JPH0416099Y2 - - Google Patents

Info

Publication number
JPH0416099Y2
JPH0416099Y2 JP1987010723U JP1072387U JPH0416099Y2 JP H0416099 Y2 JPH0416099 Y2 JP H0416099Y2 JP 1987010723 U JP1987010723 U JP 1987010723U JP 1072387 U JP1072387 U JP 1072387U JP H0416099 Y2 JPH0416099 Y2 JP H0416099Y2
Authority
JP
Japan
Prior art keywords
air
clean
exhaust
ceiling
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987010723U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63120030U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987010723U priority Critical patent/JPH0416099Y2/ja
Publication of JPS63120030U publication Critical patent/JPS63120030U/ja
Application granted granted Critical
Publication of JPH0416099Y2 publication Critical patent/JPH0416099Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1987010723U 1987-01-29 1987-01-29 Expired JPH0416099Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987010723U JPH0416099Y2 (en:Method) 1987-01-29 1987-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987010723U JPH0416099Y2 (en:Method) 1987-01-29 1987-01-29

Publications (2)

Publication Number Publication Date
JPS63120030U JPS63120030U (en:Method) 1988-08-03
JPH0416099Y2 true JPH0416099Y2 (en:Method) 1992-04-10

Family

ID=30797284

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987010723U Expired JPH0416099Y2 (en:Method) 1987-01-29 1987-01-29

Country Status (1)

Country Link
JP (1) JPH0416099Y2 (en:Method)

Also Published As

Publication number Publication date
JPS63120030U (en:Method) 1988-08-03

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