JPH0373137B2 - - Google Patents

Info

Publication number
JPH0373137B2
JPH0373137B2 JP57179407A JP17940782A JPH0373137B2 JP H0373137 B2 JPH0373137 B2 JP H0373137B2 JP 57179407 A JP57179407 A JP 57179407A JP 17940782 A JP17940782 A JP 17940782A JP H0373137 B2 JPH0373137 B2 JP H0373137B2
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
substrate
impurity
psg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57179407A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5968950A (ja
Inventor
Atsushi Ueno
Tadanaka Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57179407A priority Critical patent/JPS5968950A/ja
Publication of JPS5968950A publication Critical patent/JPS5968950A/ja
Publication of JPH0373137B2 publication Critical patent/JPH0373137B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
JP57179407A 1982-10-12 1982-10-12 半導体装置の製造方法 Granted JPS5968950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57179407A JPS5968950A (ja) 1982-10-12 1982-10-12 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57179407A JPS5968950A (ja) 1982-10-12 1982-10-12 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5968950A JPS5968950A (ja) 1984-04-19
JPH0373137B2 true JPH0373137B2 (https=) 1991-11-20

Family

ID=16065323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57179407A Granted JPS5968950A (ja) 1982-10-12 1982-10-12 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5968950A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2666427B2 (ja) * 1988-11-15 1997-10-22 日本電気株式会社 半導体装置の製造方法
JP4790237B2 (ja) * 2004-07-22 2011-10-12 ルネサスエレクトロニクス株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5968950A (ja) 1984-04-19

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