JPH0414712Y2 - - Google Patents
Info
- Publication number
- JPH0414712Y2 JPH0414712Y2 JP5201984U JP5201984U JPH0414712Y2 JP H0414712 Y2 JPH0414712 Y2 JP H0414712Y2 JP 5201984 U JP5201984 U JP 5201984U JP 5201984 U JP5201984 U JP 5201984U JP H0414712 Y2 JPH0414712 Y2 JP H0414712Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- standpipe
- shaped tube
- tank
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 40
- 238000007789 sealing Methods 0.000 claims description 12
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000009434 installation Methods 0.000 claims description 2
- 230000007423 decrease Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5201984U JPS60164200U (ja) | 1984-04-11 | 1984-04-11 | 調圧液封装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5201984U JPS60164200U (ja) | 1984-04-11 | 1984-04-11 | 調圧液封装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60164200U JPS60164200U (ja) | 1985-10-31 |
| JPH0414712Y2 true JPH0414712Y2 (h) | 1992-04-02 |
Family
ID=30571588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5201984U Granted JPS60164200U (ja) | 1984-04-11 | 1984-04-11 | 調圧液封装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60164200U (h) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101446819B1 (ko) * | 2006-12-22 | 2014-10-01 | 마루젠 세끼유가가꾸 가부시키가이샤 | 반도체 리소그래피용 중합체의 제조 방법 |
-
1984
- 1984-04-11 JP JP5201984U patent/JPS60164200U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60164200U (ja) | 1985-10-31 |
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