JPH0397926U - - Google Patents
Info
- Publication number
- JPH0397926U JPH0397926U JP740290U JP740290U JPH0397926U JP H0397926 U JPH0397926 U JP H0397926U JP 740290 U JP740290 U JP 740290U JP 740290 U JP740290 U JP 740290U JP H0397926 U JPH0397926 U JP H0397926U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- processing tank
- bringing
- utility
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は本考案の一実施例による処理槽の断面
図、第２図は従来の処理槽の断面図である。
１……槽の外壁、２……液の供給口、３……多
穴板、４……ウエハカセツト、５……ウエハ、６
……回転ドラム。
FIG. 1 is a sectional view of a processing tank according to an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional processing tank. 1...Outer wall of tank, 2...Liquid supply port, 3...Multi-hole plate, 4...Wafer cassette, 5...Wafer, 6
...Rotating drum.
Claims (1)
を回転するウエハ回転型ウエツト処理槽。 A wafer rotation type wet processing tank that rotates wafers by bringing a rotating body into contact with the wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP740290U JPH0397926U (en) | 1990-01-29 | 1990-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP740290U JPH0397926U (en) | 1990-01-29 | 1990-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0397926U true JPH0397926U (en) | 1991-10-09 |
Family
ID=31511059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP740290U Pending JPH0397926U (en) | 1990-01-29 | 1990-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0397926U (en) |
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1990
- 1990-01-29 JP JP740290U patent/JPH0397926U/ja active Pending