JPS6186929U - - Google Patents

Info

Publication number
JPS6186929U
JPS6186929U JP17043084U JP17043084U JPS6186929U JP S6186929 U JPS6186929 U JP S6186929U JP 17043084 U JP17043084 U JP 17043084U JP 17043084 U JP17043084 U JP 17043084U JP S6186929 U JPS6186929 U JP S6186929U
Authority
JP
Japan
Prior art keywords
ultrasonic cleaning
wafer cassette
wafer
horizontal part
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17043084U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17043084U priority Critical patent/JPS6186929U/ja
Publication of JPS6186929U publication Critical patent/JPS6186929U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る超音波洗浄におけるウエ
ーハカセツトの揺動装置の第１実施例の断面図、
第２図は第２実施例の断面図、第３図はウエーハ
カセツトの斜視図、第４図は従来装置の断面図を
夫々示す。 尚、図中１…ウエーハカセツト、５，５′…ウ
エーハ挿入溝、６…スリツト、７…ウエハ、８…
保持具、１０…洗浄槽、１１…アーム、１３…カ
ム、１４…水平部、１５…支点。 FIG. 1 is a sectional view of a first embodiment of a swinging device for a wafer cassette in ultrasonic cleaning according to the present invention;
FIG. 2 is a sectional view of the second embodiment, FIG. 3 is a perspective view of a wafer cassette, and FIG. 4 is a sectional view of a conventional device. In the figure, 1... wafer cassette, 5, 5'... wafer insertion groove, 6... slit, 7... wafer, 8...
Holder, 10...Cleaning tank, 11...Arm, 13...Cam, 14...Horizontal part, 15...Fully point.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 対向する保持壁体２，２′にウエーハ７を収納
するウエーハ挿入溝５，……５′，……を多数対
向して設け、各ウエーハ挿入溝５，５′に外部と
連通するスリツト６を設けたウエーハカセツト１
を保持したアーム１１の超音波洗浄槽１０外に位
置した水平部１４の一部を支点１５で支持し、他
方を回動するカム１３に当接したことを特徴とす
る超音波洗浄におけるウエーハカセツトの揺動装
置。 A large number of wafer insertion grooves 5, 5', . Wafer cassette 1 installed
A wafer cassette for ultrasonic cleaning, characterized in that a part of a horizontal part 14 of an arm 11 holding a horizontal part 14 located outside the ultrasonic cleaning tank 10 is supported by a fulcrum 15, and the other part is in contact with a rotating cam 13. rocking device.
JP17043084U 1984-11-12 1984-11-12 Pending JPS6186929U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17043084U JPS6186929U (en) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17043084U JPS6186929U (en) 1984-11-12 1984-11-12

Publications (1)

Publication Number Publication Date
JPS6186929U true JPS6186929U (en) 1986-06-07

Family

ID=30728139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17043084U Pending JPS6186929U (en) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6186929U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02207526A (en) * 1989-02-07 1990-08-17 Tokyo Electron Ltd Single wafer washing method
JPH0381628U (en) * 1989-12-13 1991-08-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02207526A (en) * 1989-02-07 1990-08-17 Tokyo Electron Ltd Single wafer washing method
JPH0381628U (en) * 1989-12-13 1991-08-21

Similar Documents

Publication Publication Date Title
JPS6186929U (en)
JPS6372798U (en)
JPS6247124U (en)
JPS60168708U (en) joint cover
JPS6170930U (en)
JPS6343427U (en)
JPS5832244U (en) Combustion device for solid fuel
JPS61149330U (en)
JPS61126491U (en)
JPS6362983U (en)
JPS6152250U (en)
JPS6265142U (en)
JPH0299970U (en)
JPS6299581U (en)
JPS62202667U (en)
JPS62136896U (en)
JPS61207032U (en)
JPS60181971U (en) Mounting stand
JPS62153649U (en)
JPH0325239U (en)
JPS6347440U (en)
JPH032632U (en)
JPH0373437U (en)
JPH0326387U (en)
JPS63122373U (en)