JPH0364928B2 - - Google Patents
Info
- Publication number
- JPH0364928B2 JPH0364928B2 JP18817585A JP18817585A JPH0364928B2 JP H0364928 B2 JPH0364928 B2 JP H0364928B2 JP 18817585 A JP18817585 A JP 18817585A JP 18817585 A JP18817585 A JP 18817585A JP H0364928 B2 JPH0364928 B2 JP H0364928B2
- Authority
- JP
- Japan
- Prior art keywords
- alumina
- groove
- substrate
- magnetic
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 63
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 48
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 4
- 238000005868 electrolysis reaction Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 37
- 239000011521 glass Substances 0.000 description 27
- 238000004544 sputter deposition Methods 0.000 description 21
- 239000010409 thin film Substances 0.000 description 20
- 229910000859 α-Fe Inorganic materials 0.000 description 20
- 238000000034 method Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 7
- 239000013077 target material Substances 0.000 description 6
- 229910001035 Soft ferrite Inorganic materials 0.000 description 5
- 229910018605 Ni—Zn Inorganic materials 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18817585A JPS6247815A (ja) | 1985-08-26 | 1985-08-26 | 溝構造磁性基板の製造方法 |
| US06/888,873 US4777074A (en) | 1985-08-12 | 1986-07-24 | Grooved magnetic substrates and method for producing the same |
| US07/213,234 US4875987A (en) | 1985-08-12 | 1988-06-29 | Grooved magnetic substrates and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18817585A JPS6247815A (ja) | 1985-08-26 | 1985-08-26 | 溝構造磁性基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247815A JPS6247815A (ja) | 1987-03-02 |
| JPH0364928B2 true JPH0364928B2 (enrdf_load_stackoverflow) | 1991-10-09 |
Family
ID=16219072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18817585A Granted JPS6247815A (ja) | 1985-08-12 | 1985-08-26 | 溝構造磁性基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247815A (enrdf_load_stackoverflow) |
-
1985
- 1985-08-26 JP JP18817585A patent/JPS6247815A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6247815A (ja) | 1987-03-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |