JPH0378739B2 - - Google Patents
Info
- Publication number
- JPH0378739B2 JPH0378739B2 JP14788683A JP14788683A JPH0378739B2 JP H0378739 B2 JPH0378739 B2 JP H0378739B2 JP 14788683 A JP14788683 A JP 14788683A JP 14788683 A JP14788683 A JP 14788683A JP H0378739 B2 JPH0378739 B2 JP H0378739B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- ion beam
- ion
- focusing
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 48
- 150000002500 ions Chemical class 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000006023 eutectic alloy Substances 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 69Ga ion Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14788683A JPS6039748A (ja) | 1983-08-12 | 1983-08-12 | イオンビ−ム集束装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14788683A JPS6039748A (ja) | 1983-08-12 | 1983-08-12 | イオンビ−ム集束装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6039748A JPS6039748A (ja) | 1985-03-01 |
| JPH0378739B2 true JPH0378739B2 (nl) | 1991-12-16 |
Family
ID=15440417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14788683A Granted JPS6039748A (ja) | 1983-08-12 | 1983-08-12 | イオンビ−ム集束装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6039748A (nl) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3621184A1 (de) * | 1986-06-25 | 1988-01-07 | Glyco Metall Werke | Schichtwerkstoff sowie verfahren zu seiner herstellung durch vakuum-plasma-spritzen |
| JP2700002B2 (ja) * | 1986-09-05 | 1998-01-19 | 株式会社日立製作所 | 荷電粒子光学系 |
| JPS63218139A (ja) * | 1987-03-06 | 1988-09-12 | Jeol Ltd | イオンビ−ム装置 |
| JPS63218134A (ja) * | 1987-03-06 | 1988-09-12 | Jeol Ltd | イオンビ−ム装置 |
| JPH0218853A (ja) * | 1988-07-06 | 1990-01-23 | Jeol Ltd | イオンビーム装置 |
| DE10122957B4 (de) | 2001-05-11 | 2005-06-02 | Akt Electron Beam Technology Gmbh | Teilchenstrahlapparat mit energiekorrigierter Strahlablenkung sowie Vorrichtungund Verfahren zur energiekorrigierten Ablenkung eines Teilchenstrahls |
| US6717141B1 (en) * | 2001-11-27 | 2004-04-06 | Schlumberger Technologies, Inc. | Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like |
| US7256606B2 (en) | 2004-08-03 | 2007-08-14 | Applied Materials, Inc. | Method for testing pixels for LCD TFT displays |
| JP6253375B2 (ja) | 2013-12-02 | 2017-12-27 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置 |
-
1983
- 1983-08-12 JP JP14788683A patent/JPS6039748A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6039748A (ja) | 1985-03-01 |
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