JPH0418013Y2 - - Google Patents
Info
- Publication number
- JPH0418013Y2 JPH0418013Y2 JP1211185U JP1211185U JPH0418013Y2 JP H0418013 Y2 JPH0418013 Y2 JP H0418013Y2 JP 1211185 U JP1211185 U JP 1211185U JP 1211185 U JP1211185 U JP 1211185U JP H0418013 Y2 JPH0418013 Y2 JP H0418013Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- diaphragm
- spring
- screw shaft
- primary chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 18
- 239000007789 gas Substances 0.000 description 21
- 230000000452 restraining effect Effects 0.000 description 8
- 238000000746 purification Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000007872 degassing Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Control Of Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1211185U JPH0418013Y2 (is) | 1985-02-01 | 1985-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1211185U JPH0418013Y2 (is) | 1985-02-01 | 1985-02-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61133812U JPS61133812U (is) | 1986-08-21 |
| JPH0418013Y2 true JPH0418013Y2 (is) | 1992-04-22 |
Family
ID=30494863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1211185U Expired JPH0418013Y2 (is) | 1985-02-01 | 1985-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418013Y2 (is) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2510838Y2 (ja) * | 1990-05-15 | 1996-09-18 | 株式会社テイエルブイ | 減圧弁 |
-
1985
- 1985-02-01 JP JP1211185U patent/JPH0418013Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61133812U (is) | 1986-08-21 |
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