JPH0415702Y2 - - Google Patents
Info
- Publication number
- JPH0415702Y2 JPH0415702Y2 JP1984170406U JP17040684U JPH0415702Y2 JP H0415702 Y2 JPH0415702 Y2 JP H0415702Y2 JP 1984170406 U JP1984170406 U JP 1984170406U JP 17040684 U JP17040684 U JP 17040684U JP H0415702 Y2 JPH0415702 Y2 JP H0415702Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- engaging
- wall surface
- engagement
- frame body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 19
- 239000000725 suspension Substances 0.000 claims description 13
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 description 18
- 238000005406 washing Methods 0.000 description 6
- 238000001035 drying Methods 0.000 description 5
- 230000005484 gravity Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170406U JPH0415702Y2 (de) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984170406U JPH0415702Y2 (de) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186321U JPS6186321U (de) | 1986-06-06 |
| JPH0415702Y2 true JPH0415702Y2 (de) | 1992-04-08 |
Family
ID=30728115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984170406U Expired JPH0415702Y2 (de) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415702Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5639998U (de) * | 1979-09-04 | 1981-04-14 |
-
1984
- 1984-11-12 JP JP1984170406U patent/JPH0415702Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5639998U (de) * | 1979-09-04 | 1981-04-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6186321U (de) | 1986-06-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4270434B2 (ja) | 基板移載装置並びに基板の取り出し方法および基板の収納方法 | |
| KR900700359A (ko) | 로보트 작업용 웨이퍼 운송구 어셈블리 | |
| JPH09205128A (ja) | 半導体ウェハ移送ロボット用アーム | |
| JP5168594B2 (ja) | 基板搬送設備 | |
| ITMI990281A1 (it) | Dispositivo per maneggiare substrati mediante un istema autolivellante a depressione in reattori epistassiali ad induzione con suscettore di | |
| JPH0237778Y2 (de) | ||
| JP4255261B2 (ja) | 基板収納容器 | |
| JPH0415702Y2 (de) | ||
| US4536122A (en) | Wafer transfer device | |
| JPH0211489B2 (de) | ||
| JP3057945B2 (ja) | 基板支持装置 | |
| JPH0595042A (ja) | 天井走行車システムの収納容器 | |
| JPH02174244A (ja) | ウェハキャリア用治具枠およびウェハ移換装置 | |
| JPS6212562A (ja) | 角マスク自動収納装置 | |
| JPS63300524A (ja) | ウエ−ハカセット搬送用保持機構 | |
| JP2582857Y2 (ja) | 基板ガイド装置 | |
| JPH0355881Y2 (de) | ||
| JPH0710267A (ja) | クリーンルーム用移載装置 | |
| JPS63124545A (ja) | 板体ロ−デイング装置 | |
| JP2003012146A (ja) | 基板用カセットの搬送装置 | |
| JPH0220834Y2 (de) | ||
| JPH0249722Y2 (de) | ||
| JPH09260478A (ja) | ウェーハキャリア、並びにウェーハ湿式処理装置及び方法 | |
| JPH0643026Y2 (ja) | 薄板状被処理物の搬送治具 | |
| JP2999064B2 (ja) | ウエット処理装置 |