JPH0365026B2 - - Google Patents

Info

Publication number
JPH0365026B2
JPH0365026B2 JP62178224A JP17822487A JPH0365026B2 JP H0365026 B2 JPH0365026 B2 JP H0365026B2 JP 62178224 A JP62178224 A JP 62178224A JP 17822487 A JP17822487 A JP 17822487A JP H0365026 B2 JPH0365026 B2 JP H0365026B2
Authority
JP
Japan
Prior art keywords
region
type
semiconductor substrate
regions
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62178224A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6387771A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP62178224A priority Critical patent/JPS6387771A/ja
Publication of JPS6387771A publication Critical patent/JPS6387771A/ja
Publication of JPH0365026B2 publication Critical patent/JPH0365026B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP62178224A 1987-07-17 1987-07-17 電界効果トランジスタ Granted JPS6387771A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62178224A JPS6387771A (ja) 1987-07-17 1987-07-17 電界効果トランジスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62178224A JPS6387771A (ja) 1987-07-17 1987-07-17 電界効果トランジスタ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5023277A Division JPS53135284A (en) 1977-04-30 1977-04-30 Production of field effect transistor

Publications (2)

Publication Number Publication Date
JPS6387771A JPS6387771A (ja) 1988-04-19
JPH0365026B2 true JPH0365026B2 (enExample) 1991-10-09

Family

ID=16044759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178224A Granted JPS6387771A (ja) 1987-07-17 1987-07-17 電界効果トランジスタ

Country Status (1)

Country Link
JP (1) JPS6387771A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3939583B2 (ja) * 2002-04-24 2007-07-04 日産自動車株式会社 電界効果トランジスタの製造方法
JP4986408B2 (ja) * 2005-04-22 2012-07-25 ローム株式会社 半導体装置およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185381A (enExample) * 1975-01-24 1976-07-26 Hitachi Ltd
JPS5374385A (en) * 1976-12-15 1978-07-01 Hitachi Ltd Manufacture of field effect semiconductor device

Also Published As

Publication number Publication date
JPS6387771A (ja) 1988-04-19

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