JPH041069B2 - - Google Patents

Info

Publication number
JPH041069B2
JPH041069B2 JP60259986A JP25998685A JPH041069B2 JP H041069 B2 JPH041069 B2 JP H041069B2 JP 60259986 A JP60259986 A JP 60259986A JP 25998685 A JP25998685 A JP 25998685A JP H041069 B2 JPH041069 B2 JP H041069B2
Authority
JP
Japan
Prior art keywords
light
substrate
photochemical reaction
light source
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60259986A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62120476A (ja
Inventor
Shunji Kishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP25998685A priority Critical patent/JPS62120476A/ja
Publication of JPS62120476A publication Critical patent/JPS62120476A/ja
Publication of JPH041069B2 publication Critical patent/JPH041069B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP25998685A 1985-11-19 1985-11-19 光化学反応加工方法およびその加工装置 Granted JPS62120476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25998685A JPS62120476A (ja) 1985-11-19 1985-11-19 光化学反応加工方法およびその加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25998685A JPS62120476A (ja) 1985-11-19 1985-11-19 光化学反応加工方法およびその加工装置

Publications (2)

Publication Number Publication Date
JPS62120476A JPS62120476A (ja) 1987-06-01
JPH041069B2 true JPH041069B2 (fr) 1992-01-09

Family

ID=17341692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25998685A Granted JPS62120476A (ja) 1985-11-19 1985-11-19 光化学反応加工方法およびその加工装置

Country Status (1)

Country Link
JP (1) JPS62120476A (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279690A (ja) * 1985-06-05 1986-12-10 Hitachi Ltd 表面処理装置

Also Published As

Publication number Publication date
JPS62120476A (ja) 1987-06-01

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