JPS6247815A - 溝構造磁性基板の製造方法 - Google Patents
溝構造磁性基板の製造方法Info
- Publication number
- JPS6247815A JPS6247815A JP18817585A JP18817585A JPS6247815A JP S6247815 A JPS6247815 A JP S6247815A JP 18817585 A JP18817585 A JP 18817585A JP 18817585 A JP18817585 A JP 18817585A JP S6247815 A JPS6247815 A JP S6247815A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- alumina
- magnetic
- groove
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18817585A JPS6247815A (ja) | 1985-08-26 | 1985-08-26 | 溝構造磁性基板の製造方法 |
| US06/888,873 US4777074A (en) | 1985-08-12 | 1986-07-24 | Grooved magnetic substrates and method for producing the same |
| US07/213,234 US4875987A (en) | 1985-08-12 | 1988-06-29 | Grooved magnetic substrates and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18817585A JPS6247815A (ja) | 1985-08-26 | 1985-08-26 | 溝構造磁性基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247815A true JPS6247815A (ja) | 1987-03-02 |
| JPH0364928B2 JPH0364928B2 (enrdf_load_stackoverflow) | 1991-10-09 |
Family
ID=16219072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18817585A Granted JPS6247815A (ja) | 1985-08-12 | 1985-08-26 | 溝構造磁性基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6247815A (enrdf_load_stackoverflow) |
-
1985
- 1985-08-26 JP JP18817585A patent/JPS6247815A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0364928B2 (enrdf_load_stackoverflow) | 1991-10-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4875987A (en) | Grooved magnetic substrates and method for producing the same | |
| US5284539A (en) | Method of making segmented pyrolytic graphite sputtering targets | |
| JPH0772346B2 (ja) | 低抵抗透明導電膜の製造方法 | |
| JPS6247815A (ja) | 溝構造磁性基板の製造方法 | |
| CN102051497A (zh) | 金银镶嵌靶材及其薄膜的制备方法 | |
| JPS59203213A (ja) | 溝構造磁性基板の製造方法 | |
| JPS60136035A (ja) | 磁気デイスクの製造方法 | |
| EP0273195B1 (en) | A method of making a thin magnetic pole piece | |
| Matsuoka et al. | rf and dc discharge characteristics for opposed‐targets sputtering | |
| US4476000A (en) | Method of making a magnetic film target for sputtering | |
| JPS6237915A (ja) | 溝構造磁性基板の製造方法 | |
| JPH07110912A (ja) | 磁気ヘッド及びその製造方法 | |
| JP2004084033A (ja) | SiO2膜の成膜方法及び該方法により成膜されたSiO2膜を備えた物品 | |
| US6007685A (en) | Deposition of highly doped silicon dioxide films | |
| EP0058560B1 (en) | Sputtering apparatus | |
| Vratny | Tantalum oxide films prepared by oxygen plasma anodization and reactive sputtering | |
| JPH033743B2 (enrdf_load_stackoverflow) | ||
| JP3127836B2 (ja) | スパッタリング方法 | |
| JPH035644B2 (enrdf_load_stackoverflow) | ||
| KR100289180B1 (ko) | 박막자기헤드의 보호층 제조방법 | |
| JPS6158884B2 (enrdf_load_stackoverflow) | ||
| JPS58164228A (ja) | 誘電体の薄膜形成方法 | |
| JPH04304367A (ja) | 薄膜形成方法 | |
| JPH03126867A (ja) | スパッタリング方法 | |
| JPS63140509A (ja) | 軟磁性膜の製造法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |