JPH0411626B2 - - Google Patents
Info
- Publication number
- JPH0411626B2 JPH0411626B2 JP58004269A JP426983A JPH0411626B2 JP H0411626 B2 JPH0411626 B2 JP H0411626B2 JP 58004269 A JP58004269 A JP 58004269A JP 426983 A JP426983 A JP 426983A JP H0411626 B2 JPH0411626 B2 JP H0411626B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reaction vessel
- film
- radicals
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 75
- 238000006243 chemical reaction Methods 0.000 claims description 68
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 description 21
- 230000015572 biosynthetic process Effects 0.000 description 20
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 16
- 229910000077 silane Inorganic materials 0.000 description 14
- 108091008695 photoreceptors Proteins 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000005281 excited state Effects 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- -1 silane Chemical compound 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58004269A JPS59131511A (ja) | 1983-01-17 | 1983-01-17 | アモルフアスシリコン膜の成膜方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58004269A JPS59131511A (ja) | 1983-01-17 | 1983-01-17 | アモルフアスシリコン膜の成膜方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59131511A JPS59131511A (ja) | 1984-07-28 |
| JPH0411626B2 true JPH0411626B2 (zh) | 1992-03-02 |
Family
ID=11579817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58004269A Granted JPS59131511A (ja) | 1983-01-17 | 1983-01-17 | アモルフアスシリコン膜の成膜方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59131511A (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH081895B2 (ja) * | 1985-06-07 | 1996-01-10 | 松下電器産業株式会社 | 非晶質シリコン膜の形成方法 |
| JP2790843B2 (ja) * | 1989-04-19 | 1998-08-27 | シャープ株式会社 | 薄膜気相成長装置 |
| JP2000212749A (ja) * | 1999-01-22 | 2000-08-02 | Ulvac Japan Ltd | 薄膜形成装置、及び窒化タングステン薄膜製造方法 |
| US6402848B1 (en) * | 1999-04-23 | 2002-06-11 | Tokyo Electron Limited | Single-substrate-treating apparatus for semiconductor processing system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56102577A (en) * | 1980-01-18 | 1981-08-17 | Mitsubishi Electric Corp | Method and device for forming thin film |
-
1983
- 1983-01-17 JP JP58004269A patent/JPS59131511A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56102577A (en) * | 1980-01-18 | 1981-08-17 | Mitsubishi Electric Corp | Method and device for forming thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59131511A (ja) | 1984-07-28 |
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