JPH03770B2 - - Google Patents

Info

Publication number
JPH03770B2
JPH03770B2 JP56140246A JP14024681A JPH03770B2 JP H03770 B2 JPH03770 B2 JP H03770B2 JP 56140246 A JP56140246 A JP 56140246A JP 14024681 A JP14024681 A JP 14024681A JP H03770 B2 JPH03770 B2 JP H03770B2
Authority
JP
Japan
Prior art keywords
resist pattern
resist
pattern
etched
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56140246A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5842231A (ja
Inventor
Toshihiko Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56140246A priority Critical patent/JPS5842231A/ja
Publication of JPS5842231A publication Critical patent/JPS5842231A/ja
Publication of JPH03770B2 publication Critical patent/JPH03770B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP56140246A 1981-09-08 1981-09-08 パターン形成方法 Granted JPS5842231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56140246A JPS5842231A (ja) 1981-09-08 1981-09-08 パターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56140246A JPS5842231A (ja) 1981-09-08 1981-09-08 パターン形成方法

Publications (2)

Publication Number Publication Date
JPS5842231A JPS5842231A (ja) 1983-03-11
JPH03770B2 true JPH03770B2 (OSRAM) 1991-01-08

Family

ID=15264308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56140246A Granted JPS5842231A (ja) 1981-09-08 1981-09-08 パターン形成方法

Country Status (1)

Country Link
JP (1) JPS5842231A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61122971U (OSRAM) * 1985-01-22 1986-08-02
JPS61122972U (OSRAM) * 1985-01-22 1986-08-02
CA1289440C (en) * 1985-08-29 1991-09-24 Syuichi Ishida Impact energy absorber of steering wheel
JP2514013Y2 (ja) * 1990-07-05 1996-10-16 富山日本電気株式会社 印刷配線板用供給機

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610783B2 (OSRAM) * 1972-06-01 1981-03-10
JPS5731289B2 (OSRAM) * 1974-05-31 1982-07-03
JPS54146966A (en) * 1978-05-10 1979-11-16 Nec Corp Pattern forming method

Also Published As

Publication number Publication date
JPS5842231A (ja) 1983-03-11

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