KR920702733A - 실리콘 단결정 제조장치 - Google Patents
실리콘 단결정 제조장치Info
- Publication number
- KR920702733A KR920702733A KR1019910701851A KR910701851A KR920702733A KR 920702733 A KR920702733 A KR 920702733A KR 1019910701851 A KR1019910701851 A KR 1019910701851A KR 910701851 A KR910701851 A KR 910701851A KR 920702733 A KR920702733 A KR 920702733A
- Authority
- KR
- South Korea
- Prior art keywords
- single crystal
- crucible
- silicon single
- crystal manufacturing
- partition member
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
- C30B15/12—Double crucible methods
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예에 석영 다중 도가니를 도시한 도면.
제2도는 제1도에서처럼 석영 이중 도가니를 이용한 실리콘 단결정 제조장치의 단면도.
제3도는 도가니형 간막이 부재의 바닥 곡률반경와 단결정 성장의 량사이의 관계를 도시한 그래프.
Claims (2)
- 용융실리콘을 함유한 회전용 석영 도가니 및 석영 도가니의 축으로 부터 석영도가니를 가열하는 전기저항 가열기 및 석용 도가니내에 용융 실리콘 단결정 성장부와 재료 용융부로 나누도록 배열되어 용융 실리콘을 통로를 가능케 하는 소형구멍을 가진 석영 간막이부재 및 시동재 실리콘을 재료 용융부에 연속적으로 공급하는 시동재 공급수단 등을 포함하는 실리콘 단결정 제조장치에 있어서, 간막이부재는 도가니형이고, 도가니형 간막이 부재의 외면은 석영도가니의 바닥부분에 근접 고정되어 있고, 도가니형 간막이부재의 측과 바닥부분을 연결하는 부분은 곡률반경을 가진 R부분을 구성하는 것을 특징으로 하는 실리콘 단결정 제조장치.
- 제1항에 있어서, 상기 곡률반경은 10mm∼50mm의 범위인 것을 특징으로 하는 실리콘 단결정 제조장치.※ 참고사항 : 최초출원 내용에 의하여 공개되는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2114519A JPH0412084A (ja) | 1990-04-27 | 1990-04-27 | シリコン単結晶の製造装置 |
JP90-114519 | 1990-04-27 | ||
PCT/JP1991/000547 WO1991017289A1 (en) | 1990-04-27 | 1991-04-24 | Silicon single crystal manufacturing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR920702733A true KR920702733A (ko) | 1992-10-06 |
Family
ID=14639784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910701851A KR920702733A (ko) | 1990-04-27 | 1991-04-24 | 실리콘 단결정 제조장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH0412084A (ko) |
KR (1) | KR920702733A (ko) |
DE (1) | DE4190942T1 (ko) |
WO (1) | WO1991017289A1 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004023790B4 (de) * | 2004-05-07 | 2016-02-18 | Xylem Ip Holdings Llc | Umwälzpumpe und Verfahren zur Flüssigkeitsschmierung eines sphärischen Lagers in einem Elektromotor |
US9863062B2 (en) | 2013-03-14 | 2018-01-09 | Corner Star Limited | Czochralski crucible for controlling oxygen and related methods |
CN105452542B (zh) * | 2013-03-14 | 2019-03-08 | 各星有限公司 | 用于控制氧的坩埚组件和相关方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1194820B (de) * | 1960-03-30 | 1965-06-16 | Telefunken Patent | Verfahren zum Ziehen von Einkristallen homogener Stoerstellenkonzentration und Vorrichtung zur Durchfuehrung des Verfahrens |
JPH0733305B2 (ja) * | 1987-03-20 | 1995-04-12 | 三菱マテリアル株式会社 | 石英製二重ルツボの製造方法 |
-
1990
- 1990-04-27 JP JP2114519A patent/JPH0412084A/ja active Pending
-
1991
- 1991-04-24 DE DE19914190942 patent/DE4190942T1/de not_active Withdrawn
- 1991-04-24 KR KR1019910701851A patent/KR920702733A/ko not_active Application Discontinuation
- 1991-04-24 WO PCT/JP1991/000547 patent/WO1991017289A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE4190942T1 (ko) | 1992-05-14 |
WO1991017289A1 (en) | 1991-11-14 |
JPH0412084A (ja) | 1992-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |