JPH0379422U - - Google Patents
Info
- Publication number
- JPH0379422U JPH0379422U JP14170789U JP14170789U JPH0379422U JP H0379422 U JPH0379422 U JP H0379422U JP 14170789 U JP14170789 U JP 14170789U JP 14170789 U JP14170789 U JP 14170789U JP H0379422 U JPH0379422 U JP H0379422U
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- etching
- ecr
- ecr etching
- microwaves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims description 3
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14170789U JPH0379422U (de) | 1989-12-06 | 1989-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14170789U JPH0379422U (de) | 1989-12-06 | 1989-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0379422U true JPH0379422U (de) | 1991-08-13 |
Family
ID=31688577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14170789U Pending JPH0379422U (de) | 1989-12-06 | 1989-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0379422U (de) |
-
1989
- 1989-12-06 JP JP14170789U patent/JPH0379422U/ja active Pending
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