JPH0367568B2 - - Google Patents
Info
- Publication number
- JPH0367568B2 JPH0367568B2 JP61169034A JP16903486A JPH0367568B2 JP H0367568 B2 JPH0367568 B2 JP H0367568B2 JP 61169034 A JP61169034 A JP 61169034A JP 16903486 A JP16903486 A JP 16903486A JP H0367568 B2 JPH0367568 B2 JP H0367568B2
- Authority
- JP
- Japan
- Prior art keywords
- height
- light
- peak
- component
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000011179 visual inspection Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Automatic Assembly (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61169034A JPS6326509A (ja) | 1986-07-19 | 1986-07-19 | 実装部品検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61169034A JPS6326509A (ja) | 1986-07-19 | 1986-07-19 | 実装部品検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6326509A JPS6326509A (ja) | 1988-02-04 |
| JPH0367568B2 true JPH0367568B2 (ko) | 1991-10-23 |
Family
ID=15879093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61169034A Granted JPS6326509A (ja) | 1986-07-19 | 1986-07-19 | 実装部品検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6326509A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108596873A (zh) * | 2018-03-14 | 2018-09-28 | 浙江大学山东工业技术研究院 | 基于高度直方图分割的耐火砖深度缺陷的识别方法 |
-
1986
- 1986-07-19 JP JP61169034A patent/JPS6326509A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6326509A (ja) | 1988-02-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |