JPH037405Y2 - - Google Patents
Info
- Publication number
- JPH037405Y2 JPH037405Y2 JP1985032474U JP3247485U JPH037405Y2 JP H037405 Y2 JPH037405 Y2 JP H037405Y2 JP 1985032474 U JP1985032474 U JP 1985032474U JP 3247485 U JP3247485 U JP 3247485U JP H037405 Y2 JPH037405 Y2 JP H037405Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- melt
- single crystal
- heater
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985032474U JPH037405Y2 (enEXAMPLES) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985032474U JPH037405Y2 (enEXAMPLES) | 1985-03-06 | 1985-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61150862U JPS61150862U (enEXAMPLES) | 1986-09-18 |
| JPH037405Y2 true JPH037405Y2 (enEXAMPLES) | 1991-02-25 |
Family
ID=30534020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985032474U Expired JPH037405Y2 (enEXAMPLES) | 1985-03-06 | 1985-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037405Y2 (enEXAMPLES) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2539336Y2 (ja) * | 1990-03-15 | 1997-06-25 | 住友金属工業株式会社 | 結晶成長装置 |
| JP2606046B2 (ja) * | 1992-04-16 | 1997-04-30 | 住友金属工業株式会社 | 単結晶引き上げ時における単結晶酸素濃度の制御方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5113664Y2 (enEXAMPLES) * | 1971-09-16 | 1976-04-12 | ||
| JPS5345679A (en) * | 1976-10-08 | 1978-04-24 | Hitachi Ltd | Pulling-up apparatus for sillicon single crystal |
| JPS55126597A (en) * | 1979-03-23 | 1980-09-30 | Nec Corp | Single crystal growing method |
-
1985
- 1985-03-06 JP JP1985032474U patent/JPH037405Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61150862U (enEXAMPLES) | 1986-09-18 |
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