JPH0399762U - - Google Patents
Info
- Publication number
- JPH0399762U JPH0399762U JP683590U JP683590U JPH0399762U JP H0399762 U JPH0399762 U JP H0399762U JP 683590 U JP683590 U JP 683590U JP 683590 U JP683590 U JP 683590U JP H0399762 U JPH0399762 U JP H0399762U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- high vacuum
- vacuum evacuation
- vacuum pump
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は、本考案の一実施例であるスパツタリ
ング装置の概略構成図である。 １……高真空ポンプ、２……バルブ、３……吸
着槽、４……成膜槽、５……基板ホルダ、６……
ターゲツト、７……吸着用ターゲツト、８……隔
壁。
ング装置の概略構成図である。 １……高真空ポンプ、２……バルブ、３……吸
着槽、４……成膜槽、５……基板ホルダ、６……
ターゲツト、７……吸着用ターゲツト、８……隔
壁。
Claims (1)
- 基板に成膜を行なう槽と、真空ポンプと、吸着
槽とで構成された高真空排気装置内を、前記真空
ポンプで排気中に前記の吸着槽内で、酸素や水分
を吸着しやすい材料を用いてスパツタリングまた
は蒸着を行ない、前記成膜槽内の真空度を高める
ことを特徴とする高真空排気装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP683590U JPH0399762U (ja) | 1990-01-27 | 1990-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP683590U JPH0399762U (ja) | 1990-01-27 | 1990-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0399762U true JPH0399762U (ja) | 1991-10-18 |
Family
ID=31510508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP683590U Pending JPH0399762U (ja) | 1990-01-27 | 1990-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0399762U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613323A (ja) * | 1984-06-14 | 1986-01-09 | Mitsubishi Electric Corp | 磁気記録媒体の製造方法 |
-
1990
- 1990-01-27 JP JP683590U patent/JPH0399762U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613323A (ja) * | 1984-06-14 | 1986-01-09 | Mitsubishi Electric Corp | 磁気記録媒体の製造方法 |