JPH0366941B2 - - Google Patents

Info

Publication number
JPH0366941B2
JPH0366941B2 JP14544186A JP14544186A JPH0366941B2 JP H0366941 B2 JPH0366941 B2 JP H0366941B2 JP 14544186 A JP14544186 A JP 14544186A JP 14544186 A JP14544186 A JP 14544186A JP H0366941 B2 JPH0366941 B2 JP H0366941B2
Authority
JP
Japan
Prior art keywords
processing
processing chamber
pallet
transport device
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14544186A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631625A (ja
Inventor
Junichi Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP14544186A priority Critical patent/JPS631625A/ja
Publication of JPS631625A publication Critical patent/JPS631625A/ja
Publication of JPH0366941B2 publication Critical patent/JPH0366941B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP14544186A 1986-06-20 1986-06-20 処理部の搬送方法 Granted JPS631625A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14544186A JPS631625A (ja) 1986-06-20 1986-06-20 処理部の搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14544186A JPS631625A (ja) 1986-06-20 1986-06-20 処理部の搬送方法

Publications (2)

Publication Number Publication Date
JPS631625A JPS631625A (ja) 1988-01-06
JPH0366941B2 true JPH0366941B2 (fr) 1991-10-21

Family

ID=15385311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14544186A Granted JPS631625A (ja) 1986-06-20 1986-06-20 処理部の搬送方法

Country Status (1)

Country Link
JP (1) JPS631625A (fr)

Also Published As

Publication number Publication date
JPS631625A (ja) 1988-01-06

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