JPS6376457U - - Google Patents
Info
- Publication number
- JPS6376457U JPS6376457U JP1986170958U JP17095886U JPS6376457U JP S6376457 U JPS6376457 U JP S6376457U JP 1986170958 U JP1986170958 U JP 1986170958U JP 17095886 U JP17095886 U JP 17095886U JP S6376457 U JPS6376457 U JP S6376457U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- double
- polishing device
- sided polishing
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 3
Description
第１図は本考案による一実施例を示す側断面図
、第２図は本考案による一実施例を示すＡ−Ａ断
面図、第３図は従来の両面研磨装置を示す側断面
図、である。
図において、１は被加工物、２はキヤリア、２
ａはギア部、３は太陽ギア、４はインターナルギ
ア、５は上部定盤、５ａは孔、６は下部定盤、７
は液供給口、８は液供給口、９は給液リング、９
ａは貯液部、１０は給液リング、１０ａは貯液部
、を示す。
Fig. 1 is a side sectional view showing an embodiment of the present invention, Fig. 2 is a sectional view taken along line A-A showing an embodiment of the invention, and Fig. 3 is a side sectional view showing a conventional double-sided polishing device. be. In the figure, 1 is the workpiece, 2 is the carrier, 2
a is a gear part, 3 is a sun gear, 4 is an internal gear, 5 is an upper surface plate, 5a is a hole, 6 is a lower surface plate, 7
is a liquid supply port, 8 is a liquid supply port, 9 is a liquid supply ring, 9
a indicates a liquid storage section, 10 indicates a liquid supply ring, and 10a indicates a liquid storage section.
Claims (1)
キヤリア２と、前記キヤリア２の自転及び公転を
制御する太陽ギア３及びインターナルギア４とが
噛み合うギア部２ａに、液体を供給するようにし
たことを特徴とする両面研磨装置。 In the double-sided polishing device, liquid is supplied to a gear portion 2a in which a carrier 2 that holds a workpiece 1 is engaged with a sun gear 3 and an internal gear 4 that control the rotation and revolution of the carrier 2. A double-sided polishing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170958U JPH0525809Y2 (en) | 1986-11-06 | 1986-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170958U JPH0525809Y2 (en) | 1986-11-06 | 1986-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6376457U true JPS6376457U (en) | 1988-05-20 |
| JPH0525809Y2 JPH0525809Y2 (en) | 1993-06-29 |
Family
ID=31106152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986170958U Expired - Lifetime JPH0525809Y2 (en) | 1986-11-06 | 1986-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525809Y2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130748U (en) * | 1989-03-30 | 1990-10-29 | ||
| JP2009006423A (en) * | 2007-06-27 | 2009-01-15 | Hoya Corp | Manufacturing method of glass substrate for magnetic disc, manufacturing method of magnetic disc, and polishing device |
| JP2009039827A (en) * | 2007-08-09 | 2009-02-26 | Fujitsu Ltd | Polishing apparatus, substrate manufacturing method, and electronic device manufacturing method |
| JP2019069499A (en) * | 2017-10-11 | 2019-05-09 | 株式会社ファインサーフェス技術 | Polishing device, polishing method, and polishing carrier |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5775961U (en) * | 1980-10-30 | 1982-05-11 |
-
1986
- 1986-11-06 JP JP1986170958U patent/JPH0525809Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5775961U (en) * | 1980-10-30 | 1982-05-11 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130748U (en) * | 1989-03-30 | 1990-10-29 | ||
| JP2009006423A (en) * | 2007-06-27 | 2009-01-15 | Hoya Corp | Manufacturing method of glass substrate for magnetic disc, manufacturing method of magnetic disc, and polishing device |
| JP2009039827A (en) * | 2007-08-09 | 2009-02-26 | Fujitsu Ltd | Polishing apparatus, substrate manufacturing method, and electronic device manufacturing method |
| JP2019069499A (en) * | 2017-10-11 | 2019-05-09 | 株式会社ファインサーフェス技術 | Polishing device, polishing method, and polishing carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0525809Y2 (en) | 1993-06-29 |