JPH0370382B2 - - Google Patents
Info
- Publication number
- JPH0370382B2 JPH0370382B2 JP57220582A JP22058282A JPH0370382B2 JP H0370382 B2 JPH0370382 B2 JP H0370382B2 JP 57220582 A JP57220582 A JP 57220582A JP 22058282 A JP22058282 A JP 22058282A JP H0370382 B2 JPH0370382 B2 JP H0370382B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- silicon
- region
- substrate
- memory cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57220582A JPS59110155A (ja) | 1982-12-16 | 1982-12-16 | 半導体メモリセル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57220582A JPS59110155A (ja) | 1982-12-16 | 1982-12-16 | 半導体メモリセル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59110155A JPS59110155A (ja) | 1984-06-26 |
| JPH0370382B2 true JPH0370382B2 (enExample) | 1991-11-07 |
Family
ID=16753226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57220582A Granted JPS59110155A (ja) | 1982-12-16 | 1982-12-16 | 半導体メモリセル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59110155A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115362A (ja) * | 1984-06-29 | 1986-01-23 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | ダイナミツクramセル |
| JPH0296368A (ja) * | 1988-09-30 | 1990-04-09 | Ricoh Co Ltd | 半導体メモリ装置 |
| JPH02135776A (ja) * | 1988-11-17 | 1990-05-24 | Hitachi Ltd | 半導体記憶装置 |
-
1982
- 1982-12-16 JP JP57220582A patent/JPS59110155A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59110155A (ja) | 1984-06-26 |
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