JPH0412084A - シリコン単結晶の製造装置 - Google Patents
シリコン単結晶の製造装置Info
- Publication number
- JPH0412084A JPH0412084A JP2114519A JP11451990A JPH0412084A JP H0412084 A JPH0412084 A JP H0412084A JP 2114519 A JP2114519 A JP 2114519A JP 11451990 A JP11451990 A JP 11451990A JP H0412084 A JPH0412084 A JP H0412084A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- partition member
- single crystal
- quartz
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 66
- 229910052710 silicon Inorganic materials 0.000 title claims description 66
- 239000010703 silicon Substances 0.000 title claims description 66
- 238000005192 partition Methods 0.000 claims abstract description 70
- 239000010453 quartz Substances 0.000 claims abstract description 50
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 50
- 239000002994 raw material Substances 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 5
- 229910002804 graphite Inorganic materials 0.000 abstract description 5
- 239000010439 graphite Substances 0.000 abstract description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 238000002425 crystallisation Methods 0.000 description 7
- 230000008025 crystallization Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 241001494479 Pecora Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
- C30B15/12—Double crucible methods
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2114519A JPH0412084A (ja) | 1990-04-27 | 1990-04-27 | シリコン単結晶の製造装置 |
| DE19914190942 DE4190942T1 (fr) | 1990-04-27 | 1991-04-24 | |
| KR1019910701851A KR920702733A (ko) | 1990-04-27 | 1991-04-24 | 실리콘 단결정 제조장치 |
| PCT/JP1991/000547 WO1991017289A1 (fr) | 1990-04-27 | 1991-04-24 | Appareil de fabrication de monocristaux de silicium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2114519A JPH0412084A (ja) | 1990-04-27 | 1990-04-27 | シリコン単結晶の製造装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0412084A true JPH0412084A (ja) | 1992-01-16 |
Family
ID=14639784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2114519A Pending JPH0412084A (ja) | 1990-04-27 | 1990-04-27 | シリコン単結晶の製造装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH0412084A (fr) |
| KR (1) | KR920702733A (fr) |
| DE (1) | DE4190942T1 (fr) |
| WO (1) | WO1991017289A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005320969A (ja) * | 2004-05-07 | 2005-11-17 | Oliver Laing | 循環ポンプ、及び電気モータの球面軸受を流体潤滑するための方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9863062B2 (en) | 2013-03-14 | 2018-01-09 | Corner Star Limited | Czochralski crucible for controlling oxygen and related methods |
| EP2971275B1 (fr) * | 2013-03-14 | 2018-02-21 | Sunedison, Inc. | Ensemble creuset destiné à réguler l'oxygène et procédés associés |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1194820B (de) * | 1960-03-30 | 1965-06-16 | Telefunken Patent | Verfahren zum Ziehen von Einkristallen homogener Stoerstellenkonzentration und Vorrichtung zur Durchfuehrung des Verfahrens |
| JPH0733305B2 (ja) * | 1987-03-20 | 1995-04-12 | 三菱マテリアル株式会社 | 石英製二重ルツボの製造方法 |
-
1990
- 1990-04-27 JP JP2114519A patent/JPH0412084A/ja active Pending
-
1991
- 1991-04-24 KR KR1019910701851A patent/KR920702733A/ko not_active Application Discontinuation
- 1991-04-24 DE DE19914190942 patent/DE4190942T1/de not_active Withdrawn
- 1991-04-24 WO PCT/JP1991/000547 patent/WO1991017289A1/fr active Application Filing
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005320969A (ja) * | 2004-05-07 | 2005-11-17 | Oliver Laing | 循環ポンプ、及び電気モータの球面軸受を流体潤滑するための方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1991017289A1 (fr) | 1991-11-14 |
| DE4190942T1 (fr) | 1992-05-14 |
| KR920702733A (ko) | 1992-10-06 |
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