JPH0388329U - - Google Patents
Info
- Publication number
- JPH0388329U JPH0388329U JP14981089U JP14981089U JPH0388329U JP H0388329 U JPH0388329 U JP H0388329U JP 14981089 U JP14981089 U JP 14981089U JP 14981089 U JP14981089 U JP 14981089U JP H0388329 U JPH0388329 U JP H0388329U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- wafer
- rinsing mechanism
- resist film
- edge rinsing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981089U JPH0388329U (enExample) | 1989-12-25 | 1989-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981089U JPH0388329U (enExample) | 1989-12-25 | 1989-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388329U true JPH0388329U (enExample) | 1991-09-10 |
Family
ID=31696185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14981089U Pending JPH0388329U (enExample) | 1989-12-25 | 1989-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388329U (enExample) |
-
1989
- 1989-12-25 JP JP14981089U patent/JPH0388329U/ja active Pending
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