JPH0410472Y2 - - Google Patents
Info
- Publication number
- JPH0410472Y2 JPH0410472Y2 JP20184686U JP20184686U JPH0410472Y2 JP H0410472 Y2 JPH0410472 Y2 JP H0410472Y2 JP 20184686 U JP20184686 U JP 20184686U JP 20184686 U JP20184686 U JP 20184686U JP H0410472 Y2 JPH0410472 Y2 JP H0410472Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- vacuum processing
- flange
- vacuum
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012856 packing Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 8
- 239000002184 metal Substances 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 8
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20184686U JPH0410472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-26 | 1986-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20184686U JPH0410472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-26 | 1986-12-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63104787U JPS63104787U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-07-07 |
| JPH0410472Y2 true JPH0410472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-03-16 |
Family
ID=31165682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20184686U Expired JPH0410472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-26 | 1986-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101903691B1 (ko) * | 2016-10-21 | 2018-10-04 | 삼성중공업 주식회사 | 배관 플랜지 어셈블리 및 배관 플랜지 어셈블리 설치방법 |
-
1986
- 1986-12-26 JP JP20184686U patent/JPH0410472Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63104787U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-07-07 |