JPH037880Y2 - - Google Patents
Info
- Publication number
- JPH037880Y2 JPH037880Y2 JP1983125276U JP12527683U JPH037880Y2 JP H037880 Y2 JPH037880 Y2 JP H037880Y2 JP 1983125276 U JP1983125276 U JP 1983125276U JP 12527683 U JP12527683 U JP 12527683U JP H037880 Y2 JPH037880 Y2 JP H037880Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- optical axis
- samples
- focusing lens
- final stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 37
- 230000003287 optical effect Effects 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12527683U JPS6032756U (ja) | 1983-08-12 | 1983-08-12 | 電子線反射回折像観察装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12527683U JPS6032756U (ja) | 1983-08-12 | 1983-08-12 | 電子線反射回折像観察装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6032756U JPS6032756U (ja) | 1985-03-06 |
JPH037880Y2 true JPH037880Y2 (US06262066-20010717-C00315.png) | 1991-02-27 |
Family
ID=30285289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12527683U Granted JPS6032756U (ja) | 1983-08-12 | 1983-08-12 | 電子線反射回折像観察装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6032756U (US06262066-20010717-C00315.png) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4429151Y1 (US06262066-20010717-C00315.png) * | 1968-04-18 | 1969-12-03 | ||
JPS58158846A (ja) * | 1982-03-15 | 1983-09-21 | Jeol Ltd | 電子顕微鏡 |
-
1983
- 1983-08-12 JP JP12527683U patent/JPS6032756U/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4429151Y1 (US06262066-20010717-C00315.png) * | 1968-04-18 | 1969-12-03 | ||
JPS58158846A (ja) * | 1982-03-15 | 1983-09-21 | Jeol Ltd | 電子顕微鏡 |
Also Published As
Publication number | Publication date |
---|---|
JPS6032756U (ja) | 1985-03-06 |