JPH0410003B2 - - Google Patents

Info

Publication number
JPH0410003B2
JPH0410003B2 JP57132350A JP13235082A JPH0410003B2 JP H0410003 B2 JPH0410003 B2 JP H0410003B2 JP 57132350 A JP57132350 A JP 57132350A JP 13235082 A JP13235082 A JP 13235082A JP H0410003 B2 JPH0410003 B2 JP H0410003B2
Authority
JP
Japan
Prior art keywords
light
monitor glass
optical
light source
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57132350A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5920804A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13235082A priority Critical patent/JPS5920804A/ja
Publication of JPS5920804A publication Critical patent/JPS5920804A/ja
Publication of JPH0410003B2 publication Critical patent/JPH0410003B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13235082A 1982-07-28 1982-07-28 膜厚監視装置 Granted JPS5920804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13235082A JPS5920804A (ja) 1982-07-28 1982-07-28 膜厚監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13235082A JPS5920804A (ja) 1982-07-28 1982-07-28 膜厚監視装置

Publications (2)

Publication Number Publication Date
JPS5920804A JPS5920804A (ja) 1984-02-02
JPH0410003B2 true JPH0410003B2 (enrdf_load_stackoverflow) 1992-02-24

Family

ID=15079296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13235082A Granted JPS5920804A (ja) 1982-07-28 1982-07-28 膜厚監視装置

Country Status (1)

Country Link
JP (1) JPS5920804A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774000A (en) * 1985-11-01 1988-09-27 Kabushiki Kaisha Tsuchiya Seisakusho Submicron disc filters
US5175697A (en) * 1986-06-02 1992-12-29 Minolta Camera Kabushiki Kaisha Spectrophotometer for accurately measuring light intensity in a specific wavelength region
JPS6324144A (ja) * 1986-07-02 1988-02-01 Sanyo Kokusaku Pulp Co Ltd 爆発性雰囲気内を走行中のシ−トの赤外線水分測定方法及び装置
JPS6324145A (ja) * 1986-07-02 1988-02-01 Sanyo Kokusaku Pulp Co Ltd ドライヤ−パ−トにおけるシ−トの水分測定方法及び装置
JPS63289105A (ja) * 1987-05-20 1988-11-25 Mitsubishi Heavy Ind Ltd ダムの放流設備据付方法
JP2012220359A (ja) * 2011-04-11 2012-11-12 Tokyo Electron Ltd 基板処理装置に用いられるプロセスモニター装置、プロセスモニター方法、および基板処理装置
US10962694B2 (en) 2018-11-02 2021-03-30 Viavi Solutions Inc. Stepped structure optical filter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119076A (en) * 1977-03-26 1978-10-18 Ritsuo Hasumi Optical thicknessmeter for transparent film

Also Published As

Publication number Publication date
JPS5920804A (ja) 1984-02-02

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