
供田　英夫
Susumu Saito
晋 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Optical Co Ltd
Original Assignee
Tokyo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Optical Co Ltd filed Critical Tokyo Optical Co Ltd
Priority to JP24428983A priority Critical patent/JPS60135809A/ja
Publication of JPS60135809A publication Critical patent/JPS60135809A/ja
Publication of JPH041849B2 publication Critical patent/JPH041849B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP24428983A 1983-12-26 1983-12-26 欠陥検査装置 Granted JPS60135809A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24428983A JPS60135809A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24428983A JPS60135809A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS60135809A true JPS60135809A (ja) 1985-07-19
JPH041849B2 JPH041849B2 (cs) 1992-01-14

Family

ID=17116522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24428983A Granted JPS60135809A (ja) 1983-12-26 1983-12-26 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS60135809A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0293312A (ja) * 1988-09-29 1990-04-04 Dainippon Printing Co Ltd 欠陥検査装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034552A (cs) * 1973-07-28 1975-04-02
JPS5146144A (cs) * 1974-10-18 1976-04-20 Victor Company Of Japan
JPS51113596A (en) * 1975-03-31 1976-10-06 Hitachi Ltd Lasar-processing apparatus
JPS54134605A (en) * 1978-04-12 1979-10-19 Olympus Optical Co Ltd Method and appartus of controlling focus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5034552A (cs) * 1973-07-28 1975-04-02
JPS5146144A (cs) * 1974-10-18 1976-04-20 Victor Company Of Japan
JPS51113596A (en) * 1975-03-31 1976-10-06 Hitachi Ltd Lasar-processing apparatus
JPS54134605A (en) * 1978-04-12 1979-10-19 Olympus Optical Co Ltd Method and appartus of controlling focus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0293312A (ja) * 1988-09-29 1990-04-04 Dainippon Printing Co Ltd 欠陥検査装置

Also Published As

Publication number Publication date
JPH041849B2 (cs) 1992-01-14

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